CN206751975U - Diffusion furnace gas handling system is used in solar panel production - Google Patents
Diffusion furnace gas handling system is used in solar panel production Download PDFInfo
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- CN206751975U CN206751975U CN201720594886.6U CN201720594886U CN206751975U CN 206751975 U CN206751975 U CN 206751975U CN 201720594886 U CN201720594886 U CN 201720594886U CN 206751975 U CN206751975 U CN 206751975U
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- pipe
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a kind of solar panel production diffusion furnace gas handling system, including source nitrogen and diffusion source bottles, the diffusion source bottles include an air inlet pipe and an escape pipe and diffusion furnace, the bottom of the diffusion source bottles is downwardly projecting hemispherical or taper, and diffusion source bottles bottom is embedded in base；One gravity sensor is arranged at the bottom of the base, whole system includes two identical and independent gas circuits, two gas circuits are arranged in parallel, and its mixture pipe is aggregated into gaseous mixture house steward, and gas is passed through after air mixing pump and is passed through diffusion furnace by gaseous mixture house steward with oxygen source nitrogen.The device can use up POCl3 in diffusion source bottles, and ensure that diffusion furnace atmosphere is stable.
Description
Technical field
It the utility model is related to a kind of solar panel plant-scale equipment, and in particular to a kind of gas supply of diffusion furnace
System.
Background technology
The diffusion technique of crystal silicon solar energy battery is usually by the use of the P-type silicon of boron-doping as base material, on 800 DEG C of left sides
The right side, the phosphorus atoms by spreading pentavalent form the semiconductor of n-type, form the process of P-N junction.It is diffusion to spread the equipment used
Stove, POCl3 are the main raw material(s)s of diffusion, and the diffusion source bottles equipped with POCl3 are installed in the thermostat of equipment,
As diffusion source bottles are passed through low discharge nitrogen, POCl3 is brought into and reaction is participated in quartz ampoule by low discharge nitrogen.Due to diffusing through
In journey to POCl3 need amount be it is certain, when the POCl3 in diffusion source bottles less than it is a certain amount of when, its nitrogen is taken
The amount of the POCl3 of band cannot meet the needs of production technology, it is necessary to the diffusion source bottles more renewed, so change
A small amount of POCl3 is there remains in old diffusion source bottles, this not only causes the waste of POCl3, and because POCl3 is
Severe poisonous chemicals, i.e. hydrolysis generation phosphoric acid and hydrogen chloride, and then produce white cigarette in humid air, meet water and alcohol then produce
Raw substantial amounts of heat and HCl gas, or even blast, human body suction has fatal danger, once leakage be able to can cause to surrounding environment
Very big danger, so there is also very big danger for the storage of old diffusion source bottles.Therefore, in production process, preferably by trichlorine oxygen
Phosphorus is all used up.
Also there are correlative study, such as Chinese patent, application number in the prior art：CN201420207177.4, notification number：
CN203904505U, entitled " feedway of POCl3 in a kind of crystal silicon solar energy battery diffusion technique ", is disclosed
A kind of device, for POCl3 to be used up.The principle of the device be also retain the diffusion source bottles of a small amount of POCl3 with
One diffusion source bottles for filling POCl3 passes through placed in series.Nitrogen first passes through old diffusion source bottles, then by new diffusion source
Bottle, nitrogen gradually all takes away the POCl3 in old diffusion source bottles, and ensures trichlorine in gas by new diffusion source bottles
The content of oxygen phosphorus being capable of composite demand.This device and method can use up the POCl3 in old bottle, can also ensure three
Chlorethoxyfos feed consistency.But in order to which the POCl3 in old bottle is used up, needed when that will use up by equipment out of use, then
New diffusion source bottles are installed.Reduce operating efficiency.
In addition, another Chinese patent CN201520584751.2, notification number：CN204959086U, title：" sun electricity
Pond is with POCl3 diffusion source bottles " a kind of diffusion source bottles are disclosed, for the POCl3 for being deposited in bottom of bottle to be used up.It is used
Device be that air inlet pipe bottom fills porous pipe with a ring and connected, this ring fills porous pipe positioned at the bottom of diffusion source bottles.
