CN106910669B - Corona discharge ion source component and its ion injection method - Google Patents

Corona discharge ion source component and its ion injection method Download PDF

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Publication number
CN106910669B
CN106910669B CN201710219373.1A CN201710219373A CN106910669B CN 106910669 B CN106910669 B CN 106910669B CN 201710219373 A CN201710219373 A CN 201710219373A CN 106910669 B CN106910669 B CN 106910669B
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corona discharge
ion
module
source component
ion source
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CN106910669A (en
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赵东杰
刘军
丁庆行
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Beijing Wuzi University
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Beijing Wuzi University
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/18—Ion sources; Ion guns using spark ionisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Disinfection, Sterilisation Or Deodorisation Of Air (AREA)

Abstract

The invention discloses a kind of corona discharge ion source component and its ion injection method, corona discharge ion source component includes：Insulating sleeve, ion generation cavity is configured with insulating sleeve, and the bottom of insulating sleeve is provided with the air feed path connected with ion generation cavity formed with the opening connected with ion generation cavity, insulating sleeve；Ionic reaction storehouse, ionic reaction storehouse is by insulation configuration into and constructing ionic reaction chamber in ionic reaction storehouse, opening connects with ionic reaction chamber；Corona discharge needle assemblies, corona discharge needle assemblies be can adjust by the upper end of insulating sleeve and extend into ion generation cavity, and corona discharge needle assemblies are spaced apart with corona discharge net；Ion implanting electrode, ion implanting electrode are located on ionic reaction storehouse and are spaced apart with corona discharge net；And controller, controller are connected with corona discharge high voltage power supply and ion implanting electrode.According to the corona discharge ion source component of the present invention, effective ion is added, improves ion implanting rate, make electric discharge more stable.

Description

Corona discharge ion source component and its ion injection method
Technical field
The present invention relates to chemical analysis instrument field, specifically, more particularly to a kind of corona discharge ion source component and Its ion injection method.
Background technology
High-Field asymmetric waveform ion mobility spectrometry (High Field Asymmetric Ion Mobility Spectrometry, FAIMS) it is that one kind is operated under atmospheric pressure environment, utilize non-linear fortune of the gaseous ion in high electric field Move to carry out the technology of trace (minimum amount) material detection.It is widely used in explosive, drugs, biological detection with And ion pre-separation field.
Corona discharge is a kind of metastable discharge type.When electrode both ends plus it is higher but up to breakdown voltage When, if the electric field (internal field) of electrode surface is very strong, the gas medium near electrode can produce electricity by partial breakdown Corona phenomenon.When the radius of curvature of electrode is smaller, the field strength near it is especially high, has exceeded the ionization field strength of gas and has touched Free threshold value is hit, will make gas that ionization occur and encourage, partial ionization simply occurs for the gas medium near electrode, so as to shape Into negative ions and electronics.Because FAIMS sizes are small, ion gun and FAIMS combination need to reduce volume, and reduce volume meeting Guiding discharge space reduces, accumulation, discharge instability, discharge current increase easily occurs and ion implanting efficiency is low etc. asks Topic, causes testing result poor repeatability；In addition existing corona discharge ion source volume is larger, can not with minimize and be miniaturized FAIMS carries out the problems such as integrated.
The content of the invention
It is contemplated that at least solve one of the problems of the prior art to a certain extent.
In view of this, one aspect of the present invention provides a kind of corona discharge ion source component, adds effective ion, improves Ion implanting rate, make electric discharge more stable.Further, the invention provides a kind of using corona discharge ion source component Ion injection method, effective ion is added, improve ion implanting rate, make electric discharge more stable.
