CN206610790U - Corona discharge ion source component - Google Patents

Corona discharge ion source component Download PDF

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Publication number
CN206610790U
CN206610790U CN201720351276.3U CN201720351276U CN206610790U CN 206610790 U CN206610790 U CN 206610790U CN 201720351276 U CN201720351276 U CN 201720351276U CN 206610790 U CN206610790 U CN 206610790U
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China
Prior art keywords
corona discharge
module
ion
source component
ion source
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CN201720351276.3U
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Chinese (zh)
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赵东杰
刘军
丁庆行
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Beijing Wuzi University
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Beijing Wuzi University
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Abstract

The utility model discloses a kind of corona discharge ion source component, including:Ion generation cavity is configured with insulating sleeve, insulating sleeve, the bottom of insulating sleeve is formed with the opening connected with ion generation cavity, and insulating sleeve is provided with the air feed path connected with ion generation cavity;Ionic reaction storehouse, ionic reaction storehouse is by insulation configuration into and constructing in ionic reaction storehouse ionic reaction chamber, opening is connected with ionic reaction chamber;Corona discharge needle assemblies, corona discharge needle assemblies be can adjust by the upper end of insulating sleeve and extend into ion generation cavity, and corona discharge needle assemblies are spaced apart with corona discharge net;Ion implanting electrode, ion implanting electrode is located on ionic reaction storehouse and is spaced apart with corona discharge net;And controller, controller is connected with corona discharge high voltage power supply and ion implanting electrode.According to corona discharge ion source component of the present utility model, effective ion is added, ion implanting rate is improved, electric discharge is more stablized.

Description

Corona discharge ion source component
Technical field
The utility model is related to chemical analysis instrument field, specifically, more particularly to a kind of corona discharge ion source group Part.
Background technology
High-Field asymmetric waveform ion mobility spectrometry (High Field Asymmetric Ion Mobility Spectrometry, FAIMS) it is that one kind is operated under atmospheric pressure environment, utilize non-linear fortune of the gaseous ion in high electric field Move to carry out the technology of trace (minimum amount) material detection.It is widely used in explosive, drugs, biological detection with And ion pre-separation field.
Corona discharge is a kind of metastable discharge type.When at electrode two ends plus higher but not up to the voltage that punctures When, if the electric field (internal field) of electrode surface is very strong, the gas medium near electrode can be produced electricity by partial breakdown Corona phenomenon.When the radius of curvature of electrode is smaller, the field strength near it is especially high, has exceeded the ionization field strength of gas and has touched Free threshold value is hit, gas will be made to occur ionization and encourage, the gas medium near electrode is generation partial ionization, so that shape Into negative ions and electronics.Because FAIMS sizes are small, ion gun and FAIMS combination need to reduce volume, and reduce volume meeting Guiding discharge space reduces, accumulation, discharge instability, discharge current increase easily occurs and ion implanting efficiency is low asks Topic, causes testing result poor repeatability;In addition existing corona discharge ion source volume is larger, can not with minimize and be miniaturized The problems such as FAIMS carries out integrated.
Utility model content
The utility model is intended at least solve one of the problems of the prior art to a certain extent.
In view of this, the utility model provides a kind of corona discharge ion source component, adds effective ion, improves Ion implanting rate, makes electric discharge more stablize.
The corona discharge ion source component provided according to the utility model, including:Structure in insulating sleeve, the insulating sleeve Ion generation cavity is made, the bottom of the insulating sleeve is formed with the opening connected with the ion generation cavity, the insulation sleeve Cylinder is provided with the air feed path connected with the ion generation cavity;Ionic reaction storehouse, the ionic reaction storehouse is by insulating part It is configured to, and constructs in the ionic reaction storehouse ionic reaction chamber, the opening is connected with the ionic reaction chamber;Corona Discharged net, and the corona discharge net is located at the opening;Corona discharge needle assemblies, the corona discharge needle assemblies are by described exhausted The upper end of edge sleeve is adjustably extend into the ion generation cavity, the corona discharge needle assemblies and the corona discharge net It is spaced apart;Ion implanting electrode, the ion implanting electrode is located on the ionic reaction storehouse and between the corona discharge net Separate;Corona discharge high voltage power supply, the corona discharge high voltage power supply and the corona discharge net and the corona discharge needle group Part is connected;And controller, the controller is connected with the corona discharge high voltage power supply and the ion implanting electrode.
