CN206540818U - A kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping - Google Patents
A kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping Download PDFInfo
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- CN206540818U CN206540818U CN201621392098.0U CN201621392098U CN206540818U CN 206540818 U CN206540818 U CN 206540818U CN 201621392098 U CN201621392098 U CN 201621392098U CN 206540818 U CN206540818 U CN 206540818U
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- thermal conductivity
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Abstract
The utility model provides a kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping：The laser that pulse laser is sent is divided into two beams after the one 1/2 wave plate by the first polarization splitting prism；Laser beam one continues to transmit parallel through the first polarization splitting prism, sequentially passes through and cold mirror is reached after laser freuqency doubling module, short wave pass filter, laser modulator, shortwave speculum, wherein laser modulator is connected with signal generator；Laser beam two reaches cold mirror after sequentially passing through long wave speculum, corner cube mirror, the 2nd 1/2 wave plate, the second polarization splitting prism, quarter wave plate；Laser beam one reaches sample holder after converging with laser beam two by object lens, and wherein sample holder is fixed in three-D electric mobile station, and three-D electric mobile station is connected with servomotor controller；Laser beam two is passed sequentially through after object lens, cold mirror, quarter wave plate, the second polarization splitting prism after sample reflects by convex lens focus to photodetector.
Description
Technical field
The utility model belongs to thermal conductivity technical field of measurement and test, relates generally to ultrashort laser pulse pumping Detection Techniques, especially
It is related to a kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping.
Background technology
Micro-nano structure material widely applies to the fields such as microelectronics, photoelectron, and these micro elements operationally will
High heat flow density is produced, hot stack will directly influence the operating efficiency and reliability of such devices.Solve above-mentioned micro-
Device heat dissipation problem is extremely urgent, and it is accurate that this needs the thermotransport property of the micro-nano structure material to constituting above-mentioned micro element to carry out
Characterize, to disclose its thermotransport mechanism.Studying ultrafast thermodynamic process, it is often necessary to visit by super short pulse laser pumping
Survey technology.In traditional ultrashort laser pulse pumping detection system, the thermal conductivity of sample surfaces independent position can only be measured, and
Thermal conductivity in sample surfaces specified range can not be obtained to be distributed, this causes traditional measuring system can not meet microelectronics, photoelectricity
The fields such as son are to a large amount of demands with thermal conductivity distribution in microstructure sample surfaces specified range.
Utility model content
(1) technical problem to be solved
In view of above-mentioned technical problem, the utility model provides a kind of thermal conductivity for detecting heat reflection technology based on pumping and swept
Retouch system.
(2) technical scheme
According to one side of the present utility model, there is provided a kind of thermal conductivity scanning that heat reflection technology is detected based on pumping
System：The laser that pulse laser is sent is divided into two beams after the one 1/2 wave plate by the first polarization splitting prism, respectively swashs
Light beam one and laser beam two；Laser beam one continues to transmit parallel through the first polarization splitting prism, sequentially passes through laser freuqency doubling mould
Cold mirror, wherein laser modulator and signal generator are reached after block, short wave pass filter, laser modulator, shortwave speculum
Connection；Laser beam two sequentially passes through long wave speculum, corner cube mirror, the 2nd 1/2 wave plate, the second polarization splitting prism, 1/4 ripple
Cold mirror is reached after piece；Laser beam one reaches sample holder, wherein sample holder after converging with laser beam two by object lens
It is fixed in three-D electric mobile station, three-D electric mobile station is connected with servomotor controller, servomotor controller and meter
Calculation machine is connected；Laser beam two is passed sequentially through after sample reflects after object lens, cold mirror, quarter wave plate, the second polarization splitting prism
By convex lens focus to photodetector, photodetector is connected with lock-in amplifier, and lock-in amplifier is connected with computer.
Preferably, the stroke range of the three-D electric mobile station is more than the scope of scanning needed for sample, and three-D electric is moved
The mobile accuracy of dynamic platform is not more than the resolution ratio of scanning needed for sample.