This design is very good.It is but extremely difficult in practical operation.First, diffusion source bottles are mostly glass or steel cylinder, and opening is very
Small or no this annular porous pipe of opening is difficult to be put into diffusion source bottles；Second, even if annular porous pipe is put into diffusion source bottles
Interior, because bottom of bottle is flat, the area that annular porous pipe can cover also is annular, and actual use is still it is difficult to ensure that use up three
Chlorethoxyfos, at the same when POCl3 amount less to a certain extent after, the amount for the POCl3 that nitrogen entrance can be taken away also subtracts therewith
It is few, and then the process in diffusivity is adversely affected.
Further, since the flow velocity that nitrogen oxygen and the nitrogen with POCl3 enter diffusion furnace is different, area is different, position
The factors such as difference, cause in diffusion furnace actual atmosphere and uneven.
The content of the invention
The purpose of this utility model is that POCl3 can be used up by providing one kind, and it can improve diffusion furnace atmosphere
Diffusion furnace gas handling system is used in the solar panel production of uniformity.
To achieve these goals, the utility model includes, source nitrogen and diffusion source bottles, and the diffusion source bottles include one
Air inlet pipe and an escape pipe and diffusion furnace, air inlet pipe bottom are not more than 5 millimeters apart from the bottom of diffusion source bottles；
The source nitrogen is connected by nitrogen tube with air induction hose, and the nitrogen tube is provided with nitrogen valve, and the air inlet is soft
Pipe connects with air inlet pipe, and the air inlet pipe is provided with intake valve, and the escape pipe connects with an air-out hose, the escape pipe
Air outlet valve is provided with, the air-out hose connects with a mixture pipe, and the mixture pipe is provided with mixing air valve；
The bottom of the diffusion source bottles is downwardly projecting hemispherical or taper, and diffusion source bottles bottom is embedded in base, bottom
The bottom of seat is plane；
One gravity sensor is arranged at the bottom of the base, and the gravity sensor and a weight displaying alarm connect
Connect；
Further, the nitrogen valve, air induction hose, diffusion source bottles, air-out hose, mixture pipe and mixing air valve are equal
There are two, form two independent gas circuits；
Have one between mixing air valve and air-out hose and mixture pipe interface on the mixture pipe of each independent gas circuit
Branch road tracheae, there is a branch road tracheae valve on the branch road tracheae, the other end of the branch road tracheae connects with another independent gas circuit, even
It is logical to be between nitrogen valve and air induction hose and the interface of nitrogen tube；
The mixture pipe of two independent gas circuits connects with total mixture pipe.
The air inlet of the diffusion furnace connects with a cylindrical air mixing pump, and total mixture pipe and air mixing pump enter
Gas end connects, the diameter parallel of its airintake direction and air mixing pump；
The inlet end of the air mixing pump has two airintake directions and the tangent mixed gas entrance of air mixing pump, the respectively first mixed gas
Entrance and the second mixed gas entrance
Also include a nitrogen source of oxygen, the nitrogen source of oxygen has two nitrogen oxygen hoses, respectively the first nitrogen oxygen hose and second
Nitrogen oxygen hose, the first nitrogen oxygen hose connect with the first mixed gas entrance, and the second nitrogen oxygen hose connects with the second mixed gas entrance.
By the way that into downwardly projecting hemispherical or cone, the bottom design of diffusion source bottles can be made into POCl3 soon
Constantly concentrated when using up to bottom.Meanwhile the bottom of air inlet pipe is not more than 5 millis apart from the distance between bottom of diffusion source bottles
Rice.With reference to the two conditions, even if in the case of can ensureing that POCl3 surplus is very small, the outlet side of air inlet pipe still
Remain able to immerse in POCl3 solution.So as to ensure that POCl3 can be used up.
In addition, diffusion source bottles are connected with source nitrogen and diffusion furnace using flexible pipe so that diffusion source bottles and other tracheaes and
It is not fixedly connected between device.Meanwhile weight induction device is set in diffusion source bottles bottom, diffusion can be observed the very first time
The weight of source bottle, so as to learn the usage amount of POCl3.By setting weight displaying alarm, it is set to be reached in diffusion source bottles
Alarmed during to its empty bottle weight or the slightly higher quality with empty bottle, so as to which trapezoidal staff changes diffusion source bottles.
