CN206706247U - A kind of improved single crystal growing furnace - Google Patents
A kind of improved single crystal growing furnace Download PDFInfo
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- CN206706247U CN206706247U CN201720524565.9U CN201720524565U CN206706247U CN 206706247 U CN206706247 U CN 206706247U CN 201720524565 U CN201720524565 U CN 201720524565U CN 206706247 U CN206706247 U CN 206706247U
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- growing furnace
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Abstract
The utility model discloses a kind of improved single crystal growing furnace,Including housing,The lower end of the housing is provided with upper support seat,And the lower end of upper support seat is provided with lower support base,It is fixed between the upper branching holder and lower support base using shock reducing structure,And the lower end of lower support base is provided with cushion socket,The upper end of the housing is provided with secondary furnace chamber,And the lower end of secondary furnace chamber is provided with control valve,The device on the housing of single crystal growing furnace by setting a standby feeding device to carry out secondary charging,Single crystal growing furnace need not be reopened during due to secondary charging,Therefore airtight sex chromosome mosaicism is needed not worry about,And the secondary shock-absorbing mechanism that the bottom of housing is formed using shock reducing structure and cushion socket,Also influence of the external vibration to monocrystalline silicon generating process in the course of work can effectively be reduced,So as to preferably ensure product quality,Therefore there is very high practical value.
Description
Technical field
Single crystal growing furnace technical field is the utility model is related to, specially a kind of improved single crystal growing furnace.
Background technology
Single crystal growing furnace is that one kind melts the polycrystalline materials such as polysilicon in inert gas environment, turns into nothing with Grown by CZ Method
Misplaced the equipment of monocrystalline, and volume can be reduced after traditional single crystal growing furnace melts because polysilicon is heated when in use, therefore can be after
Continuous added material, so as to improve single production yields, but original inert gas environment can be destroyed using direct blow-on addition, because
This causes the inefficiencies of single production capacity, and single crystal growing furnace when monocrystalline silicon is generated if subjected to external disturbance, easily makes
Crystal production produces dislocation, if invention one kind being capable of easily secondary added material, and can effectively reduce or remit external vibration
Modified single crystal growing furnace just can solve the problem that problems, a kind of improved single crystal growing furnace is we provided for this.
Utility model content
The purpose of this utility model is to provide a kind of improved single crystal growing furnace, asked with solve to propose in above-mentioned background technology
Topic.
To achieve the above object, the utility model provides following technical scheme：A kind of improved single crystal growing furnace, including housing,
The lower end of the housing is provided with upper support seat, and the lower end of upper support seat is provided with lower support base, and the upper branching holder is with
It is fixed between support base using shock reducing structure, and the lower end of lower support base is provided with cushion socket, the upper end of the housing is set
There is secondary furnace chamber, and the lower end of secondary furnace chamber is provided with control valve, the top of the secondary furnace chamber is provided with pulling apparatus, and under housing
End is provided with electric rotating machine, and the upper end driving of the electric rotating machine has rotating seat, and the upper end of rotating seat is provided with crucible, described
Heater is provided with the outside of crucible, and the upper end of heater is provided with guide ring, the upper end of the guide ring is provided with
Temperature transition ring, and cooling device is provided with the outside of heater, is provided with air inlet on the left of the housing, and housing
Right side is provided with gas outlet, and the upper end of the housing is provided with observation window mounting seat, and the upper end of observation window mounting seat is provided with
Observation window, stock pipe is provided with the right side of the housing, and the lower end for pipe of stocking up is provided with limit valve, the outer end of the stock pipe
Pushing meanss mounting seat is provided with by flange, and pushing meanss are provided with pushing meanss mounting seat, the stock pipe is in place
The passage that aperture is less than polysilicon grain size size is provided with the pipeline section of enclosure interior.
Preferably, the shock reducing structure is damping spring damper, and cushion socket is the rubber blanket of multi-layer intercrossed superposition.
Preferably, the housing is from top to bottom made up of upper shell, middle housing and lower house successively, and the observation window is by interior
Layer glass and inner layer glass stack composition, and the cooling of the outside cooling device of connection is provided between glass outer and inner layer glass
Liquid torus.
Preferably, the pulling apparatus is air-leg or hydraulic stem, and pushing meanss are ball screw rod type motor push rod.
