CN206775813U - It is a kind of to carry the plasma-initiated polymerization device for turning electrode group surely - Google Patents

It is a kind of to carry the plasma-initiated polymerization device for turning electrode group surely Download PDF

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CN206775813U
CN206775813U CN201720521649.7U CN201720521649U CN206775813U CN 206775813 U CN206775813 U CN 206775813U CN 201720521649 U CN201720521649 U CN 201720521649U CN 206775813 U CN206775813 U CN 206775813U
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electrode
plasma
vacuum chamber
straight rod
metal straight
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宗坚
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Jiangsu Favored Nanotechnology Co Ltd
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WUXI RJ INDUSTRIES Co Ltd
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Abstract

It is a kind of to carry the plasma-initiated polymerization device for turning electrode group surely, belong to technical field of plasma, for preparing polymer coating in substrate surface.Fix metal straight rod in the device to be axially equidistantly fixedly connected in vacuum chamber interior walls along vacuum chamber by insulating base, fixed metal straight rod connects and composes fixed electrode through wired in series;Rotate metal straight rod to be axially equidistantly fixedly connected on metal pivoted frame along vacuum chamber, form rotating electrode;Fixed electrode connects high frequency electric source output end, rotating electrode ground connection.During work, open high frequency electric source and be allowed to continuously export high frequency power, and rotate rotating electrode.The periodicity of rotating electrode is close and away from fixed electrode, periodically fires the plasma to go out so as to produce.High frequency electric source of the present utility model does not need impulse modulation, simple in construction, price is low, debugging is easy;Plasma stability is good;Discharge electrode structure and process and assemble required precision are relatively low, good process repeatability.