Preferably, the corner cube mirror is fixed in linear mobile station, and the linear mobile station is connected with computer.
Preferably, the laser modulator is electrooptic modulator, acousto-optic modulator or chopper intensity modulation equipment.
Preferably, the spatial resolution of the thermal conductivity scanning system is better than 1 micron.
(3) beneficial effect
It can be seen from the above technical proposal that the utility model at least has the advantages that one of them：
(1) sample is fixed in three-D electric mobile station, by controlling three-D electric mobile station perpendicular to laser beam
Moved up and down in two dimensions of incident direction, realize that arbitrfary point thermal conductivity is measured in sample surfaces specified range；
(2) before each pumping detection measurement, by controlling three-D electric mobile station before laser beam incident parallel direction
After move, realize that full-automatic accurate control sample is located at the focal plane position of object lens；
(3) by controlling sample to be located at the focal plane position of object lens before each pumping detects measurement, sample table is realized
The accurate measurement that thermal conductivity is distributed in the specified range of face.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model embodiment.
【Main element】
1st, pulse laser；2nd, the one 1/2 wave plate；3rd, the first polarization splitting prism；4th, laser freuqency doubling module；5th, short-pass
Optical filter；6th, laser modulator；7th, signal generator；8th, shortwave speculum；9th, cold mirror；10th, object lens；11st, linear mobile station；
12nd, corner cube mirror；13rd, long wave speculum；14th, the 2nd 1/2 wave plate；15th, the second polarization splitting prism；16th, convex lens； 17、
Photodetector；18th, quarter wave plate；19th, lock-in amplifier；20th, computer；21st, servomotor controller；22nd, sample is fixed
Frame；23rd, three-D electric mobile station.
Embodiment
The technical thought of thermal conductivity scanning system for detecting heat reflection technology based on pumping that the utility model is provided is：Meter
Calculation machine control three-D electric mobile station moves up and down in two dimensions perpendicular to laser beam incident direction, often changes one
Secondary position, records current location information and carries out pumping detection measurement, it is defeated that lock-in amplifier gathers photodetector in real time
The pumping detectable signal gone out, computer obtains lock-in amplifier output signal in real time, and computer extracts lock-in amplifier output letter
Number amplitude signal component, while controlling three-D electric mobile station movable in laser beam incident parallel direction, in amplitude letter
Number component stops when maximum, and the process is carried out before each pumping detection measurement.
For the purpose of this utility model, technical scheme and advantage is more clearly understood, below in conjunction with specific embodiment, and
Referring to the drawings, the utility model is further described.
There is provided a kind of thermal conductivity that heat reflection technology is detected based on pumping in exemplary embodiment of the present utility model
Scanning system.Fig. 1 is the structural representation of the utility model embodiment.As shown in figure 1, of the present utility model based on pumping detection
The thermal conductivity scanning system of heat reflection technology includes：Pulse laser 1, the one 1/2 wave plate 2, the first polarization splitting prism 3, swash
Optical sccond-harmonic generation module 4, short wave pass filter 5, laser modulator 6, signal generator 7, shortwave speculum 8, cold mirror 9, object lens 10,
Linear mobile station 11, corner cube mirror 12, long wave speculum 13, the 2nd 1/2 wave plate 14, the second polarization splitting prism 15, convex lens
Mirror 16, photodetector 17, quarter wave plate 18, lock-in amplifier 19, computer 20, servomotor controller 21, sample holder
22nd, three-D electric mobile station 23.