According to the corona discharge ion source component of embodiment of the present utility model, the corona discharge ion source assembly volume Small, air-tightness is good, by controller optimization running parameter, considerably increases effective ion, make electric discharge more stablize, improve from Sub- injection rate.
According to one embodiment of the present utility model, further comprise air injection pump, the air injection pump with it is described Air feed path is connected, and the air injection pump is connected with the controller.
According to one embodiment of the present utility model, further comprise filter, the filter is located at the air and supplied To in passage, the filter includes the active carbon layer, silicone rubber particles layer and molecular sieve layer arranged successively.
According to one embodiment of the present utility model, further comprise coupling seats, the coupling seats are socketed in described On insulating sleeve, the coupling seats are connected with the ionic reaction storehouse.
According to one embodiment of the present utility model, the corona discharge needle assemblies include connecting with the insulating sleeve screw thread The adjustment stud connect and the corona discharge needle being fixedly connected with the lower end of the adjustment stud.
According to one embodiment of the present utility model, the controller includes:Micro treatment module and with the microprocessor Control function module, terminal user's interactive module and waveform generating module that module is connected respectively, the waveform generating module It at least may include one kind in square wave module, triangular wave module and sine wave module.
According to one embodiment of the present utility model, the micro treatment module includes microprocessor and the microprocessor The control module of connection, the WIFI module being connected with the microprocessor and the pulse boosting mould being connected with the microprocessor Block;Terminal user's interactive module be connected with the microprocessor and including:Key-press module and display module;The control work( Can module be connected with the control module and including:The gentle stream injection control module of corona discharge high voltage power supply control module;Institute Waveform generating module is stated to be connected with the pulse boosting module.
According to a kind of ion injection method of application corona discharge ion source component of embodiment of the present utility model, including Following steps:
S1:Initialize corona discharge ion source component, setting corona voltage, electric current, injection air flow rate work ginseng Number;
S2:Judged whether to set up stable corona discharge according to the corona discharge running parameter of setting, if set up steady The running parameter of fixed corona discharge, in real time detection corona discharge;
S3:The corona discharge running parameter of detection carries out corona discharge stability by fuzzy matrix and BP neural network and commented Estimate;
S4:Judged whether to need to optimize corona discharge running parameter according to assessment result, if need not optimize, output is worked as Preceding working condition;
S5:Judged to detect whether to terminate according to current operating state.
According to the ion injection method of the application corona discharge ion source component of embodiment of the present utility model, the corona is put Source components small volume is ionized, air-tightness is good, by controller optimization running parameter, considerably increases effective ion, makes electric discharge More stablize, improve ion implanting rate.
According to the ion injection method of the application corona discharge ion source component of embodiment of the present utility model, the corona Electric discharge running parameter Xn represents that the membership function mui (Xn) is indicated from trapezoidal with membership function mui (Xn),
U={ μH(Xn), μN(Xn), μL(Xn)}
Wherein, μH(Xn) it is high state fuzzy subset, μN(Xn) it is normal condition fuzzy subset, μL(Xn) it is low state mould Subset is pasted, the working condition of corona discharge ion source under each parameter is represented respectively.
It is described to be subordinate to according to the ion injection method of the application corona discharge ion source component of embodiment of the present utility model Function mu (Xn) is as the input data of each neuron of the input layer of the BP neural network, and each neuron in intermediate layer is Single hidden layer or many hidden layer configurations, last hidden layer in the intermediate layer are delivered to the information of each neuron of output layer to carry out one The forward-propagating processing procedure of secondary study, and the output layer output information result is Ym.
Brief description of the drawings
Fig. 1 is the structural representation of the corona discharge ion source component according to embodiment of the present utility model.
