CN206849806U - A kind of sample platform of scanning electronic microscope and ESEM - Google Patents
A kind of sample platform of scanning electronic microscope and ESEM Download PDFInfo
- Publication number
- CN206849806U CN206849806U CN201720685445.7U CN201720685445U CN206849806U CN 206849806 U CN206849806 U CN 206849806U CN 201720685445 U CN201720685445 U CN 201720685445U CN 206849806 U CN206849806 U CN 206849806U
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- sample
- mark
- marking rod
- scanning electronic
- electronic microscope
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Abstract
The utility model provides a kind of sample platform of scanning electronic microscope and ESEM, is related to ESEM accessories field.Marking rod is installed, the mark end of marking rod has is used for the mark head for marking the target observations area of testing sample as the motion of marking rod is selectively positioned in sample area on the base station of sample platform of scanning electronic microscope provided by the utility model.The sample platform of scanning electronic microscope causes user that the mark head of marking rod can be moved to the target observations area of testing sample under an optical microscope or under the natural light visual field in advance and play mark or indicative function, in order to testing sample, user can quickly and accurately find out target observations area according to the mark or instruction of mark head under the Electronic Speculum visual field, and the situation for avoiding causing contaminated samples from pen mark mark or polluting Electronic Speculum vacuum chamber occurs.
Description
Technical field
ESEM accessories field is the utility model is related to, in particular to a kind of sample platform of scanning electronic microscope and is swept
Retouch Electronic Speculum.
Background technology
ESEM is that a kind of sample preparation is simple, differentiates test analysis equipment high, that comprehensive analytical capacity is strong, wide at present
General surface and section micro-analysis applied to various types of materials.
Some such particular samples can be run into when doing some tests：Optically A areas and B areas have certain distinguish
Knowledge and magnanimity, and be placed on can not reach under Electronic Speculum under optics identification effect (such as silicon chip laser doping area and non-laser doping
Color foreign lands behind area, or silicon chip PE)；Either target sample separation is obvious under optics, difference in A areas and B in SEM
It is obvious that still because target sample is exaggerated more than 40 times, cause to find border difficulty (such as at the normal area of silicon crystal crystal boundary).
These regions that with the naked eye can substantially distinguishes are found extremely difficult under Electronic Speculum, but we often will be to this
Liang Ge areas carry out the analysis of pattern or composition, and this is just to bring great difficulty to sample preparation, or even can not prepare sample.
Existing sample platform of scanning electronic microscope is all generally the smooth magnesium alloy round platform in surface, and diameter is from 2inch-
5inch, there is no any mark above, in test conductive tape or glue stick on top, then test is set above
Sample, tested, run into some particular points, it is necessary to be identified in sample with identification pencil, sample can be caused in this process
The pollution of product, while sample is caused necessarily to destroy, at this moment sample will stand a period of time in atmosphere, volatilizable in be identified
Material can just put vacuum chamber into after removing.In the less operator's operation of some operating experiences, directly these samples are sent
Entering Electronic Speculum vacuum cavity can cause " to pollute " to the cavity of Electronic Speculum, so as to influence Electronic Speculum performance.Therefore, how for such sample
Product carry out the problem of test is puzzlement ESEM worker.
Utility model content
The purpose of this utility model is to provide a kind of sample platform of scanning electronic microscope, and the sample platform of scanning electronic microscope can treat test sample
The target observations area of product is marked, and is easy to user quickly and easily to find target observations area under Electronic Speculum.
Another object of the present utility model is to provide ESEM, and the ESEM is configured with above-mentioned ESEM sample
The target observations area of testing sample can be marked for sample platform, the sample platform of scanning electronic microscope, be easy to user convenient under Electronic Speculum
Rapidly find target observations area.
What the utility model was realized in：
A kind of sample platform of scanning electronic microscope, it includes base station and marking rod, and the surface of base station is provided with treats test sample for placement
The sample area of product and the installing zone for adjustment notch bar；
Installing zone is provided with the fixed part for fixation mark bar；
The connection end of marking rod is flexibly connected with fixed part, and the mark end of marking rod is with optional with the motion of marking rod
It is used for selecting property the mark head for marking the target observations area of testing sample in sample area.
