CN206259333U - Silicon chip suction means - Google Patents
Silicon chip suction means Download PDFInfo
- Publication number
- CN206259333U CN206259333U CN201621382085.5U CN201621382085U CN206259333U CN 206259333 U CN206259333 U CN 206259333U CN 201621382085 U CN201621382085 U CN 201621382085U CN 206259333 U CN206259333 U CN 206259333U
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- CN
- China
- Prior art keywords
- silicon chip
- hole
- sucker
- clamp
- suction means
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Abstract
The utility model discloses a kind of operating efficiency it is higher and can reduce the contaminated probability of silicon chip for the upper and lower sheet devices of graphite boat.The silicon chip suction means, including base, one side surface of base is fixed with multiple clamps, multiple through holes are provided with each clamp, the edge of each through hole is provided with multiple fixing holes, a fixed plate is provided with each fixing hole, each through hole is provided centrally with sucker, multiple springs are connected with sucker, multiple springs are corresponded with multiple fixing holes, and a side surface of clamp is provided with multiple metallic channels, and the quantity of metallic channel is identical with the quantity of through hole, each metallic channel is connected with a through hole, and compressed air hose is provided with metallic channel.The silicon chip suction means whole process is easy to operate, and the silicon chip quantity being removed and placed into every time is more, substantially increases operating efficiency, meanwhile, in whole process, contact of the silicon chip with people is reduced, reduce the contaminated probability of silicon chip.It is adapted in the popularization and application of silicon wafer processing equipment field.
Description
Technical field
The utility model is related to silicon wafer processing equipment field, especially a kind of silicon chip suction means.
Background technology
Because solar irradiation is mapped on the silicon chip of solar cell, a portion sunshine can be reflected, even if to inciting somebody to action
Silicon face is designed to matte, although incident light can produce the multiple reflections can to increase the absorptivity of light, but, still have one
The sunshine for dividing can be reflected, and in order to reduce the reflection loss of sunshine, the method generally taken is in solar cell
Silicon chip surface covers one layer of antireflective coating, and this layer film can reduce the reflectivity of sunshine, increase photoelectric transformation efficiency, in crystalline substance
In body silicon face deposit antireflective coating technology, silicon nitride film has that high-insulativity, chemical stability are good, compactness is good, hardness is high
The features such as, while there is the good ability for sheltering metal and water ion deposition, so as to be widely adopted.
In crystal silicon solar energy battery manufacturing process, the usual using plasma enhancing chemical gaseous phase of silicon nitride film is prepared
Sedimentation, referred to as PECVD (Plasma Enhanced Chemical Vapor Deposition), PECVD is to utilize forceful electric power
Gas source molecular ionization needed for field makes produces plasma, containing the chemical group that many activity are very high in plasma, this
A little groups pass through through a series of chemistry and plasma reaction, and solid film is formed in silicon chip surface.
At present, in crystal silicon solar energy battery manufacturing process, the device for preparing silicon nitride film mainly includes setting
There is the vacuum deposition chamber of fire door, graphite boat is provided with vacuum moulding machine room, silicon chip is positioned on graphite boat, and vacuum deposition chamber is provided with
Air inlet and exhaust outlet, are connected with the air inlet pipe for being passed through process gas on the air inlet, be connected with the exhaust outlet
Delivery pipe, discharge pipe end is connected with vavuum pump, and the import of vavuum pump is connected with the outlet of delivery pipe, the outlet connection of vavuum pump
There is tail comb, wherein, when silicon chip being positioned on graphite boat or silicon chip being taken out from graphite boat by manually realizing silicon chip
Pick and place, this is a kind of dull, manual labor for repeating, and efficiency is very low, and silicon chip contacts with the hand of people and silicon chip is caused
Pollution.
Utility model content
It is higher and can reduce silicon chip and get dirty that technical problem to be solved in the utility model is to provide a kind of operating efficiency
Contaminate the silicon chip suction means of probability.
The utility model solves the technical scheme that its technical problem used：The silicon chip suction means, including base, institute
The side surface for stating base is fixed with multiple clamps, and multiple clamps are be arranged in parallel successively, and multiple through holes are provided with each clamp,
The edge of each through hole is provided with multiple fixing holes, and a fixed plate, the thickness of the fixed plate are provided with each fixing hole
Less than the thickness of clamp, each through hole is provided centrally with sucker, and multiple springs are connected with sucker, and multiple springs are fixed with multiple
Hole is corresponded, and one end of spring is fixed on sucker, and the other end is fixed in fixed plate, and a side surface of the clamp is set
There are multiple metallic channels, the quantity of metallic channel is identical with the quantity of through hole, each metallic channel is connected with a through hole, is set in metallic channel
Compressed air hose is equipped with, one end of compressed air hose is connected with air compressor, and the other end is connected with sucker, it is the sucker, many
The compressed air hose in fixed plate, each metallic channel in individual spring, each fixing hole is respectively positioned on two surface compositions of clamp
Clearance space in.