Description

It is a kind of to carry the plasma-initiated polymerization device for turning electrode group surely
Technical field
The utility model belongs to technical field of plasma, and in particular to a kind of plasma-initiated polymerization device.
Background technology
Plasma polymerization is using discharging that organic gaseous monomer is plasmarized, it is produced all kinds of spikes, The method for forming polymer by carrying out addition reaction between these spikes or between spike and monomer.Plasma polymerization can Being divided into plasma state polymerization and two kinds of forms of plasma-initiated polymerization, their difference is:Plasma state polymerization is whole Monomer is completely exposed to plasma environment in course of reaction, and gas only passes through in a short time in plasma-initiated polymerization The plasma that glow discharge is formed, make monomer vapours that gas phase reaction generation activated centre occur, trigger monomer vapours when long Between carry out polymerisation in the subsequent process without plasma.Complicated, reaction weight with plasma state polymerizate be present The problem of existing property is poor, and treatment effect is decayed with the time is compared, and plasma-initiated polymerization mode can be with the knot of less destruction monomer Structure, retain monomer premium properties, make polymerizate structure more single, be easily formed linear macromolecule product;On the other hand, lead to Cross and graft reaction occurs with material surface, the adhesive force on surface can be strengthened, coating result is not decayed with the time.
It can be seen that the necessary condition for realizing plasma-initiated polymerization, which is plasma, periodically fires sterilized journey.It is existing Plasma-initiated polymerization technology is realized by impulse modulation high frequency glow discharge, such as document《Face coat》(CN A kind of hydrophobic and/or oleophobic base material 1190545C) is disclosed, polymerization is prepared including using impulse modulation high frequency glow discharge The method of thing coating;Document《Apply the method for conformal nano coating by low pressure plasma process》 (CN201180015332.1) method for being directed to prepare polymer coating using impulse modulation high frequency glow discharge.These are existing Technology uses impulse modulation high frequency glow discharge, is because can be avoided using high-frequency discharge because electrode is exhausted by polymerizate Discharge off caused by edge, high-frequency discharge can also maintain in the case of being insulated even if electrode by polymerizate, and use arteries and veins Modulated make high-frequency discharge periodically on/off be in order to meet required for plasma-initiated polymerization short time electric discharge and Long-time discharge off polymerize.However, the method for impulse modulation high frequency glow discharge is needed to use and had used by prior art The high frequency electric source of impulse modulation function, its shortcoming are:Impulse modulation high frequency electric source is complicated, price is high, is not easy to debug;Pulse It is poor to modulate plasma stability caused by high-frequency discharge;It is high to discharge electrode structure and process and assemble required precision, technique Repeatability is poor.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of with the plasma-initiated polymerization for turning electrode group surely Device, to solve, impulse modulation high frequency electric source existing for existing plasma-initiated polymerization device is complicated, price is high, is not easy Debugging;Plasma stability is poor;The problems such as process repeatability is poor.
Technical solutions of the utility model are:
It is a kind of to carry the plasma-initiated polymerization device for turning electrode group surely, it is characterised in that:The device include vacuum chamber, Fixed electrode, rotating electrode;Vector gas and monomer vapours pipeline and blast pipe, pending base are installed on the vacuum chamber Material is positioned in the space that rotating electrode in vacuum chamber surrounds;
The fixed electrode includes one group of fixation metal straight rod, one group of insulating base and wire, and fixed metal straight rod passes through Insulating base is axially equidistantly fixedly connected in vacuum chamber interior walls along vacuum chamber, and fixed metal straight rod connects structure through wired in series Into fixed electrode;
The rotating electrode includes one group of rotation metal straight rod and metal pivoted frame, the rotary shaft and vacuum of the metal pivoted frame The central axis of room, metal pivoted frame can rotate around rotary shaft;The rotation metal straight rod is axially equidistantly fixed along vacuum chamber It is connected on metal pivoted frame, forms rotating electrode;
Fixed metal straight rod and rotation metal straight rod quantity can as, can also be different, due to two groups of metallic rods all It is equidistant, if quantity is the same, discharging can occur to extinguish simultaneously simultaneously between a pair of metallic rods, if quantity is different, two Group metallic rod some the extinguishing left, is discharged with asymmetry spatially close to there is remote, close electric discharge, but with Time integral effect is also space uniform, and plated film result is not influenceed.
The fixed electrode is formed with rotating electrode turns electrode group surely.
Any cross section of chamber body inwall of the vacuum chamber sidepiece for same diameter circle or the identical length of side regular polygon, The regular polygon is when number is at least 6;The top cover and bottom of the vacuum chamber are transversal with the sidepiece chamber body inwall of vacuum chamber The flat board or domes of face matching.
The blast pipe is vertically arranged on the central shaft in vacuum chamber, blast pipe one end stretch out vacuum chamber after with vavuum pump Connect, perforate on the tube wall of the blast pipe.
The exhaust bore is 25-100mm, and uniform pore openings on its tube wall, aperture 2-30mm, hole is at intervals of 2- 100mm。
The fixed electrode connects high frequency electric source output end, the rotating electrode ground connection;The frequency model of the high frequency electric source Enclose for 10kHz-100MHz, the voltage waveform of the high frequency electric source output is sine wave or square wave.
The distance between cylinder where cylinder and rotating electrode where the fixed electrode is 1-5cm.The distance is Two groups of metallic rods can be close minimum range, distance 1-5cm is putting under usual plasma coating air pressure 0.1-100Pa Electrical distance, guarantee reliably to discharge, can not all discharge apart near or remote or excite electric arc.
The fixed metal straight rod and the diameter range for rotating metal straight rod are 1-20mm, and material is copper, aluminium or iron.It is fixed Metal straight rod and rotate metal straight rod diameter it is smaller, its can caused by electric field it is stronger, be more prone to discharge, discharge space office Domain property is also better, but its rigidity is weaker, and the diameter range is to consider discharge space locality and rigidly obtain optimal Value range.
The adjacent two fixed metal straight rods or adjacent two spacing rotated between metal straight rod are more than 15cm.It is above-mentioned Spacing more than 15cm is the distance that usual plasma coating air pressure 0.1-100Pa decentralization electric energy enough extinguishes, less than this away from From electric discharge will be likely to extinguish.
What the rotating speed of rotating electrode changed is the frequency of electric discharge and extinguishing, and influence of the rotating speed to coating effects is actually The influence of discharge cycle, according to being particularly applicable on the plated film of different materials, the rotating speed of Different Optimization can be used.
It is of the present utility model with turn surely electrode group plasma-initiated polymerization device work when, by pending base material It is placed in the space that rotating electrode surrounds, vector gas and monomer vapours is passed through vacuum chamber by the road, opening high frequency electric source makes Continuous output high frequency power, and rotate rotating electrode.Rotating electrode rotate make its rotate metal straight rod periodically it is close and Fixation metal straight rod away from fixed electrode, electric discharge generation plasma, plasma extinguishment when remote, so as to produce when close The plasma to go out is periodically fired, makes monomer vapours that initiated polymerization occur and is deposited on substrate surface formation polymer painting Layer.
