CN206258371U - A kind of photomicrography pumping detects heat reflection system - Google Patents
A kind of photomicrography pumping detects heat reflection system Download PDFInfo
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- CN206258371U CN206258371U CN201621393038.0U CN201621393038U CN206258371U CN 206258371 U CN206258371 U CN 206258371U CN 201621393038 U CN201621393038 U CN 201621393038U CN 206258371 U CN206258371 U CN 206258371U
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- laser beam
- pumping
- laser
- photomicrography
- heat reflection
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Abstract
The utility model provides a kind of photomicrography pumping and detects heat reflection system, the linearly polarized laser that pulse laser sends reaches automatically controlled cold mirror through the first light path and the second light path respectively, laser beam one is reflected after converging with laser beam two by sample, laser beam two is divided into laser beam three and laser beam four after the 3rd light path by beam splitter, laser beam three reaches photodetector and lock-in amplifier, and laser beam four reaches digital camera.The utility model identifies pumping and detection hot spot in digital camera shooting image by computer, control automatically controlled cold mirror that angular deflection occurs, change the position of pumping hot spot, pumping is set to be precisely coincident with detection hot spot, can eliminate due to variation of ambient temperature, optical element stress reduces problem to vibrate the hot spot registration for causing, high degree of automation, control accuracy is greatly improved, the accurate control and the accurate measurement of microstructure thermal conductivity of measurement position with the microstructure of Real Time Observation sample surfaces, can be realized by the system.
Description
Technical field
The utility model belongs to thermal conductivity measuring technology, is related to ultrashort laser pulse pumping Detection Techniques, more particularly to one
Plant photomicrography pumping detection heat reflection system.
Background technology
Micro-nano structure material widely applies to the fields such as microelectronics, photoelectron, and these micro elements operationally will
High heat flow density is produced, hot stack will directly influence the operating efficiency and reliability of such devices.Solve above-mentioned micro-
Device heat dissipation problem is extremely urgent, and this needs is carried out accurately to the thermotransport property for constituting the micro-nano structure material of above-mentioned micro element
Characterize, to disclose its thermotransport mechanism.Studying ultrafast thermotransport process, it is often necessary to visit by super short pulse laser pumping
Survey technology.In traditional ultrashort laser pulse pumping detection system, the measurement position of sample can only "ball-park" estimate, this causes
Traditional measuring system can only the sample homogeneous to simple structure, surface nature carry out thermal conductivity sign, and for microelectronics, light
It is greatly difficult that largely there is the accurate sign of the thermal conductivity of microstructure sample different zones or structure to exist in the fields such as electronics.
Utility model content
(1) technical problem to be solved
The utility model provides a kind of photomicrography pumping and detects heat reflection system, to solve to exist in the prior art
Problem.
(2) technical scheme
The utility model provides a kind of photomicrography pumping and detects heat reflection system, and the line that pulse laser sends is inclined
Laser shake by being divided into two beams, respectively laser beam one and laser beam two by the first polarization splitting prism after the one 1/2 wave plate；Swash
Light beam one continues to transmit by the first polarization splitting prism along former linearly polarized laser transmission direction, sequentially passes through laser freuqency doubling mould
Automatically controlled cold mirror is reached after block, short wave pass filter, laser modulator, shortwave speculum；It is anti-that laser beam two sequentially passes through long wave
Automatically controlled cold mirror is reached after penetrating mirror, corner cube mirror, the 2nd 1/2 wave plate, the second polarization splitting prism, quarter wave plate；Laser beam one
After converging with laser beam two by object lens reach sample holder, laser beam two by sample holder sample reflection after according to
It is secondary by being divided into two beams by beam splitter after object lens, automatically controlled cold mirror, quarter wave plate, the second polarization splitting prism, convex lens, respectively
It is laser beam three and laser beam four；Laser beam three reaches photodetector, and photodetector is connected with lock-in amplifier；Laser beam
Four reach digital camera, and digital camera is connected with computer.
Preferably, the automatically controlled cold mirror, for reflection laser beam one, transmission laser beam two makes laser beam one and laser
Beam two mixes and adjusts relative position of the mixed light beam by focal beam spot after object lens.
Preferably, signal generator connection laser modulator, laser modulator loads the output signal of signal generator
To laser beam one.