It is further that the quantity of through hole is three on each clamp, and three centers of through hole constitute an isosceles three
It is angular.
It is further to be provided with handle on the base.
It is further that magnetic valve is provided with the compressed air hose, is provided with for controlling electromagnetism on the handle
The switch of valve opening and closing, the switch is connected with magnetic valve.
The beneficial effects of the utility model are：Operationally, operating personnel hold base to the silicon chip suction means, then will
Clamp insertion is placed in the gaily decorated basket of silicon chip, each clamp is inserted between two silicon chips adjacent in the gaily decorated basket, now air pressure
Contracting machine is worked, and each sucker holds corresponding silicon chip, and clamp is then taken out from the gaily decorated basket and inserted phase in graphite boat
Between adjacent graphite cake, now air compressor is stopped, and each sucker unclamps corresponding silicon chip, and silicon chip falls into stone
In Mo Zhou, repeating said process just can be sequentially placed into graphite boat silicon chip, first when needing to take out silicon chip from graphite boat
First by between graphite cake adjacent in clamp insertion graphite boat, now air compressor works, and each sucker will be corresponding
Silicon chip is held, and then clamp is taken out and inserted in the gaily decorated basket from graphite boat, and now air compressor is stopped, each sucker
Corresponding silicon chip is unclamped, silicon chip is fallen into the gaily decorated basket, repeat said process just can successively take out graphite boat simultaneously by silicon chip
It is put into the gaily decorated basket, whole process is easy to operate, and the silicon chip quantity being removed and placed into every time is more, substantially increases work effect
Rate, meanwhile, in whole process, contact of the silicon chip with people is reduced, reduce the contaminated probability of silicon chip.
Brief description of the drawings
The structural representation of Fig. 1 silicon chip suction means described in the utility model；
Fig. 2 is the structural representation of clamp described in the utility model；
Description of symbols in figure：Base 1, clamp 2, fixing hole 3, fixed plate 4, sucker 5, spring 6, metallic channel 7,
Compressed air hose 8, handle 9, magnetic valve 10, switch 11.
Specific embodiment
The utility model is further illustrated below in conjunction with the accompanying drawings.
As shown in Fig. 1 to 2, the silicon chip suction means, including base 1 a, side surface of the base 1 is fixed with multiple cards
Plate 2, multiple clamps 2 are be arranged in parallel successively, and multiple through holes are provided with each clamp 2, and the edge of each through hole is provided with multiple
A fixed plate 4 is provided with fixing hole 3, each fixing hole 3, the thickness of the fixed plate 4 is less than the thickness of clamp 2, each
Through hole is provided centrally with sucker 5, and multiple springs 6 are connected with sucker 5, and multiple springs 6 are corresponded with multiple fixing holes 3, bullet
One end of spring 6 is fixed on sucker 5, and the other end is fixed in fixed plate 4, and a side surface of the clamp 2 is provided with multiple and leads
Wire casing 7, the quantity of metallic channel 7 is identical with the quantity of through hole, and each metallic channel 7 is connected with a through hole, is provided with metallic channel 7
Compressed air hose 8, one end of compressed air hose 8 is connected with air compressor, and the other end is connected with sucker 5, the sucker 5, many
The compressed air hose 8 in fixed plate 4, each metallic channel 7 in individual spring 6, each fixing hole 3 is respectively positioned on two tables of clamp 2
In the clearance space of face composition.Operationally, operating personnel hold base 1 to the silicon chip suction means, then put the insertion of clamp 2
Put in the gaily decorated basket of silicon chip, each clamp 2 is inserted between two silicon chips adjacent in the gaily decorated basket, now air compressor work,
Each sucker 5 holds corresponding silicon chip, and then clamp 2 is taken out from the gaily decorated basket and graphite adjacent in graphite boat is inserted
Between plate, now air compressor is stopped, and each sucker 5 unclamps corresponding silicon chip, and silicon chip is fallen into graphite boat,
Repeating said process just can be sequentially placed into graphite boat silicon chip, when needing to take out silicon chip from graphite boat, first will card
In the insertion graphite boat of plate 2 between adjacent graphite cake, now air compressor work, each sucker inhales corresponding silicon chip
Firmly, then clamp 2 is taken out and is inserted in the gaily decorated basket from graphite boat, now air compressor is stopped, each sucker 5 will be with
Corresponding silicon chip unclamp, silicon chip fallen into the gaily decorated basket, and repeating said process just silicon chip can successively be taken out graphite boat and be put into
In the gaily decorated basket, whole process is easy to operate, and the silicon chip quantity being removed and placed into every time is more, substantially increases operating efficiency,
Meanwhile, in whole process, contact of the silicon chip with people is reduced, reduce the contaminated probability of silicon chip.