Further, in the utility model preferred embodiment, sample platform of scanning electronic microscope also includes locating shaft, fixed part
Positioning hole is offered, locating shaft is installed in positioning hole, and one end of locating shaft is inserted in positioning hole, and the other end is protruded in base station
Surface, the axis of locating shaft is vertical with the surface of base station, and the connection end of marking rod is provided with the collar, and the collar is sheathed on outside locating shaft
It is rotatablely connected with locating shaft.
Further, in the utility model preferred embodiment, locating shaft is detachably connected with fixed part, locating shaft
Top is provided with the axle cap that the axis direction for preventing the collar along locating shaft slides.
Further, in the utility model preferred embodiment, base station is rounded, and sample area is square, sample area
Center overlaps with the center of circle of base station, and installing zone surrounds sample area.
Further, in the utility model preferred embodiment, the quantity of marking rod be it is multiple, the quantity of fixed part with
The quantity of marking rod is corresponding, and multiple marking rods are flexibly connected with fixed part correspondingly, and the length of each marking rod is configured to
Preset length, preset length to mark head to be selectively positioned in sample area with the motion of marking rod.
Further, in the utility model preferred embodiment, multiple fixed parts using the center of sample area as the center of circle simultaneously
And it is evenly spaced apart to be arranged in around sample area with circular or circular arc arrangement mode.
Further, in the utility model preferred embodiment, the mark of any one marking rod in multiple marking rods
Remember tapered or ring-type or an arrow shaped.
Further, in the utility model preferred embodiment, marking rod is each using copper, silver, gold and nonmagnetic
Any one material in alloy is made.
A kind of ESEM, it is configured with above-mentioned sample platform of scanning electronic microscope.
Compared with prior art, the utility model has the advantages that：
Marking rod is installed, the mark end of marking rod has on the base station of sample platform of scanning electronic microscope provided by the utility model
It is used for the mark head for marking the target observations area of testing sample in sample area as the motion of marking rod is selectively positioned at.This
The sample platform of scanning electronic microscope of sample causes user can be in advance under an optical microscope or under the natural light visual field by the mark of marking rod
Mark or indicative function play in the target observations area that head is moved to testing sample, in order to which testing sample uses under the Electronic Speculum visual field
Person can quickly and accurately find out target observations area according to the mark or instruction of mark head, avoid causing from pen mark mark
Contaminated samples or the situation generation for polluting Electronic Speculum vacuum chamber.
Brief description of the drawings
, below will be to required use in embodiment in order to illustrate more clearly of the technical scheme of the utility model embodiment
Accompanying drawing be briefly described, it will be appreciated that the following drawings illustrate only some embodiments of the present utility model, therefore should not be by
Regard the restriction to scope as, for those of ordinary skill in the art, on the premise of not paying creative work, may be used also
To obtain other related accompanying drawings according to these accompanying drawings.
Fig. 1 is that the structure for the sample platform of scanning electronic microscope for being provided with seven marking rods that the utility model embodiment 1 provides is shown
It is intended to；
Fig. 2 is Fig. 1 A-A cross-sectional views；
Fig. 3 is that the structure for the sample platform of scanning electronic microscope for being provided with a marking rod that the utility model embodiment 1 provides is shown
It is intended to；
Fig. 4 is that the structure for the sample platform of scanning electronic microscope for being provided with two marking rods that the utility model embodiment 1 provides is shown
It is intended to.
Icon：100- sample platform of scanning electronic microscope；200- base stations；201- installing zones；202- sample areas；203- positioning holes；
204- locating shafts；205- axle caps；206- fixed parts；300- marking rods；301- connection ends；302- marks end；303- marks head；
The 304- collars.