Compared with prior art, the beneficial effects of the utility model are：The single crystal growing furnace of the utility model design passes through in list
Set a standby feeding device to carry out secondary charging on the housing of brilliant stove, list need not be reopened during due to secondary charging
Brilliant stove, therefore airtight sex chromosome mosaicism is needed not worry about, and the secondary shock-absorbing that the bottom of housing is formed using shock reducing structure and cushion socket
Mechanism, influence of the external vibration to monocrystalline silicon generating process in the course of work also can be effectively reduced, so as to preferably ensure
Product quality, the observation window of the device use independent cooling construction, are scalded so as to effectively avoid passing through during observation window observation
Observer, therefore there is very high practical value.
Brief description of the drawings
Fig. 1 is the utility model structure diagram；
Fig. 2 is the sectional view of the utility model structure.
In figure：Housing in 1 housing, 101 upper shells, 102,103 lower houses, 2 air inlets, 3 observation windows, 301 inner layer glasses,
302 coolant torus, 303 glass outers, 4 pushing meanss mounting seats, 5 gas outlets, 6 upper support seats, 7 times support bases, 8 dampings
Body, 9 electric rotating machines, 10 cushion sockets, 11 pulling apparatus, 12 pushing meanss, 13 stock pipes, 14 passages, 15 limit valves, 16 coolings
Device, 17 rotating seats, 18 observation window mounting seats, 19 crucibles, 20 heaters, 21 guide rings, 22 temperature transition rings, 23 controls
Valve, 24 secondary furnace chambers.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the technical scheme in the utility model, those of ordinary skill in the art are not making creative work premise
Lower obtained every other embodiment, belong to the scope of the utility model protection.
Fig. 1-2 is referred to, the utility model provides a kind of technical scheme：A kind of improved single crystal growing furnace, including housing 1, shell
The lower end of body 1 is provided with upper support seat 6, and the lower end of upper support seat 6 is provided with lower support base 7, upper branching holder 6 and lower support base
It is fixed between 7 using shock reducing structure 8, and the lower end of lower support base 7 is provided with cushion socket 10, the upper end of housing 1 is provided with pair
Furnace chamber 24, and the lower end of secondary furnace chamber 24 is provided with control valve 23, the top of secondary furnace chamber 24 is provided with pulling apparatus 11, and housing 1
Lower end be provided with electric rotating machine 9, the upper end driving of electric rotating machine 9 has rotating seat 17, and the upper end of rotating seat 17 is provided with earthenware
Crucible 19.
The outside of crucible 19 is provided with heater 20, and the upper end of heater 20 is provided with guide ring 21, guide ring
21 upper end is provided with temperature transition ring 22, and the outside of heater 20 is provided with cooling device 16, and the left side of housing 1 is set
There is air inlet 2, and the right side of housing 1 is provided with gas outlet 5, the upper end of housing 1 is provided with observation window mounting seat 18, and observation window
The upper end of mounting seat 18 is provided with observation window 3, and the right side of housing 1 is provided with stock pipe 13, and the lower end for pipe 13 of stocking up is provided with
Limit valve 15, the outer end for pipe 13 of stocking up is provided with pushing meanss mounting seat 4 by flange, and is set in pushing meanss mounting seat 4
There are pushing meanss 12, it is logical less than polysilicon grain size size that stock pipe 13 is provided with aperture at the pipeline section inside housing 1
Stomata 14.
Shock reducing structure 8 is damping spring damper, and cushion socket 10 is the rubber blanket of multi-layer intercrossed superposition, and housing 1 is by up to
Under be made up of successively upper shell 101, middle housing 102 and lower house 103, observation window 3 is by inner layer glass 301 and inner layer glass 303
Composition is stacked, and the coolant torus of the outside cooling device of connection is provided between glass outer 303 and inner layer glass 301
302, pulling apparatus 11 is air-leg or hydraulic stem, and pushing meanss 12 are ball screw rod type motor push rod.
The device on the housing 1 of single crystal growing furnace by setting a standby feeding device so that the polycrystalline in crucible 19
After silicon melts, additionally it is possible to by stocking up, pipe 13 carries out secondary charging, and polysilicon is preset in stock pipe 13 during being somebody's turn to do, and two
Single crystal growing furnace need not be reopened during secondary charging, therefore needs not worry about airtight sex chromosome mosaicism, and the bottom of housing 1 uses damping
The secondary shock-absorbing mechanism that body 8 and cushion socket 10 are formed, it also can effectively reduce external vibration in the course of work and monocrystalline silicon is given birth to
Into the influence of process, so as to preferably ensure product quality, and the observation window 3 of the device uses independent cooling construction, from
And observer is scalded when effectively avoiding passing through observation window observation, therefore there is very high practical value.