Fig. 2 is the structural representation of the controller of the corona discharge ion source component according to embodiment of the present utility model.
Fig. 3 is showing for the ion injection method of the application corona discharge ion source component according to embodiment of the present utility model It is intended to.
Fig. 4 is the base of the ion injection method of the application corona discharge ion source component according to embodiment of the present utility model In the corona discharge work layout method of Data Fusion Based on Fuzzy Neural Networks.
Reference:1- insulating sleeves, 2- ion generation cavities, 3- openings, 4- air feed paths, 5- ionic reactions storehouse, 6- ionic reaction chambers, 7- corona discharge nets, 8- corona discharge needle assemblies, 9- ion implanting electrodes, 10- corona discharge high-tension electricities Source, 11- controllers, 12- air injection pumps, 13- filters, 81- adjustment studs, 82- corona discharge needles, 14- coupling seats. 111- micro treatment modules, 112- control function modules, 113- terminal user's interactive modules, 114- waveform generating modules, 1141- squares Shape ripple module, 1142- triangular wave modules, 1143- sine wave modules, 1111- microprocessors, 1112- control modules, 1113- WIFI module, 1114- pulse boosting modules, 1131- key-press modules, 1132- display modules, 1121- corona discharge high voltage power supplies Control module, 1122- air-flows injection control module.
Embodiment
Embodiment of the present utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning Same or similar element or element with same or like function are represented to same or similar label eventually.Below by ginseng The embodiment for examining accompanying drawing description is exemplary, it is intended to for explaining the utility model, and it is not intended that to the utility model Limitation.
Fig. 1 is the structural representation of the corona discharge ion source component according to the utility model embodiment, as shown in figure 1, Corona discharge ion source component includes:Insulating sleeve 1, ionic reaction storehouse 5, corona discharge net 7, corona discharge needle assemblies 8, ion Injecting electrode 9, corona discharge high voltage power supply 10 and controller 11.
Specifically, insulating sleeve is used to insulate, and ion generation cavity 2, the bottom of insulating sleeve 1 are configured with insulating sleeve 1 End is formed with the opening 3 connected with ion generation cavity 2, and the shape of opening 3 can be circle, rectangle etc., it is to be understood that open The shape of mouth 3 is not limited to circle, rectangle etc..
Insulating sleeve 1 is provided with the air feed path 4 connected with ion generation cavity 2;Ionic reaction storehouse 5 is by insulating part structure Cause, the shape of insulating part can be cylinder, rectangle etc., it is to be understood that the shape of insulating part is not limited to cylinder, square Shape.And ionic reaction chamber 6 is constructed in ionic reaction storehouse 5, opening 3 is connected with ionic reaction chamber 6;Corona discharge net 7 is located at It is open at 3;Ionic reaction storehouse 5 is connected by corona discharge net 7 with ionic reaction chamber 6.
Corona discharge needle assemblies 8 are adjustably extend into ion generation cavity 2 by the upper end of insulating sleeve 1, and wherein one In individual embodiment, corona discharge needle assemblies 8 include the adjustment stud 81 being threadedly coupled with insulating sleeve 1 and with adjusting stud 81 The corona discharge needle 82 that lower end is fixedly connected, adjustment stud 81 is linked together by screw thread with insulating sleeve 1.Corona discharge needle Component 8 is spaced apart with corona discharge net 7;Corona discharge high voltage power supply 10 connects with corona discharge net 7 and corona discharge needle assemblies 8 Connect;That is, the both positive and negative polarity of corona discharge high voltage power supply 10 is connected with corona discharge needle assemblies 8 and corona discharge net 7 respectively Connect, form pin-net formula corona discharge structure.
Ion implanting electrode 9 is located on ionic reaction storehouse 5 and is spaced apart with corona discharge net 7;In the He of ion implanting electrode 7 Electric-force gradient is formed between corona discharge net 7, in favor of ion implanting.Controller 11 and corona discharge high voltage power supply 10 and ion Injecting electrode 9 is connected, and the output voltage and electric current of corona discharge high voltage power supply 10 is controlled by controller 11, so that control system Corona discharge process.
