CN206339802U - Substrate support bar - Google Patents
Substrate support bar Download PDFInfo
- Publication number
- CN206339802U CN206339802U CN201621242128.XU CN201621242128U CN206339802U CN 206339802 U CN206339802 U CN 206339802U CN 201621242128 U CN201621242128 U CN 201621242128U CN 206339802 U CN206339802 U CN 206339802U
- Authority
- CN
- China
- Prior art keywords
- support bar
- bracing piece
- inner bracing
- outer support
- static liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 52
- 239000007788 liquid Substances 0.000 claims abstract description 76
- 239000011248 coating agent Substances 0.000 claims abstract description 19
- 238000000576 coating method Methods 0.000 claims abstract description 19
- 238000011084 recovery Methods 0.000 claims description 5
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Abstract
The utility model is related to a kind of substrate support bar, including：Outer support bar, it is the box body structure of a surface opening；Inner bracing piece, is placed in the outer support bar, with the supporting surface for supporting substrate；For controlling the inner bracing piece to move up and down with so that the lifting structure that the inner bracing piece changes between the first state and a second state, the lifting structure includes one through the bottom of the outer support bar to support the connecting rod of the inner bracing piece；Anti-static liquid coated structure, for when the inner bracing piece is located at the first state, anti-static liquid to be coated on the inner bracing piece；Wherein, the first state is fully located inside the outer support bar for the inner bracing piece, and second state is the supporting surface of the inner bracing piece and the flush with opening of the outer support bar.The automatic coating of anti-static liquid is realized, to the pollution of substrate etc. and hazard to person is avoided when preventing from coating anti-static liquid.
Description
Technical field
The utility model is related to LCD product manufacture technology field, more particularly to a kind of substrate support bar.
Background technology
In the manufacturing process in TFT-LCD (Thin Film Transistor-LCD) field, exposure machine is mainly by mask plate
On film layer aligned and be exposed on the glass substrate after gluing, glass substrate is carried by base station, and Lift
Bar (support bar) primarily function is：During Loading (loading) substrate, Lift bar rise, and receive Robot arm (machines
Human arm) substrate in feeding exposure machine, then base station surface is down to, substrate is uniformly placed on base station surface；Unloading
During (unloading) substrate, Lift bar rise, after Robot arm take substrate away, wait next plate base feeding to continue to.
ESD (Electro-static Driven Comb) is always the stubborn enemy in LCD (liquid crystal display) and semiconductor industry, and exposure machine exists
During Unloading substrates, the moment that Lift bar separate substrate jack-up with base station surface, wink can be produced between base station and substrate
When high-pressure electrostatic, film layer is punctured and burnt, so that it is bad to produce ESD, with ageing equipment, Lift bar abrasions are this bad
Can be increasingly severe.And by coating anti-static liquid on Lift bar surfaces, can effectively prevent that ESD is occurred frequently.Use at present
Method be to coat anti-static liquid manually on Lift bar surfaces, and this mode is not only difficult to uniform comprehensively coating, makes to remove
Electrostatic capacity is deteriorated, also in the presence of many risks.
Utility model content
In order to solve the above-mentioned technical problem, the utility model provides a kind of substrate support bar, realizes the automatic of anti-static liquid
Coating.
In order to achieve the above object, the technical solution adopted in the utility model is：A kind of substrate support bar, including：
Outer support bar, it is the box body structure of a surface opening；
Inner bracing piece, is placed in the outer support bar, with the supporting surface for supporting substrate；
For controlling the inner bracing piece to move up and down to cause the inner bracing piece in first state and the second state
Between the lifting structure that changes；
Anti-static liquid coated structure, for when the inner bracing piece is located at the first state, in the inner bracing piece
Upper coating anti-static liquid；
Wherein, the first state is fully located inside the outer support bar for the inner bracing piece, second state
For the flush with opening of the supporting surface and the outer support bar of the inner bracing piece.
Further, there is gap between the edge of the inner bracing piece and the outer support bar.
Further, the through hole that multiple confession anti-static liquids pass through is provided with the inner bracing piece；The anti-static liquid is applied
Covering structure includes：It is fixed on the anti-static liquid supply structure of the outer support bar bottom；
Anti-static liquid for the anti-static liquid supply structure to be provided is delivered on the supporting surface, quantity and institute
The corresponding multiple connecting tubes of through hole are stated, one end of each connecting tube is connected with the anti-static liquid supply structure, the other end
Connected with the corresponding through hole on the inner bracing piece.
Further, the connecting tube is bent elastic hose.
Further, also including anti-static liquid recovery structure, set relative with the opening is fixed on the outer support bar
The surface put, and by pipeline with being connected inside the outer support bar.