The 800nm linearly polarized lasers that pulse laser 1 is exported deflect by the rear polarizer direction of the one 1/2 wave plate 2, so
It is afterwards two beams, respectively laser beam one and laser beam two by 3 points of the first polarization splitting prism, polarization direction is respectively level and perpendicular
Directly, laser beam one is as pumping light, and laser beam two makes laser beam one and laser beam two as detection light, the one 1/2 wave plate 2 of regulation
Power ratio be about 50:1, laser beam one continues to transmit parallel through the first polarization splitting prism 3, by laser freuqency doubling module
Then 4 rear portion shunt excitation optical sccond-harmonic generations filter out the 800nm wavelength lasers of non-frequency multiplication by short wave pass filter 5 to 400nm wavelength,
Then laser modulator 6 is passed through, its power level is loaded the signal that frequency is MHz ranks, and the signal comes from signal
Device 7, reaches cold mirror 9 after then being reflected by shortwave speculum 8, laser beam two is anti-by the first polarization splitting prism 3, long wave successively
Penetrate mirror 13 and corner cube mirror 12 reflects, wherein corner cube mirror 12 is fixed in linear mobile station 11, linear mobile station 11
Controlled by computer 20, then laser beam two passes through the 2nd 1/2 wave plate 14, the 2nd 1/2 wave plate 14 of adjustment makes the inclined of laser beam two
Direction shake from being changed into level vertically, then laser beam two reaches cold after sequentially passing through the second polarization splitting prism 15, quarter wave plate 18
Light microscopic 9, cold mirror 9 makes laser beam one mix conllinear propagation with laser beam two, and co-linear beams reach sample by object lens 10 and fixed
Frame 22, wherein sample holder 22 are fixed in three-D electric mobile station 23, three-D electric mobile station 23 and Serve Motor Control
Device 21 is connected, and it is inclined that laser beam two passes sequentially through arrival second after object lens 10, cold mirror 9 and quarter wave plate 18 after sample reflects
Shake Amici prism 15, and laser beam two passes twice through the rear polarizer direction of 1/4 wave plate 18 and is changed into vertical from level and divided by the second polarization
Light prism 15 is reflected, and the induction region of photodetector 17 is then focused on by convex lens 16, and its power level is converted into
Output voltage values, lock-in amplifier 19 separates the component of signal in voltage signal with the output signal same frequency of signal generator 7
And gather, lock-in amplifier 19 is connected with computer 20, the pumping that collection photodetector 17 is exported in real time of lock-in amplifier 19
Detectable signal, computer 20 obtains the output signal of lock-in amplifier 19 and extracts amplitude signal component, Serve Motor Control in real time
Device 21 is connected with computer 20, and the control of computer 20 three-D electric mobile station 23 is perpendicular to two of laser beam incident direction
Moved up and down in dimension, three-D electric mobile station 23 often changes a position, record current location information and carry out once
Pumping detection measurement, before pumping detection measurement, control three-D electric mobile station 23 is moved before and after laser beam incident parallel direction
It is dynamic, stop when amplitude signal component is maximum, now, sample is located at the focal plane position of object lens 10, pumping detection measurement process
In only linear mobile station 11 carry corner cube mirror 12 and move, collection photodetector 17 is exported lock-in amplifier 19 in real time
Pumping detectable signal, linear mobile station 11 often change a position computer 20 record the linear current location information of mobile station 11 and
The output signal of lock-in amplifier 19, until linear mobile station 11 is moved to maximum travel position, then changes three-D electric again
The position of mobile station 23 simultaneously repeats said process until scanning completes the Sample Scan region of setting.
Sample is located at the focal plane position of object lens 10 when the amplitude signal component of the output signal of lock-in amplifier 19 is maximum, because
This can make amplitude signal component maximum by controlling three-D electric mobile station 23 to be moved forward and backward in laser beam incident parallel direction
The mode of change automatically realizes that accurate control sample is located at the focal plane position of object lens 10.
Computer 20 controls three-D electric mobile station 23 to be moved similar to the scan mode S types of AFM,
It is measured transverse shifting three-D electric mobile station 23 to left side or right side measurement point after a measurement point to measure, in measurement
Three-D electric mobile station 23 to upside or downside measurement point is vertically moved after completion a line measurement point to measure, eventually through
Scan the whole measurement point formation sample surfaces thermal conductivity distribution maps of measured region.
The data that thermal conductivity data is gathered according to lock-in amplifier 19 are calculated.The spacescan of thermal conductivity scanning system
Resolution ratio is identical with the mobile accuracy of three-D electric mobile station 23, for selected three-D electric mobile station, spacescan resolution ratio
1 micron can be better than.
