CN106290167A - Acousto-optic deflection device and the parallel scan device of resonance scanner - Google Patents
Acousto-optic deflection device and the parallel scan device of resonance scanner Download PDFInfo
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- CN106290167A CN106290167A CN201610762078.6A CN201610762078A CN106290167A CN 106290167 A CN106290167 A CN 106290167A CN 201610762078 A CN201610762078 A CN 201610762078A CN 106290167 A CN106290167 A CN 106290167A
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- branch road
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
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Abstract
The invention discloses the parallel scan device of a kind of acousto-optic deflection device and resonance scanner, it includes acousto-optic deflection device, resonance scanner, light path switching component and controller, controller is initially used for controlling light path switching component makes incident laser enter the first scanning branch road at acousto-optic deflection device place, or controlling light path switching component makes incident laser enter the second scanning branch road at resonance scanner place, and control light path switching component makes the laser beam of the first scanning branch road and the second scanning branch road unify exit path.
Description
Technical field
The present invention relates to laser scanner technique field, particularly relate to sweeping parallel of a kind of acousto-optic deflection device and resonance scanner
Imaging apparatus.
Background technology
Along with industrial technology and the development of scientific research, people are more and more higher to the requirement of optical scanning equipment, both wish
The scope of scanning field of view is big, it is also desirable to the speed of scanning is faster.The raising of these sweep parameters is by scanning device parameter
Improve and realize.But the optimization of scanning device and exploitation are cycles the longest, and existing scanning device is respectively arranged with excellent lacking
Point.
Acousto-optic deflection device (AOD) is a kind of to utilize acoustooptical effect to change the diffractive optical element of laser direction.Its relative mechanical
Formula deflector has the feature of mechanical inertia, therefore can obtain faster scanning speed, and line-scanning frequency may be up to
80kHz, two-dimensional scan frequency may be up to 0.5kHz～2kHz.Its shortcoming is that sweep limits is less, swashs in scanning ultrashort pulse
Light time can introduce dispersion.
Resonance scanner (resonant scanner) is the mechanical scan device of a kind of high speed.It utilizes a reflecting mirror
It is in resonance state, thus obtains the line-scanning frequency of up to 12kHz.If respectively swept in the rotating stage of a resonance cycle
Retouch a line, then can obtain the line-scanning frequency of 24kHz.Resonance scanner, while high-velocity scanning, can keep bigger
Sweep limits.But its resonance line frequency is fixing, can only sacrifice by reducing line number amount when realizing faster scanning speed
Sampling density.The two-dimensional scan frequency being currently based on the scanner of resonance scanner the highest can only achieve 0.5kHz.Resonance
Scanning device another drawback is that its scanning speed is Sine distribution and nonlinear Distribution, result in a certain degree of illumination inequality
Even.
In consideration of it, the present invention needs the above-mentioned technical problem of solution badly.
Summary of the invention
The technical problem that present invention mainly solves is to provide one can realize big visual field refreshing frequency on a machine
Acousto-optic deflection device and the parallel scan device of resonance scanner with small field of view superelevation refreshing frequency.
For solving above-mentioned technical problem, the technical scheme that the present invention uses is: provide a kind of acousto-optic deflection device together
Shake the parallel scan device of scanning device, and it includes acousto-optic deflection device, resonance scanner, light path switching component and controller, controls
Device is initially used for controlling light path switching component makes incident laser enter the first scanning branch road at acousto-optic deflection device place, or controls
Light path switching component makes incident laser enter the second scanning branch road at resonance scanner place, and control light path switching component makes
The laser beam obtaining the first scanning branch road and the second scanning branch road unifies exit path.