According to corona discharge ion source component provided by the invention, including：Insulating sleeve, it is configured with the insulating sleeve Ion generation cavity, the bottom of the insulating sleeve is formed with the opening connected with the ion generation cavity, on the insulating sleeve Provided with the air feed path connected with the ion generation cavity；Ionic reaction storehouse, the ionic reaction storehouse is by insulation configuration Into, and ionic reaction chamber is constructed in the ionic reaction storehouse, the opening connects with the ionic reaction chamber；Corona discharge Net, the corona discharge net are located at the opening；Corona discharge needle assemblies, the corona discharge needle assemblies are by the insulation sleeve The upper end of cylinder is adjustably extend into the ion generation cavity, the corona discharge needle assemblies and the corona discharge net interval Open；Ion implanting electrode, the ion implanting electrode are located on the ionic reaction storehouse and are spaced apart with the corona discharge net； Corona discharge high voltage power supply, the corona discharge high voltage power supply connect with the corona discharge net and the corona discharge needle assemblies Connect；And controller, the controller are connected with the corona discharge high voltage power supply and the ion implanting electrode.
Corona discharge ion source component according to an embodiment of the invention, the corona discharge ion source assembly volume is small, gas Close property is good, by controller optimization running parameter, considerably increases effective ion, makes electric discharge more stable, improves ion note Enter rate.
According to one embodiment of present invention, air injection pump, the air injection pump and the air are further comprised Feed path is connected, and the air injection pump is connected with the controller.
According to one embodiment of present invention, filter is further comprised, it is logical that the filter is located at the air supply In road, the filter includes active carbon layer, silicone rubber particles layer and the molecular sieve layer arranged successively.
According to one embodiment of present invention, coupling seats are further comprised, the coupling seats are socketed in the insulation On sleeve, the coupling seats are connected with the ionic reaction storehouse.
According to one embodiment of present invention, the corona discharge needle assemblies include what is be threadedly coupled with the insulating sleeve Adjustment stud and the corona discharge needle being fixedly connected with the lower end of the adjustment stud.
According to one embodiment of present invention, the controller includes：Micro treatment module and with the micro treatment module Control function module, terminal user's interactive module and the waveform generating module connected respectively, the waveform generating module is at least It may include one kind in square wave module, triangular wave module and sine wave module.
According to one embodiment of present invention, the micro treatment module includes microprocessor, is connected with the microprocessor Control module, the WIFI module being connected with the microprocessor and the pulse boosting module being connected with the microprocessor；Institute State terminal user's interactive module be connected with the microprocessor and including：Key-press module and display module；The control function mould Block be connected with the control module and including：The gentle stream injection control module of corona discharge high voltage power supply control module；The ripple Shape occurs module and is connected with the pulse boosting module.
A kind of ion injection method using corona discharge ion source component according to an embodiment of the invention, including it is following Step：
S1：Initialize corona discharge ion source component, setting corona voltage, electric current, injection air flow rate work ginseng Number；
S2：Judged whether to establish stable corona discharge according to the corona discharge running parameter of setting, if set up steady Fixed corona discharge, the running parameter of corona discharge is detected in real time；
S3：The corona discharge running parameter of detection carries out corona discharge stability by fuzzy matrix and BP neural network and commented Estimate；
S4：Judge whether to need to optimize corona discharge running parameter according to assessment result, if need not optimize, output is worked as Preceding working condition；
S5：Judge to detect whether to terminate according to current operating state.
Ion injection method according to an embodiment of the invention using corona discharge ion source component, the corona discharge from Source components small volume, air-tightness is good, by controller optimization running parameter, considerably increases effective ion, makes electric discharge more It is stable, improve ion implanting rate.
Ion injection method according to an embodiment of the invention using corona discharge ion source component, the corona discharge Running parameter Xn represents that the membership function mui (Xn) is indicated from trapezoidal with membership function mui (Xn),
U={ μH(Xn), μN(Xn), μL(Xn)}
Wherein, μH(Xn) it is high state fuzzy subset, μN(Xn) it is normal condition fuzzy subset, μL(Xn) it is low state mould Subset is pasted, represents the working condition of corona discharge ion source under each parameter respectively.
Ion injection method according to an embodiment of the invention using corona discharge ion source component, the membership function Input datas of the μ (Xn) as each neuron of the input layer of the BP neural network, and each neuron in intermediate layer is single hidden Layer or more hidden layer configurations, last hidden layer in the intermediate layer are delivered to the information of each neuron of output layer once to be learned The forward-propagating processing procedure of habit, and the output layer output information result is Ym.
