CN209561441U - A kind of phosphorus source feed system suitable for tubular diffusion process - Google Patents
A kind of phosphorus source feed system suitable for tubular diffusion process Download PDFInfo
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- CN209561441U CN209561441U CN201920205612.2U CN201920205612U CN209561441U CN 209561441 U CN209561441 U CN 209561441U CN 201920205612 U CN201920205612 U CN 201920205612U CN 209561441 U CN209561441 U CN 209561441U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to field of chemical equipment, and in particular to a kind of phosphorus source feed system suitable for tubular diffusion process.The utility model has the technical scheme that a kind of phosphorus source feed system suitable for tubular diffusion process, include main source bottle, it is characterized by: also comprising secondary source bottle, the main source bottle is connected by link pipeline and the secondary source bottle perforation, and the level sensor for detecting liquid levels height in the main source bottle is equipped in the main source bottle；Also comprising the main valve for controlling the connecting line switch state.The phosphorus source feed system that the purpose of the utility model is to provide a kind of suitable for tubular diffusion process, major-minor bottle separate design, dynamic guarantees that the liquid level of main bottle in a reasonable setting value, so that the phosphorus oxychloride vapor stream of supply diffusion is stablized, improves diffusion quality.
Description
Technical field
The utility model relates to field of chemical equipment, and in particular to a kind of phosphorus source supply suitable for tubular diffusion process
System.
Background technique
Photovoltaic technology is a kind of photovoltaic effect using solar cell semiconductor material, and solar radiation energy is directly converted
For a kind of new power generating system of electric energy.Solar battery is an important foundation part of photovoltaic industry, in manufacturing process
In have one of diffusing procedure.In this process, it needs to deposit one layer of phosphorus atoms in P-type silicon often to use liquid to form PN junction
Source is diffused.The concrete mode of diffusion is, using inert gas, such as nitrogen, to be passed through in the quartz source bottle for filling phosphorus oxychloride,
It carries in phosphorus oxychloride steam to diffusion furnace tube.It is elemental phosphorous that phosphorus oxychloride reacts generation with oxygen, and becomes at high temperature into silicon substrate
N type semiconductor is formed in vivo..
There are certain technological deficiencies during this, in process of production, as liquid source (phosphorus oxychloride) gradually subtracts
Few, the contact area into nitrogen and liquid source in bottle is also reduced, and the source steam (phosphorus oxychloride steam) of generation also subtracts therewith
It is few, therefore the steam brought into high temperature diffusion furnace tube gradually tails off.It is such to will cause PN junction quality in production process and become
Change, until generating substandard product.
In order to ensure the quality of PN junction, liquid level just needs replacing trichlorine in 20mm in usual source bottle in reality production
Oxygen phosphorus not only increases the losing quantity of phosphorus oxychloride in production in this way, increases handling source bottle workload, also can be because of discarded trichlorine oxygen
Phosphorus inconvenience processing, brings pressure to environment.
Utility model content
The phosphorus source feed system that the purpose of the utility model is to provide a kind of suitable for tubular diffusion process, major-minor bottle point
From design, dynamic guarantees the liquid level of main bottle in a reasonable setting value, so that the phosphorus oxychloride steam of supply diffusion
Steady air current improves diffusion quality.
The above-mentioned technical purpose of the utility model has the technical scheme that a kind of tubular type that is suitable for expands
Phosphorus source feed system in day labor skill includes main source bottle, it is characterised in that: also comprising secondary source bottle, the main source bottle passes through link
Pipeline and the secondary source bottle perforation connect, and the liquid for detecting liquid levels height in the main source bottle is equipped in the main source bottle
Position inductor；Also comprising the main valve for controlling the connecting line switch state.
As the preferred of the utility model, it is connected with signal piping on the main source bottle, the level sensor is mounted on
In the signal piping.
As the preferred of the utility model, air inlet pipe and an air outlet pipe is connected on the main source bottle.
As the preferred of the utility model, the air inlet pipe includes for going deep into liquid level extension below.
As the preferred of the utility model, pair source bottle is also comprising linking pipeline with described for adjusting the secondary source bottle
The auxiliary-valve of switch state.
As the preferred of the utility model, the secondary liquid for detecting level value in the secondary source bottle is equipped in the bottle of the pair source
Position inductor.
As the preferred of the utility model, pair source bottle includes venthole.
As the preferred of the utility model, pair source bottle includes perfusing hole.
As the preferred of the utility model, the main source bottle be it is multiple, multiple main sources bottles pass through link pipeline and institute
State secondary source bottle connection.
In conclusion the utility model has the following beneficial effects:
1: comprising novel major-minor source bottle structure, main source bottle increases liquid level inducing function, can when main source bottle liquid level is relatively low
By secondary source bottle supply.
2: main source bottle can guarantee by adjusting induction level, pipeline time etc. liquid level in a zone of reasonableness, thus
So that the phosphorus oxychloride vapor stream of supply diffusion is stablized, diffusion quality is improved.
3: only needing to change secondary source bottle when the bottle of replacement source, and existing feelings can be reduced by the source liquid of secondary source bottle all using finishing
20% remaining waste under condition, the risk when source bottle of reduction recycles and secondary dress fills.
4: traditional single source bottle can be supplied single diffusion system and be changed to the multiple lists of supply source system supply by this system
Only diffusion system supplies a complete diffusion machine, reduce overall system complexity, improves system stability.
Detailed description of the invention:
Fig. 1 is the schematic diagram of embodiment 1；
Fig. 2 is the schematic diagram of embodiment 2.
In figure:
1, main source bottle, 11, air inlet pipe, 12, escape pipe, 13, main valve, 2, secondary source bottle, 21, venthole, 22, perfusing hole,
23, auxiliary-valve, 3, link pipeline, 4, signal piping, 5, level sensor.