According to the corona discharge ion source component of embodiment of the present utility model, the corona discharge ion source assembly volume Small, air-tightness is good, by controller optimization running parameter, considerably increases effective ion, electric discharge is more stablized, and improves ion Injection rate.
As shown in figure 1, further comprising that air is noted according to the corona discharge ion source component of embodiment of the present utility model Enter pump 12, air injection pump 12 is connected with air feed path 4, and air injection pump 12 is connected with controller 11.Pass through controller 11 control air injection pumps 12 inject air.
As shown in figure 1, further comprising filter according to the corona discharge ion source component of embodiment of the present utility model 13, filter 13 is located in air feed path 4, filter 13 include arrange successively active carbon layer, silicone rubber particles layer and Molecular sieve layer.Air turns into clean air after being filtered by filter 13, and into ion generation cavity 2, its air-flow contributes to instead Answer ion implanting to ionic reaction chamber 6, improve ion implanting effect.
As shown in figure 1, being further comprised coupling bottom according to the corona discharge ion source component of embodiment of the present utility model Seat 14, coupling seats 14 are socketed on insulating sleeve 1, and coupling seats 14 are connected with ionic reaction storehouse 5.
As shown in Fig. 2 according to embodiment of the present utility model, controller 11 is used to optimize corona discharge ion source work ginseng Several optimization and adjustment.Controller 11 includes:Micro treatment module 111 and the control work(being connected respectively with micro treatment module 111 Energy module 112, terminal user's interactive module 113 and waveform generating module 114, waveform generating module 114 at least may include square One kind in shape ripple module 1141, triangular wave module 1142 and sine wave module 1143.
As shown in Fig. 2 according to embodiment of the present utility model, micro treatment module 111 includes microprocessor 1111 and micro- place Reason device 1111 control module 1112 connected, the WIFI module 1113 that is connected with microprocessor 1111 and connect with microprocessor 1111 The pulse boosting module 1114 connect;That is, WIFI module is wirelessly transferred, pulse boosting module 1114 can pass through System voltage is brought up to more than 400V by DC-DC module, is conducive to producing ion gun.
Terminal user's interactive module 113 be connected with microprocessor 1111 and including:Key-press module 1131 and display module 1132;Output waveform is adjusted according to key-press module 1131 and display module 1132 in microprocessor 1111.
Control function module 112 be connected with control module 1112 and including:Corona discharge high voltage power supply control module 1121 Gentle stream injection control module 1122;Waveform generating module 114 is connected with pulse boosting module 1114.That is, corona is put Electric high voltage power supply control module 1121 is used for the voltage and electric current for controlling electric discharge, and air-flow injection control module is used to control air pump Start and stop are with flow so as to control.
Corona discharge effect can be effectively improved by the following three kinds of methods of adjustment:
1st, the voltage and current of corona discharge high voltage power supply 10
Ion implanting is improved by the voltage and electric current of control corona discharge high voltage power supply 10.Under each arcing distance with The increase discharge current for voltage approximately has exponent relation growth, and its nearlyer rate of change of arcing distance is faster, and it changes Amplitude is more violent, discharge stability reduction, it is therefore desirable to Optimization Work parameter, its work was both stablized, ion yield is again high.
2nd, the air-flow injection flow of control air injection pump 12
Ion motion can be accelerated by being passed through air-flow in region of discharge, set up new concentration balance, and then improve ion implanting Efficiency.After air-flow increase, ion implanting efficiency highest can lift about 10 times, but now systemic resolution declines, it is necessary to optimize note Enter the size balance resolution ratio and ion implanting efficiency of air-flow.
3rd, the electric field of ionic reaction chamber 6
Apply periodic voltage in ion implanting electrode 9, ionization area there are electric field and without electric field two within each cycle The individual period, increase ion implanting when having electric field, plasma diffusing W,Mo will be adhered to during no electric field, the injection effect of ion gun will be improved. But the stationarity of the amplitude of Periodic Electric Field and frequency influence ion implanting, it is therefore desirable to optimize electric pulse field parameter.