One of independent gas circuit is used alone by setting two independent gas circuits, during use, when the expansion of the independent gas circuit
When POCl3 in scattered source bottle uses totally, you can open another independent gas circuit and be operated, so as to ensure to expand in diffusion furnace
The work of the continuous-stable of day labor skill.
When the POCl3 of one of independent gas circuit will exhaust, you can open the air inlet of another independent gas gas circuit
Valve, air outlet valve and mixing air valve, while branch road tracheae valve is opened, POCl3 can so be used up, and can ensure to mix
Close the stabilization of POCl3 content in gas.
By setting air mixing pump, total mixture pipe mixes the gas with POCl3 with oxygen nitrogen in air mixing pump
After uniformly, into diffusion furnace, so as to improve the stability of diffusion furnace atmosphere.
Further, each independent gas circuit also includes a bypass pipe, and the bypass pipe connects with nitrogen tube and mixture pipe,
The connectivity part of bypass pipe and nitrogen tube is located at, and between nitrogen valve and air induction hose and the connectivity part of nitrogen tube, bypass pipe is with mixing
The connectivity part of tracheae is located at, between the connectivity part and mixture pipe of mixture pipe and branch road tracheae and the connectivity part of air-out hose,
The bypass pipe is provided with by-passing valve.
The effect of bypass pipe is to prevent when changing diffusion source bottles, retains mixing containing POCl3 in the duct
Closing gas leak causes environmental pollution, is detrimental to health.Its principle is, when needing to change diffusion source bottles, to close intake valve
With air outlet valve and mixing air valve, open the intake valve of nitrogen valve, by-passing valve, branch road air valve and another independent gas circuit, go out
The mixed gas retained in the duct, can so be passed into another independent gas circuit, so as to have by air valve and mixing air valve
Effect prevents leaking for POCl3.
Further, the diffusion source bottles are externally provided with heat-insulation layer.Heat-insulation layer can keep the steady of the temperature in diffusion source bottles
It is fixed, it is easy to control the content of POCl3 in gaseous mixture.
Preferably, the heat-insulation layer is heat-preservation cotton.
Further, there is a sleeve outside the air mixing pump, the blast pipe of diffusion furnace is connected with the sleeve, and the sleeve is provided with
One waste gas outlet.Gas temperature can be improved by carrying out heating to air mixing pump, so as to accelerate the phase counterdiffusion between gas, be improved
Uniformity coefficient, it can also prevent temperature from reducing to cause POCl3 solution to condense.
Brief description of the drawings
Fig. 1 independent gas circuit schematic diagrames.
Fig. 2 is two parallel schematic diagrames of independent gas circuit.
Fig. 3 is air mixing pump schematic diagram.
Fig. 4 is diffusion furnace and air mixing pump scheme of installation.
Embodiment
The utility model is described in detail below in conjunction with the accompanying drawings.
As shown in figure 1, diffusion furnace gas handling system, including source nitrogen 1 and diffusion source bottles 2 are used in a kind of solar panel production
And diffusion furnace 130, the diffusion source bottles 2 include an air inlet pipe 21 and an escape pipe 22, the bottom of air inlet pipe 21 distance expands
The bottom for dissipating source bottle 2 is not more than 5 millimeters；
The source nitrogen 1 is connected by nitrogen tube 101 with air induction hose 501, and the nitrogen tube 101 is provided with nitrogen valve
102, the air induction hose 501 connects with air inlet pipe 21, and the air inlet pipe 21 is provided with intake valve 211, the escape pipe 22 with
One air-out hose 502 connects, and the escape pipe 22 is provided with air outlet valve 221, the air-out hose 502 and a mixture pipe
701 connections, the mixture pipe 701 are provided with mixing air valve 702；
The bottom of the diffusion source bottles 2 is downwardly projecting hemispherical or taper, and the bottom of diffusion source bottles 2 is embedded in base 24
Interior, the bottom of base 24 is plane；
One gravity sensor 3 is arranged at the bottom of the base 24, the gravity sensor 3 and a weight displaying alarm
4 connections.