The beneficial effects of the utility model are:
(1) the utility model is simple in construction, price is low, debugging is easy, wherein the high frequency electric source used does not need pulse to adjust System, the high frequency electric source of impulse modulation function, its shortcoming are:Impulse modulation high frequency electric source is complicated, price is high, is not easy to debug; Plasma stability caused by impulse modulation high-frequency discharge is poor;It is high to discharge electrode structure and process and assemble required precision, Process repeatability is poor.The mode that the utility model is exactly based on mechanical rotation movement realizes the generation of interrupted plasma, Principle and structure are all fairly simple.
(2) plasma caused by the utility model device has good plasma stability, discharge electrode structure and added Frock matches somebody with somebody the advantages that relatively low required precision, good process repeatability.
Current impulse modulation high-frequency discharge needs accurate matching synchronous, discharge electrode structure between same batch facility, The time delay of process and assemble and synchronous transmission of signal line is slightly different, will produce the difference of high frequency matching, cause electric discharge The larger difference of effect, coating effects under same technological parameter is produced larger difference so that process repeatability compared with Difference.The plasma polymerization of the utility model patent realizes interrupted plasma by the way of mechanical rotation movement Produce, high frequency electric source continuously exports, it is not necessary to accurate matching is synchronous, discharge electrode structure and process and assemble required precision compared with Low therefore even if in the presence of certain machining tolerance, the electric discharge of its plasma is influenceed nor very significantly, so plasma is steady Qualitative good, good process repeatability.
Brief description of the drawings
Fig. 1 is a kind of plan structure signal with the plasma-initiated polymerization device for turning electrode group surely of the utility model Figure.
Fig. 2 is the cross section structure diagram of the longitudinal section in Fig. 1 diametrically.
In figure, 1, vacuum chamber, 2, fixed metal straight rod, 3, insulating base, 4, wire, 5, rotate metal straight rod, 6, metal Pivoted frame, 7, high frequency electric source, 8, base material, 9, vector gas and monomer vapours pipeline, 10, blast pipe.
Embodiment
Specific embodiment of the utility model is described in detail with reference to technical scheme and accompanying drawing.
Embodiment 1
As depicted in figs. 1 and 2 a kind of with turning the plasma-initiated polymerization device of electrode group surely.The device includes true Empty room 1, fixed electrode, rotating electrode;Vector gas and monomer vapours pipeline 9 and blast pipe 10 are installed on the vacuum chamber, Pending base material 8 is positioned in the space that rotating electrode in vacuum chamber surrounds;
Fixed electrode includes one group of fixation metal straight rod, 2, one groups of insulating bases 3 and wire 4, and fixed metal straight rod 2 passes through Insulating base is axially equidistantly fixedly connected in vacuum chamber interior walls along vacuum chamber, and fixed metal straight rod 2 connects through wired in series Form fixed electrode;
The rotating electrode includes one group of rotation metal straight rod 5 and metal pivoted frame 6, the rotary shaft of the metal pivoted frame with it is true The central axis of empty room, metal pivoted frame can rotate around rotary shaft;The rotation metal straight rod 5 is axially equidistantly solid along vacuum chamber Surely it is connected on metal pivoted frame, forms rotating electrode;
The fixed electrode is formed with rotating electrode turns electrode group surely.
Any cross section of chamber body inwall of vacuum chamber sidepiece is the circle of same diameter, and the top cover and bottom of the vacuum chamber are The slab construction matched with the sidepiece chamber body cross section of inboard wall of vacuum chamber.
Blast pipe 10 is vertically arranged on the central shaft in vacuum chamber, and blast pipe one end connects after stretching out vacuum chamber with vavuum pump Connect, perforate on the tube wall of the blast pipe.Exhaust bore is 25mm, uniform pore openings on its tube wall, aperture 2mm, hole interval For 50mm.
Fixed electrode connects the output end of high frequency electric source 7, the rotating electrode ground connection;The frequency range of the high frequency electric source is 10kHz, the voltage waveform of the high frequency electric source output is sine wave.
The distance between cylinder where cylinder and rotating electrode where fixed electrode is 1cm.
Fixed metal straight rod and the diameter range for rotating metal straight rod are 1mm, and material is iron.
Spacing between adjacent two fixed metal straight rods is 15.5cm;
Adjacent two spacing rotated between metal straight rod are 15.5cm.
Embodiment 2
The embodiment is identical with the basic structure of embodiment 1, and different technical parameters is as follows:
(1), any cross section of chamber body inwall of vacuum chamber sidepiece be the identical length of side regular polygon, the regular polygon side Number is 6 sides;The top cover and bottom of the vacuum chamber are the domes matched with the sidepiece chamber body cross section of inboard wall of vacuum chamber.
(2) exhaust bore is 45mm, and uniform pore openings on its tube wall, aperture 12mm, hole is at intervals of 100mm.
(3) frequency range of high frequency electric source is 1MHz, and the voltage waveform of the high frequency electric source output is square wave.
(4) the distance between cylinder where the cylinder and rotating electrode where fixed electrode is 5cm.
(5) diameter range of fixed metal straight rod and rotation metal straight rod is 6mm, and material is aluminium.
Spacing between adjacent two fixed metal straight rods is 20cm;It is adjacent two rotate metal straight rod between spacing be 25cm。
Embodiment 3
The embodiment is identical with the basic structure of embodiment 1, and different technical parameters is as follows:
(1), any cross section of chamber body inwall of vacuum chamber sidepiece be the identical length of side regular polygon, the regular polygon side Number is 8 sides;The top cover and bottom of the vacuum chamber are the slab construction matched with the sidepiece chamber body cross section of inboard wall of vacuum chamber.
(2) exhaust bore is 78mm, and uniform pore openings on its tube wall, aperture 20mm, hole is at intervals of 80mm.
(3) frequency range of high frequency electric source is 25MHz, and the voltage waveform of the high frequency electric source output is square wave.
(4) the distance between cylinder where the cylinder and rotating electrode where fixed electrode is 15cm.
(5) diameter range of fixed metal straight rod and rotation metal straight rod is 13mm, and material is copper.
Spacing between adjacent two fixed metal straight rods is 30cm;It is adjacent two rotate metal straight rod between spacing be 40cm。
Embodiment 4
The embodiment is identical with the basic structure of embodiment 1, and different technical parameters is as follows:
(1), any cross section of chamber body inwall of vacuum chamber sidepiece is the circle of same diameter;The top lid and bottom of the vacuum chamber Build the domes matched for the sidepiece chamber body cross section of inboard wall with vacuum chamber.
(2) exhaust bore is 100mm, and uniform pore openings on its tube wall, aperture 30mm, hole is at intervals of 100mm.
(3) frequency range of high frequency electric source is 100MHz, and the voltage waveform of the high frequency electric source output is sine wave.
(4) the distance between cylinder where the cylinder and rotating electrode where fixed electrode is 20cm.
(5) diameter range of fixed metal straight rod and rotation metal straight rod is 20mm, and material is copper.
Spacing between adjacent two fixed metal straight rods is 35cm;It is adjacent two rotate metal straight rod between spacing be 50cm。