In order that silicon chip suction means avoids generation silicon chip from dropping in moving process, the quantity of through hole on each clamp 2
It is three, and three centers of through hole constitute an isosceles triangle, so each silicon chip is held with three suckers 5, and
Sucker 5 constitutes an isosceles triangle, and its suction firmly can uniformly hold silicon chip, it is to avoid silicon chip occurs and drops.
Base 1 is captured for convenience, and handle 9 is provided with the base 1.
In addition, operating for convenience, magnetic valve 10 is provided with the compressed air hose 8, use is provided with the handle 9
In the switch 11 of the control opening and closing of magnetic valve 10, the switch 11 is connected with magnetic valve 10.Just can so make air compressor
It is always on, only need to be by switching 11 either on or off magnetic valves 10, operation more facilitates.
Claims (4)
1. silicon chip suction means, it is characterised in that：Including base (1), a side surface of the base (1) is fixed with multiple clamps
(2), multiple clamps (2) are be arranged in parallel successively, and multiple through holes are provided with each clamp (2), and the edge of each through hole is provided with
A fixed plate (4) is provided with multiple fixing holes (3), each fixing hole (3), the thickness of the fixed plate (4) is less than clamp
(2) thickness, each through hole is provided centrally with sucker (5), is connected with multiple springs (6) on sucker (5), multiple springs (6) with
Multiple fixing holes (3) are corresponded, and one end of spring (6) is fixed on sucker (5), and the other end is fixed in fixed plate (4), institute
The side surface for stating clamp (2) is provided with multiple metallic channels (7), and the quantity of metallic channel (7) is identical with the quantity of through hole, and each is led
Wire casing (7) is connected with a through hole, and compressed air hose (8), one end and the sky of compressed air hose (8) are provided with metallic channel (7)
Air compressor is connected, and the other end is connected with sucker (5), the sucker (5), multiple spring (6), consolidating in each fixing hole (3)
Compressed air hose (8) in fixed board (4), each metallic channel (7) is respectively positioned on two clearance spaces of surface composition of clamp (2)
It is interior.
2. silicon chip suction means as claimed in claim 1, it is characterised in that：The quantity of through hole is three on each clamp (2),
And three centers of through hole constitute an isosceles triangle.
3. silicon chip suction means as claimed in claim 2, it is characterised in that：Handle (9) is provided with the base (1).
4. silicon chip suction means as claimed in claim 3, it is characterised in that：Electromagnetism is provided with the compressed air hose (8)
Valve (10), is provided with the switch (11) for controlling magnetic valve (10) to be opened and closed, the switch (11) and electromagnetism on the handle (9)
Valve (10) is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621382085.5U CN206259333U (en) | 2016-12-15 | 2016-12-15 | Silicon chip suction means |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621382085.5U CN206259333U (en) | 2016-12-15 | 2016-12-15 | Silicon chip suction means |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206259333U true CN206259333U (en) | 2017-06-16 |
Family
ID=59029821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621382085.5U Expired - Fee Related CN206259333U (en) | 2016-12-15 | 2016-12-15 | Silicon chip suction means |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206259333U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107481964A (en) * | 2017-07-18 | 2017-12-15 | 罗博特科智能科技股份有限公司 | A kind of silicon chip batch suction means |
| CN108831853B (en) * | 2018-05-22 | 2020-05-26 | 中国电子科技集团公司第二研究所 | Sucker assembly mechanism for unloading grouped silicon wafers in graphite boat carrier and unloading method |
| CN115339231A (en) * | 2022-09-07 | 2022-11-15 | 西安创研电子科技有限公司 | Nitrogen oxygen sensor chip side electrode printing clamping device |
-
2016
- 2016-12-15 CN CN201621382085.5U patent/CN206259333U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107481964A (en) * | 2017-07-18 | 2017-12-15 | 罗博特科智能科技股份有限公司 | A kind of silicon chip batch suction means |
| CN107481964B (en) * | 2017-07-18 | 2023-08-25 | 罗博特科智能科技股份有限公司 | Silicon wafer batch sucking device |
| CN108831853B (en) * | 2018-05-22 | 2020-05-26 | 中国电子科技集团公司第二研究所 | Sucker assembly mechanism for unloading grouped silicon wafers in graphite boat carrier and unloading method |
| CN115339231A (en) * | 2022-09-07 | 2022-11-15 | 西安创研电子科技有限公司 | Nitrogen oxygen sensor chip side electrode printing clamping device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170616 Termination date: 20201215 |