Above-mentioned three kinds of methods can effectively improve corona discharge effect so that the increase of effective ion quantity, but there is office It is sex-limited, and corona discharge is a dynamic process, it is necessary to detection in real time and Optimization Work parameter, therefore utilize fuzzy control Method and the common optimal control parameter of neutral net, so that corona discharge ion source is in preferably state.
By the running parameter to corona discharge ion source, such as discharge voltage, discharge current, ionic reaction area air-flow, from Voltage, waveform, frequency of sub- injecting electrode etc., are detected in real time, set up fuzzy matrix, are carried out most by artificial neural network The selection and setting of excellent mode work in combination parameter.
Fig. 3 is the ion injection method of the application corona discharge ion source component according to embodiment of the present utility model, such as Shown in Fig. 3, using the ion injection method of corona discharge ion source component, comprise the following steps:
S1:Initialize corona discharge ion source component, setting corona voltage, electric current, injection air flow rate work ginseng Number;
S2:Judged whether to set up stable corona discharge according to the corona discharge running parameter of setting, if set up steady The running parameter of fixed corona discharge, in real time detection corona discharge;
S3:The corona discharge running parameter of detection carries out corona discharge stability by fuzzy matrix and BP neural network and commented Estimate;
S4:Judged whether to need to optimize corona discharge running parameter according to assessment result, if need not optimize, output is worked as Preceding working condition;
S5:Judged to detect whether to terminate according to current operating state.
Specifically, the initial work of the initialization of hardware is first carried out first after system electrification, after everything is ready Then setting carries out corona discharge status monitoring according to system default parameter setting ion gun running parameter, and whether observation sets up Stable corona discharge is played, if not set up stable corona discharge, system initialization is re-started;
If established after stable corona discharge, start to measure feature work parameter in real time, then set up Running parameter and corona discharge stability data matrix, and then the total data collected and foregoing result of calculation are input to mould Paste neutral net and carry out corona discharge Stability Assessment, judged whether to need to be operated parameter optimization according to assessment result, if It can not optimize, re-start system initialization;If can optimize, current operating state is exported, indicates well, to enter And according to current operating state judge detect when terminate, if do not terminated, reset according to system default parameter setting from Component running parameter;If it has ended, terminating.
As shown in figure 4, according to the ion implanting side of the application corona discharge ion source component of embodiment of the present utility model Method, corona discharge running parameter Xn represents that membership function mui (Xn) is indicated from trapezoidal with membership function mui (Xn),
U={ μH(Xn), μN(Xn), μL(Xn)}
Wherein, μH(Xn) it is high state fuzzy subset, μN(Xn) it is normal condition fuzzy subset, μL(Xn) it is low state mould Subset is pasted, the working condition of corona discharge ion source under each parameter is represented respectively.
As shown in figure 4, according to the ion implanting side of the application corona discharge ion source component of embodiment of the present utility model Method, membership function mui (Xn) is used as the input data of each neuron of the input layer of BP neural network, and each neuron in intermediate layer For single hidden layer or many hidden layer configurations, last hidden layer in intermediate layer is delivered to the information of each neuron of output layer to carry out once The forward-propagating processing procedure of study, and output layer output information result is Ym.
The selection for carrying out optimal injection mode combination by artificial neural network is specifically included:
The relevant operating parameter Xn injected ions into method as the obfuscation of artificial neural network input vector;Its Middle ionization state parameter Xn at least includes:Discharge voltage, discharge current, ionic reaction area air-flow, the voltage of ion implanting electrode, Waveform, frequency;Ionization state parameter Xn is represented using membership function mui (Xn), and membership function mui (Xn) is carried out from trapezoidal Represent, be divided into high, normal, low three fuzzy subsets, represent the working condition of corona discharge ion source under this parameter;State " height " Represent that this thing ion gun ion yield is high, but poor work stability;State " low " represents that this thing ion gun ion yield is low, but work Make stability good;State " normal " represents that this thing ion gun ion yield and job stability are preferable;
Each working status parameter Xn is converted into the degree of membership of 3 fuzzy subsets;
Wherein artificial neural network is BP neural network, and the input data of each neuron of the input layer of BP neural network For the membership function mui (Xn) of obfuscation, and each neuron in intermediate layer for single hidden layer or many hidden layer configurations, its intermediate layer The forward-propagating processing procedure that last hidden layer is delivered to the information of each neuron of output layer once to be learnt, and output Layer output information result Ym.Optimized with output information result Ym with adjusting each running parameter of ion gun.