Claims (8)

  1. It is 1. a kind of with the plasma-initiated polymerization device for turning electrode group surely, it is characterised in that:The device includes vacuum chamber (1), fixed electrode, rotating electrode;Vector gas and monomer vapours pipeline (9) and blast pipe are installed on the vacuum chamber (10), pending base material (8) is positioned in the space that rotating electrode in vacuum chamber surrounds;
    The fixed electrode includes one group of fixation metal straight rod (2), one group of insulating base (3) and wire (4), fixed metal straight rod (2) axially equidistantly it is fixedly connected in vacuum chamber interior walls along vacuum chamber by insulating base, fixed metal straight rod (2) is through wire It is connected in series composition fixed electrode;
    The rotating electrode includes one group of rotation metal straight rod (5) and metal pivoted frame (6), the rotary shaft of the metal pivoted frame with it is true The central axis of empty room, metal pivoted frame can rotate around rotary shaft;The rotation metal straight rod (5) is axially equidistant along vacuum chamber It is fixedly connected on metal pivoted frame, forms rotating electrode;
    The fixed electrode is formed with rotating electrode turns electrode group surely.
  2. It is 2. according to claim 1 a kind of with the plasma-initiated polymerization device for turning electrode group surely, it is characterised in that: Any cross section of chamber body inwall of the vacuum chamber sidepiece for same diameter circle or the identical length of side regular polygon, it is described just more In shape, number is at least 6 sides;The top cover and bottom of the vacuum chamber are what is matched with the sidepiece chamber body cross section of inboard wall of vacuum chamber Flat board or domes.
  3. It is 3. according to claim 1 a kind of with the plasma-initiated polymerization device for turning electrode group surely, it is characterised in that: The blast pipe (10) is vertically arranged on the central shaft in vacuum chamber, and blast pipe one end connects after stretching out vacuum chamber with vavuum pump Connect, perforate on the tube wall of the blast pipe.
  4. It is 4. according to claim 3 a kind of with the plasma-initiated polymerization device for turning electrode group surely, it is characterised in that: The exhaust bore is 25-100mm, and uniform pore openings on its tube wall, aperture 2-30mm, hole is at intervals of 2-100mm.
  5. It is 5. according to claim 1 a kind of with the plasma-initiated polymerization device for turning electrode group surely, it is characterised in that: The fixed electrode connects high frequency electric source (7) output end, the rotating electrode ground connection;The frequency range of the high frequency electric source is 10kHz-100MHz, the voltage waveform of the high frequency electric source output is sine wave or square wave.
  6. It is 6. according to claim 1 a kind of with the plasma-initiated polymerization device for turning electrode group surely, it is characterised in that: The distance between cylinder where cylinder and rotating electrode where the fixed electrode is 1-5cm.
  7. It is 7. according to claim 1 a kind of with the plasma-initiated polymerization device for turning electrode group surely, it is characterised in that: The fixed metal straight rod and the diameter range for rotating metal straight rod are 1-20mm, and material is copper, aluminium or iron.
  8. It is 8. according to claim 1 a kind of with the plasma-initiated polymerization device for turning electrode group surely, it is characterised in that: The adjacent two fixed metal straight rods or adjacent two spacing rotated between metal straight rod are more than 15cm.
CN201720521649.7U 2017-05-11 2017-05-11 It is a kind of to carry the plasma-initiated polymerization device for turning electrode group surely Active CN206775813U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106961779A (en) * 2017-05-11 2017-07-18 无锡荣坚五金工具有限公司 It is a kind of to carry the plasma-initiated polymerization device for turning electrode group surely
CN110933833A (en) * 2019-12-26 2020-03-27 华中科技大学 A plasma activated oil treatment device
CN112538618A (en) * 2019-09-20 2021-03-23 江苏菲沃泰纳米科技股份有限公司 Moving electrode device, movable support device and application
WO2021051779A1 (en) 2019-09-20 2021-03-25 江苏菲沃泰纳米科技有限公司 Coating apparatus, moving electrode device and movable support device therefor, and use thereof
CN112616234A (en) * 2020-12-30 2021-04-06 西安交通大学 Device and method for generating underwater discharge plasma by using direct current source