Embodiment
It is new below in conjunction with this practicality to make the purpose, technical scheme and advantage of the utility model embodiment clearer
Accompanying drawing in type embodiment, the technical scheme in the embodiment of the utility model is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model part of the embodiment, rather than whole embodiments.Generally here described in accompanying drawing and
The component of the utility model embodiment shown can be configured to arrange and design with a variety of.
Therefore, the detailed description of the embodiment of the present utility model to providing in the accompanying drawings is not intended to limit requirement below
The scope of the utility model of protection, but it is merely representative of selected embodiment of the present utility model.Based in the utility model
Embodiment, the every other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made, all
Belong to the scope of the utility model protection.
It should be noted that：Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent accompanying drawing in individual accompanying drawing.
, it is necessary to explanation in description of the present utility model, term " " center ", " on ", " under ", it is "left", "right", " perpendicular
Directly ", the orientation of the instruction such as " level ", " interior ", " outer " or position relationship be based on orientation shown in the drawings or position relationship, or
The utility model product using when the orientation usually put or position relationship, be for only for ease of description the utility model and letter
Change description, rather than instruction or imply signified device or element must have specific orientation, with specific azimuth configuration and
Operation, therefore it is not intended that to limitation of the present utility model.
In addition, the term such as term " level ", " vertical ", " pendency " is not offered as requiring part abswolute level or pendency, and
It is to be slightly tilted.Such as " level " only refers to that its direction is more horizontal with respect to for " vertical ", is not to represent the structure
Must be fully horizontal, but can be slightly tilted.
In description of the present utility model, it is also necessary to which explanation, unless otherwise clearly defined and limited, term " are set
Put ", " installation ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected,
Or it is integrally connected；Can mechanically connect；Can be joined directly together, can also be indirectly connected by intermediary, Ke Yishi
The connection of two element internals.For the ordinary skill in the art, with concrete condition above-mentioned term can be understood at this
Concrete meaning in utility model.
Embodiment 1
Fig. 1-Fig. 4 is referred to, the sample platform of scanning electronic microscope 100 that the present embodiment provides, it includes：Rounded base station 200
With multiple marking rods 300, the surface of base station 200 is provided with sample area 202 for placing testing sample and for adjustment notch
The installing zone 201 of bar 300.Sample area 202 is square, and the center of sample area 202 overlaps with the center of circle of base station 200, installing zone 201
Around sample area 202.Installing zone 201 is provided with the fixed part 206 for fixation mark bar 300.
It should be noted that in other examples, base station 200 can also be square or the shape of the rule such as trapezoidal,
Certain base station 200 can also be irregular shape.
It should be noted that in other examples, the quantity of marking rod 300 can configure according to actual conditions, such as
Can be one (as shown in Figure 3) or two (as shown in Figure 4), three, four, five, six, seven (as shown in Figure 1)
Etc. multiple.
The quantity of fixed part 206 is corresponding with the quantity of marking rod 300, and one end of marking rod 300 is connection end 301, another
Hold to mark end 302.The connection end 301 of multiple marking rods 300 is flexibly connected with fixed part 206 correspondingly.Multiple fixations
Portion 206 is evenly spaced apart to be arranged in sample area 202 using the center of sample area 202 as the center of circle and with the arrangement mode of circular arc
Around.The mark end 302 of marking rod 300 has to be used for as the motion of marking rod 300 is selectively positioned in sample area 202
Mark the mark first 303 in the target observations area of testing sample.
Certainly, in other examples, multiple fixed parts 206 using the center of sample area 202 as the center of circle and with circle
Arrangement mode be evenly spaced apart to be arranged in around sample area 202.
Corresponding preset length is configured to positioned at the length of the marking rod 300 of diverse location, preset length to mark head
303 are selectively positioned in sample area 202 with the motion of marking rod 300.Preset length can configure according to actual conditions.
The preset length of each marking rod 300 be able to can also be differed with identical.