Brief description of the drawings
Fig. 1 is the structural representation of corona discharge ion source component according to an embodiment of the invention.
Fig. 2 is the structural representation of the controller of corona discharge ion source component according to an embodiment of the invention.
Fig. 3 is the signal of the ion injection method according to an embodiment of the invention using corona discharge ion source component Figure.
Fig. 4 is the ion injection method according to an embodiment of the invention using corona discharge ion source component based on mould Paste the corona discharge work layout method of neural Network Data Fusion.
Reference：1- insulating sleeves, 2- ion generation cavities, 3- openings, 4- air feed paths, 5- ionic reactions storehouse, 6- ionic reaction chambers, 7- corona discharge nets, 8- corona discharge needle assemblies, 9- ion implanting electrodes, 10- corona discharge high-tension electricities Source, 11- controllers, 12- air injection pumps, 13- filters, 81- adjustment studs, 82- corona discharge needles, 14- coupling seats. 111- micro treatment modules, 112- control function modules, 113- terminal user's interactive modules, 114- waveform generating modules, 1141- squares Shape ripple module, 1142- triangular wave modules, 1143- sine wave modules, 1111- microprocessors, 1112- control modules, 1113- WIFI module, 1114- pulse boosting modules, 1131- key-press modules, 1132- display modules, 1121- corona discharge high voltage power supplies Control module, 1122- air-flows injection control module.
Embodiment
Embodiments of the invention are described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning to end Same or similar label represents same or similar element or the element with same or like function.Below with reference to attached The embodiment of figure description is exemplary, it is intended to for explaining the present invention, and is not considered as limiting the invention.
Fig. 1 is the structural representation of corona discharge ion source component according to embodiments of the present invention, as shown in figure 1, corona Discharge ion source component includes：Insulating sleeve 1, ionic reaction storehouse 5, corona discharge net 7, corona discharge needle assemblies 8, ion implanting Electrode 9, corona discharge high voltage power supply 10 and controller 11.
Specifically, insulating sleeve is used to insulate, and ion generation cavity 2, the bottom of insulating sleeve 1 are configured with insulating sleeve 1 Formed with the opening 3 connect with ion generation cavity 2,3 shape of being open can be circle, rectangle etc., it is to be understood that open at end The shape of mouth 3 is not limited to circle, rectangle etc..
Insulating sleeve 1 is provided with the air feed path 4 connected with ion generation cavity 2；Ionic reaction storehouse 5 is by insulating part structure Cause, the shape of insulating part can be cylinder, rectangle etc., it is to be understood that the shape of insulating part is not limited to cylinder, square Shape.And ionic reaction chamber 6 is constructed in ionic reaction storehouse 5, opening 3 connects with ionic reaction chamber 6；Corona discharge net 7 is located at It is open at 3；Ionic reaction storehouse 5 is connected by corona discharge net 7 with ionic reaction chamber 6.
Corona discharge needle assemblies 8 are adjustably extend into ion generation cavity 2 by the upper end of insulating sleeve 1, and wherein one In individual embodiment, corona discharge needle assemblies 8 include the adjustment stud 81 being threadedly coupled with insulating sleeve 1 and with adjusting stud 81 The corona discharge needle 82 that lower end is fixedly connected, adjustment stud 81 are linked together by screw thread and insulating sleeve 1.Corona discharge needle Component 8 is spaced apart with corona discharge net 7；Corona discharge high voltage power supply 10 connects with corona discharge net 7 and corona discharge needle assemblies 8 Connect；That is, the both positive and negative polarity of corona discharge high voltage power supply 10 is connected with corona discharge needle assemblies 8 and corona discharge net 7 respectively Connect, form pin-net formula corona discharge structure.