Further, also including disk roller, it is provided for fixing the first neck of the disk roller in the middle part of the outer support bar,
In the relative both sides of length direction, described first neck of the outer support bar, the inner bracing piece is set respectively, it is described
Outer support bar along its length, on relative two madial walls be concaved with the second neck；
In said first condition, the disk roller is moved to second neck from first neck and can be along
Second neck moves so that the disk roller is moved on the supporting surface on the corresponding inner bracing piece.
Further, the first side wall of second neck close to the outer support bar bottom is connected with first neck
Locate as cambered surface.
Further, be removably provided with cover plate at the opening of first neck, the surface of the cover plate with it is described outer
The flush with opening of support bar.
Further, the cover plate is provided with the vaccum-suction attachement pad for sorbing substrate.
Further, the lifting structure includes lift cylinder.
Further, also including for controlling the lifting structure to move and control the anti-static liquid coated structure to apply
Cover the PLC control structures of the anti-static liquid of predetermined amount.
Further, also including accepting the mobile knot of substrate for controlling the outer support bar to be moved to predeterminated position
Structure.
Further, the moving structure includes being arranged at the connection on surface relative with the opening on the outer support bar
Lever, and for driving the drive shaft of the gangbar motion.
The beneficial effects of the utility model are：Realize the automatic coating of anti-static liquid, prevent coating anti-static liquid when to base
The pollution of plate etc. and avoid hazard to person.
Brief description of the drawings
Fig. 1 represents substrate supporting bar structure schematic diagram in the utility model embodiment；
Fig. 2 represents substrate support bar sectional view in the utility model embodiment；
Fig. 3 represents that inner bracing piece is located at first state structural representation in the utility model embodiment；
Fig. 4 represents roller arrangement schematic diagram in the utility model embodiment.
Embodiment
Feature of the present utility model and principle are described in detail below in conjunction with accompanying drawing, illustrated embodiment is only used for this
The explanation of utility model, not to the limitation of the utility model protection domain.
As Figure 1-Figure 4, the present embodiment provides a kind of substrate support bar, including：
Outer support bar 2, it is the box body structure of a surface opening；
Inner bracing piece 1, is placed in the outer support bar 2, with the supporting surface for supporting substrate；
For controlling the inner bracing piece 1 to move up and down to cause the inner bracing piece 1 in first state and the second shape
The lifting structure changed between state；
Anti-static liquid coated structure, for when the inner bracing piece 1 is located at the first state, in the inner bracing piece
Anti-static liquid is coated on 1；
Wherein, the first state is fully located inside the outer support bar 2 for the inner bracing piece 1, second shape
State is the supporting surface of the inner bracing piece 1 and the flush with opening of the outer support bar 2.
The automatic coating of anti-static liquid is realized in the setting of the anti-static liquid coated structure, improves operating efficiency；And interior branch
The setting of strut 1 and outer support bar 2 so that the inner bracing piece 1 is when being fully located at 2 inside of outer support bar described interior
Coat anti-static liquid on support bar 1, prevent anti-static liquid leak to the base station of bearing substrate (base station for setting support bar) and
The pollution of the device on base station periphery；Also, relative to artificial coating, it is to avoid the injury to human body, it is also prevented from anti-static liquid
Take out of outside support bar and substrate or other devices are polluted.
The specific constructive form of the anti-static liquid coated structure can have a variety of, as long as realizing in the first state
Under, the automatic coating anti-static liquid on the inner bracing piece 1, it is preferred that be provided with the inner bracing piece 1 multiple for anti-
The through hole 3 that electrostatic liquid passes through；The anti-static liquid coated structure includes：It is fixed on the anti-static liquid of the bottom of outer support bar 2
Supply structure；
Anti-static liquid for the anti-static liquid supply structure to be provided is delivered on the supporting surface, quantity and institute
The corresponding multiple connecting tubes of through hole 3 are stated, one end of each connecting tube is connected with the anti-static liquid supply structure, the other end
Connected with the corresponding through hole 3 on the inner bracing piece 1.
In the present embodiment, the through hole 3 is uniformly arranged on the inner bracing piece 1, and the quantity of the through hole 3 can basis
It is actually needed setting.
It is preferred that, the anti-static liquid supply structure includes an anti-static liquid supplying tank 8 for accommodating anti-static liquid, described outer
The bottom of support bar 2 is provided with the holding tank for accommodating the anti-static liquid supplying tank 8.
In the present embodiment, the inner bracing piece 1 can in the outer support bar 2 elevating movement to be coated in anti-static liquid
The support to substrate is realized after end, for the lifting beneficial to the inner bracing piece 1, in the present embodiment, the connecting tube is can
The elastic hose of bending.