Specific embodiment:
The utility model is described in further detail below in conjunction with attached drawing.
This specific embodiment is only the explanation to the utility model, is not limitations of the present invention, ability
Field technique personnel can according to need the modification that not creative contribution is made to the present embodiment after reading this specification, but
As long as all by the protection of Patent Law in the scope of the claims of the utility model.
Embodiment 1, as shown in Figure 1, a kind of phosphorus source feed system suitable for tubular diffusion process, includes main source bottle 1,
For storing liquid source, such as phosphorus oxychloride in main source bottle 1.Air inlet pipe 11 includes extension, and extension length is longer, submerges liquid
Below face, for inputting inert gas, such as nitrogen.In the technical program, detection in communication is equipped in 1 side of main source bottle
Pipeline 4, liquid source equally also enter in signal piping 4, are provided with level sensor 5, city can be used in level sensor 5
Mature product on field, specific brand and model are not specifically limited herein.When level sensor 5 senses 4 He of signal piping
Liquid level height value in main source bottle 1 is lower than preset threshold value, then can transmit a signal to the control system on backstage.
Also comprising secondary source bottle 2, secondary source bottle 2 is connected to by link pipeline 3 with main source bottle 1.It links pipeline 3 and is equipped with main valve
13.Under normal circumstances, main valve 13 is closed, and when level sensor 5 senses that liquid level is too low, control bound door 13 is beaten
It opens.Here 13 unfolding mode of main valve can be artificial open manually and be also possible to open by automation equipment, this
In without limitation.
It is equipped with venthole 21 on secondary source bottle 2, for stablizing air pressure in bottle.It is additionally provided with perfusing hole 22 on secondary source bottle 2, is used for
Staff supplements liquid source into secondary source bottle 2.It is again provided with secondary level sensor in secondary source bottle 2, when liquid level is low in secondary source bottle 2
It when threshold value, can also trigger, be prompted to staff.
Secondary source bottle 2 supports replacement, in replacement, shuts auxiliary-valve 23 first, opens auxiliary-valve 23 after the completion of replacement.
Inert gas enters main source bottle 1 by air inlet pipe 11, and also liquid source comes into full contact with, and takes steam, such as phosphorus oxychloride out of
Steam goes out escape pipe 12.
As shown in Fig. 2, Fig. 2 is another embodiment, the difference with embodiment 1 is to support multiple main source bottles 1 simultaneously
It uses, favorable expandability.As shown in Fig. 2, multiple main source bottles 1 are connect by a link pipeline 3 with secondary source bottle 2, it is only necessary to one
Secondary source bottle 2 reduces the use of secondary source bottle 2.Thus a complete diffusion machine can be supplied with a set of equipment.
Claims (9)
1. a kind of phosphorus source feed system suitable for tubular diffusion process includes main source bottle (1), it is characterised in that: also include
Secondary source bottle (2), the main source bottle (1) is connected by link pipeline (3) and secondary source bottle (2) perforation, in the main source bottle (1)
Equipped with the level sensor (5) for detecting liquid levels height in the main source bottle (1)；Also comprising for controlling the link
The main valve (13) of pipeline (3) switch state.
2. a kind of phosphorus source feed system suitable for tubular diffusion process according to claim 1, it is characterised in that: institute
It states and is connected with signal piping (4) on main source bottle (1), the level sensor (5) is mounted in the signal piping (4).
3. a kind of phosphorus source feed system suitable for tubular diffusion process according to claim 1, it is characterised in that: institute
It states and is connected with air inlet pipe (11) and escape pipe (12) on main source bottle (1).
4. a kind of phosphorus source feed system suitable for tubular diffusion process according to claim 3, it is characterised in that: institute
Stating air inlet pipe (11) includes for going deep into liquid level extension below.
5. a kind of phosphorus source feed system suitable for tubular diffusion process according to claim 1, it is characterised in that: institute
Secondary source bottle (2) is stated also comprising for adjusting the secondary source bottle (2) and the auxiliary-valve (23) for linking pipeline (3) switch state.
6. a kind of phosphorus source feed system suitable for tubular diffusion process according to claim 5, it is characterised in that: institute
State the secondary level sensor being equipped in secondary source bottle (2) for detecting level value in the secondary source bottle (2).
7. a kind of phosphorus source feed system suitable for tubular diffusion process according to claim 1, it is characterised in that: institute
Stating secondary source bottle (2) includes venthole (21).
8. a kind of phosphorus source feed system suitable for tubular diffusion process according to claim 1, it is characterised in that: institute
Stating secondary source bottle (2) includes perfusing hole (22).
9. according to claim 1 to a kind of phosphorus source feed system suitable for tubular diffusion process described in 8 any one,
Be characterized in that: the main source bottle (1) be it is multiple, multiple main sources bottles (1) pass through link pipeline (3) and the secondary source bottle (2)
Connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920205612.2U CN209561441U (en) | 2019-02-18 | 2019-02-18 | A kind of phosphorus source feed system suitable for tubular diffusion process |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920205612.2U CN209561441U (en) | 2019-02-18 | 2019-02-18 | A kind of phosphorus source feed system suitable for tubular diffusion process |
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| CN209561441U true CN209561441U (en) | 2019-10-29 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109950360A (en) * | 2019-02-18 | 2019-06-28 | 浙江贝盛光伏股份有限公司 | A kind of phosphorus source feed system suitable for tubular diffusion process |
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2019
- 2019-02-18 CN CN201920205612.2U patent/CN209561441U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109950360A (en) * | 2019-02-18 | 2019-06-28 | 浙江贝盛光伏股份有限公司 | A kind of phosphorus source feed system suitable for tubular diffusion process |
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