While there has been shown and described that embodiment of the present utility model, for the ordinary skill in the art,
It is appreciated that these embodiments can be carried out with a variety of changes in the case where not departing from principle of the present utility model and spirit, repaiied
Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.
Claims (4)
1. a kind of improved single crystal growing furnace, including housing (1), and be characterised by：The lower end of the housing (1) is provided with upper support seat
(6), and the lower end of upper support seat (6) is provided with lower support base (7), is used between the upper branching holder (6) and lower support base (7)
Shock reducing structure (8) is fixed, and the lower end of lower support base (7) is provided with cushion socket (10), and the upper end of the housing (1) is provided with
Secondary furnace chamber (24), and the lower end of secondary furnace chamber (24) is provided with control valve (23), the top of the secondary furnace chamber (24) is provided with lifting
Device (11), and the lower end of housing (1) is provided with electric rotating machine (9), the upper end driving of the electric rotating machine (9) has rotating seat
(17), and the upper end of rotating seat (17) is provided with crucible (19), and heater (20) is provided with the outside of the crucible (19), and
The upper end of heater (20) is provided with guide ring (21), and the upper end of the guide ring (21) is provided with temperature transition ring (22),
And cooling device (16) is provided with the outside of heater (20), air inlet (2), and shell are provided with the left of the housing (1)
Gas outlet (5) is provided with the right side of body (1), the upper end of the housing (1) is provided with observation window mounting seat (18), and observation window is pacified
The upper end of dress seat (18) is provided with observation window (3), and stock pipe (13) is provided with the right side of the housing (1), and pipe (13) of stocking up
Lower end be provided with limit valve (15), the outer end of the stock pipe (13) is provided with pushing meanss mounting seat (4) by flange, and
Pushing meanss (12) are provided with pushing meanss mounting seat (4), the stock pipe (13) is at the internal pipeline section of housing (1)
It is provided with the passage (14) that aperture is less than polysilicon grain size size.
A kind of 2. improved single crystal growing furnace according to claim 1, it is characterised in that：The shock reducing structure (8) is damping spring
Damper, and cushion socket (10) is the rubber blanket of multi-layer intercrossed superposition.
A kind of 3. improved single crystal growing furnace according to claim 1, it is characterised in that：The housing (1) is from top to bottom successively
It is made up of upper shell (101), middle housing (102) and lower house (103), the observation window (3) is by inner layer glass (301) and internal layer
Glass (303) stacks composition, and the outside cooling device of connection is provided between glass outer (303) and inner layer glass (301)
Coolant torus (302).
A kind of 4. improved single crystal growing furnace according to claim 1, it is characterised in that：The pulling apparatus (11) is air-leg
Or hydraulic stem, and pushing meanss (12) are ball screw rod type motor push rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720524565.9U CN206706247U (en) | 2017-05-11 | 2017-05-11 | A kind of improved single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720524565.9U CN206706247U (en) | 2017-05-11 | 2017-05-11 | A kind of improved single crystal growing furnace |
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| Publication Number | Publication Date |
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| CN206706247U true CN206706247U (en) | 2017-12-05 |
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ID=60463114
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| CN201720524565.9U Active CN206706247U (en) | 2017-05-11 | 2017-05-11 | A kind of improved single crystal growing furnace |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107841787A (en) * | 2017-12-15 | 2018-03-27 | 江苏润弛太阳能材料科技有限公司 | A kind of protector for solar energy quartz crucible damping |
| CN108360063A (en) * | 2018-05-04 | 2018-08-03 | 蒋国庆 | Continuous crystal-pulling single crystal growing furnace |
| CN110528065A (en) * | 2019-09-30 | 2019-12-03 | 萧县威辰机电工程设备有限公司 | A kind of monocrystalline silicon growing furnace that security performance is high |
-
2017
- 2017-05-11 CN CN201720524565.9U patent/CN206706247U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107841787A (en) * | 2017-12-15 | 2018-03-27 | 江苏润弛太阳能材料科技有限公司 | A kind of protector for solar energy quartz crucible damping |
| CN108360063A (en) * | 2018-05-04 | 2018-08-03 | 蒋国庆 | Continuous crystal-pulling single crystal growing furnace |
| CN110528065A (en) * | 2019-09-30 | 2019-12-03 | 萧县威辰机电工程设备有限公司 | A kind of monocrystalline silicon growing furnace that security performance is high |
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