CN206881305U

CN206881305U - Fluid treating device

Info

Publication number: CN206881305U
Application number: CN201720535285.8U
Authority: CN
Inventors: 杨国勇; 史建伟
Original assignee: Mao Lingfeng
Current assignee: Suzhou Suri membrane nanotechnology Co., Ltd.
Priority date: 2016-06-07
Filing date: 2017-05-12
Publication date: 2018-01-16
Anticipated expiration: 2027-05-12

Abstract

The utility model discloses a kind of fluid treating device, and it includes：Matrix with first fluid passage, in the first area for the first surface that the fluid intake of the first fluid passage is distributed in described matrix；Flow impedance portion, there is the second surface being oppositely arranged with the first surface；Multiple nanometers of thread like bodies, described nanometer thread like body one end is fixedly arranged in the second area of the first surface, the other end is fixedly connected with the second surface, it is spaced apart between adjacent nano wire body, the second area of the first surface abuts with first area, so that second fluid passage is cooperatively formed between the multiple nanometer thread like body, flow impedance portion and matrix, and pending fluid is only capable of entering first fluid passage by the second fluid passage.Fluid treating device of the present utility model has the characteristics that flux is big, flow resistance is small, energy high-efficient cleaning removes micro-/ nano grade particles in fluid, reusable, service life length, and produces in enormous quantities suitable for scale.

Description

Fluid treating device

Technical field

The utility model is more particularly to a kind of device and its preparation side that purified treatment is carried out to the fluid containing particulate matter Method.

Background technology

Daily life, work in, people for remove fluid in particle and make fluid be purified have extensively Demand.For example, be directed to low-quality air, dust therein, molecule etc. need to be removed, to ensure the health of human body.Again For example, for water, oil (edible oil, gasoline, diesel oil etc.), particulate matter therein need to be removed, to realize the purifying of water, oil.Example again Such as, for fields such as biological medicines, it need to remove or screen cell in blood and body fluid, virus, bacterium etc..

Traditional fluid treating device (such as mouth mask, air purifier etc.) has that flux is low, volume is big, using the longevity mostly Order the defects of short, and it is low for the elimination effect of fine particle in fluid.

In recent years, with the development of micro-nano process technology, researcher has also been proposed some streams based on porous membrane Body processing equipment, i.e. go out micron or nano level numerous holes by etching (corrosion) on film, make it can apply to clearly Except the particle in fluid, especially molecule, its size can be precisely controlled.But there is flux and mechanical strength in this device Between contradiction, flux is big, often mechanical structure is fragile, and mechanical strength is big, flux again very little.This is due to that it processes skill The limitation of art, if hole is smaller, film thickness just needs thinner, and this also make it that the mechanical support performance of porous membrane is further Deterioration, can not adapt to adverse circumstances, and service life is also very limited, so so far can't be practical.

Currently there is researcher to utilize sacrificial layer technology, realize the fluid treating device comprising transverse flow channels and (refer to Shown in Fig. 1), the aperture of these transverse flow channels can be controlled in several nanometers, therefore be beneficial to remove the fine particle in fluid, But its flux is too small.

The content of the invention

Main purpose of the present utility model is to provide a kind of fluid treating device of improvement and preparation method thereof, to overcome Deficiency of the prior art.

To realize aforementioned invention purpose, the technical solution adopted in the utility model includes：

The utility model embodiment provides a kind of fluid treating device, and it includes：

Matrix with first fluid passage, the first fluid passage have a fluid intake and fluid issuing, and described The fluid intake of one fluid passage is distributed in the first area of the first surface of described matrix；

Flow impedance portion, the second surface that there is the first surface with described matrix to be oppositely arranged are pending for preventing Fluid is directly entered the fluid intake of the first fluid passage；

It is distributed in the vertical nanometer wire of complex root that is in the second area of the first surface of described matrix and being spaced Body, the second area of the first surface of described matrix are set around the first area, the both ends difference of the nanometer thread like body It is fixedly connected with the first surface of described matrix and the second surface in the flow impedance portion, wherein between adjacent nano wire body Distance be more than 0 but less than mixing in the particle diameter of the selected particle in pending fluid so that the complex root nano wire Second fluid passage is cooperatively formed between shape body, flow impedance portion and matrix, and pending fluid is only capable of by described second Fluid passage enters first fluid passage.