Ion implanting electrode 9 is located on ionic reaction storehouse 5 and is spaced apart with corona discharge net 7；In the He of ion implanting electrode 7 Electric-force gradient is formed between corona discharge net 7, in favor of ion implanting.Controller 11 and corona discharge high voltage power supply 10 and ion Injecting electrode 9 is connected, and the output voltage and electric current of corona discharge high voltage power supply 10 are controlled by controller 11, so as to control system Corona discharge process.
Corona discharge ion source component according to an embodiment of the invention, the corona discharge ion source assembly volume is small, gas Close property is good, by controller optimization running parameter, considerably increases effective ion, makes electric discharge more stable, improves ion implanting Rate.
As shown in figure 1, corona discharge ion source component according to an embodiment of the invention further comprises air injection pump 12, air injection pump 12 is connected with air feed path 4, and air injection pump 12 is connected with controller 11.Controlled by controller 11 Air injection pump 12 processed injects air.
As shown in figure 1, corona discharge ion source component according to an embodiment of the invention further comprises filter 13, mistake Filter 13 is located in air feed path 4, and filter 13 includes active carbon layer, silicone rubber particles layer and the molecular sieve arranged successively Layer.Air turns into clean air after being filtered by filter 13, and into ion generation cavity 2, its air-flow contributes to reactive ion Ionic reaction chamber 6 is injected into, improves ion implanting effect.
As shown in figure 1, corona discharge ion source component according to an embodiment of the invention further comprises coupling seats 14, Coupling seats 14 are socketed on insulating sleeve 1, and coupling seats 14 are connected with ionic reaction storehouse 5.
As shown in Fig. 2 according to an embodiment of the invention, controller 11 is used to optimize corona discharge ion source running parameter Optimization and adjustment.Controller 11 includes：Micro treatment module 111 and the control function mould being connected respectively with micro treatment module 111 Block 112, terminal user's interactive module 113 and waveform generating module 114, waveform generating module 114 at least may include square wave One kind in module 1141, triangular wave module 1142 and sine wave module 1143.
As shown in Fig. 2 according to an embodiment of the invention, micro treatment module 111 includes microprocessor 1111 and microprocessor The control modules 1112 of 1111 connections, the WIFI module 1113 that is connected with microprocessor 1111 and it is connected with microprocessor 1111 Pulse boosting module 1114；That is, WIFI module is wirelessly transferred, pulse boosting module 1114 can pass through DC-DC System voltage is brought up to more than 400V by module, is advantageous to produce ion gun.
Terminal user's interactive module 113 be connected with microprocessor 1111 and including：Key-press module 1131 and display module 1132；Output waveform is adjusted according to key-press module 1131 and display module 1132 in microprocessor 1111.
Control function module 112 be connected with control module 1112 and including：Corona discharge high voltage power supply control module 1121 Gentle stream injection control module 1122；Waveform generating module 114 is connected with pulse boosting module 1114.That is, corona is put Electric high voltage power supply control module 1121 is used for the voltage and electric current for controlling electric discharge, and air-flow injection control module is used to control air pump Start and stop are with flow so as to controlling.
Corona discharge effect can be effectively improved by adjusting following three kinds of methods：
1st, the voltage and current of corona discharge high voltage power supply 10
By controlling the voltage of control corona discharge high voltage power supply 10 to improve ion implanting with electric current.Under each arcing distance with The increase discharge current approximation for voltage has exponent relation growth, and its nearlyer rate of change of arcing distance is faster, and it changes Amplitude is more violent, and discharge stability reduces, it is therefore desirable to Optimization Work parameter, its work was both stablized, ion yield is again high.
2nd, the air-flow injection flow of air injection pump 12 is controlled
Ion motion can be accelerated by being passed through air-flow in region of discharge, establish new concentration balance, and then improve ion implanting Efficiency.After air-flow increase, ion implanting efficiency highest can lift about 10 times, but now systemic resolution declines, it is necessary to optimize note Enter the size balance resolution ratio and ion implanting efficiency of air-flow.