Preferably, the computer by computer vision algorithms make identify pumping in digital camera shooting image with
Detection hot spot, controls automatically controlled cold mirror that angular deflection occurs, and changes the position of pumping hot spot, pumping is accurately weighed with detection hot spot
Close.
Preferably, the laser modulator is electrooptic modulator, acousto-optic modulator or chopper intensity modulation equipment.
Preferably, the reflected parallel degree of the corner cube mirror is better than 5arc sec.
Preferably, the angular adjustment precision of the automatically controlled cold mirror is better than 1 microradian.
Preferably, the light splitting ratio of the beam splitter is 50: 50.
Preferably, the photo-sensitive cell of digital camera is located at the focal plane position of convex lens, and object lens constitute light with convex lens
Conjugate relation is learned, object lens, convex lens, digital camera and computer collectively form photomicrography subsystem.
Preferably, the data for being gathered by lock-in amplifier calculate sample thermal conductivity.
(3) beneficial effect
From above-mentioned technical proposal as can be seen that photomicrography pumping of the present utility model detection heat reflection system have with
Lower beneficial effect：
The utility model adds beam splitter before photodetector, and the light that sample surfaces reflect is reflexed into digital camera
Machine, convex lens are optical conjugate relation with object lens, and sample surfaces can be on digital camera photo-sensitive cell into real image so as to be clapped
Take the photograph, the image that digital camera shoots is by Real time vision, and object lens, convex lens, digital camera and computer are common
Constitute photomicrography subsystem；Computer identifies pumping and detection hot spot in digital camera shooting image, control electricity
Control cold mirror occur angular deflection, change pumping hot spot position, make pumping with detection hot spot be precisely coincident, can eliminate due to
Variation of ambient temperature, to vibrate the hot spot registration for causing reduction problem, the process is usual in the prior art for optical element stress
By being accomplished manually, Efficiency and accuracy is low, and the utility model realizes that real-time hot spot registration is controlled by computer controls, from
Dynamicization degree is high, and control accuracy is greatly improved, and measurement can be realized with the microstructure of Real Time Observation sample surfaces by the system
The accurate control and the accurate measurement of microstructure thermal conductivity of position.
Brief description of the drawings
Fig. 1 is the photomicrography pumping detection heat reflection system structure diagram of the utility model embodiment.
Symbol description
1- pulse lasers；The wave plates of 2- the 1st；The polarization splitting prisms of 3- first；4- laser freuqency doubling modules；5- short-pass
Optical filter；6- laser modulators；7- signal generators；8- shortwave speculums；The linear mobile stations of 9-；10- corner cube mirrors；11-
Computer；12- long wave speculums；13- digital cameras；14- photodetectors；15- beam splitters；16- convex lens；17- locks phase
Amplifier；The automatically controlled cold mirrors of 18-；The wave plates of 19- the 2nd 1/2；The polarization splitting prisms of 20- second；21-1/4 wave plates；22- is three-dimensional to be moved
Dynamic platform；23- sample holders；24- object lens.
Specific embodiment
The photomicrography pumping detection heat reflection system that the utility model is provided, adds beam splitting before photodetector
Mirror, convex lens are optical conjugate relation with object lens, and sample surfaces can be on digital camera photo-sensitive cell into real image so as to be clapped
Take the photograph, the image that digital camera shoots is by Real time vision, and object lens, convex lens, digital camera and computer are common
Constitute photomicrography subsystem；Computer identifies the pumping in digital camera shooting image by computer vision algorithms make
With detection hot spot, control automatically controlled cold mirror that angular deflection occurs, change the position of pumping and detection hot spot, make pumping with detection light
Spot is precisely coincident in real time.
To make the purpose of this utility model, technical scheme and advantage become more apparent, below in conjunction with specific embodiment, and
Reference picture 1, further describes to the utility model.
Photomicrography pumping detection heat reflection system of the present utility model is included with lower component, the concrete model of each part
Only it is illustrative, is not limited thereto.