The utility model embodiment additionally provides a kind of method for preparing fluid treating device, and it includes：

There is provided with first surface and with the first surface mutually back to the 3rd surface substrate；

Growth forms the vertical nanometer thread like body of complex root being spaced on the first surface of the substrate, wherein adjacent The distance between nanometer thread like body is more than 0 but is less than and mixes in the particle diameter of the selected particle in pending fluid；

The second surface being oppositely arranged with the first surface with the substrate is set on the first surface of the substrate Flow impedance portion, and at least make the complex root nanometer thread like body that is distributed in the second area of the first surface of the substrate with The second surface in the flow impedance portion is fixedly connected；

3rd surface of the substrate is processed, formed through the substrate first fluid passage, described first The fluid intake of fluid passage is distributed in the first area of the first surface of the substrate, and the of the first surface of the substrate Two regions are set around the first area, make the complex root nanometer being distributed in the second area of the first surface of the substrate Second fluid passage is cooperatively formed between thread like body, flow impedance portion and substrate, and pending fluid is only capable of by described Two fluid passages enter first fluid passage.

Than prior art, fluid treating device provided by the utility model is at least with flux is big, flow resistance is small, energy is efficient The features such as removing micro-/ nano grade particles in fluid, can also use thicker matrix, high mechanical strength, can clean and repeatedly make With, service life length, and preparation technology is simply controllable, is prepared on a large scale suitable for scale.

Brief description of the drawings

, below will be to embodiment or existing in order to illustrate more clearly of the embodiment of the present application or technical scheme of the prior art There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this Some embodiments described in application, for those of ordinary skill in the art, on the premise of not paying creative work, Other accompanying drawings can also be obtained according to these accompanying drawings.

Fig. 1 is a kind of sectional view of the fluid treating device comprising transverse flow channels in the prior art；

Fig. 2 is a kind of sectional view of fluid treating device in the utility model first embodiment；

Fig. 3 a- Fig. 3 e are nanometer thread like body in a kind of fluid treating device in the utility model some typical embodiments View in transverse section；

Fig. 4 a- Fig. 4 c are nanometer thread like body in a kind of fluid treating device in the utility model some typical embodiments Arrangement schematic diagram；

Fig. 5 a- Fig. 5 c are the top view of multiple fluid processing unit in the utility model first embodiment；

Fig. 6 is a kind of sectional view of fluid treating device in the utility model second embodiment；

Fig. 7 is a kind of sectional view of fluid treating device in the utility model 3rd embodiment；

Fig. 8 is a kind of sectional view of fluid treating device in the utility model fourth embodiment；

Fig. 9 is a kind of sectional view of fluid treating device in the embodiment of the utility model the 5th；

Figure 10 is a kind of preparation technology flow chart of fluid treating device in the exemplary embodiments of the utility model one.

Embodiment

In view of deficiency of the prior art, inventor is able to propose that this practicality is new through studying for a long period of time and largely putting into practice The technical scheme of type.The technical scheme, its implementation process and principle etc. will be further explained as follows.

A kind of fluid treating device that the one side of the utility model embodiment proposes includes：

Wherein, described matrix can be various forms, such as cuboid shape, sheet, polyhedral, hemispherical, spherical Or other irregular forms.Therefore, described " first surface " can be any one unspecific conjunction in described matrix Suitable plane or curved surface.

Wherein, the first fluid passage can be the through hole of any form, and its fluid intake is distributed in described matrix On first surface, and its fluid issuing can be both distributed on another surfaces different from the first surface of described matrix (for example, another surface can it is adjacent with the first surface, mutually back to), can also be distributed on described first surface (when So in this case, described first surface Shang Yingyou fluid barriers mechanism, make pending fluid will not be described first The fluid outlet is flowed to directly on a surface.In some cases, the fluid issuing of the first fluid passage be also can To be distributed in inside described matrix, for example, when existing in described matrix to receive the cavity of the fluid after processing.

Wherein, the flow impedance portion can also be variform, for example, can be sheet, shell shape, cuboid shape, Polyhedral etc., if its can make pending fluid will not from by the complex root nanometer thread like body, flow impedance portion with Fluid passage outside the second fluid passage cooperatively formed between matrix enters the fluid intake of described first fluid passage .And the setting form in the flow impedance portion can also be various, for example, it integrally can set with described matrix interval Put, locally can be also connected with described matrix, or even in some cases, to be formed also but with described matrix by being integrally machined.

Wherein, described complex root nanometer thread like body refers to two or more nanometer of thread like body.Wherein described nano wire The form of shape body can be various, for example, it can be to be vertically arranged that (herein vertical is primarily referred to as and described matrix The perpendicular or generally perpendicular direction of first surface) wire, column, tubulose, the rule such as taper or irregular structure, and its transverse direction Cross section structure (transverse direction herein, being primarily referred to as the direction parallel with the first surface of described matrix) can also be rule or not advise Then shape, such as can be polygon (triangle, quadrangle or other), circle, ellipse, star etc. (refer to Fig. 3 a- Fig. 3 e).