3rd, the electric field of ionic reaction chamber 6
Apply periodic voltage in ion implanting electrode 9, ionization area there are electric field and without electric field two within each cycle The individual period, increase ion implanting when having electric field, plasma diffusing W,Mo will be adhered to during no electric field, the injection effect of ion gun will be improved. But the stationarity of the amplitude of Periodic Electric Field and frequency influence ion implanting, it is therefore desirable to optimize electric pulse field parameter.
Above-mentioned three kinds of methods can effectively improve corona discharge effect so that the increase of effective ion quantity, but office be present It is sex-limited, and corona discharge is a dynamic process, it is necessary to detection in real time and Optimization Work parameter, therefore utilize fuzzy control Method and the common optimal control parameter of neutral net, so that corona discharge ion source is in preferably state.
By the running parameter to corona discharge ion source, as discharge voltage, discharge current, ionic reaction area air-flow, from The voltage of sub- injecting electrode, waveform, frequency etc., are detected, establish fuzzy matrix in real time, are carried out most by artificial neural network The selection and setting of excellent mode work in combination parameter.
Fig. 3 is the ion injection method according to an embodiment of the invention using corona discharge ion source component, such as Fig. 3 institutes Show, using the ion injection method of corona discharge ion source component, comprise the following steps：
S1：Initialize corona discharge ion source component, setting corona voltage, electric current, injection air flow rate work ginseng Number；
S2：Judged whether to establish stable corona discharge according to the corona discharge running parameter of setting, if set up steady Fixed corona discharge, the running parameter of corona discharge is detected in real time；
S3：The corona discharge running parameter of detection carries out corona discharge stability by fuzzy matrix and BP neural network and commented Estimate；
S4：Judge whether to need to optimize corona discharge running parameter according to assessment result, if need not optimize, output is worked as Preceding working condition；
S5：Judge to detect whether to terminate according to current operating state.
Specifically, the initial work of the initialization of hardware is first carried out first after system electrification, after everything is ready Then setting carries out corona discharge status monitoring, whether observation establishes according to system default parameter setting ion gun running parameter Stable corona discharge is played, if not set up stable corona discharge, re-starts system initialization；
If after establishing stable corona discharge, start to measure feature work parameter in real time, then establish Running parameter and corona discharge stability data matrix, and then the total data collected and foregoing result of calculation are input to mould Paste neutral net and carry out corona discharge Stability Assessment, judge whether to need to be operated parameter optimization according to assessment result, if It can not optimize, re-start system initialization；If can optimize, current operating state is exported, instruction is good, enters And according to current operating state judge detect when terminate, if do not terminated, reset according to system default parameter setting from Component running parameter；If it has ended, terminate.
As shown in figure 4, the ion injection method according to an embodiment of the invention using corona discharge ion source component, electricity Corona running parameter Xn represents that membership function mui (Xn) is indicated from trapezoidal with membership function mui (Xn),
U={ μH(Xn), μN(Xn), μL(Xn)}
Wherein, μH(Xn) it is high state fuzzy subset, μN(Xn) it is normal condition fuzzy subset, μL(Xn) it is low state mould Subset is pasted, represents the working condition of corona discharge ion source under each parameter respectively.
As shown in figure 4, the ion injection method according to an embodiment of the invention using corona discharge ion source component, is subordinate to Input datas of the membership fuction μ (Xn) as each neuron of the input layer of BP neural network, and each neuron in intermediate layer is single Hidden layer or more hidden layer configurations, last hidden layer in intermediate layer are delivered to the information of each neuron of output layer once to be learnt Forward-propagating processing procedure, and output layer output information result is Ym.