In the present embodiment, Fig. 1 and Fig. 2 are referred to, is connected for the ease of marking rod 300 with fixed part 206, ESEM
Sample stage 100 also includes locating shaft 204, and fixed part 206 offers positioning hole 203.Locating shaft 204 is installed in positioning hole 203,
One end of locating shaft 204 is inserted in positioning hole 203, and the other end is protruded in the surface of base station 200, the axis and base of locating shaft 204
The surface of platform 200 is vertical.The connection end 301 of marking rod 300 is provided with the collar 304, the collar 304 be sheathed on locating shaft 204 it is outer with
Locating shaft 204 is rotatablely connected.Marking rod 300 is circled with locating shaft 204 for the center of circle under i.e. this connected mode, and its is inswept
Circle or arc area region where plane it is parallel with the surface of base station 200.
So, when needing to observe under ESEM or detect the target observations area of testing sample, user can be manual
Marking rod 300 is rotated, mark first 303 is moved to the target observations area of testing sample, then by the scanning electron microscope example
Platform 100 is placed in Electronic Speculum vacuum chamber, and user can quickly and accurately find target according to the indicating positions of mark first 303
Observation area.And then the situation for avoiding causing contaminated samples from mark modes such as pen marks or polluting Electronic Speculum vacuum chamber occurs.
In the case of, mark first 303 can be moved to such as installing zone 201 of non-sample area 202.
Wherein, in some cases, a testing sample needs multiple target observations areas, then uses multiple fixed parts 206
It is evenly spaced apart to be arranged in around sample area 202 using the center of sample area 202 as the center of circle and with the arrangement mode of circular arc
This arrangement mode can facilitate operator or user selectively using suitable marking rod 300 to mark on testing sample
Different target observation area.Such as target observations area can use nearby principle to use the marking rod 300 positioned at left side to enter close to left side
Line flag, target observations area then can use the marking rod 300 positioned at right side to be marked, this arrangement mode is non-close to right side
Often convenient mark.
It should be noted that in other examples, in the position of fixed part 206, locating shaft 204 can also be with its axle
The line mode parallel with the surface of base station 200 is connected with base station 200, and the collar 304 of marking rod 300 is sheathed on locating shaft 204
It is rotatablely connected outside with locating shaft 204.Under this connected mode, marking rod 300 is circled with locating shaft 204 for the center of circle, its
Plane where inswept circle or arc area is vertical with the surface of base station 200.
Or in other examples, the mode that the connection end 301 of marking rod 300 is flexibly connected with fixed part 206
It may also be what is so set, i.e., neck be set in the position of fixed part 206, the connection end 301 of marking rod 300 is removably caught in
Neck is flexibly connected with fixed part 206, and the mark being caught on the marking rod after neck 300 first 303 is located at the internal labeling of sample area 202
The target observations area of testing sample can be used for can also.
Or in other examples, the mode that the connection end 301 of marking rod 300 is flexibly connected with fixed part 206
What can be set as is provided with chute in the position of fixed part 206, and marking rod 300 is placed in chute to be slided with fixed part 206
Dynamic connection, the one end open of chute, marking rod 300 can slide to stretch out to enable from the opening in chute marks first 303 position
To mark the target observations area of testing sample in the sample area 202.
In a word, as long as the connection end 301 of marking rod 300 causes the mark head of marking rod 300 with the connected mode of fixed part 206
303 can be selectively positioned in sample area 202 with the motion of marking rod 300 to be tagged to the target observations of testing sample
Area.
In the present embodiment, in order to prevent marking rod 300 from being come off from locating shaft 204, the top of locating shaft 204 is provided with
For the axle cap 205 for preventing axis direction of the collar 304 along locating shaft 204 from sliding.The collar can be prevented by the setting of axle cap 205
304 come off along the axis direction slip of locating shaft 204.