Wherein, described complex root nanometer thread like body can it is regular or irregular, uniform or it is heterogeneous be distributed in it is described (Fig. 4 a- Fig. 4 c is referred on the first surface of matrix).

Wherein, the fluid intake of the first fluid passage have rule or irregular shape, such as polygon (rectangle, Rhombus is other), circular or ellipse etc., it can simply be adjusted according to the demand of practical application.

Wherein, described pending fluid can be gas phase or liquid phase, such as empty gas and water, oils, in some situations The set of particulate matter lower or in flow-like, or molten state of Cucumber etc..

Wherein, described " particle " is primarily referred to as solid phase particles, but in some cases, can also be and the fluid (particularly liquid phase fluid) incompatible drop etc..

Wherein, the second area of the first surface of described matrix is set around the first area.Particularly, it is distributed in institute The complex root nanometer thread like body for stating second area is set around the fluid intake of the first fluid passage.Such setting shape Formula, composition of the gap that can make to be distributed between the complex root nanometer thread like body of the second area as second fluid passage Part, so as to obtain larger fluid flux.

In some more preferred embodiment, also it is arranged at intervals with the 3rd region of the first surface of described matrix Complex root nanometer thread like body, the 3rd region are set around the second area.Wherein, it is distributed in answering for the 3rd region The top of several nanometers of thread like bodies can be connected with the flow impedance portion, can not be also connected with the flow impedance portion, particularly, When be connected at the top of these nanometer of thread like body with the flow impedance portion, then the gap between these nanometer of thread like body top is also Fluid passage is may make up, so as to further increase the contact surface of the fluid treating device and fluid, lifting fluid flux.

Further, it is distributed in the nanometer thread like body in the 3rd region and is distributed in the nanometer wire of the second area Body can be identical or different.It is particularly preferred, the 3rd region or the second area no matter are distributed across, as long as The distance between adjacent nano wire body of the first surface of described matrix is distributed across to be all higher than 0 but be less than to mix in pending Fluid in selected particle particle diameter.

More preferable, the first area of the first surface of described matrix and second area are distributed in the flow impedance portion In in the orthographic projection on the first surface of described matrix.

More preferable, the nanometer thread like body is wire or columnar projections, and its draw ratio is 4：1~200000：1, and The distance between adjacent nano wire body and the ratio of the length of the nanometer thread like body are 1：4~1：200000.By using The nanometer thread like body of this structure and distributional pattern, multiple nanometers of thread like bodies can be made intensive can to arrange (nanometer thread like body itself Proportion is few in unit area), handled beneficial to the molecule in convection body, while also assign the fluid processing The larger fluid flux of device (hole between nanometer thread like body is bigger than nanometer thread like body own vol).

Especially preferred, a diameter of 1nm~50 μm of the nanometer thread like body, length is 50nm~200 μm, adjacent nano The distance between thread like body is 1nm~50 μm, can so enable particle diameter in the fluid treating device treatment fluid of structure formation As low as nano level particle, and keep higher fluid processing flux.

Further, it is distributed in the complex root nanometer thread like body arrangement shape in the 3rd region of the first surface of described matrix Into the array structure with super-hydrophobic or superoleophobic performance.In this way, it can also assign the functions such as the fluid treating device automatically cleaning.

It is it is of course also possible to suitable low as known to industry by being set on the partially or fully surface of the nanometer thread like body The coating that surface energy substance is formed, or the nanometer thread like body directly is formed using hydrophobic material, it is super-hydrophobic so as to make it have Performance, self-cleaning performance etc..

In some more specific embodiment, the aperture of the first fluid passage can be 1 μm~1mm.

In some more specific embodiment, the thickness of described matrix is more than 1 μm.

Wherein, the material of described matrix can be selected from metal, nonmetallic, organic material, inorganic material etc., such as silicon chip, Polymer, ceramics etc., and not limited to this.

In some more preferred embodiment, the nanometer thread like body may be selected from CNT, silicon nanowires, Yin Na Any of rice noodles, nanowires of gold, zinc oxide nanowire, gallium nitride nano-wire etc. or two or more combinations, but be not limited to This.

