CN205899028U - Laser range measurement system - Google Patents

Abstract

The utility model relates to a measure technical field, concretely relates to laser range measurement system, the laser source includes two at least laser source units, every laser source unit jets out a branch of laser beam separately, displacement adjusting device includes the driving part, follower and locating part, the follower slides and sets up on the driving part, and slide the setting on the locating part, make and remove the driving part, the follower moves under the effect of driving part, and the slip direction of the relative driving part of follower is more than or equal to 60 degrees with the slip angular separation of the relative locating part of follower, remove the speculum setting on the follower, two bundle at least laser that come from the laser source are through closing the synthetic a branch of compound light back directive beam splitter of light device, a branch of compound light that comes from the beam splitter passes through beam splitting device, after beam splitting device divides into two bundles of at least monochromatic light according to the difference of wavelength with this shu fuhe light, make each monochromatic light follow not equidirectional jetting out, measuring result is more accurate, measurement accuracy is higher.

Description

A kind of LDMS

Technical field

This utility model is related to field of measuring technique and in particular to a kind of LDMS.

Background technology

The appearance of laser instrument, makes ancient interference technique be developed rapidly, and laser has brightness height, good directionality, list The features such as color and coherence are good, laser interferometry techniques comparative maturity.Laser interferometry system application is very wide General: accurate length, the measurement such as linear scale, grating, gauge block, the detection of precision lead screw of angle；Detection and localization in precision instrument The control of system such as precision optical machinery, correction；Position detecting system in large scale integrated circuit special equipment and detecting instrument；Micro- Undersized measurement etc..At present, in most of laser interference length-measuring systems, all employ Michelson's interferometer or similar Light channel structure, such as, conventional single frequency laser interferometer at present.

Single frequency laser interferometer is the light beam sending from laser instrument, is divided into two-way by beam splitter after beam-expanding collimation, and point Do not reflect can be combined in beam splitter from stationary mirror and moving reflector and produce interference fringe.When moving reflector moves When dynamic, the light intensity change of interference fringe is converted to electric impulse signal by the photo-electric conversion element in receptor and electronic circuit etc., Shaped, amplify after input forward-backward counter calculate overall pulse number n, then by electronic computer press calculating formula l=n × λ/2, formula Middle λ is optical maser wavelength, calculates the displacement l of moving reflector.

Laser interferometer requires laser interference light path to be always maintained at interference state in measurement process, and this is for measurement process Propose very high requirement.For solving drawback present in laser interferometry techniques, technical staff proposes multiwavelength laser Interfeerometry ranging technology, this technology only needs the starting point in measurement to keep interference state with terminating point, and pilot process need not keep The interference state of light path.In existing conventional techniques, multiwavelength laser interfeerometry ranging technology is using multiple independent lasing light emitters Unit forms lasing light emitter, and each laser cell projects a monochromic beam, and the light beam of all laser cells is all penetrated and moved in the same face On reflecting mirror, as shown in figs. 1 and 2 although each light beam is incident on the same face of mobile mirror, but, it is incident on mobile anti- Penetrate the diverse location on mirror surface, due to the mismachining tolerance of mobile mirror, mobile mirror reflecting surface each position not exclusively exists On same plane, cause the original position of each laser beam different, form measurement error, affect certainty of measurement.

So, based on above-mentioned deficiency, need a kind of device that can improve laser interferometer measurement precision at present badly.

Utility model content

The purpose of this utility model is: it is limited to optical maser wavelength for current laser interferometer precision, and measuring environment The deficiency that optical maser wavelength is had a direct impact, provides a kind of precision higher LDMS.

To achieve these goals, the technical solution adopted in the utility model is:

A kind of LDMS, including lasing light emitter, fixed pan reflecting mirror, beam splitter, interferometry photodetector, Mobile mirror, described lasing light emitter includes at least two laser source units, and each described laser source unit each projects a branch of sharp Light beam, the wavelength of each described laser source unit outgoing laser beam is each unequal, also include displacement adjustment device, Multiplexing apparatus and Light-dividing device,

Described displacement adjustment device includes driving link, driven member and locating part, and described driven member is slidably arranged in described master On moving part, and it is slidably arranged on described locating part, make mobile described driving link, described driven member is in the effect of described driving link Lower motion, and the slip of the glide direction described locating part relative with described driven member of the relatively described driving link of described driven member Angular separation is more than or equal to 60 degree, and mobile mirror is arranged on described driven member,

At least two bundle laser from described lasing light emitter synthesize directive beam splitting after a branch of complex light by described Multiplexing apparatus Mirror,

A branch of complex light from beam splitter passes through described light-dividing device, and this is restrainted by described light-dividing device by the difference of wavelength After complex light is divided at least two monochromic beams, each monochromatic light is made to project along different directions.