Wherein, light path switching component includes the 1st/1st wave plate, the 1st/2nd wave plate, the first polarization spectro
Device, the second polarizing beam splitter, the first reflecting mirror and the second reflecting mirror, it is inclined that incident laser arrives first through the 1st/1st wave plate
Shake beam splitter, and incident laser is divided into horizontal polarization light and orthogonal polarized light by the first polarizing beam splitter, and controller controls vertical inclined
The light that shakes enters the first scanning branch road and arrives after acousto-optic deflection device is again by the second reflecting mirror reflection and the second polarizing beam splitter polarization
Exit path, or control horizontal polarization light successively via entering the second scanning branch road after the first reflecting mirror reflection successively through second
Exit path is arrived after 1/2nd wave plates, resonance scanner and the second polarizing beam splitter.
Wherein, light path switching device includes that the first electric reflector mirror, the second electric reflector mirror, the first reflecting mirror and second are anti-
Penetrating mirror, controller controls the first electric reflector mirror and leaves light path and make the second electric reflector mirror enter light path so that incident laser
Enter after the first scanning branch road is reflected via the second reflecting mirror and the second electric reflector mirror by acousto-optic deflection device again and arrive outgoing
Path, or control the first electric reflector mirror and enter light path and make the second electric reflector mirror leave light path so that incident laser warp
Enter the second scanning branch road after being reflected by the first electric reflector mirror and the first reflecting mirror and finally reach outgoing by resonance scanner
Path.
Wherein, the second reflecting mirror is the first galvanometer galvanometer.
Wherein, parallel scan device farther includes dispersion compensation unit and astigmatic compensation unit, along the first scanning branch road
Direction of propagation dispersion compensation unit, astigmatic compensation unit harmony light polarizer is successively set on the first scanning branch road.
Wherein, parallel scan device farther includes the second galvanometer galvanometer, and the direction of propagation along the second scanning branch road is total to
Shake scanning device and the second galvanometer galvanometer is successively set on the second scanning branch road.
Wherein, parallel scan device farther includes scanning lens, and scanning lens is arranged on exit path, for going out
Penetrate laser beam focus in objective plane.
The invention has the beneficial effects as follows: compared with prior art, parallel scan device of the present invention includes two scannings
Road, resonance scanner and acousto-optic deflection device are respectively arranged on a scanning branch road therein, by being switched fast scanning branch road
Mode can realize the rate of scanning of big visual field on same optical scanner more than 40Hz, two dimension less than 500Hz
Laser scanning, and the two dimensional laser scanning that the two-dimensional scan frequency of small field of view is more than 500Hz.
Accompanying drawing explanation
Fig. 1 is to be applied to acousto-optic polariser of the present invention and the light path switching component in the parallel scan device of resonance scanner
The structural representation of one better embodiment；
Fig. 2 is to be applied to acousto-optic polariser of the present invention and the light path switching component in the parallel scan device of resonance scanner
The structural representation of another better embodiment；
Fig. 3 is acousto-optic polariser of the present invention and the structure of a preferred embodiment of the parallel scan device of resonance scanner is shown
It is intended to；
Fig. 4 is the knot of acousto-optic polariser of the present invention and another better embodiment of the parallel scan device of resonance scanner
Structure schematic diagram.
Detailed description of the invention
The present invention provides the parallel scan device of a kind of acousto-optic deflection device and resonance scanner.Parallel scan device includes sound
Light deflector, resonance scanner, light path switching component and controller.Controller is initially used for controlling light path switching component and makes incidence
Laser enters the first scanning branch road at acousto-optic deflection device place, or control light path switching component makes incident laser entrance resonance sweep
Retouch the second scanning branch road at device place, and control light path switching component makes the first scanning branch road and second scan swashing of branch road
Light beam unifies exit path.
Refer to Fig. 1, Fig. 1 and provide the better embodiment of a kind of light path switching component, can be applicable to acousto-optic of the present invention
In the parallel scan device of polariser and resonance scanner.