Pulse laser, using Mai Tai BB titanium sapphire femtosecond oscillating lasers, pulse width is less than 1ps, preferably
Less than 80fs, wave-length coverage 710-990nm, mean power is more than 1.5W；
One 1/2 wave plate, using the wave plate of Thorlabs WPH05M-808 zero levels 1/2；
First polarization splitting prism, using Thorlabs PBS052 polarizing beam splitter cubes；
Laser freuqency doubling module, using BIBO frequency-doubling crystals, optimal input wavelength should be with pulse laser in laser freuqency doubling module
The output wavelength of device is consistent；
Short wave pass filter, using Thorlabs FESH0500 hard coat short wave pass filters；
Laser modulator, for electrooptic modulator, acousto-optic modulator or can use chopper intensity modulation equipment, it is preferred to use
Electrooptic modulator, and specially Conoptics M350-160 electrooptic modulators；
Signal generator, using Keysight 33509B waveform generators；
Shortwave speculum, using Thorlabs BB05-E02 plane mirrors；
Long wave speculum, using Thorlabs BB05-E03 plane mirrors；
Corner cube mirror, reflected parallel degree should be better than 5arc sec, it is preferred to use Newport UBBR2.5-5S right angles are anti-
Penetrate mirror；
Linear mobile station, using the linear mobile stations of Newport M-IMS600PP；
2nd 1/2 wave plate, using the wave plate of Thorlabs WPH05M-808 zero levels 1/2；
Automatically controlled cold mirror, is arranged on Thorlabs KC1-PZ/M piezoelectricity and adjusts optics using Thorlabs FM04 cold mirrors
Adjustment frame, angular adjustment precision is better than 1 microradian；
Object lens, using Edmund 10X EO M Plan Apo object lens；
Three-dimensional mobile station, using Thorlabs PT3/M XYZ displacement platforms；
Quarter wave plate, using Thorlabs WPQ05M-808 zero level quarter wave plates；
Second polarization splitting prism, using Thorlabs PBS052 polarizing beam splitter cubes；
Convex lens, using Thorlabs LA1461 planoconvex spotlights；
Beam splitter, using the beam splitters of Thorlabs EBS1 50: 50；
Photodetector, the wavelength of its input should be believed according to the selection of the output wavelength of pulse laser with ensureing maximum output
Number, it is preferred to use Thorlabs PDA36A silicon substrates amplify photodetector across resistance；
Lock-in amplifier, its incoming frequency scope covers the range of signal of laser modulator, it is preferred to use Stanford
Research SR844 lock-in amplifiers；
Digital camera, it is free of camera lens and photo-sensitive cell resolution ratio is not less than 1280x1024 and uses Thorlabs
DCC1545M CMOS cameras；
Photomicrography pumping detection heat reflection system of the present utility model includes：Pulse laser 1；One 1/2 wave plate
2；First polarization splitting prism 3；Laser freuqency doubling module 4；Short wave pass filter 5；Laser modulator 6；Signal generator 7；Shortwave
Speculum 8；Linear mobile station 9；Corner cube mirror 10；Computer 11；Long wave speculum 12；Digital camera 13；Photodetection
Device 14；Beam splitter 15；Convex lens 16；Lock-in amplifier 17；Automatically controlled cold mirror 18；2nd 1/2 wave plate 19；Second polarization spectro rib
Mirror 20；Quarter wave plate 21；Three-dimensional mobile station 22；Sample holder 23；Object lens 24.
The one 1/2 wave plate 2, the first polarization splitting prism 3, laser freuqency doubling are set gradually along the optical axis direction of pulse laser 1
Module 4, short wave pass filter 5, laser modulator 6 and shortwave speculum 8；The 800nm linearly polarized lasers of the output of pulse laser 1
Deflected by the rear polarizer direction of the one 1/2 wave plate 2, be then two beams, respectively laser by 3 points of the first polarization splitting prism
Beam one and laser beam two, polarization direction are respectively horizontally and vertically, and the one 1/2 wave plate 2 of regulation makes laser beam one and laser beam two
Power ratio be about 50: 1, laser beam one is continued by the first polarization splitting prism 3 along the direction of propagation of former linearly polarized laser
Transmission, by fraction of laser light after laser freuqency doubling module 4 by frequency multiplication to 400nm wavelength, then will not again by short wave pass filter 5
The 800nm wavelength lasers of frequency are filtered, and in laser modulator 6, the power level of 400nm wavelength lasers is loaded signal generator
7 frequency is the output signal of MHz ranks, and automatically controlled cold mirror 18 is reached after then being reflected by shortwave speculum 8.