The selection that optimal injection mode combination is carried out by artificial neural network specifically includes：
Input vectors of the relevant operating parameter Xn as the blurring of artificial neural network injected ions into method；Its Middle ionization state parameter Xn is comprised at least：Discharge voltage, discharge current, ionic reaction area air-flow, ion implanting electrode voltage, Waveform, frequency；Ionization state parameter Xn is represented using membership function mui (Xn), and membership function mui (Xn) selects trapezoidal progress Represent, be divided into high, normal, low three fuzzy subsets, represent the working condition of corona discharge ion source under this parameter；State " height " Represent this thing ion gun ion yield height, but poor work stability；State " low " represents that this thing ion gun ion yield is low, but work It is good to make stability；State " normal " represents that this thing ion gun ion yield and job stability are preferable；
Each working status parameter Xn is converted into the degree of membership of 3 fuzzy subsets；
Wherein artificial neural network is BP neural network, and the input data of each neuron of the input layer of BP neural network For the membership function mui (Xn) of blurring, and each neuron in intermediate layer for single hidden layer or more hidden layer configurations, wherein interbed Last hidden layer is delivered to forward-propagating processing procedure of the information of each neuron of output layer once to be learnt, and exports Layer output information result Ym.Optimized with output information result Ym with adjusting each running parameter of ion gun.
Specifically, do not made reference and detected with the absolute value or discharge voltage of single discharge current, this is mainly The impacted factor of its discharge process is more, the corrosion condition of such as spray point, testing sample moisture content, it is more difficult to single work Parameter value is monitored to its state.Therefore running parameter adjustment is carried out after carrying out comprehensive assessment using multiple parameters.Corona is put Electricity is that a dynamic is influenceed by more factors, and its state boundaries is unintelligible, therefore introduces fuzzy membership and put to describe corona The working condition of electricity.For corona discharge running parameter Xn (such as discharge voltage, discharge current, ionic reaction area air-flow, ion note Enter voltage, waveform, frequency of electrode etc.) select trapezoidal carry out table for the input vector of its blurring, its membership function mui (Xn) Show, ion gun state parameter is described with three class values are too high, normal, too low.
The data of blurring are input to neutral net and carry out fuzzy reasoning as input layer, defeated so as to reach information fusion Go out optimum results Yn.The parameter Xn of fuzzy neural network actual measurement enters blurring layer, each input parameter conversion from left input For the degree of membership of 3 fuzzy subsets, the output basic point number for being blurred input layer is 3 times of input number.By being subordinate to for blurring Result is spent as input layer, is input to neutral net and is carried out fuzzy reasoning, so as to reach the corona discharge of information fusion work ginseng Number optimization.Its used neural network algorithm is BP (Back Propagation) neutral net, i.e. error-duration model error is anti- It is made up of to the learning process of propagation algorithm the forward-propagating of information and two processes of backpropagation of error.Each nerve of input layer Member is responsible for receiving the output information from previous stage fuzzy membership function, and passes to each neuron in intermediate layer；Intermediate layer is Internal information process layer, be responsible for information conversion, according to the demand of information change ability, intermediate layer can be designed as single hidden layer or More hidden layer configurations；Last hidden layer is delivered to the information of each neuron of output layer, after further treatment after, completion once learn Forward-propagating processing procedure, by output layer outwardly output information result Ym.Optimization letter is exported according to result Ym Breath, takes different intervening measures and means.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show The description of example " or " some examples " etc. means specific features, structure, material or the spy for combining the embodiment or example description Point is contained at least one embodiment or example of the present invention.In this manual, to the schematic representation of above-mentioned term not Identical embodiment or example must be directed to.Moreover, specific features, structure, material or the feature of description can be with office What combined in an appropriate manner in one or more embodiments or example.In addition, those skilled in the art can say this Different embodiments or example described in bright book are engaged and combined.
Although embodiments of the invention have been shown and described above, it is to be understood that above-described embodiment is example Property, it is impossible to limitation of the present invention is interpreted as, one of ordinary skill in the art within the scope of the invention can be to above-mentioned Embodiment is changed, changed, replacing and modification.