Pulse laser 1 is used for output line polarized pulses laser, using Mai Tai BB titanium sapphire femtosecond oscillating lasers
Device, pulse width is less than 1ps, preferably smaller than the 80fs, -990nm of wave-length coverage 710, and mean power is more than 1.5W.
One 1/2 wave plate 2 is used for the polarization direction for adjusting pulse laser output line polarized pulses laser, uses
The wave plate of Thorlabs WPH05M-808 zero levels 1/2.
First polarization splitting prism 3 is used to pulse laser being divided into the mutually perpendicular two beams laser in polarization direction, is respectively
Laser beam one and laser beam two, laser beam one are horizontal polarization, and laser beam two is vertical polarization, using Thorlabs PBS052
Polarizing beam splitter cube.
Laser freuqency doubling module 4 halves for the laser frequency of laser beam one to be doubled into wavelength, using BIBO frequency-doubling crystals,
Optimal input wavelength should be consistent with the output wavelength of pulse laser in laser freuqency doubling module.
Short wave pass filter 5 is used for the laser for filtering out non-frequency multiplication in laser beam one, using Thorlabs FESH0500 hard
Coating short wave pass filter.
Laser modulator 6 be used for by the signal loading of specific frequency specific waveforms to laser beam one, can for electrooptic modulator,
Acousto-optic modulator uses chopper intensity modulation equipment, it is preferred to use electrooptic modulator, and specially Conoptics M350-
160 electrooptic modulators.
The signal of specific frequency specific waveforms of the signal generator 7 needed for for producing laser modulator, is used
Keysight 33509B waveform generators.
Shortwave speculum 8 is used for the direction of propagation for changing laser beam one by reflecting, flat using Thorlabs BB05-E02
Face speculum.
Long wave speculum 13 is used for the direction of propagation for changing laser beam two by reflecting, using Thorlabs BB05-E03
Plane mirror.
Corner cube mirror 12 be used to making the direction of propagation of laser beam two parallel with original direction by reflection and on the contrary, using
Newport UBBR2.5-5S corner cube mirrors, its reflected parallel degree is better than 5 second of arcs.
Linear mobile station 11 is used to carry corner cube mirror motion, the light path of laser beam two is adjusted, using Newport M-
The linear mobile stations of IMS600PP.
2nd 1/2 wave plate 14 is used for the polarization direction for adjusting laser beam two, using Thorlabs WPH05M-808 zero levels 1/
2 wave plates.
Cold mirror 9 is used for reflection laser beam one, and transmission laser beam two makes laser beam one be mixed with laser beam two, realizes altogether
Line pumping is detected, using Thorlabs FM04 Cold Mirrors.
Object lens 10 are used to focus on laser beam one and laser beam two, using Edmund 10X EO M Plan Apo object lens.
Quarter wave plate 18 is used for the polarization direction for adjusting laser beam two, using the ripple of Thorlabs WPQ05M-808 zero levels 1/4
Piece.
Second polarization splitting prism 15 is used for the direction of propagation for changing laser beam two by reflecting, using Thorlabs
PBS052 polarizing beam splitter cubes.
Convex lens 16 are used to focus on laser beam two, and constitute micro imaging system with object lens, using Thorlabs
LA1461 planoconvex spotlights.
Photodetector 17 is used to the energy intensity of laser beam two being converted to output voltage intensity, and its wavelength inputted should
According to the selection of the output wavelength of pulse laser to ensure spiking output, it is preferred to use Thorlabs PDA36A silicon substrates across
Resistance amplification photodetector.
Lock-in amplifier 19 is used to gather in photodetector output voltage signal with signal generator output signal with frequency
The component of signal of rate, its incoming frequency scope covers the range of signal of laser modulator, it is preferred to use Stanford Research
SR844 lock-in amplifiers.
Sample holder 22 is used for fixed measured sample；Three-D electric mobile station 23 is used to carry sample holder shifting
It is dynamic, the relative position of adjustment sample and object lens, using the axle electricity driving displacement platforms of Thorlabs PT3/M-Z8 tri-, its stroke range is big
The scope scanned needed for sample, preferably stroke 25mm, and mobile accuracy is not more than the resolution ratio of scanning needed for sample.