Laser beam two is deflected by the first polarization splitting prism 3, and successively by long wave speculum 12 and corner cube mirror 10
Reflection, wherein corner cube mirror 10 is fixed in linear mobile station 9, linear mobile station 9 by computer controls, then laser beam two
By the 2nd 1/2 wave plate 19, the 2nd 1/2 wave plate 19 of adjustment makes the polarization direction of laser beam two from being changed into level vertically, then swashs
Light beam two reaches automatically controlled cold mirror 18 after sequentially passing through the second polarization splitting prism 20, quarter wave plate 21, and automatically controlled cold mirror 18 makes to swash
Light beam one mixes conllinear propagation with laser beam two and forms co-linear beams, and co-linear beams reach sample holder 23 by object lens 24,
Wherein sample holder 23 is fixed in three-dimensional mobile station 22, and adjustment sample holder 23 makes sample be located at the focal plane of object lens 24
Position, by backtracking after sample reflection, laser beam two after sample reflection by passing sequentially through object lens 24, automatically controlled for laser beam one
The second polarization splitting prism 20 is reached after cold mirror 18 and quarter wave plate 21, laser beam 2 passes through the rear polarizer of quarter wave plate 21 second
Direction is changed into vertical from level and is reflected by the second polarization splitting prism 20, then passes sequentially through convex lens 16 and beam splitter 15,
Two points by laser beam of beam splitter 15 is two beams, respectively laser beam three and laser beam four, and laser beam three reaches photodetector 14,
Its power level is converted into voltage signal, same with the output signal of signal generator 7 in the separation voltage signal of lock-in amplifier 17
The component of signal and gathered data of frequency, laser beam four reach digital camera 13, and the image that digital camera 13 shoots passes through
Computer 11 shows that computer 11 identifies the pumping in the shooting image of digital camera 13 by computer vision algorithms make in real time
With detection hot spot, control automatically controlled cold mirror 18 that angular deflection occurs, change the position of pumping hot spot, make pumping with detection hot spot essence
Really overlap, the data gathered by lock-in amplifier 17 calculate sample thermal conductivity.
Sample is located at the focal plane position of object lens 24, and the photo-sensitive cell of digital camera 13 is located at the focal plane of convex lens 16
Position, object lens 24 constitute optical conjugate relation with convex lens 16, and object lens, convex lens, digital camera and computer are collectively formed
Photomicrography subsystem.
The multiplication factor of photomicrography subsystem is the ratio of the focal length of convex lens 16 and the focal length of object lens 24, for selected original
The multiplication factor of the part photomicrography subsystem is 12.5 times.
The resolution ratio of photomicrography subsystem for the photo-sensitive cell of digital camera 13 point away from the ratio with multiplication factor,
Resolution ratio for the selected original paper photomicrography subsystem is about 0.4 micron.
Thermal conductivity data is calculated by the data that lock-in amplifier 17 is gathered.
So far, combined accompanying drawing has been described in detail to the utility model embodiment.According to above description, this area
Technical staff should have and clearly recognize to photomicrography pumping of the present utility model detection heat reflection system.
It should be noted that in accompanying drawing or specification text, the implementation for not illustrating or describing is affiliated technology
Form known to a person of ordinary skill in the art, is not described in detail in field.Additionally, above-mentioned definition to each element and not only limiting
The various modes mentioned in embodiment, those of ordinary skill in the art can simply be changed or be replaced to it, for example：
(1) direction term mentioned in embodiment, for example " on ", D score, "front", "rear", "left", "right" etc., be only ginseng
The direction of accompanying drawing is examined, not for limiting protection domain of the present utility model；
(2) above-described embodiment can be based on design and the consideration of reliability, and the collocation that is mixed with each other is used or and other embodiment
Mix and match is used, i.e., the technical characteristic in different embodiments can freely form more embodiments.
Particular embodiments described above, has been carried out in detail to the purpose of this utility model, technical scheme and beneficial effect
Illustrate, should be understood that and the foregoing is only specific embodiment of the utility model, be not limited to this practicality new
Type, all within spirit of the present utility model and principle, any modification, equivalent substitution and improvements done etc. should be included in this
Within the protection domain of utility model.