Claims (9)

  1. A kind of 1. corona discharge ion source component, it is characterised in that including：
    Insulating sleeve, is configured with ion generation cavity in the insulating sleeve, the bottom of the insulating sleeve formed with it is described from The opening of sub- generation cavity connection, the insulating sleeve are provided with the air feed path connected with the ion generation cavity；
    Ionic reaction storehouse, the ionic reaction storehouse is by insulation configuration into and it is anti-in the ionic reaction storehouse to construct ion Chamber is answered, the opening connects with the ionic reaction chamber；
    Corona discharge net, the corona discharge net are located at the opening；
    Corona discharge needle assemblies, the corona discharge needle assemblies by the upper end of the insulating sleeve adjustably extend into it is described from In sub- generation cavity, the corona discharge needle assemblies are spaced apart with the corona discharge net；
    Ion implanting electrode, the ion implanting electrode be located on the ionic reaction storehouse and with the corona discharge net interval Open；
    Corona discharge high voltage power supply, the corona discharge high voltage power supply and the corona discharge net and the corona discharge needle assemblies Connection；With
    Controller, the controller are connected with the corona discharge high voltage power supply and the ion implanting electrode；
    Further comprise coupling seats, the coupling seats are socketed on the insulating sleeve, the coupling seats with it is described from Sub- reaction warehouse is connected.
  2. 2. corona discharge ion source component according to claim 1, it is characterised in that further comprise air injection pump, The air injection pump is connected with the air feed path, and the air injection pump is connected with the controller.
  3. 3. corona discharge ion source component according to claim 1, it is characterised in that further comprise filter, it is described Filter is located in the air feed path, the filter include arrange successively active carbon layer, silicone rubber particles layer and Molecular sieve layer.
  4. 4. the corona discharge ion source component according to any one of claim 1, it is characterised in that the corona discharge needle Component includes the corona being fixedly connected with the adjustment stud of insulating sleeve threaded connection and with the lower end of the adjustment stud Spray point.
  5. 5. corona discharge ion source component according to claim 1, it is characterised in that the controller includes：Microprocessor Mould occurs for the module and control function module being connected respectively with the micro treatment module, terminal user's interactive module and waveform Block, the waveform generating module comprise at least one kind in square wave module, triangular wave module and sine wave module.
  6. 6. corona discharge ion source component according to claim 5, it is characterised in that the micro treatment module includes micro- place Reason device, the control module being connected with the microprocessor, the WIFI module that is connected with the microprocessor and with the microprocessor The pulse boosting module of device connection；Terminal user's interactive module be connected with the microprocessor and including：Key-press module and Display module；The control function module be connected with the control module and including：Corona discharge high voltage power supply control module and Air-flow injects control module；The waveform generating module is connected with the pulse boosting module.
  7. 7. a kind of ion injection method of corona discharge ion source component according to any one of claim 1-6, including Following steps：
    S1：Initialize corona discharge ion source component, setting corona voltage, electric current, injection air flow rate running parameter；
    S2：Judged whether to establish stable corona discharge according to the corona discharge running parameter of setting, if setting up stabilization Corona discharge, the running parameter of corona discharge is detected in real time；
    S3：The corona discharge running parameter of detection carries out corona discharge stability assessment by fuzzy matrix and BP neural network；
    S4：Judge whether to need to optimize corona discharge running parameter according to assessment result, if need not optimize, export current work Make state；
    S5：Judge to detect whether to terminate according to current operating state.
  8. 8. the ion injection method of corona discharge ion source component according to claim 7, it is characterised in that the detection Corona discharge running parameter Xn represent that the membership function mui (Xn) is indicated from trapezoidal with membership function mui (Xn),
    U={ μH(Xn), μN(Xn), μL(Xn)}
    Wherein, μH(Xn) it is high state fuzzy subset, μN(Xn) it is normal condition fuzzy subset, μL(Xn) it is the fuzzy son of low state Collection, the working condition of corona discharge ion source under each parameter is represented respectively.
  9. 9. the ion injection method of corona discharge ion source component according to claim 8, it is characterised in that described to be subordinate to Input data of the function mu (Xn) as each neuron of the input layer of the BP neural network, and each neuron in intermediate layer is Single hidden layer or more hidden layer configurations, last hidden layer in the intermediate layer are delivered to the information of each neuron of output layer to carry out one The forward-propagating processing procedure of secondary study, and the output layer output information result is Ym.
CN201710219373.1A 2017-04-06 2017-04-06 Corona discharge ion source component and its ion injection method Active CN106910669B (en)

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