CN206557530U - It is a kind of expose inner plating contraposition caliberating device and apply its exposure machine - Google Patents

It is a kind of expose inner plating contraposition caliberating device and apply its exposure machine Download PDF

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Publication number
CN206557530U
CN206557530U CN201720092909.3U CN201720092909U CN206557530U CN 206557530 U CN206557530 U CN 206557530U CN 201720092909 U CN201720092909 U CN 201720092909U CN 206557530 U CN206557530 U CN 206557530U
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China
Prior art keywords
exposure
caliberating device
contraposition
platform
inner plating
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CN201720092909.3U
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Chinese (zh)
Inventor
蔡志国
朱俊伟
吴斌
罗宜清
张显峰
张兴旺
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Suzhou Lithography Laser Technology Co Ltd
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Suzhou Lithography Laser Technology Co Ltd
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Abstract

The utility model is a kind of contraposition caliberating device for exposing inner plating, including platform and exposure caliberating device, the platform surface is provided with mounting hole, the exposure caliberating device is installed in mounting hole, the exposure caliberating device includes two groups, and the edge that caliberating device is exposed described in two groups respectively close to platform arbitrary neighborhood is set.The contraposition caliberating device, exposure caliberating device is divided into two groups to be installed in platform, two groups of exposure caliberating devices are set respectively close to two edges of platform arbitrary neighborhood, meet the requirement of energy exposure aligning respectively on XY directions, the uniformity of the exposure figure harmomegathus value on XY directions is ensure that, the precision of exposure demarcation is improved.The utility model have also been devised the exposure machine using the contraposition caliberating device.

Description

It is a kind of expose inner plating contraposition caliberating device and apply its exposure machine
Technical field
The utility model is related to printed-board technology field, particularly a kind of contraposition caliberating device for exposing inner plating And apply its exposure machine.
Background technology
Exposure machine is generally used during current industrial circle manufacture circuit board, can be used without any before being produced for inner plating In the hole of mark or pattern, the method that traditional PCB internal layer manufacture crafts are taken is to expose glue first by the two sides of circuit board Piece is aligned, and then inner layer circuit board is clipped in the middle of two films, and two sides is exposed processing simultaneously;But laser straight is delivered a child Equipment is produced without using the digital print pattern shape of film, its alignment is by extracting in hole or pattern image on circuit board Heart coordinate is matched with graph theory coordinate, and the operation such as translation is then zoomed in and out to figure by the data processing of figure, Most theoretical diagram shape is accurately printed onto on circuit board at last.
Chinese patent literature CN104407502A discloses a kind of laser direct imaging equipment production non-porous circuit board of internal layer Method, in the document, position alignment of inner layer plates is marked and imaging sensor is arranged at the same side of sheet frame, when inner plating is aligned, energy Enough ensure the contraposition crawl of X-direction, but it cannot be guaranteed that precision is consistent with X-direction precision in the Y direction, it is impossible to ensure circuit board XY directions harmomegathus value is consistent.
Utility model content
To solve above technical problem, the utility model devises a kind of contraposition caliberating device for exposing inner plating, can Ensure that XY directions harmomegathus value is consistent when inner plating exposes.
The utility model adopts the following technical scheme that realization:
A kind of contraposition caliberating device for exposing inner plating, it is characterised in that including platform and exposure caliberating device is described flat Platform surface is provided with mounting hole, and the exposure caliberating device is installed in mounting hole, and the exposure caliberating device includes two groups, The edge that caliberating device is exposed described in two groups respectively close to platform arbitrary neighborhood is set.
Preferably, caliberating device is exposed described in every group and includes at least one.
Preferably, caliberating device is exposed described in one of which and includes at least two.
Preferably, covered with exposure figure film on the camera lens of the exposure caliberating device.
The contraposition caliberating device of the exposure inner plating of the utility model design, is divided into two groups by exposure caliberating device and is installed on In platform, two groups of exposure caliberating devices are set respectively close to two edges of platform arbitrary neighborhood, are met and are divided on XY directions Not can exposure aligning requirement, it is ensured that the uniformity of exposure figure harmomegathus value on XY directions, improve exposure demarcation essence Degree.
The utility model have also been devised the exposure machine using above-mentioned demarcation alignment device, be specially:
A kind of exposure machine, including any of the above-described described contraposition caliberating device, contraposition harvester, direct write exposure device, The stage+module is on moving track, and the direct write exposure device is installed on the top of platform with the contraposition harvester.
Brief description of the drawings
Fig. 1 exposure image system schematics of the present utility model
The site of exposure demarcation when Fig. 2 exposes A faces
Fig. 3 exposes the site demarcated during inner plating B faces
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only to explain The utility model, is not used to limit the utility model.
It is exposure image system of the present utility model such as Fig. 1, wherein the contraposition caliberating device of exposure inner plating includes platform 1, two groups of exposure caliberating devices 21 and 22 are respectively arranged in the adjacent two sheet frame regions 11 and 12 of platform 1.It is additionally provided with direct write Exposure device 3 and contraposition harvester 41,42, wherein direct write exposure device 3 fill 41,42 with contraposition collection and are arranged at the upper of platform Side.
In the present embodiment, the exposure caliberating device 21 in sheet frame region 11 is set to 6, the exposure demarcation in sheet frame region 12 Device 22 is set to 4, and sheet frame region can set multiple exposure caliberating devices, can adapt to different size of inner plating and carries out Exposure demarcation.
Such as Fig. 2, in actual exposure demarcation, inner plating 5 is positioned over the surface of platform 1, using exposing caliberating device to it Carry out the demarcation of loci.While A face figures are exposed, on B faces in the region 11 to a point is demarcated as, in area It is two points in domain 12, three exposure calibration points establish inner plating loci in the x-direction and the z-direction.Such as Fig. 3, work as A After the completion of the graph exposure of face, inner plating upset carries out needing to carry out contraposition collection before graph exposure to the B faces of inner plating.It is right Position harvester 42 and 41 captures loci in the x-direction and the z-direction respectively, it is ensured that harmomegathus value one is exposed on XY directions Cause.
Covered with exposure figure film on the above-mentioned camera lens for using exposure caliberating device, wherein the figure for exposing demarcation can be with For various figures, such as filled circles, hollow ring, cross or other forms, or many dot patterns, the present embodiment is 5 marker graphics.
It is described above, only the utility model preferably embodiment, but protection domain of the present utility model is not This is confined to, any one skilled in the art can readily occur in the technical scope that the utility model is disclosed Change or replacement, should all cover within protection domain of the present utility model.Therefore, protection domain of the present utility model should It is defined by scope of the claims.