In some concrete application schemes, the nanometer thread like body can be by catalysis material or with antibacterial, sterilization work( The material of energy is formed, or, the nanometer thread like body can also be surface covered with catalysis material or with sterilization, antibacterial work( The coating that the material of energy is formed.For example, the nanometer thread like body can use zinc oxide nanowire, gallium nitride nano-wire etc. to have light The nano wire of the property of catalysis, under light auxiliary irradiation, the organic matter in the fluid that can degrade.For example, the nanometer thread like body Ag nano wires, Au nano wires etc. can be used, to kill the bacterium in fluid, virus, microorganism.

In some more specific embodiment, the thickness in the flow impedance portion is 0.5 μm~200 μm.

In some more preferred embodiment, the fluid treating device may also include at least one supporter, institute State supporter one end to be fixedly connected with described matrix, the other end is fixedly connected with the flow impedance portion.By the supporter, The more cooperation of firm stable between flow impedance portion and matrix can be achieved, and can be effectively to being distributed in flow impedance portion and base Nanometer wire body between body forms protection, avoids, because flow impedance portion and/or matrix by external force after being acted on, receiving to described The extruding of rice thread like body and caused by nanometer thread like body the problems such as caving in, damaging.

Wherein, the supporter can be variform, such as column (cylinder, polygon prism etc.), step-like, frustum Deng, and not limited to this, its flexural capacity should be greater than any described nanometer thread like body.And the supporter can flowed Processing forms or is integrally machined and to be formed with matrix or flow impedance portion between body stop part and matrix.

Further, described supporter can be two or more, and the two or more supporter is symmetrically distributed in institute Around the fluid intake for stating first fluid passage.

In some more preferred embodiment, one can have also been set up on the fluid intake of the first fluid passage Beam supported above, the support beam are fixedly connected with the flow impedance portion, are formed and supported to convection body stop part, further Lift the structural strength of the fluid treating device.

Further, the support beam can be more, its can with parallel arrangement the first fluid passage fluid On entrance.

In some more preferred embodiment, the nanometer wire body surface face is additionally provided with function material layer, described The material of function material layer includes catalysis material, anti-biotic material etc. and (forms layers of photo-catalytic material and/or anti-biotic material Layer), and not limited to this.For example, more typical catalysis material can be titanium dioxide etc., this kind of function material is being included When fluid treating device convection body is handled, if being aided with ultraviolet lighting etc., some organic pollutions that can also be in convection body etc. Photocatalytic degradation is carried out, realizes the multiple purifying of convection body.In another example more typical anti-biotic material can be such as Au, Ag Deng noble metal, bacterium in fluid, virus etc. can be synchronously killed in the processing procedure of fluid by it.

Further, for the benefit of light penetrates, and at least local of at least part component in the fluid treating device is Transparent configuration.For example, can partly or entirely be made of clear material in the flow impedance portion, matrix, nanometer thread like body.

A kind of preparation method for fluid treating device that the other side of the utility model embodiment proposes includes：

In some more specific embodiment, described preparation method, it is characterised in that including：

The complex root nanometer thread like body to be formed and be spaced is grown in the first surface of the substrate；

Soluble or corrodible organic matter and/or inorganic matter are coated with the first surface of the substrate, and makes organic matter And/or the gap between the inorganics filled complex root nanometer thread like body, form sacrifice layer；

First photoresist mask is set on the sacrifice layer, then the sacrifice layer is performed etching, at least makes to be distributed in Exposed at the top of complex root nanometer thread like body in the second area of the first surface of the substrate, remove first light afterwards Resist mask；

The second mask is set in the first surface of the substrate, and makes on the substrate first surface and fluid The corresponding region of stop part exposes, and deposition forms flow impedance portion afterwards, then removes second mask；

Patterned 3rd photoresist mask, then the 3rd table to the substrate are set on the 3rd surface of the substrate Face performs etching, until exposing the expendable material being filled between adjacent nano wire body, so as in the 3rd table of the substrate Face forms slotted eye, and the slotted eye position is corresponding with the first area of the first surface of the substrate, and the of the substrate The second area on one surface is set around the first area,

The 3rd photoresist mask and the expendable material being filled between the complex root nanometer thread like body are removed, in institute State and the first fluid passage is formed on substrate.

The technical solution of the utility model is further described below with reference to accompanying drawing and some embodiments.Need to illustrate , shown in accompanying drawing is only that the structure of the utility model fluid treating device and related device is simply shown Meaning, therefore non-accurate Drawing goes out the size of wherein each component, size etc..