Preferably, described driving link and described driven member are magnetic material and make, described driving link and described driven State that part is in that there is a natural attraction between the sexes, so, it is possible preferably to control the displacement accuracy of driven member, that is to say and can improve shifting further The displacement accuracy of dynamic reflecting mirror is so that the certainty of measurement of LDMS is higher more accurate.

Preferably, mobile described driving link is subjected to displacement, there is position in described driven member under the drive of described driving link Move, the displacement of described driven member is perpendicular with the displacement of described driving link, so, be easy to calculate, structure is simply easy to process, with When the convenient movement controlling driving link and driven member.

Preferably, locating part includes limited block, described limited block is arranged on the both sides of driven member, for limiting driven member The direction of motion along driving link moves, and so, the simpler cost of device is cheaper.

Preferably, being provided with the inclined-plane tilting with respect to its direction of motion on described driving link, described driven member slides It is arranged on this inclined-plane, so, device is simple, can reduce processing cost.

Preferably, described inclined-plane is less than or equal to 5 degree with the angle of the direction of motion of described driving link, so, can enter One step improves the displacement accuracy of mobile mirror so that the certainty of measurement of LDMS is higher more accurate.

Preferably, inclusion support member, described locating part is fixedly installed on described support member, and described driving link slides and sets Put on described support member.

Preferably, described displacement adjustment device also includes driving the driving means of described driving link movement, described driving Device is Piezoelectric driving means, can be by the work(of mechanical energy and the mutual phase transformation of electric energy using Piezoelectric driving means Can ceramic material, necessarily/mono- micro- of its deformation quantity very little producing under electric field action, no more than size itself Thin tail sheep, has good repetitive distortion recovery capability, good stability, high precision, further increases the application accurate displacement The accuracy of device and reliability.

Preferably, described Multiplexing apparatus include closing light mirror, make the one side of closing light mirror described in beam of laser directive, another bundle The reflected light of the another side of closing light mirror described in laser directive, the transmitted light of this beam of laser and this another beam of laser is by described closing light The same position of mirror forms a branch of recombination laser after projecting.

Preferably, described light-dividing device includes spectroscope, recombination laser beam to described spectroscope it is intended that wavelength swash There is transmission/reflection/angle in light, the laser of other wavelength occurs reflection/transmission.

In sum, due to employing technique scheme, the beneficial effect of the application is:

1st, multiple laser is synthesized a branch of recombination laser directive beam splitter, through beam splitter directive mobile mirror also only There is a branch of synthesis light, this is equivalent to each wavelength laser and is incident on the same position of mobile mirror, so, each wavelength laser Reflection initial position identical, the path length difference of optical interference circuit is identical, it can be avoided that the survey bringing because of mobile mirror mismachining tolerance Amount error, meanwhile, prior art will solve this problem all using high precision movement reflecting mirror, and cost is high, and the application can Reduces cost while improving certainty of measurement；

2nd, driven member be more than relative to the angle r of the glide direction of driving link and the glide direction of driven member relative limit part or Equal to 60 degree, the displacement of driving link is more than the displacement of driven member, so, it is possible to make the displacement accuracy of driven member higher, energy Enough displacement accuracies more accurately controlling driven member, thus the displacement accuracy of mobile mirror is higher, and then make Laser Measuring Certainty of measurement away from system is higher；

3rd, multiple laser is synthesized a branch of recombination laser directive beam splitter, through beam splitter directive mobile mirror also only There is a branch of synthesis light, this is equivalent to each wavelength laser and is incident on the same position of mobile mirror, so, each wavelength laser Reflection initial position identical, the path length difference of optical interference circuit is identical, it can be avoided that the survey bringing because of mobile mirror mismachining tolerance Amount error, meanwhile, prior art will solve this problem all using high precision movement reflecting mirror, and cost is high, and the application can Reduces cost while improving certainty of measurement.