Servomotor controller 21 is used to drive three-D electric mobile station to move, using Thorlabs KDC101K types cube
Body has brush DC servomotor controllers.
Computer 20 is used to control servomotor controller and linear mobile station, the signal of record lock-in amplifier collection and
The position of linear mobile station and three-D electric mobile station.
Sample is fixed in three-D electric mobile station by the utility model, is connected by servomotor controller and computer
Connect, computer obtains the data that lock-in amplifier is collected simultaneously, passes through the Treatment Analysis output control three-D electric to data
The movement of mobile station, it is possible to achieve following two purposes：Realize that Automatic Control sample surfaces are located at focal plane of lens position, it is real
Thermal conductivity measurement in arbitrfary point in existing sample surfaces specified range, both are implemented in combination with thermal conductivity in sample surfaces specified range and are distributed
Accurate measurement.
It should be noted that in accompanying drawing or specification text, the implementation for not illustrating or describing is affiliated technology
Form known to a person of ordinary skill in the art, is not described in detail in field.In addition, the above-mentioned definition to each element and method is simultaneously
Various concrete structures, shape or the mode mentioned in embodiment are not limited only to, those of ordinary skill in the art can carry out letter to it
Singly change or replace, for example：
(1) corner cube mirror can also use the orthogonally located form of normal mirror；
(2) lock-in amplifier can coordinate lock phase software to replace with high-speed data acquisition card；
It should also be noted that, the demonstration of the parameter comprising particular value can be provided herein, but these parameters are without definite etc.
In corresponding value, but analog value can be similar in acceptable error margin or design constraint.The side mentioned in embodiment
Only it is the direction of refer to the attached drawing such as " on ", " under ", "front", "rear", "left", "right" to term, not for limiting this
The protection domain of utility model.In addition, unless specifically described or the step of must sequentially occur, the order of above-mentioned steps is simultaneously unlimited
Be formed on it is listed above, and can according to it is required design and change or rearrange.And above-described embodiment can be based on design and reliable
The consideration of degree, the collocation that is mixed with each other is used or used with other embodiment mix and match, i.e., technical characteristic not in be the same as Example
More embodiments can be freely formed.
Although in addition, it will be appreciated by those of skill in the art that some embodiments described herein include other embodiments
In included some features rather than further feature, but the combination of the feature of be the same as Example does not mean in this practicality newly
Within the scope of type and form different embodiments.For example, in the following claims, embodiment claimed
One of any mode can use in any combination.
The utility model is limited it should be noted that above-described embodiment is illustrated rather than to the utility model,
And those skilled in the art can design alternative embodiment without departing from the scope of the appended claims.In right
It is required that in, any reference symbol between bracket should not be configured to limitations on claims.Word "comprising" is not arranged
Except there is element or step not listed in the claims.Word "a" or "an" before element does not exclude the presence of many
Individual such element.The utility model can be by means of including the hardware of some different elements and by means of properly programmed
Computer is realized.In if the unit claim of equipment for drying is listed, several in these devices can be by same
One hardware branch is embodied.The use of word first, second, and third does not indicate that any order.Can be by these lists
Word is construed to title.
Furthermore, word of the specification with the ordinal number used in claim such as " first ", " second ", " the 3rd ",
To modify corresponding element, itself simultaneously unexpectedly contains and represents the element and have any ordinal number, do not represent yet a certain element with it is another
Order in the order or manufacture method of one element, the use of those ordinal numbers is only used for obtaining the element with certain name
So that clear differentiation can be made with another element with identical name.
Particular embodiments described above, has carried out entering one to the purpose of this utility model, technical scheme and beneficial effect
Step is described in detail, be should be understood that and be the foregoing is only specific embodiment of the utility model, is not limited to this
Utility model, all within spirit of the present utility model and principle, any modification, equivalent substitution and improvements done etc. all should be wrapped
It is contained within protection domain of the present utility model.