Refer to shown in Fig. 2 and Fig. 5 a- Fig. 5 b, in first embodiment of the present utility model, a kind of fluid treating device Including matrix 101, described matrix 101 has a first surface 101a, and (the dotted line in figure of first area 1011 of described matrix 101 The region enclosed) some through holes 104 as fluid passage are distributed with, it is provided with more vertical nano wires on the first surface And/or the array that nanotube (abbreviation nano wire/pipe) 103 is formed, it is distributed in the second area 1012 around first area 1011 The top for more nano wire/pipes 103 that the interior through hole 104 is distributed is also associated with flow impedance portion 102, the flow impedance Portion 102 is arranged above the fluid intake of the through hole 104, pending fluid can not be bypassed foregoing nano wire/Guan Zhen Arrange and be directly entered the through hole 104, the flow impedance portion 102 has second be oppositely arranged with the first surface 101a Surface 102b.And in remaining region 1013 (the 3rd region can be named as) of the first surface 101a also can dense distribution it is more Vertical nano wire/the pipe 103 of root.In fig. 2, the arrow with dotted line shows the direct of travel of fluid.

Wherein, because foregoing nano wire/pipe has larger ratio of height to diameter (or draw ratio) so that these nano wire/pipes can The densely arranged first surface in described matrix, by the spacing for adjusting these nano wire/pipes, you can different-grain diameter in convection body The particle of scope, it is special than being that atomic small particle is purged processing, while because nano wire/pipe diameter itself is minimum, can also make It is controlled in very low level for the resistance of fluid, and forms very big fluid flux, far superior to existing perforated membrane, Fluid treating device based on transverse flow channels etc..

Wherein, if with reference to known to industry scheme, foregoing nano wire/pipe array is carried out to certain design, can also be made Formation super-drainage structure, superoleophobic structure, can not only remove the particle in fluid, and can also make by automatic cleaning action The particle being blocked can not gather in the functional area (nano wire/pipe array surface) of the fluid treating device, avoid described Fluid treating device fails after long-term use.

Wherein, described matrix 101 can have larger thickness, it is formed preferably foregoing nano wire/pipe array Support, while can be increased further the mechanical strength of the fluid treating device, make that the fluid treating device is pressure-resistant, bending resistance Folding, impact resistant, impact resistance, and then it is applied and will not be damaged in a variety of environment, for example, can apply to high pressure, High-velocity fluid is handled, and this function is that existing perforated membrane etc. can not be reached.

Wherein, the flow impedance portion can be that sheet, its thickness etc. can adjust according to practical application request.

Wherein, the material selection range of the fluid treating device each several part (101,102,103,104) is various, can To be inorganic material or organic material, for example, metal, non-metal inorganic material, plastics, ceramics, semiconductor, glass, Polymer etc..When these parts all select to use inorganic material, the fluid treating device also has the spy of resistance to temperature change Property, high temperature and cryogen can be handled.

Using previous designs described fluid treating device can (ultrasound) cleaning, be used for multiple times, and remain on good Good fluid handling abilities.

When being handled using described fluid treating device convection body, the fluid containing impurity particle is stated before entry During the array that nano wire/pipe 103 forms, wherein particle diameter be more than certain numerical value particle (or some drops incompatible with fluid, Such as the water droplet in the water droplet or oil in air) be blocked in outside foregoing nano wire/pipe array, fluid is via each nanometer afterwards Gap between line/pipe enters back into through hole 104 after reaching the porch of through hole 104, realizes the purification of convection body and/or to institute Need the enriching and recovering of particle (drop).

Referring to shown in Fig. 2, in some concrete application schemes of the first embodiment, foregoing nano wire/pipe Diameter can be 1nm~50 μm, length (height) h₁Can be that the distance between 50nm~200 μm, adjacent nanowires/pipe can be with For 1nm~50 μm.The aperture w of the through hole 104 can be 1 μm~1mm.The thickness h of described matrix₂Can be more than 1 μm.Institute State the thickness h in flow impedance portion₃It can be 0.5 μm~200 μm.

Referring to Fig. 3 a- Fig. 3 e, the lateral cross section structure of foregoing nano wire/pipe can be rule or irregular shape , such as can be polygon (triangle, quadrangle or other), circle, ellipse, star etc..

Referring to Fig. 4 a- Fig. 4 c, foregoing nano wire/pipe can regular or irregular, uniform or distribution heterogeneous On the first surface of described matrix.In some more specific application schemes, the average headway of adjacent nanowires/pipe exists 1nm~50 μm.

In addition, refer to Fig. 5 a- Fig. 5 c, in this first embodiment, the shape in aforementioned through-hole 104 and flow impedance portion 102 Shape (the particularly shape of lateral cross section) can be various, such as can be circular, square, rectangle or other shapes.