Brief description

Fig. 1 is the structural representation of the application device；

Fig. 2 is the moving direction relation schematic diagram of each parts of the application displacement adjustment device；

Fig. 3 is different from the moving direction relation schematic diagram of each parts of Fig. 2 for the application；

Fig. 4 is driving link and driven member matching relationship schematic diagram；

Fig. 5 is the structural representation of the driving link in Fig. 4；

Fig. 6 is to be different from the driving link of Fig. 4 and another kind of matching relationship schematic diagram of driven member；

Fig. 7 is to be different from the driving link of Fig. 6 and another kind of matching relationship schematic diagram of driven member；

Fig. 8 is the structural representation of the driving link in Fig. 7；

Fig. 9 is the driving link direction of motion schematic diagram being different from Fig. 2；

Figure 10 is the driving link direction of motion schematic diagram being different from Fig. 9；

Figure 11 is another kind of structural representation of the Multiplexing apparatus being different from Fig. 1；

Figure 12 is that the existing light source multiwavelength laser that separates interferes Models of Absolute Distance Measurement Based system schematic；

In figure labelling: 1- lasing light emitter, 1012- laser source unit, 107- Multiplexing apparatus, 102- beam splitter, 103- is fixing flat Face reflecting mirror, 105- mobile mirror, 2- driving link, 3- driven member, 4- limited block, 5- driving means, 7- support member, 71- keeps off Plate, 72- support platform, 1071- closing light mirror, 1072- mono- combines light microscopic, 108- light-dividing device, 1081- spectroscope, and 104- interferes Measurement photodetector.

Specific embodiment

Below in conjunction with the accompanying drawings, this utility model is described in detail.

In order that the purpose of this utility model, technical scheme and advantage become more apparent, below in conjunction with accompanying drawing and enforcement Example, is further elaborated to this utility model.It should be appreciated that specific embodiment described herein is only in order to explain this Utility model, is not used to limit this utility model.

Beam splitter described herein refers to the Optical devices that light beam can be divided into multi beam, generally by optics Coating film on glass forms；Spectroscope refers to the Optical devices decomposing out by monochromatic light from complex light.

As shown in figs. 1-11, a kind of LDMS, including lasing light emitter 1, fixed pan reflecting mirror 103, beam splitter 103rd, interferometry photodetector 104, mobile mirror 105 and Multiplexing apparatus 107, lasing light emitter 1 includes at least two laser Source unit 1012, each laser source unit 1012 each projects one laser beam, each laser source unit 1012 outgoing laser beam Wavelength each unequal, come self-excitation light source 1 at least two bundle laser directives after Multiplexing apparatus 107 synthesize a branch of recombination laser Beam splitter 103, Multiplexing apparatus 107 include closing light mirror 1071, and closing light mirror 1071 is provided with plated film, make beam of laser directive closing light The one side of mirror 1071, the another side of another beam of laser directive closing light mirror 1071, the transmitted light of this beam of laser and this another Shu Ji The reflected light of light forms a branch of recombination laser, closing light mirror 1071 and existing spectroscope by the same position of closing light mirror 1071 after being projected 1081 principle is identical, and except for the difference that the emergent light of spectroscope 1081 becomes the incident illumination of closing light mirror 1071, light-dividing device 108 Including spectroscope 1081, light beam can be divided into two-beam by a spectroscope 1081, and spectroscope 1081 is ready-made goods, need not Design customization, reduces the cost of the application system, and further, recombination laser beam is to spectroscope it is intended that the laser of wavelength There is transmission/reflection/angle, the laser of other wavelength occurs reflection/transmission, so, multiple laser synthesized a branch of recombination laser directive Beam splitter 103, through beam splitter 103 directive mobile mirror 105 also only have a branch of synthesis light, this be equivalent to each wavelength swash Light is incident on the same position of mobile mirror 105, and so, the reflection initial position of each wavelength laser is identical, optical interference circuit Path length difference identical, it can be avoided that the measurement error brought because of mobile mirror 105 mismachining tolerance, meanwhile, prior art will solve , all using high precision movement reflecting mirror 105, cost is high, and the application is without high precision movement reflecting mirror 105, energy for this problem of determining Enough reduces costs while improving certainty of measurement.