In present embodiment, light path switching component specifically includes 1/2nd wave plates 11,16 and 14, polarizing beam splitter 12 He
15, reflecting mirror 13 and 17.Incident laser arrives polarizing beam splitter 12 through 1/2nd wave plates 11, and incidence is swashed by polarizing beam splitter 12
Light is divided into horizontal polarization light and orthogonal polarized light, selects orthogonal polarized light outgoing or horizontal polarization by the way of controller controls
Light outgoing is to select incident laser entrance the first scanning branch road or to enter the second scanning branch road.When selecting orthogonal polarized light outgoing,
The orthogonal polarized light of incident laser will enter the first scanning branch road and be reflected by reflecting mirror 17 and partially through 1/2nd wave plates 16 again
Exit path is arrived after the beam splitter 15 that shakes polarization；When selecting horizontal polarization light outgoing, the horizontal polarization light of incident laser is via instead
Enter the second scanning branch road after penetrating mirror 13 reflection and arrive exit path after 1/2nd wave plates 14 and polarizing beam splitter 15 polarize.
If acousto-optic deflection device and resonance scanner are respectively put in the first scanning branch road and the second scanning branch road, will to obtain one parallel
Scanning means.
Refer to Fig. 2, Fig. 2 and provide another better embodiment of a kind of light path switching component, can be applicable to the present invention
In the parallel scan device of acousto-optic polariser and resonance scanner.
In present embodiment, light path switching component includes electric reflector mirror 20 and 21, reflecting mirror 13 and 17.Pass through controller
The mode controlled selects electric reflector mirror 20 leave light path and make electric reflector mirror 21 enter light path, or selects electric reflector
Mirror 20 enters light path and makes electric reflector mirror 21 leave light path.When electric reflector mirror 20 leaves light path and electric reflector mirror 21 enters
Entering light path, incident laser enters after the first scanning branch road reflects via reflecting mirror 17 and electric reflector mirror 21 again and arrives out rays
Footpath；When electric reflector mirror 20 enters light path and electric reflector mirror 21 leaves light path, incident laser is via electric reflector mirror 20 and anti-
Enter the second scanning branch road after penetrating mirror 13 reflection and finally arrive exit path.If by acousto-optic deflection device and resonance scanner difference
Put in the first scanning branch road and the second scanning branch road and will obtain a parallel scanning means.
Refer to Fig. 3, Fig. 3 and provide a preferable reality of a kind of acousto-optic deflection device parallel scan device with resonance scanner
Execute example.
The present embodiment parallel scan device includes that acousto-optic deflection device 42, resonance scanner 30, light path switching component, dispersion are mended
Repay unit 40, astigmatic compensation unit 41 and galvanometer galvanometer 31.Wherein light path switching component includes 1/2nd wave plates 11 and 14,
Polarizing beam splitter 12 and 15, reflecting mirror 13 and galvanometer galvanometer 43.
Incident laser arrives polarizing beam splitter 12 through 1/2nd wave plates 11, and incident laser is divided into water by polarizing beam splitter 12
Flat polarized light and orthogonal polarized light, controller controls orthogonal polarized light outgoing or horizontal polarization light outgoing to select incident laser to enter
Enter the first scanning branch road or enter the second scanning branch road.When selecting orthogonal polarized light outgoing, the orthogonal polarized light of incident laser will
Enter the first scanning branch road and sequentially pass through dispersion compensation unit 40, astigmatic compensation unit 41, acousto-optic deflection device 42 again by galvanometer
Galvanometer 43 reflection and polarizing beam splitter 15 arrive exit path after polarizing；When selecting horizontal polarization light outgoing, the water of incident laser
Flat polarized light via reflecting mirror 13 reflect after enter second scanning branch road through 1/2nd wave plates 14 successively, resonance scanner 30,
Arrival exit path is polarized by polarizing beam splitter 15 after galvanometer galvanometer 31.
In other words, along dispersion compensation unit, astigmatic compensation unit harmony described in the direction of propagation of described first scanning branch road
Light polarizer is successively set on described first scanning branch road；Along resonance scan described in the direction of propagation of described second scanning branch road
Device and described second galvanometer galvanometer are successively set on described second scanning branch road.