Specifically, do not made reference and detected with the absolute value or discharge voltage of single discharge current, this is mainly The impacted factor of its discharge process is more, the corrosion condition of such as spray point, testing sample moisture content, it is more difficult to use single work Parameter value is monitored to its state.Therefore carry out carrying out running parameter adjustment after comprehensive assessment using multiple parameters.Corona is put Electricity is that a dynamic is influenceed by many factors, and its state boundaries is unintelligible, therefore introducing fuzzy membership is put to describe corona The working condition of electricity.For corona discharge running parameter Xn (such as discharge voltage, discharge current, ionic reaction area air-flow, ion note Enter voltage, waveform, frequency of electrode etc.) be its obfuscation input vector, its membership function mui (Xn) select trapezoidal carry out table Show, with three class values it is too high, normal, too low ion gun state parameter is described.
The data of obfuscation are input to neutral net and carry out fuzzy reasoning as input layer, so that information fusion is reached, it is defeated Go out optimum results Yn.The parameter Xn of fuzzy neural network actual measurement enters obfuscation layer, each input parameter conversion from left input For the degree of membership of 3 fuzzy subsets, the output basic point number of obfuscation input layer is 3 times of input number.By being subordinate to for obfuscation Result is spent as input layer, neutral net is input to and carries out fuzzy reasoning, so as to reach the corona discharge work ginseng of information fusion Number optimization.Its used neural network algorithm is BP (Back Propagation) neutral net, i.e. error-duration model error is anti- It is made up of to the learning process of propagation algorithm the forward-propagating of information and two processes of backpropagation of error.Each nerve of input layer Member is responsible for receiving the output information from previous stage fuzzy membership function, and passes to each neuron in intermediate layer;Intermediate layer is Internal information process layer, be responsible for information conversion, according to the demand of information change ability, intermediate layer can be designed as single hidden layer or Many hidden layer configurations;Last hidden layer is delivered to the information of each neuron of output layer, after further treatment after, completion once learn Forward-propagating processing procedure, by output layer outwardly output information result Ym.According to result Ym output optimization letters Breath, takes different intervening measure and means.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show The description of example " or " some examples " etc. means to combine specific features, structure, material or the spy that the embodiment or example are described Point is contained at least one embodiment of the present utility model or example.In this manual, to the schematic table of above-mentioned term State and be necessarily directed to identical embodiment or example.Moreover, specific features, structure, material or the feature of description can be with Combined in an appropriate manner in any one or more embodiments or example.In addition, those skilled in the art can be by Not be the same as Example or example described in this specification are engaged and combined.
Although embodiment of the present utility model has been shown and described above, it is to be understood that above-described embodiment is Exemplary, it is impossible to it is interpreted as to limitation of the present utility model, one of ordinary skill in the art is in scope of the present utility model It is interior above-described embodiment to be changed, changed, replaced and modification.