Because laser is affected by humidity, temperature etc. in air, wavelength can change, and affects certainty of measurement, by the application LDMS calibration reduces the impact of wavelength change, and its certainty of measurement improves further, and calibration steps is as follows:

1st, displacement adjustment device is attached on testee, debugging light path is so that LDMS is in interference shape State；

2nd, the interferometry photodetector measurement number of LDMS resets；

3rd, mobile testee, by mobile for testee to measuring terminal, reads the measured interference light of LDMS The count value of electric explorer；

4th, testee stop motion, LDMS command displacement adjusting means moves s₁, read laser ranging system The count value of the interferometry photodetector of system, obtains integer part n₁With fractional part δ n₁；

5th, continue step 4, each time adjusting means displacement amount of movement is different, record laser ranging after each adjusting apparatus motion The count value of the interferometry photodetector of system；

6th, ask for being corrected the exact value of optical maser wavelength according to following equations group, will be mutually mutual two-by-two for the equation in equation group Subtract, ask for λ value, finally calculate the average of all λ asking for, using this average as a certain optical maser wavelength corrected value.

Meanwhile, if using optical maser wavelength as exact value, the semi-gloss of the optical interference circuit of deemphasis positive mobile mirror initial position Path difference l, then go to calibrate wavelength X using the l value after calibration, then l is calculated using the λ after calibration, so circulate, be obtained in that accurately More accurate λ value, improves the precision of the application LDMS further.

$\left\{\begin{array}{c}{s}_1+l=(n_1+\mathrm{\δ}{n}_1)\×\mathrm{\λ}\\ s_2+l=(n_2+\mathrm{\δ}{n}_2)\×\mathrm{\λ}\\ ......\\ s_n+l=(n_n+\mathrm{\δ}{n}_n)\×\mathrm{\λ}\end{array}\right.$

In formula:

After sn- n-th is mobile, mobile mirror is with respect to the displacement of initial position,

L- mobile mirror initial position and the distance of beam splitter,

The integer part of mobile mirror interferometry photodetector reading after the mobile mobile mirror of nn- n-th,

δn_nThe fractional part of mobile mirror interferometry photodetector reading after the mobile mobile mirror of-n-th

The wavelength of λ-a certain laser.

Closing light mirror 1071 is at least two, another closing light mirror 1071 of emergent light directive that a closing light mirror 1071 closes, one Two-beam can be synthesized a branch of recombination laser by individual closing light mirror 1071, and two closing light mirrors 1071 can a branch of for three beams light compositing be combined Laser, n+1 can be restrainted a branch of recombination laser of light compositing by n closing light mirror 1071, that is, closing light mirror 1071 quantity is more, with regard to energy Enough more light beams are synthesized a branch of recombination laser, one-wavelength laser is more, and the precision of test system is higher, test is also more accurate Really.

As shown in figure 11, two closing light mirrors 1071 form a combination light microscopic 1072, often two conjunctions in combination light microscopic 1072 Light microscopic 1071 is in 90 degree of angle arrangements, and the reflecting surface of this two closing light mirrors 1071 is relatively, and so, structure is simple, stably may be used Lean on.

As shown in figure 12, including at least two combination light microscopics 1072, often combination one of light microscopic 1072 closing light mirror 1071 with Another group of a closing light mirror 1071 is parallel, and the reflecting surface of this two closing light mirrors 1071 is relatively, so, can be by multiple monochromes The a branch of recombination laser of light compositing, closing light mirror 1071 is ready-made goods, without design customization, reduces the cost of the application system.

The application LDMS also includes light-dividing device 108, a branch of recombination laser being projected by mobile mirror 105 Through beam splitter 103 reflection after inject light-dividing device 108, light-dividing device 108 by wavelength difference by this bundle recombination laser be divided into After few two monochromic beams, each monochromatic light is made to project along different directions, and directive respective interferometry photodetector 104, such as This, each one-wavelength laser is finally that individually separate carrying out is interfered, and disclosure satisfy that the testing requirement of system.

Spectroscope 1081 is at least two, a branch of one spectroscope 1081 of recombination laser directive, this spectroscope 1081 Transmission/reflection/angle goes out a kind of monochromatic light, and reflection/transmission goes out another kind of recombination laser, this another kind of recombination laser directive another Multiple monochromatic photosynthetic recombination lasers so, can be divided into monochromatic light, spectroscope 1081 is ready-made goods by spectroscope 1081, Without design customization, reduce the cost of the application system.