Claims (5)
1. a kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping, it is characterised in that：What pulse laser was sent
Laser is divided into two beams, respectively laser beam one and laser beam two after the one 1/2 wave plate by the first polarization splitting prism；Laser
Beam one continues to transmit parallel through the first polarization splitting prism, sequentially passes through laser freuqency doubling module, short wave pass filter, laser and adjusts
Cold mirror is reached after device processed, shortwave speculum, wherein laser modulator is connected with signal generator；Laser beam two sequentially passes through length
Cold mirror is reached after wave reflection mirror, corner cube mirror, the 2nd 1/2 wave plate, the second polarization splitting prism, quarter wave plate；Laser beam one
Sample holder is reached by object lens after converging with laser beam two, wherein sample holder is fixed in three-D electric mobile station,
Three-D electric mobile station is connected with servomotor controller, and servomotor controller is connected with computer；Laser beam two passes through sample
Passed sequentially through after product reflection after object lens, cold mirror, quarter wave plate, the second polarization splitting prism by convex lens focus to photodetection
Device, photodetector is connected with lock-in amplifier, and lock-in amplifier is connected with computer.
2. the thermal conductivity scanning system according to claim 1 that heat reflection technology is detected based on pumping, it is characterised in that：Institute
The stroke range for stating three-D electric mobile station is more than the scope of scanning needed for sample, and the mobile accuracy of three-D electric mobile station is little
The resolution ratio scanned needed for sample.
3. a kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping according to claim 1, its feature is existed
In：The corner cube mirror is fixed in linear mobile station, and the linear mobile station is connected with computer.
4. the thermal conductivity scanning system according to claim 1 that heat reflection technology is detected based on pumping, it is characterised in that：Institute
Laser modulator is stated for electrooptic modulator, acousto-optic modulator or chopper intensity modulation equipment.
5. the thermal conductivity scanning system according to claim 1 that heat reflection technology is detected based on pumping, it is characterised in that：Institute
The spatial resolution for stating thermal conductivity scanning system is better than 1 micron.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621392098.0U CN206540818U (en) | 2016-12-16 | 2016-12-16 | A kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621392098.0U CN206540818U (en) | 2016-12-16 | 2016-12-16 | A kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping |
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| Publication Number | Publication Date |
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| CN206540818U true CN206540818U (en) | 2017-10-03 |
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| CN201621392098.0U Expired - Fee Related CN206540818U (en) | 2016-12-16 | 2016-12-16 | A kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106769881A (en) * | 2016-12-16 | 2017-05-31 | 中国科学院工程热物理研究所 | A kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping |
| CN109164136A (en) * | 2018-08-16 | 2019-01-08 | 中国科学院电工研究所 | Thermoelectricity transports parameter high pass system for measuring quantity and method |
| CN109211965A (en) * | 2018-03-12 | 2019-01-15 | 国家电投集团科学技术研究院有限公司 | Determination of conductive coefficients system |
| CN115047638A (en) * | 2022-06-10 | 2022-09-13 | 北京空间机电研究所 | Laser double-visual-direction scanning assembly system without mechanical movable part |
-
2016
- 2016-12-16 CN CN201621392098.0U patent/CN206540818U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106769881A (en) * | 2016-12-16 | 2017-05-31 | 中国科学院工程热物理研究所 | A kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping |
| CN109211965A (en) * | 2018-03-12 | 2019-01-15 | 国家电投集团科学技术研究院有限公司 | Determination of conductive coefficients system |
| CN109164136A (en) * | 2018-08-16 | 2019-01-08 | 中国科学院电工研究所 | Thermoelectricity transports parameter high pass system for measuring quantity and method |
| CN109164136B (en) * | 2018-08-16 | 2021-06-29 | 中国科学院电工研究所 | High-flux measurement system and method for thermoelectric transport parameters |
| CN115047638A (en) * | 2022-06-10 | 2022-09-13 | 北京空间机电研究所 | Laser double-visual-direction scanning assembly system without mechanical movable part |
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