Refer to shown in Fig. 6, more preferably, in second embodiment of the present utility model, a kind of fluid treating device Including matrix 201, described matrix 201 have first surface 2011 and with the first surface mutually back to the 3rd surface (in figure not Show), and some through holes 204 as fluid passage are distributed with described matrix 201, it is provided with more on the first surface The array that vertical nano wire/pipe 203 is formed, it is also connected with around the top of more nano wire/pipes 203 of the through hole 204 distribution There is flow impedance portion 202, the flow impedance portion 202 is arranged above the fluid intake of the through hole 204, makes pending stream Body can not bypass foregoing nano wire/pipe array and be directly entered the through hole 204.It is also, also right around the through hole 204 Claim or it is asymmetric more than one, such as four supporters 205 are distributed with, can also increase to institute by the supporter 205 The support in flow impedance portion 202 is stated, realizes the more cooperation of firm stable between flow impedance portion and matrix, and can be effectively right Nano wire/pipe the array being distributed between flow impedance portion and matrix forms protection, avoids because flow impedance portion and/or matrix exist After being acted on by external force, the problems such as nano wire/pipe 203 caused by the extruding of foregoing nano wire/pipe array caves in, damaged.

Wherein, the supporter can be variform, such as can have rectangle, trapezoidal, step longitudinal cross-section (longitudinal direction herein can be regarded as perpendicular to the direction of described matrix first surface) etc., and not limited to this.In second implementation In some specific embodiments of example, the supporter can be to project upwards the boss to be formed from the edge part of through hole 204 Deng its upper end connection flow impedance portion 202.

Wherein, the quantity of the supporter, diameter, distribution density etc. can adjust according to being actually needed, but it is few to try one's best Occupancy described matrix first surface space, avoid its fluid flux to the nano wire/pipe from causing big influence.

The structure of matrix, nano wire/pipe array, flow impedance portion, through hole employed in the second embodiment etc., set Form, material etc. can with address above it is same or similar, so here is omitted.

Refer to shown in Fig. 7, more preferably, in 3rd embodiment of the present utility model, a kind of fluid treating device Including matrix 301, described matrix 301 have first surface 3011 and with the first surface mutually back to the 3rd surface (in figure not Show), and some through holes 304 as fluid passage are distributed with described matrix 301, it is provided with more on the first surface The array that vertical nano wire/pipe 303 is formed, it is also connected with around the top of more nano wire/pipes 303 of the through hole 304 distribution There is flow impedance portion 302, the flow impedance portion 302 is arranged above the fluid intake of the through hole 304, makes pending stream Body can not bypass foregoing nano wire/pipe array and be directly entered the through hole 304.Also, also set up on the through hole 304 There is more than one, such as a more support beams 305 symmetrically or non-symmetrically arranged, can also increase pair by the support beam 305 The support in the flow impedance portion 302, the more cooperation of firm stable between flow impedance portion and matrix is realized, and can be effective Protection is formed to the nano wire/pipe array being distributed between flow impedance portion and matrix, avoided because of flow impedance portion and/or matrix After being acted on by external force, the problems such as nano wire/pipe 303 caused by the extruding of foregoing nano wire/pipe array caves in, damaged.

Wherein, the support beam can be variform, such as can be with arch-shaped etc., and not limited to this.And further , the support beam can also coordinate with other supporters, such as the supporter addressed in second embodiment coordinates.

Wherein, the quantity of the support beam, size, distribution density etc. can adjust according to being actually needed, but it is few to try one's best The fluid intake for blocking the through hole, avoid its fluid flux to the fluid treating device from causing big influence.

The structure of matrix, nano wire/pipe array, flow impedance portion, through hole employed in the 3rd embodiment etc., set Form, material etc. can with address above it is same or similar, so here is omitted.

Refer to shown in Fig. 8, more preferably, in fourth embodiment of the present utility model, a kind of fluid treating device Including matrix 401, described matrix 401 have first surface 4011 and with the first surface mutually back to the 3rd surface 4012, and Some through holes 404 as fluid passage are distributed with described matrix 401, more vertical nanometers are provided with the first surface The array that post 403 is formed, flow impedance portion is also associated with around the top of more nano-pillars 403 of the through hole 304 distribution 402, the flow impedance portion 402 is arranged above the fluid intake of the through hole 404, before pending fluid is not bypassed The nano column array stated and be directly entered the through hole 304.Also, the of the surface of nano-pillar 403 and described matrix 401 Layers of photo-catalytic material 405 is additionally provided with one surface.Enter with the fluid treating device convection body comprising layers of photo-catalytic material 405 During row processing, if being aided with ultraviolet lighting etc., some organic pollutions that can also be in convection body etc. carry out photocatalytic degradation, realize pair The multiple purifying of fluid.