Two spectroscopes 1081 form one group of spectroscope, and two in every group spectroscope 1081 is in 90 degree of angle arrangements, and And the reflecting surface of this two spectroscopes 1081 is relatively, so, structure is simple, reliable and stable.

Including at least two groups of spectroscopes, one of every group of spectroscope spectroscope 1081 and another group of a spectroscope 71 Parallel, and the reflecting surface of this two spectroscopes 1081 is relatively, so, multiple monochromatic photosynthetic subdivision light is divided into monochrome Light, spectroscope 1081 is ready-made goods, without design customization, reduces the cost of the application system.

As shown in Fig. 1～10, displacement adjustment device includes driving link 2, driven member 3 and locating part, and driven member 3 slides and arranges On driving link 2, and it is slidably arranged on locating part, under the collective effect of driving link 2 and locating part, driven member 3 can only be along one The motion of individual direction, makes mobile driving link 2, driven member 3 moves in the presence of driving link 2 and is subjected to displacement, and driven member 3 phase With the angle r of the glide direction of driven member 3 relative limit part, 60 degree are more than or equal to the glide direction of driving link 2, driving link 2 Moving direction driven member 3 relative with driving link 2 slide direction angle f be less than or equal to 30 degree, mobile mirror setting On driven member 3, displacement adjustment device is arranged on testee, so, when testee is subjected to displacement, testee band Dynamic displacement adjustment device, and then drive mobile mirror.

As shown in Figures 2 and 3, driving link 2 moves in the y-direction, and driven member 3 moves in the presence of driving link 2 in the x-direction And be subjected to displacement, driven member 3 driving link 2 relatively moves along a direction, and driven member 3 glide direction a of driving link 2 relatively with The angle r of glide direction x of driven member 3 relative limit part is more than or equal to 60 degree, the moving direction y of driving link 2 and driving link 2 First 30 degree are less than or equal to the angle f of the direction b that driven member 3 slides, the displacement of driving link 2 is more than the displacement of driven member 3 Amount, so, it is possible to make the displacement accuracy of driven member 3 higher, can more accurately control the displacement accuracy of driven member 3, thus The displacement accuracy of mobile mirror is higher, so make LDMS certainty of measurement higher.

Driving link 2 and driven member 3 are magnetic material and make, state that driving link 2 and driven member 3 are in that there is a natural attraction between the sexes, make Driving link 2 and driven member 3 are in all the time and are close to state, so, it is possible to avoid producing in driven member 3 driving link 2 motor process relatively Raw gap affects the displacement accuracy of driven member 3, simultaneously it is also possible to driven member 3 is in effect of inertia after avoiding driving link 2 stop motion Lower continuation is moved and the displacement accuracy of driven member 3 is difficult to control to, and so that driving link 2 and driven member 3 is in all the time and be close to state The displacement accuracy of driven member 3 can preferably be controlled, that is to say the displacement accuracy that can improve mobile mirror further so that The certainty of measurement of LDMS is higher more accurate.

The inclined-plane tilting with respect to its direction of motion is provided with driving link 2, driven member 3 is slidably arranged on this inclined-plane, That is the sliding contact surface of driving link 2 and driven member 3 is plane, and this plane is tilted with the direction of motion of driving link 2, Now, the angle of the glide direction of this plane and driving link 2 as angle f shown in Fig. 2 and Fig. 3, driving link 2 and driven member 3 Sliding contact surface can be multiple faces, male and fomale(M＆F) as shown in Figure 4 and Figure 5, wavy surface as shown in Figure 6 and as shown in Figure 7 Plane, wherein, is easily worked with plane, processing cost is minimum the most.

Move driving link 2 in the y-direction and be subjected to displacement ya, driven member 3 is subjected to displacement xa in drive lower edge x of driving link 2, from The displacement of moving part 3 is vertical with the displacement of driving link 2, so, angle r+f=90 degree in Fig. 2 and Fig. 3, xa=ya × cot (r), side Just calculate, meanwhile, structure is simple, the convenient movement controlling driving link 2 and driven member 3.Additionally, the displacement of driven member 3 and active The displacement of part 2 can also out of plumb, as shown in Figure 9 and Figure 10, be two kinds of mutation modes of the application.