There is a situation where unnecessary anti-static liquid outflow during coating anti-static liquid, in order to prevent that anti-static liquid outflow from causing dirt
In dye, the present embodiment, there is gap, so unnecessary antistatic between the edge of the inner bracing piece 1 and the outer support bar 2
Liquid is entered from the gap in the outer support bar 2, and the inner bracing piece 1 is by first shape after coating anti-static liquid
State is converted to the second state, i.e., the supporting surface of described inner bracing piece 1 and the flush with opening of the outer support bar 2
When, anti-static liquid outflow is not had.
Anti-static liquid is present in the overlong time of outer support bar 2, or the anti-static liquid in the outer support bar 2 is excessive
When, it may occur that the situation of anti-static liquid outflow, in order to prevent that substrate support bar also includes in the generation of such case, the present embodiment
Anti-static liquid recovery structure 9, is fixed on the bottom (with the relative surface that is open on outer support bar 2) of the outer support bar 2, and
Connected by pipeline 7 with the inside of outer support bar 2.
The anti-static liquid flowed into from the inner bracing piece 1 with the gap of the outer support bar 2 in the outer support bar 2 passes through
Pipeline 7 flows into the anti-static liquid recovery structure 9 and reclaimed, and prevents from polluting and saving resource.
As shown in figure 3, in the present embodiment, substrate support bar also includes disk roller, and the middle part of the outer support bar 2 is provided for
First neck 11 of the fixed disk roller, in relative two of length direction, described first neck 11 of the outer support bar 2
Side sets the inner bracing piece 1 respectively, the outer support bar 2 along its length, set to the concave on relative two madial walls
There is the second neck 6；
In said first condition, the disk roller is moved to second neck 6 from first neck 11 and being capable of edge
Second neck 6 and move so that the disk roller is moved on the supporting surface on the corresponding inner bracing piece 1.
As shown in figure 4, the disk roller includes roller shaft 16 and the painting part 15 being sheathed on outside the roller shaft.
Fig. 2 show the state that the disk roller is located at second neck 6, when carrying out anti-static liquid coating, lifting knot
Structure controls the inner bracing piece 1 to decline, and spraying is anti-automatically by the through hole 3 on the inner bracing piece 1 for anti-static liquid supply structure
Electrostatic liquid, the disk roller is moved to second neck 6 from first neck 11, and along second neck 6 in phase
Back and forth movement on the supporting surface on the inner bracing piece 1 answered, makes the branch of inner bracing piece 1 described in anti-static liquid uniform fold
Support face, after coating terminates, the disk roller is fixed into first neck 11, and unnecessary anti-static liquid can be from the inner bracing piece
Gap between 1 and the outer support bar 2, which enters the outer support bar 2 and enters the anti-static liquid recovery structure, reclaims.It is anti-
After the coating of electrostatic liquid is uniform, a few minutes (the specific time can set according to actual needs) are stood, in the control of the lifting structure
Under, the inner bracing piece 1 is converted into second state with supporting substrate by the first state.
In order to be entered beneficial to the disk roller by described the first neck 11 in second neck 6, the present embodiment, described the
Two draw-in groove 6 close to the bottom of outer support bar 2 (surface that is oppositely arranged of surface with setting opening) the first side wall with it is described
The junction of first neck 11 is cambered surface.
In order to prevent the disk roller use time long and the contaminated coating to influence anti-static liquid in surface, it is necessary to often
Cleaning is changed, the replacing of the disk roller for convenience, in the present embodiment, is removably set at the opening of first neck 11
There are cover plate 4, the surface of the cover plate 4 and the flush with opening of the outer support bar 2.The cover plate 4 is removed, i.e.,
The disk roller can be taken out.
It is preferred that, the cover plate 4 is provided with the vaccum-suction attachement pad 5 for sorbing substrate, and the absorption beneficial to substrate is fixed.
It is preferred that, the lifting structure includes lift cylinder 10.One end of the lift cylinder can be directly through described outer
Support bar 2 realizes the lifting of inner bracing piece 1 to be connected with inner bracing piece 1；Can also be with supporting interior through the outer support bar 2
The connecting rod of support bar 1 connects to realize the lifting of inner bracing piece 1.
It is preferred that, substrate support bar also includes being used to control the lifting structure to move and control the anti-static liquid to apply
Cover the PLC control structures 12 of the anti-static liquid of structure coating predetermined amount.
The quantitative anti-static liquid of anti-static liquid supply structure even application is controlled by PLC control structures 12, effectively reduces and applies
Cover the time, it is to avoid unnecessary wait and shutdown, and anti-static liquid consumption can be saved.
It is preferred that, substrate support bar also includes being used to control the outer support bar 2 to be moved to predeterminated position to accept substrate
Moving structure.