Claims (10)
1. a kind of photomicrography pumping detects heat reflection system, it is characterised in that
The linearly polarized laser that pulse laser sends divides by being divided into two beams by the first polarization splitting prism after the one 1/2 wave plate
Wei not laser beam one and laser beam two；
Laser beam one continues to transmit by the first polarization splitting prism along former linearly polarized laser transmission direction, sequentially passes through laser times
Automatically controlled cold mirror is reached after frequency module, short wave pass filter, laser modulator, shortwave speculum；
Laser beam two sequentially passes through long wave speculum, corner cube mirror, the 2nd 1/2 wave plate, the second polarization splitting prism, 1/4 ripple
Automatically controlled cold mirror is reached after piece；
Laser beam one reaches sample holder after converging with laser beam two by object lens, and laser beam two is by sample holder
Divided by beam splitter after object lens, automatically controlled cold mirror, quarter wave plate, the second polarization splitting prism, convex lens are passed sequentially through after sample reflection
It is two beams, respectively laser beam three and laser beam four；
Laser beam three reaches photodetector, and photodetector is connected with lock-in amplifier；Laser beam four reaches digital camera,
Digital camera is connected with computer.
2. photomicrography pumping according to claim 1 detects heat reflection system, it is characterised in that the automatically controlled cold light
Mirror, for reflection laser beam one, transmission laser beam two makes laser beam one mix with laser beam two and adjusts mixed light beam by thing
The relative position of focal beam spot after mirror.
3. photomicrography pumping according to claim 1 detects heat reflection system, it is characterised in that signal generator connects
Laser modulator is connect, the output signal of signal generator is loaded onto laser beam one by laser modulator.
4. photomicrography pumping according to claim 1 detects heat reflection system, it is characterised in that the computer leads to
Pumping and detection hot spot that computer vision algorithms make is identified in digital camera shooting image are crossed, controls automatically controlled cold mirror to occur
Angular deflection, changes the position of pumping hot spot, pumping is precisely coincident with detection hot spot.
5. photomicrography pumping according to claim 1 detects heat reflection system, it is characterised in that the Laser Modulation
Device is electrooptic modulator, acousto-optic modulator or chopper intensity modulation equipment.
6. photomicrography pumping according to claim 1 detects heat reflection system, it is characterised in that the right angle reflection
The reflected parallel degree of mirror is better than 5arc sec.
7. photomicrography pumping according to claim 1 detects heat reflection system, it is characterised in that the automatically controlled cold light
The angular adjustment precision of mirror is better than 1 microradian.
8. photomicrography pumping according to claim 1 detects heat reflection system, it is characterised in that the beam splitter
Light splitting ratio is 50: 50.
9. photomicrography pumping according to claim 1 detects heat reflection system, it is characterised in that digital camera
Photo-sensitive cell is located at the focal plane position of convex lens, and object lens constitute optical conjugate relation, object lens, convex lens, numeral with convex lens
Video camera and computer collectively form photomicrography subsystem.
10. photomicrography pumping according to claim 4 detects heat reflection system, it is characterised in that mutually put by lock
The data of big device collection calculate sample thermal conductivity.
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| CN201621393038.0U CN206258371U (en) | 2016-12-16 | 2016-12-16 | A kind of photomicrography pumping detects heat reflection system |
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| CN201621393038.0U CN206258371U (en) | 2016-12-16 | 2016-12-16 | A kind of photomicrography pumping detects heat reflection system |
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| CN206258371U true CN206258371U (en) | 2017-06-16 |
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| CN201621393038.0U Expired - Fee Related CN206258371U (en) | 2016-12-16 | 2016-12-16 | A kind of photomicrography pumping detects heat reflection system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106442335A (en) * | 2016-12-16 | 2017-02-22 | 中国科学院工程热物理研究所 | Microscopic visual pump-probe heat reflection system |
-
2016
- 2016-12-16 CN CN201621393038.0U patent/CN206258371U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106442335A (en) * | 2016-12-16 | 2017-02-22 | 中国科学院工程热物理研究所 | Microscopic visual pump-probe heat reflection system |
| CN106442335B (en) * | 2016-12-16 | 2024-04-09 | 中国科学院工程热物理研究所 | Microscopic visual pumping detection heat reflection system |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170616 Termination date: 20211216 |