Claims (5)

1. a kind of contraposition caliberating device for exposing inner plating, it is characterised in that including platform and exposure caliberating device, the platform Surface is provided with mounting hole, and the exposure caliberating device is installed in mounting hole, and the exposure caliberating device includes two groups, two The group exposure caliberating device is set respectively close to the edge of platform arbitrary neighborhood.
2. the contraposition caliberating device of exposure inner plating according to claim 1, it is characterised in that demarcation is exposed described in every group Device includes at least one.
3. the contraposition caliberating device of exposure inner plating according to claim 2, it is characterised in that exposed described in one of which Caliberating device includes at least two.
4. the contraposition caliberating device of the exposure inner plating according to claim 1 or 2 or 3, it is characterised in that the exposure scale Determine on the camera lens of device covered with exposure figure film.
5. a kind of exposure machine, it is characterised in that including any described contraposition caliberating device of Claims 1 to 4, contraposition collection dress Put, direct write exposure device, the stage+module is on moving track, and the direct write exposure is installed on the contraposition harvester The top of platform.
CN201720092909.3U 2017-01-24 2017-01-24 It is a kind of expose inner plating contraposition caliberating device and apply its exposure machine Active CN206557530U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720092909.3U CN206557530U (en) 2017-01-24 2017-01-24 It is a kind of expose inner plating contraposition caliberating device and apply its exposure machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720092909.3U CN206557530U (en) 2017-01-24 2017-01-24 It is a kind of expose inner plating contraposition caliberating device and apply its exposure machine

Publications (1)

Publication Number Publication Date
CN206557530U true CN206557530U (en) 2017-10-13

Family

ID=60009809

Family Applications (1)

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CN201720092909.3U Active CN206557530U (en) 2017-01-24 2017-01-24 It is a kind of expose inner plating contraposition caliberating device and apply its exposure machine

Country Status (1)

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CN (1) CN206557530U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020124406A1 (en) * 2018-12-19 2020-06-25 江苏影速集成电路装备股份有限公司 Alignment device, method and equipment for double-sided exposure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020124406A1 (en) * 2018-12-19 2020-06-25 江苏影速集成电路装备股份有限公司 Alignment device, method and equipment for double-sided exposure

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