CN206363993U - 新型晶圆转移装置 - Google Patents
新型晶圆转移装置 Download PDFInfo
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- CN206363993U CN206363993U CN201621492256.XU CN201621492256U CN206363993U CN 206363993 U CN206363993 U CN 206363993U CN 201621492256 U CN201621492256 U CN 201621492256U CN 206363993 U CN206363993 U CN 206363993U
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- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000011031 large-scale manufacturing process Methods 0.000 abstract description 5
- 235000012431 wafers Nutrition 0.000 description 58
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201621492256.XU CN206363993U (zh) | 2016-12-30 | 2016-12-30 | 新型晶圆转移装置 |
Applications Claiming Priority (1)
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CN201621492256.XU CN206363993U (zh) | 2016-12-30 | 2016-12-30 | 新型晶圆转移装置 |
Publications (1)
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CN206363993U true CN206363993U (zh) | 2017-07-28 |
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CN201621492256.XU Withdrawn - After Issue CN206363993U (zh) | 2016-12-30 | 2016-12-30 | 新型晶圆转移装置 |
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CN (1) | CN206363993U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106601659A (zh) * | 2016-12-30 | 2017-04-26 | 上海新阳半导体材料股份有限公司 | 新型晶圆转移装置 |
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2016
- 2016-12-30 CN CN201621492256.XU patent/CN206363993U/zh not_active Withdrawn - After Issue
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106601659A (zh) * | 2016-12-30 | 2017-04-26 | 上海新阳半导体材料股份有限公司 | 新型晶圆转移装置 |
CN106601659B (zh) * | 2016-12-30 | 2024-02-02 | 上海新阳半导体材料股份有限公司 | 新型晶圆转移装置 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170915 Address after: 201616 Shanghai city Songjiang District Sixian Road No. 3600 Building No. 10 West 1 floor Patentee after: XINYANG GUIMI (SHANGHAI) SEMICONDUCTOR TECHNOLOGY CO.,LTD. Address before: 201616 Shanghai city Songjiang District Sixian Road No. 3600 Patentee before: SHANGHAI SINYANG SEMICONDUCTOR MATERIALS Co.,Ltd. |
|
AV01 | Patent right actively abandoned | ||
AV01 | Patent right actively abandoned | ||
AV01 | Patent right actively abandoned |
Granted publication date: 20170728 Effective date of abandoning: 20240202 |
|
AV01 | Patent right actively abandoned |
Granted publication date: 20170728 Effective date of abandoning: 20240202 |