In view of under certain situation, it is not necessary to testing sample is marked, in the present embodiment, locating shaft 204 is with consolidating
Determine portion 206 to be detachably connected.When that need not be marked to testing sample, locating shaft 204 and marking rod 300 are removed.Work as needs
When being marked to locating shaft 204, the collar 304 of locating shaft 204 through marking rod 300 is installed in positioning hole 203.In order to
Stability when facilitating locating shaft 204 and the detachable of fixed part 206 while ensureing to be connected, in the present embodiment, positioning hole 203
Inwall offer internal thread, the outer wall that locating shaft 204 stretches into the part of positioning hole 203 offers outer spiral shell with screw-internal thread fit
Line.Being detachably connected between locating shaft 204 and fixed part 206 is ensured by internal thread and externally threaded cooperation.
The target observations area of testing sample is broadly divided into circle, spot and wire area.For these three situations, can incite somebody to action
Mark first 303 designs tapered or ring-type or arrow shaped.The mark first 303 of each shape may be incorporated for marking above-mentioned three kinds of shapes
The target observations area of shape.Preferably, in mark, with the target of the first 303 mark circle of taper or ring-shaped mark and spot
Observation area, with the target observations area in the first 303 mark wire area of sagittate mark.
In addition, the shape of the mark first 303 of multiple marking rods 300 can be with identical, and can also be different, can be according to actual feelings
Condition designs.
Further, in the present embodiment, each parts of sample platform of scanning electronic microscope 100 can not contain iron-cobalt-nickel etc. and be magnetic
Metal or metal alloy.
In the present embodiment, marking rod 300 from than aluminium good conductivity metal (such as one kind in copper, silver-colored box gold, or
Any one material in person is nonmagnetic alloy is made), but other materials can also be selected on the premise of test is not influenceed.
The electric conductivity that sample can be increased using the contact target viewing area of marking rod made of metal material 300 improves picture quality.
The sample platform of scanning electronic microscope 100 that the utility model embodiment provides has advantages below：
(1) facilitate sample preparation, overcome the existing possibility that can not prepare sample of prior art, also may be used even if sample is prepared
What can be tested is zone errors；
(2) it can be quickly found and be visually observed but separation that Electronic Speculum is difficult to find that by the mark of marking rod 300,
Ensure to observe position or observation area is reliable, in the absence of the phenomenon of " guessing position "；
(3) it need not be marked with pen, do not polluted；The mark with special point of observation can be applied.
(4) electric conductivity that can increase sample using the engaged test region of metal marker bar 300 improves picture quality.
In a word, the connection end that the sample platform of scanning electronic microscope 100 that the utility model embodiment provides passes through multiple marking rods 300
301 are flexibly connected with fixed part 206 so that mark first 303 can be alternative with the motion of marking rod 300 correspondingly
Ground, which is located at, is used for the design for marking the target observations area of testing sample in sample area 202, solving can recognize in optics, still
The problem that can not be positioned in Electronic Speculum, avoid the embarrassment with the marker pen meeting of mark contaminated samples.The utility model embodiment is not only
The boudary portion of the difficult identification of Electronic Speculum is only applicable to, particular point mark or key point mark is can be used for, is greatly saved
Find the time of sample.
Embodiment 2
A kind of ESEM is present embodiments provided, the ESEM is configured with the scanning electron microscope example of the offer of embodiment 1
Platform 100.The beneficial effect for the ESEM that the present embodiment provides is the same as embodiment 1.
Preferred embodiment of the present utility model is these are only, is not limited to the utility model, for this area
Technical staff for, the utility model can have various modifications and variations.It is all within the spirit and principles of the utility model,
Any modification, equivalent substitution and improvements made etc., should be included within the scope of protection of the utility model.
Claims (10)
1. a kind of sample platform of scanning electronic microscope, it is characterised in that it includes base station and marking rod, and the surface of the base station is provided with use
In the sample area and installing zone for installing the marking rod of placing testing sample；
The installing zone is provided with the fixed part for fixing the marking rod；
The connection end of the marking rod is flexibly connected with the fixed part, and the mark end of the marking rod has with the mark
The motion of bar, which is selectively positioned at, is used for the mark head for marking the target observations area of the testing sample in the sample area.