As shown in Fig. 2 the nitrogen valve 102, air induction hose 501, diffusion source bottles 2, air-out hose 502, mixture pipe 701
And mixing air valve 702 has two, forms two independent gas circuits 100；
In mixing air valve 702 and air-out hose 502 and mixture pipe 701 on the mixture pipe 701 of each independent gas circuit 100
Have a branch road tracheae 801 between interface, there is a branch road tracheae valve 802 on the branch road tracheae 801, the branch road tracheae 801 it is another
One end connects with another independent gas circuit 100, and connectivity part is in nitrogen valve 102 and air induction hose 501 and the interface of nitrogen tube 101
Between；
The mixture pipe 701 of two independent gas circuits 100 connects with total mixture pipe 11.
Each independent gas circuit 100 also includes a bypass pipe 601, the bypass pipe 601 and nitrogen tube 101 and mixture pipe
701 connections, bypass pipe 601 and the connectivity part of nitrogen tube 101 are located at, nitrogen valve 102 and air induction hose 501 and nitrogen tube 101
Between connectivity part, the connectivity part of bypass pipe 601 and mixture pipe 701 is located at, the connection of mixture pipe 701 and branch road tracheae 801
Between place and the connectivity part of mixture pipe 701 and air-out hose 502, the bypass pipe 601 is provided with by-passing valve 602.
As shown in Figures 3 and 4, the air inlet of the diffusion furnace 130 connects with a cylindrical air mixing pump 120, described total
Mixture pipe 11 connects with the inlet end of air mixing pump 120, the diameter parallel of its airintake direction and air mixing pump 120；
The inlet end of the air mixing pump 120 has two airintake directions and the tangent mixed gas entrance of air mixing pump 120, and respectively
One mixed 121 and second mixed gas entrance 122 of gas entrance
Also include a nitrogen source of oxygen 9, the nitrogen source of oxygen 9 has two nitrogen oxygen hoses, the respectively He of the first nitrogen oxygen hose 91
Second nitrogen oxygen hose 92, the first nitrogen oxygen hose 91 connect with the first mixed gas entrance 121, and the second nitrogen oxygen hose 92 enters with the second mixed gas
Mouth 122 connects.
There is a sleeve outside the air mixing pump 120, the blast pipe of diffusion furnace 130 connects with the sleeve, and the sleeve is provided with one
Individual waste gas outlet.
In production, heat-insulation layer can also be set outside the diffusion source bottles 2, heat-preservation cotton can be selected in insulation material
Wherein used gravity sensor and weight displaying alarm, with Chinese patent CN201620052294.7 institutes
Gravimetric data is transferred in many neck displaying alarms by the principle of disclosure with equipment and the identical gravity sensor of connected mode
Processor, processor sends weight data to display, while by gravimetric data compared with threshold values, when weight is equal to
Or control alarm equipment alarm during less than threshold values.
Claims (5)
1. diffusion furnace gas handling system, including source nitrogen are used in a kind of solar panel production（1）And diffusion source bottles（2）And diffusion
Stove（130）, it is characterised in that
The diffusion source bottles（2）Including an air inlet pipe（21）With an escape pipe（22）, air inlet pipe（21）Bottom distance diffusion
Source bottle（2）Bottom be not more than 5 millimeters；
The source nitrogen（1）Pass through nitrogen tube（101）With air induction hose（501）Connection, the nitrogen tube（101）It is provided with nitrogen
Valve（102）, the air induction hose（501）With air inlet pipe（21）Connection, the air inlet pipe（21）It is provided with intake valve（211）, institute
State escape pipe（22）With an air-out hose（502）Connection, the escape pipe（22）It is provided with air outlet valve（221）, the outlet
Flexible pipe（502）With a mixture pipe（701）Connection, the mixture pipe（701）It is provided with mixing air valve（702）；
The diffusion source bottles（2）Bottom be downwardly projecting hemispherical or taper, diffusion source bottles（2）Bottom is embedded in base（24）
It is interior, base（24）Bottom be plane；
The base（24）Bottom have a gravity sensor（3）, the gravity sensor（3）Filled with a weight display alarm
Put（4）Connection；
The nitrogen valve（102）, air induction hose（501）, diffusion source bottles（2）, air-out hose（502）, mixture pipe（701）And