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106961779A (en) * 2017-05-11 2017-07-18 无锡荣坚五金工具有限公司 It is a kind of to carry the plasma-initiated polymerization device for turning electrode group surely
CN106961779B (en) * 2017-05-11 2024-02-02 江苏菲沃泰纳米科技股份有限公司 Plasma initiation polymerization device with fixed rotation electrode group
CN112538618A (en) * 2019-09-20 2021-03-23 江苏菲沃泰纳米科技股份有限公司 Moving electrode device, movable support device and application
WO2021051779A1 (en) 2019-09-20 2021-03-25 江苏菲沃泰纳米科技有限公司 Coating apparatus, moving electrode device and movable support device therefor, and use thereof
CN112538618B (en) * 2019-09-20 2022-02-22 江苏菲沃泰纳米科技股份有限公司 Moving electrode device, movable support device and application
US11555247B2 (en) 2019-09-20 2023-01-17 Jiangsu Favored Nanotechnology Co., Ltd. Coating apparatus and movable electrode arrangement, movable support arrangement, and application thereof
CN110933833A (en) * 2019-12-26 2020-03-27 华中科技大学 A plasma activated oil treatment device
CN112616234A (en) * 2020-12-30 2021-04-06 西安交通大学 Device and method for generating underwater discharge plasma by using direct current source
CN112616234B (en) * 2020-12-30 2021-09-17 西安交通大学 Device and method for generating underwater discharge plasma by using direct current source

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Effective date of registration: 20201111

Address after: Yuqi Industrial Park East Ring Road 214183 Jiangsu city of Wuxi Province

Patentee after: Jiangsu Favored Nanotechnology Co.,Ltd.

Address before: 214000 Yuqi town Yuqi Industrial Park East Ring Road, Huishan District, Wuxi City, Jiangsu Province

Patentee before: Wuxi Rongjian Hardware Tools Co.,Ltd.

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Address after: No.182, East Ring Road, Yuqi supporting area, Huishan Economic Development Zone, Wuxi City, Jiangsu Province, 214000

Patentee after: Jiangsu feiwotai nanotechnology Co.,Ltd.

Address before: 214183 East Ring Road, Yuqi Industrial Park, Wuxi City, Jiangsu Province

Patentee before: Jiangsu Favored Nanotechnology Co.,Ltd.

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