CN206717685U - 研磨垫 - Google Patents

研磨垫 Download PDF

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Publication number
CN206717685U
CN206717685U CN201590000989.4U CN201590000989U CN206717685U CN 206717685 U CN206717685 U CN 206717685U CN 201590000989 U CN201590000989 U CN 201590000989U CN 206717685 U CN206717685 U CN 206717685U
Authority
CN
China
Prior art keywords
grinding
layer
convex shaped
shaped part
grinding layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201590000989.4U
Other languages
English (en)
Chinese (zh)
Inventor
向史博
田浦歳和
高木大辅
铃木真二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bando Chemical Industries Ltd
Original Assignee
Bando Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bando Chemical Industries Ltd filed Critical Bando Chemical Industries Ltd
Application granted granted Critical
Publication of CN206717685U publication Critical patent/CN206717685U/zh
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28Resins or natural or synthetic macromolecular compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CN201590000989.4U 2014-09-26 2015-09-17 研磨垫 Active CN206717685U (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014197481 2014-09-26
JP2014-197481 2014-09-26
PCT/JP2015/076379 WO2016047535A1 (ja) 2014-09-26 2015-09-17 研磨パッド及び研磨パッドの製造方法

Publications (1)

Publication Number Publication Date
CN206717685U true CN206717685U (zh) 2017-12-08

Family

ID=55581062

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201590000989.4U Active CN206717685U (zh) 2014-09-26 2015-09-17 研磨垫

Country Status (4)

Country Link
JP (2) JP6822840B2 (ja)
CN (1) CN206717685U (ja)
TW (1) TWI697382B (ja)
WO (1) WO2016047535A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109202696A (zh) * 2018-09-10 2019-01-15 台山市远鹏研磨科技有限公司 一种金刚石陶瓷减薄垫

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3224896U (ja) * 2019-11-13 2020-01-30 バンドー化学株式会社 研磨パッド

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03256676A (ja) * 1990-03-05 1991-11-15 Romatetsuku Kk 研削布
JP2002057130A (ja) * 2000-08-14 2002-02-22 Three M Innovative Properties Co Cmp用研磨パッド
JP2007190613A (ja) * 2004-02-09 2007-08-02 Bando Chem Ind Ltd 研磨フィルム及びその製造方法
JP2007007844A (ja) * 2005-05-31 2007-01-18 Mineo Kobayashi 軟質樹脂砥石、それを用いた円筒状研削ロールとその製造方法
JP2009072832A (ja) * 2007-09-18 2009-04-09 Bando Chem Ind Ltd 研磨シートおよびその製造方法
WO2010032715A1 (ja) * 2008-09-17 2010-03-25 株式会社クラレ 研磨パッド
JP2011031361A (ja) * 2009-08-05 2011-02-17 Nihon Micro Coating Co Ltd 研磨用具、研磨方法及び研磨用具の製造方法
JP2012064295A (ja) * 2009-11-10 2012-03-29 Showa Denko Kk 磁気記録媒体用ガラス基板の製造方法
JP6188286B2 (ja) * 2012-07-13 2017-08-30 スリーエム イノベイティブ プロパティズ カンパニー 研磨パッド及びガラス、セラミックス、及び金属材料の研磨方法
CN102862128B (zh) * 2012-09-20 2015-10-21 北京国瑞升科技股份有限公司 一种凹凸结构磨料制品及其制备方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109202696A (zh) * 2018-09-10 2019-01-15 台山市远鹏研磨科技有限公司 一种金刚石陶瓷减薄垫

Also Published As

Publication number Publication date
JPWO2016047535A1 (ja) 2017-07-20
TW201620670A (zh) 2016-06-16
TWI697382B (zh) 2020-07-01
JP2021020314A (ja) 2021-02-18
JP6822840B2 (ja) 2021-01-27
WO2016047535A1 (ja) 2016-03-31

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