Wherein, for the benefit of light penetrates, and part or all of in the flow impedance portion, matrix, nanometer thread like body can be with It is made of clear material.In some specific embodiments of the present embodiment, the flow impedance portion can be integrally by transparent material Material is made, such as light is injected.

Wherein, more typical catalysis material can be titanium dioxide etc., but not limited to this.

Wherein, to form the layers of photo-catalytic material 405, those skilled in the art can use a variety of sides known to industry Formula, for example, coating (spin coating, spraying, printing etc.), physically or chemically vapour deposition (such as MOCVD, PECVD, ald), Sputtering etc., and not limited to this.

Wherein, the thickness of the layers of photo-catalytic material 405 can be controlled in nanoscale, to reduce it to the stream as far as possible The influence of the fluid flux of body processing unit.

The structure of matrix, nano wire/pipe array, flow impedance portion, through hole employed in the fourth embodiment etc., set Form, material etc. can with address above it is same or similar, so here is omitted.

Refer to shown in Fig. 9, more preferably, in the 5th embodiment of the present utility model, a kind of fluid treating device Including matrix 501, described matrix 501 have first surface 5011 and with the first surface mutually back to the 3rd surface 5012, and Some through holes 504 as fluid passage are distributed with described matrix 501, more vertical nanometers are provided with the first surface The array that post 503 is formed, flow impedance portion is also associated with around the top of more nano-pillars 503 of the through hole 504 distribution 502, the flow impedance portion 502 is arranged above the fluid intake of the through hole 504, before pending fluid is not bypassed The nano column array stated and be directly entered the through hole 504.Also, the of the surface of nano-pillar 503 and described matrix 501 Anti-biotic material layer 505 is additionally provided with one surface.At with the fluid treating device convection body comprising anti-biotic material layer 505 During reason, bacterium in fluid, virus etc. can be synchronously killed in the processing procedure of fluid, realize the multiple purifying of convection body.

Wherein, more typical anti-biotic material can be noble metals such as Au, Ag etc., but not limited to this.

Wherein, to form the anti-biotic material layer 505, those skilled in the art can use a variety of sides known to industry Formula, for example, coating (spin coating, spraying, printing etc.), physically or chemically vapour deposition (such as MOCVD, PECVD, ald), Sputtering etc., and not limited to this.

Wherein, the thickness of the anti-biotic material layer 505 can be controlled in nanoscale, to reduce it to the fluid as far as possible The influence of the fluid flux of processing unit.

The structure of matrix, nano wire/pipe array, flow impedance portion, through hole employed in 5th embodiment etc., set Form, material etc. can with address above it is same or similar, so here is omitted.

The fluid treating device of the present utility model can be prepared by physics, chemical method, such as can be chemistry Growth method, Physical Processing method etc., particularly MEMS (MEMS, Microelectromechanical Systems) method Deng.

For example, refer to shown in Figure 10, in sixth embodiment of the present utility model, a kind of preparation of fluid treating device Technique may include steps of：

S1：The more vertical nano wire/pipes to be formed and be intervally installed are grown in the first surface of substrate (such as silicon chip)；

S2：Soluble or corrodible organic matter and/or inorganic matter are coated with the first surface of the substrate, and is made organic Gap between thing and/or inorganics filled each vertical nano wire/pipe, forms sacrifice layer；

S3：Photoresist is set on the sacrifice layer, and carries out photoetching；

S4：The sacrifice layer is performed etching, makes to be distributed in more in the second area of the first surface of the substrate Exposed at the top of vertical nano wire, remove photoresist afterwards；

S5：The substrate first surface set photoresist mask, and make it is on the substrate first surface, with it is described The corresponding region in flow impedance portion exposes；

S6：Deposition forms flow impedance portion in region expose, corresponding with the flow impedance portion；

S7：Peel off and remove photoresist；

S8：The substrate and first surface mutually back to the 3rd surface on patterned etching mask is set；

S9：3rd surface of the substrate is performed etching, until expose be filled in it is sacrificial between neighboring vertical nano wire Domestic animal material, so as to form slotted eye, the slotted eye position and the first surface of the substrate on the 3rd surface of the substrate First area it is corresponding, the second area of the first surface of the substrate is set around the first area；

S10：The etching mask and the expendable material being filled between each vertical nano-wire are removed, fluid processing dress is made Put.

To form the mode of vertical nano wire/pipe to grow in abovementioned steps and can be selected from MOCVD, PECVD, electrochemistry and sink The various ways known to industry such as product.

The lithographic method used in These steps can be photoetching, Mechanical lithography, dry etching, wet etching etc..