2. sample platform of scanning electronic microscope according to claim 1, it is characterised in that it is fixed that the sample platform of scanning electronic microscope also includes
Position axle, the fixed part offer positioning hole, and one end of the locating shaft is inserted in the positioning hole, and the other end is protruded in institute
Base station surface is stated, the axis of the locating shaft is vertical with the surface of the base station, and the connection end of the marking rod is provided with the collar,
The collar is sheathed on outside the locating shaft and is rotatablely connected with the locating shaft.
3. sample platform of scanning electronic microscope according to claim 2, it is characterised in that the locating shaft and the fixed part are removable
Connection is unloaded, the top of the locating shaft is provided with the axle that the axis direction for preventing the collar along the locating shaft slides
Cap.
4. according to the sample platform of scanning electronic microscope any one of claim 1-3, it is characterised in that the base station is rounded,
The sample area is square, and the center of the sample area overlaps with the center of circle of the base station, and the installing zone surrounds the sample
Area.
5. sample platform of scanning electronic microscope according to claim 4, it is characterised in that mark tapered or ring-type or the arrow
Head.
6. sample platform of scanning electronic microscope according to claim 4, it is characterised in that the quantity of the marking rod is multiple, institute
It is corresponding with the quantity of the marking rod to state the quantity of fixed part, multiple marking rods are movable with the fixed part correspondingly
Connection, the length of each marking rod are configured to preset length, and the preset length causes the mark head with the mark
The motion of note bar is selectively positioned in the sample area.
7. sample platform of scanning electronic microscope according to claim 6, it is characterised in that multiple fixed parts are with the sample area
Center be evenly spaced apart to be arranged in around the sample area for the center of circle and with circular or circular arc arrangement mode.
8. sample platform of scanning electronic microscope according to claim 7, it is characterised in that any one in multiple marking rods
The mark of marking rod is tapered or ring-type or arrow shaped.
9. according to the sample platform of scanning electronic microscope any one of claim 1-3, it is characterised in that the base station and the mark
Note bar each uses any one material in copper, silver, gold and nonmagnetic alloy to be made.
10. a kind of ESEM, it is characterised in that it is configured with the scanning electron microscope example any one of claim 1-9
Platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720685445.7U CN206849806U (en) | 2017-06-13 | 2017-06-13 | A kind of sample platform of scanning electronic microscope and ESEM |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720685445.7U CN206849806U (en) | 2017-06-13 | 2017-06-13 | A kind of sample platform of scanning electronic microscope and ESEM |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206849806U true CN206849806U (en) | 2018-01-05 |
Family
ID=60800162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720685445.7U Expired - Fee Related CN206849806U (en) | 2017-06-13 | 2017-06-13 | A kind of sample platform of scanning electronic microscope and ESEM |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206849806U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110487800A (en) * | 2019-07-23 | 2019-11-22 | 人本集团有限公司 | Rolling bearing retainer riveting quality detection method |
| CN110534389A (en) * | 2018-05-25 | 2019-12-03 | 中国石油化工股份有限公司 | Sample stake and sample repositioning method can be resetted |
| CN113077698A (en) * | 2021-04-13 | 2021-07-06 | 浙江省肿瘤医院 | Teaching aid is used in stomach cancer pathology teaching |
-
2017
- 2017-06-13 CN CN201720685445.7U patent/CN206849806U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110534389A (en) * | 2018-05-25 | 2019-12-03 | 中国石油化工股份有限公司 | Sample stake and sample repositioning method can be resetted |
| CN110534389B (en) * | 2018-05-25 | 2022-05-20 | 中国石油化工股份有限公司 | Resettable sample peg and sample resetting method |
| CN110487800A (en) * | 2019-07-23 | 2019-11-22 | 人本集团有限公司 | Rolling bearing retainer riveting quality detection method |
| CN113077698A (en) * | 2021-04-13 | 2021-07-06 | 浙江省肿瘤医院 | Teaching aid is used in stomach cancer pathology teaching |
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Granted publication date: 20180105 Termination date: 20200613 |