Reflecting mirror 17 in Fig. 1, compared with light path switching device shown in Fig. 1, is replaced by the light path switching device in the present embodiment
It is changed to galvanometer galvanometer 43, additionally, the present embodiment acousto-optic deflection device 42 is unusual type acousto-optic polariser, diffraction light i.e. can be gone out
Penetrating the polarization state of light relative to incident illumination half-twist, serve the effect of 1/2nd wave plates, therefore, the present embodiment is without two points
One of wave plate.
Further, the present embodiment parallel scan device also includes scanning lens 50.Scanning lens 50 is arranged at out rays
On footpath, its essence is lens or a battery of lens, is used for making laser beam focus in objective plane.When swashing of parallel scan device
When connecing microscope after light exit path, scanning lens 50 will form telescope configuration with the cylinder mirror in microscope so that sweeps
Retouch plane microscope to be on focal plane, and the laser entering object lens is parallel collimated light.
Refer to Fig. 4, Fig. 4, to provide another of a kind of acousto-optic deflection device and the parallel scan device of resonance scanner preferable
Embodiment.
The present embodiment parallel scan device includes that acousto-optic deflection device 42, resonance scanner 30, light path switching component, dispersion are mended
Repay unit 40, astigmatic compensation unit 41 and galvanometer galvanometer 31.Wherein, light path switching component includes electric reflector mirror 20,21, instead
Penetrate mirror 13 and galvanometer galvanometer 43.
Controller controls electric reflector mirror 20 and leaves light path and make electric reflector mirror 21 enter light path, or controls electronic
Reflecting mirror 20 enters light path and makes electric reflector mirror 21 leave light path.When electric reflector mirror 20 leaves light path and electric reflector mirror
21 enter light path, and incident laser enters the first scanning branch road and sequentially passes through dispersion compensation unit 40, astigmatic compensation unit 41, acousto-optic
Deflector 42 arrives exit path after reflecting via galvanometer galvanometer 43 and electric reflector mirror 21 again；When electric reflector mirror 20 enters
Light path and electric reflector mirror 21 leaves light path, incident laser enters second after reflecting via electric reflector mirror 20 and reflecting mirror 13 and sweeps
Retouch branch road and finally arrive exit path through resonance scanner 30 successively, galvanometer galvanometer 31.
Reflecting mirror 17 in Fig. 2, compared with light path switching device shown in Fig. 2, is replaced by the light path switching device in the present embodiment
It is changed to galvanometer galvanometer 43.
Further, the present embodiment parallel scan device also includes scanning lens 50.Scanning lens 50 is arranged at out rays
On footpath, its essence is lens or a battery of lens, is used for making laser beam focus in objective plane.When swashing of parallel scan device
When connecing microscope after light exit path, scanning lens 50 will form telescope configuration with the cylinder mirror in microscope so that sweeps
Retouch plane microscope to be on focal plane, and the laser entering object lens is parallel collimated light.
The present invention has application valency in fields such as micro-imaging, laser display and record system, laser printing, Laser Processings
Value.
Being different from prior art, parallel scan device of the present invention includes two scanning branch roads, resonance scanner 30 harmony
Light deflector 42 is respectively arranged on a scanning branch road therein, can be same by the way of being switched fast scanning branch road
Realize the rate of scanning of big visual field on platform optical scanner more than 40Hz, two dimensional laser scanning less than 500Hz, and neglect
The two-dimensional scan frequency of the field two dimensional laser scanning more than 500Hz.
The foregoing is only embodiments of the present invention, not thereby limit the scope of the claims of the present invention, every utilization is originally
Equivalent structure or equivalence flow process that description of the invention and accompanying drawing content are made convert, or are directly or indirectly used in what other were correlated with
Technical field, is the most in like manner included in the scope of patent protection of the present invention.
Claims (7)
1. an acousto-optic deflection device and the parallel scan device of resonance scanner, it is characterised in that described parallel scan device bag
Including acousto-optic deflection device, resonance scanner, light path switching component and controller, described controller is initially used for controlling described light path and cuts
Change assembly make incident laser enter acousto-optic deflection device place first scanning branch road, or control described light path switching component make into
Penetrate laser and enter the second scanning branch road at described resonance scanner place, and control described light path switching component and make described the
The laser beam of one scan branch road and described second scanning branch road unifies exit path.