It is preferred that, the moving structure includes being arranged at the bottom of outer support bar 2 (with the opening phase on outer support bar 2
To the surface of setting) gangbar 13, and the drive shaft 14 for driving the gangbar 13 to move.
Above be the utility model preferred embodiment, it is necessary to explanation, to those skilled in the art,
On the premise of not departing from principle described in the utility model, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as the utility model protection domain.
Claims (13)
1. a kind of substrate support bar, it is characterised in that including：
Outer support bar, it is the box body structure of a surface opening；
Inner bracing piece, is placed in the outer support bar, with the supporting surface for supporting substrate；
For controlling the inner bracing piece to move up and down to cause the inner bracing piece between the first state and a second state
The lifting structure of change；
Anti-static liquid coated structure, for when the inner bracing piece is located at the first state, being applied on the inner bracing piece
Cover anti-static liquid；
Wherein, the first state is fully located inside the outer support bar for the inner bracing piece, and second state is institute
State the supporting surface of inner bracing piece and the flush with opening of the outer support bar.
2. substrate support bar according to claim 1, it is characterised in that the edge of the inner bracing piece and the outer support
There is gap between bar.
3. substrate support bar according to claim 1 or 2, it is characterised in that multiple confessions are provided with the inner bracing piece
The through hole that anti-static liquid passes through；The anti-static liquid coated structure includes：It is fixed on the outer support bar and the opening phase
To surface anti-static liquid supply structure；
Anti-static liquid for the anti-static liquid supply structure to be provided is delivered on the supporting surface, quantity and led to described
The corresponding multiple connecting tubes in hole, one end of each connecting tube is connected with the anti-static liquid supply structure, the other end and institute
State the corresponding through hole connection on inner bracing piece.
4. substrate support bar according to claim 3, it is characterised in that the connecting tube is bent elastic hose.
5. substrate support bar according to claim 3, it is characterised in that also including anti-static liquid recovery structure, be fixed on
The surface relative with the opening on the outer support bar, and by pipeline with being connected inside the outer support bar.
6. substrate support bar according to claim 1, it is characterised in that also including disk roller, the middle part of the outer support bar
Be provided for fixing the first neck of the disk roller, the outer support bar length direction, described first neck it is relative
Both sides the inner bracing piece is set respectively, the outer support bar along its length, concave on relative two madial walls
Provided with the second neck；
In said first condition, the disk roller is moved to second neck from first neck and can be along described
Second neck moves so that the disk roller is moved on the supporting surface on the corresponding inner bracing piece.
7. substrate support bar according to claim 6, it is characterised in that second neck is close to the outer support bar bottom
The first side wall in portion is cambered surface with the first neck junction.
8. substrate support bar according to claim 6, it is characterised in that removably set at the opening of first neck
There are cover plate, the surface of the cover plate and the flush with opening of the outer support bar.
9. substrate support bar according to claim 8, it is characterised in that the cover plate is provided with for the true of sorbing substrate
Empty suction tray.
10. substrate support bar according to claim 1, it is characterised in that the lifting structure includes lift cylinder.
11. substrate support bar according to claim 1, it is characterised in that also including for controlling the lifting structure to transport
The PLC control structures of anti-static liquid that is dynamic and controlling the anti-static liquid coated structure coating predetermined amount.
12. substrate support bar according to claim 1, it is characterised in that also including for controlling the outer support bar to move
Move to predeterminated position to accept the moving structure of substrate.
13. substrate support bar according to claim 12, it is characterised in that the moving structure includes being arranged at outside described
The gangbar on the surface relative with the opening on support bar, and for driving the drive shaft of the gangbar motion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621242128.XU CN206339802U (en) | 2016-11-17 | 2016-11-17 | Substrate support bar |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621242128.XU CN206339802U (en) | 2016-11-17 | 2016-11-17 | Substrate support bar |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206339802U true CN206339802U (en) | 2017-07-18 |
Family
ID=59307113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621242128.XU Expired - Fee Related CN206339802U (en) | 2016-11-17 | 2016-11-17 | Substrate support bar |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206339802U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106444110A (en) * | 2016-11-17 | 2017-02-22 | 合肥京东方光电科技有限公司 | Substrate supporting rod and antistatic liquid coating method |
-
2016
- 2016-11-17 CN CN201621242128.XU patent/CN206339802U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106444110A (en) * | 2016-11-17 | 2017-02-22 | 合肥京东方光电科技有限公司 | Substrate supporting rod and antistatic liquid coating method |
| CN106444110B (en) * | 2016-11-17 | 2023-08-29 | 合肥京东方光电科技有限公司 | Substrate support bar and method of applying antistatic liquid |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170718 |