Claims (10)

1. a kind of corona discharge ion source component, it is characterised in that including:
Be configured with ion generation cavity in insulating sleeve, the insulating sleeve, the bottom of the insulating sleeve be formed with it is described from The opening of sub- generation cavity connection, the insulating sleeve is provided with the air feed path connected with the ion generation cavity;
Ionic reaction storehouse, the ionic reaction storehouse is by insulation configuration into and it is anti-in the ionic reaction storehouse to construct ion Chamber is answered, the opening is connected with the ionic reaction chamber;
Corona discharge net, the corona discharge net is located at the opening;
Corona discharge needle assemblies, the corona discharge needle assemblies by the upper end of the insulating sleeve adjustably extend into it is described from In sub- generation cavity, the corona discharge needle assemblies are spaced apart with the corona discharge net;
Ion implanting electrode, the ion implanting electrode be located on the ionic reaction storehouse and with the corona discharge net interval Open;
Corona discharge high voltage power supply, the corona discharge high voltage power supply and the corona discharge net and the corona discharge needle assemblies Connection;With
Controller, the controller is connected with the corona discharge high voltage power supply and the ion implanting electrode.
2. corona discharge ion source component according to claim 1, it is characterised in that further comprise air injection pump, The air injection pump is connected with the air feed path, and the air injection pump is connected with the controller.
3. corona discharge ion source component according to claim 1, it is characterised in that further comprise filter, described Filter is located in the air feed path.
4. corona discharge ion source component according to claim 3, it is characterised in that the filter includes arranging successively Active carbon layer, silicone rubber particles layer and molecular sieve layer.
5. corona discharge ion source component according to claim 1, it is characterised in that further comprise coupling seats, institute State coupling seats to be socketed on the insulating sleeve, the coupling seats are connected with the ionic reaction storehouse.
6. the corona discharge ion source component according to any one of claim 1-5, it is characterised in that the corona discharge Needle assemblies include the adjustment stud being threadedly coupled with the insulating sleeve and the electricity being fixedly connected with the lower end of the adjustment stud Corona pin.
7. corona discharge ion source component according to claim 1, it is characterised in that the controller includes:Microprocessor Mould occurs for module and the control function module being connected respectively with the micro treatment module, terminal user's interactive module and waveform Block, the waveform generating module at least may include one kind in square wave module, triangular wave module and sine wave module.
8. corona discharge ion source component according to claim 7, it is characterised in that the micro treatment module includes micro- place Reason device, the control module being connected with the microprocessor, the WIFI module that is connected with the microprocessor and with the microprocessor The pulse boosting module of device connection.
9. corona discharge ion source component according to claim 8, it is characterised in that terminal user's interactive module with The microprocessor be connected and including:Key-press module and display module.
10. corona discharge ion source component according to claim 8, it is characterised in that the control function module and institute State control module connection and including:The gentle stream injection control module of corona discharge high voltage power supply control module;The waveform occurs Module is connected with the pulse boosting module.
CN201720351276.3U 2017-04-06 2017-04-06 Corona discharge ion source component Withdrawn - After Issue CN206610790U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106910669A (en) * 2017-04-06 2017-06-30 北京物资学院 Corona discharge ion source component and its ion injection method
CN107941897A (en) * 2017-11-30 2018-04-20 北京市北分仪器技术有限责任公司 A kind of bipolarity controllable pulse corona discharge ionization source and its ionic migration spectrometer
CN110289203A (en) * 2019-06-03 2019-09-27 清华大学深圳研究生院 A kind of corona discharge ionization source structure and ionic migration spectrometer

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106910669A (en) * 2017-04-06 2017-06-30 北京物资学院 Corona discharge ion source component and its ion injection method
CN106910669B (en) * 2017-04-06 2018-03-20 北京物资学院 Corona discharge ion source component and its ion injection method
CN107941897A (en) * 2017-11-30 2018-04-20 北京市北分仪器技术有限责任公司 A kind of bipolarity controllable pulse corona discharge ionization source and its ionic migration spectrometer
CN107941897B (en) * 2017-11-30 2024-01-02 北京市北分仪器技术有限责任公司 Bipolar controllable pulse corona discharge ionization source and ion mobility spectrometer thereof
CN110289203A (en) * 2019-06-03 2019-09-27 清华大学深圳研究生院 A kind of corona discharge ionization source structure and ionic migration spectrometer
CN110289203B (en) * 2019-06-03 2021-03-09 清华大学深圳研究生院 Corona discharge ionization source structure and ion mobility spectrometer

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