Parallel scan device the most according to claim 1, it is characterised in that described light path switching component includes the one or two point
One of wave plate, the 1st/2nd wave plate, the first polarizing beam splitter, the second polarizing beam splitter, the first reflecting mirror and second reflection
Mirror, described incident laser arrives described first polarizing beam splitter through the 1st/1st wave plate, and the first polarizing beam splitter is by described
Incident laser is divided into horizontal polarization light and orthogonal polarized light, and described controller controls described orthogonal polarized light entrance described first and sweeps
Retouch branch road and arrive described exit path after acousto-optic deflection device is again by the second reflecting mirror reflection and the second polarizing beam splitter polarization, or
Person controls described horizontal polarization light successively via entering described second scanning branch road after described first reflecting mirror reflection successively through institute
Described exit path is arrived after stating the 1st/2nd wave plate, resonance scanner and the second polarizing beam splitter.
Parallel scan device the most according to claim 1, it is characterised in that described light path switching device includes that first is electronic
Reflecting mirror, the second electric reflector mirror, the first reflecting mirror and the second reflecting mirror, described controller controls described first electric reflector mirror
Leave light path and make described second electric reflector mirror enter light path so that described incident laser enters described first scanning branch road
Described exit path is arrived after being reflected via the second reflecting mirror and the second electric reflector mirror again by described acousto-optic deflection device, or
Control described first electric reflector mirror to enter light path and make described second electric reflector mirror leave light path so that described incidence swashs
Light is entered described second scanning branch road and is swept by described resonance after reflecting via described first electric reflector mirror and the first reflecting mirror
Retouch device and finally reach described exit path.
4. according to the parallel scan device described in Claims 2 or 3, it is characterised in that described second reflecting mirror is the first inspection stream
Meter galvanometer.
Parallel scan device the most according to claim 1, it is characterised in that described parallel scan device farther includes color
Dissipate compensating unit and astigmatic compensation unit, mend along dispersion compensation unit, astigmatism described in the direction of propagation of described first scanning branch road
Repay unit harmony light polarizer to be successively set on described first scanning branch road.
Parallel scan device the most according to claim 1, it is characterised in that described parallel scan device farther includes
Two galvanometer galvanometers, depend on along resonance scanner and described second galvanometer galvanometer described in the direction of propagation of described second scanning branch road
Secondary be arranged on described second scanning branch road on.
Parallel scan device the most according to claim 1, it is characterised in that described parallel scan device farther includes to sweep
Retouching lens, described scanning lens is arranged on described exit path, for being focused in objective plane by shoot laser bundle.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610762078.6A CN106290167B (en) | 2016-08-30 | 2016-08-30 | The parallel scan device of acousto-optic deflection device and resonance scanner |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610762078.6A CN106290167B (en) | 2016-08-30 | 2016-08-30 | The parallel scan device of acousto-optic deflection device and resonance scanner |
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| CN106290167B CN106290167B (en) | 2019-09-27 |
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| CN110488248A (en) * | 2019-08-26 | 2019-11-22 | 苏州迈斯泰克达光电科技有限公司 | A kind of array scanning laser radar installations based on acousto-optic deflection device |
| CN110850659A (en) * | 2019-11-27 | 2020-02-28 | 中国航空工业集团公司北京长城计量测试技术研究所 | Microscale laser measurement scanning device |
| CN112925095A (en) * | 2021-01-29 | 2021-06-08 | 江苏德恩医学技术有限公司 | Double-sided film coating galvanometer, extensible high-speed scanning galvanometer group and microscope |
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| CN112925095A (en) * | 2021-01-29 | 2021-06-08 | 江苏德恩医学技术有限公司 | Double-sided film coating galvanometer, extensible high-speed scanning galvanometer group and microscope |
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| CN106290167B (en) | 2019-09-27 |
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