For example, the method for the photoresist mask of graphical (nano graph) is formed in abovementioned steps to be included：Photoetching technique, receive Nano-sphere mask technique, nanometer (metal) particle mask technology etc., and not limited to this.

For example, mode known to industry, such as RIE, ICP, wet etching, electrochemical corrosion can be passed through in abovementioned steps Performed etching Deng to substrate.

For example, in abovementioned steps, the dissolved organic matter of filling can be photoresist etc. or corrodible inorganic matter such as gold Category, SiO₂, SiN etc..

Obviously, the preparation technology of the utility model fluid treating device is simple controllable, is adapted to mass to give birth on a large scale Production.

It should be appreciated that above-described embodiment is only to illustrate technical concepts and features of the present utility model, it is ripe its object is to allow Content of the present utility model can be understood and implement according to this by knowing the personage of technique, can not be limited with this of the present utility model Protection domain.All equivalent change or modifications made according to the utility model Spirit Essence, should all cover of the present utility model Within protection domain.

Claims

A kind of 1. fluid treating device, it is characterised in that including：

Matrix with first fluid passage, the first fluid passage has fluid intake and fluid issuing, described first-class The fluid intake of body passage is distributed in the first area of the first surface of described matrix；

Flow impedance portion, the second surface that there is the first surface with described matrix to be oppositely arranged, for preventing pending fluid It is directly entered the fluid intake of the first fluid passage；

The vertical nanometer thread like body of complex root that is in the second area of the first surface of described matrix and being spaced is distributed in, The second area of the first surface of described matrix is set around the first area, the both ends of the nanometer thread like body respectively with institute State the first surface of matrix and the second surface in the flow impedance portion be fixedly connected, wherein between adjacent nano wire body away from From more than 0 but less than mixing in the particle diameter of the selected particle in pending fluid, so that the complex root nanometer thread like body, Second fluid passage is cooperatively formed between flow impedance portion and matrix, and pending fluid is only capable of leading to by the second fluid Road enters first fluid passage.
2. fluid treating device according to claim 1, it is characterised in that：3rd region of the first surface of described matrix The complex root nanometer thread like body being intervally installed inside also is distributed with, the 3rd region of the first surface of described matrix is around described Second area is set.
3. fluid treating device according to claim 1 or 2, it is characterised in that：The vertical nanometer thread like body is in situ raw It is longer than the first surface of described matrix.
4. fluid treating device according to claim 1 or 2, it is characterised in that：The nanometer thread like body include nano wire, Any one in nano-pillar, nanotube；And/or described complex root nanometer thread like body is uniformly distributed or non-uniform Distribution exists On the first surface of described matrix.
5. fluid treating device according to claim 1 or 2, it is characterised in that：The draw ratio of the nanometer thread like body is 4：1~200000：1；And/or the distance between adjacent nano wire body and the ratio of the length of the nanometer thread like body are 1：4 ~1：200000.
6. fluid treating device according to claim 5, it is characterised in that：A diameter of 1nm of the nanometer thread like body~ 50 μm, length is that the distance between 50nm~200 μm, adjacent nano wire body are 1nm~50 μm；And/or the nanometer wire Body includes any one in CNT, silicon nanowires, nano silver wire, nanowires of gold, zinc oxide nanowire, gallium nitride nano-wire Kind.
7. fluid treating device according to claim 2, it is characterised in that：It is distributed in the of the first surface of described matrix The complex root nanometer thread like body in three regions arranges to form the array structure with super-hydrophobic or superoleophobic performance.
8. fluid treating device according to claim 1, it is characterised in that：The fluid treating device also includes at least one Individual supporter, described supporter one end are fixedly connected with described matrix, and the other end is fixedly connected with the flow impedance portion.
9. fluid treating device according to claim 8, it is characterised in that：The fluid treating device includes two or more Described supporter, and the supporter described in the two or more is symmetrically distributed in the fluid intake week of the first fluid passage Enclose.
10. fluid treating device according to claim 1, it is characterised in that：The fluid intake of the first fluid passage Restocking is provided with a beam supported above, and the support beam is fixedly connected with the flow impedance portion；And/or the first fluid The aperture of passage is 1 μm~1mm；And/or the thickness of described matrix is more than 1 μm；And/or the thickness in the flow impedance portion For 0.5 μm~200 μm；And/or the fluid intake of the first fluid passage has rule or irregular shape, the rule Shape includes polygon, circle or ellipse；And/or the nanometer wire body surface face be additionally provided with layers of photo-catalytic material and/or Anti-biotic material layer；And/or at least local of at least part component in the fluid treating device is transparent configuration.