Mix air valve（702）There are two, form two independent gas circuits（100）；
Each independent gas circuit（100）Mixture pipe（701）On mixing air valve（702）And air-out hose（502）With gaseous mixture
Pipe（701）There is a branch road tracheae between interface（801）, the branch road tracheae（801）On have a branch road tracheae valve（802）, the branch
Road tracheae（801）The other end and another independent gas circuit（100）Connection, connectivity part is in nitrogen valve（102）And air induction hose
（501）With nitrogen tube（101）Interface between；
Two independent gas circuits（100）Mixture pipe（701）With total mixture pipe（11）Connection；
The diffusion furnace（130）Air inlet and a cylindrical air mixing pump（120）Connection, total mixture pipe（11）With
Air mixing pump（120）Inlet end connection, its airintake direction and air mixing pump（120）Diameter parallel；
The air mixing pump（120）Inlet end have two airintake directions and air mixing pump（120）Tangent mixed gas entrance, respectively
One mixed gas entrance（121）With the second mixed gas entrance（122）
Also include a nitrogen source of oxygen（9）, the nitrogen source of oxygen（9）There are two nitrogen oxygen hoses, respectively the first nitrogen oxygen hose（91）
With the second nitrogen oxygen hose（92）, the first nitrogen oxygen hose（91）With the first mixed gas entrance（121）Connection, the second nitrogen oxygen hose（92）With
Second mixed gas entrance（122）Connection.
2. diffusion furnace gas handling system is used in solar panel production according to claim 1, it is characterised in that each independent
Gas circuit（100）Also include a bypass pipe（601）, the bypass pipe（601）With nitrogen tube（101）And mixture pipe（701）Connection,
Bypass pipe（601）With nitrogen tube（101）Connectivity part be located at, nitrogen valve（102）And air induction hose（501）With nitrogen tube（101）
Connectivity part between, bypass pipe（601）With mixture pipe（701）Connectivity part be located at, mixture pipe（701）With branch road tracheae
（801）Connectivity part and mixture pipe（701）With air-out hose（502）Connectivity part between, the bypass pipe（601）It is provided with side
Port valve（602）.
3. diffusion furnace gas handling system is used in solar panel production according to claim 2, it is characterised in that the diffusion
Source bottle（2）It is externally provided with heat-insulation layer.
4. diffusion furnace gas handling system is used in solar panel production according to claim 3, it is characterised in that the insulation
Layer is heat-preservation cotton.
5. diffusion furnace gas handling system is used in solar panel production according to claim 4, it is characterised in that the mixed gas
Cylinder（120）There are a sleeve, diffusion furnace outside（130）Blast pipe connected with the sleeve, the sleeve is provided with a waste gas outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720594886.6U CN206751975U (en) | 2017-05-26 | 2017-05-26 | Diffusion furnace gas handling system is used in solar panel production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720594886.6U CN206751975U (en) | 2017-05-26 | 2017-05-26 | Diffusion furnace gas handling system is used in solar panel production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206751975U true CN206751975U (en) | 2017-12-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720594886.6U Expired - Fee Related CN206751975U (en) | 2017-05-26 | 2017-05-26 | Diffusion furnace gas handling system is used in solar panel production |
Country Status (1)
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| CN (1) | CN206751975U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109355709A (en) * | 2018-12-07 | 2019-02-19 | 吕洪良 | A kind of photovoltaic cell manufacture diffusion furnace inlet duct and its control method |
| CN109853042A (en) * | 2018-12-07 | 2019-06-07 | 张忠恕 | A kind of novel oxidized diffusion furnace system air inlet pipe |
-
2017
- 2017-05-26 CN CN201720594886.6U patent/CN206751975U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109355709A (en) * | 2018-12-07 | 2019-02-19 | 吕洪良 | A kind of photovoltaic cell manufacture diffusion furnace inlet duct and its control method |
| CN109853042A (en) * | 2018-12-07 | 2019-06-07 | 张忠恕 | A kind of novel oxidized diffusion furnace system air inlet pipe |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171215 Termination date: 20200526 |
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| CF01 | Termination of patent right due to non-payment of annual fee |