The angle f of the direction of motion of inclined-plane and described driving link 2 is less than or equal to 5 degree, and particularly, this angle f is 1 degree, 2 Degree, 3 degree, 4 degree or 5 degree, inclined-plane is less with the angle f of the direction of motion of described driving link 2, the displacement of driving link 2 with driven The ratio of the displacement of part 3 is bigger, the displacement accuracy of driven member 3 higher that is to say, that the motion side of inclined-plane and described driving link 2 To angle f less, the displacement accuracy of mobile mirror is higher, and the certainty of measurement of LDMS is higher.

Displacement adjustment device includes support member 7, and support member 7 includes support platform 72 and baffle plate 71, and locating part is fixedly installed In support platform 72, driving link 2 is slidably arranged on support platform.

Locating part includes limited block 4, and limited block 4 is arranged on the both sides of driven member 3, for limiting driven member 3 along driving link 2 The direction of motion move.Locating part can be various ways, for example, can be provided in the chute on support member 7, may also be in limit The both sides setting limited block 4 of position part, but, this kind of mode limits the both sides of driven member 3 simultaneously, compared with this mode, this Embodiment only arranges limited block 4 in the both sides of driven member 3, due to having lacked a limited block 4, therefore frictional force is less and device more Plus simply cost is cheaper.

Displacement adjustment device also includes driving the driving means of driving link movement, and driving means drive dress for Piezoelectric Put, can be by the ceramic material of mechanical energy and the mutual phase transformation of electric energy using Piezoelectric driving means, it is made in electric field With the deformation quantity very little of lower generation, no more than size itself 1/10000000th micro-displacement, have good reciprocal Deformation recovery capability, good stability, high precision, further increase accuracy and the reliability of the application accurate displacement device.

All any modification, equivalent and improvement made within spirit of the present utility model and principle etc., all should wrap It is contained within protection domain of the present utility model.

Claims (10)

1. a kind of LDMS, including lasing light emitter, fixed pan reflecting mirror, beam splitter, interferometry photodetector, shifting Dynamic reflecting mirror, described lasing light emitter includes at least two laser source units, and each described laser source unit each projects beam of laser Bundle, the wavelength of each described laser source unit outgoing laser beam each unequal it is characterised in that also include displacement adjustment device, Multiplexing apparatus and light-dividing device,

Described displacement adjustment device includes driving link, driven member and locating part, and described driven member is slidably arranged in described driving link On, and be slidably arranged on described locating part, make mobile described driving link, described driven member is transported in the presence of described driving link Dynamic, and the glide direction of the glide direction described locating part relative with described driven member of the relatively described driving link of described driven member Angle is more than or equal to 60 degree, and mobile mirror is arranged on described driven member,

At least two bundle laser from described lasing light emitter synthesize directive beam splitter after a branch of complex light by described Multiplexing apparatus,

A branch of complex light from beam splitter passes through described light-dividing device, and described light-dividing device presses the difference of wavelength by this Shu Fuhe After light is divided at least two monochromic beams, each monochromatic light is made to project along different directions.

2. LDMS according to claim 1 is it is characterised in that described driving link and described driven member are magnetic Property material is made, state that described driving link and described driven member are in that there is a natural attraction between the sexes.

3. LDMS according to claim 1 and 2 is subjected to displacement it is characterised in that moving described driving link, institute State driven member to be subjected to displacement under the drive of described driving link, the displacement of described driven member is vertical with the displacement phase of described driving link Directly.

4. LDMS according to claim 3 is it is characterised in that described locating part includes limited block, described limit Position block is arranged on the both sides of driven member, for limiting driven member along the direction of motion movement of driving link.

5. LDMS according to claim 1 is it is characterised in that described driving link has with respect to its motion side To the inclined-plane tilting, described driven member is slidably arranged on this inclined-plane.

6. LDMS according to claim 5 is it is characterised in that the motion side of described inclined-plane and described driving link To angle be less than or equal to 5 degree.

7. LDMS according to claim 1 it is characterised in that also including support member, fix by described locating part It is arranged on described support member, described driving link is slidably arranged on described support member.

8. LDMS according to claim 7 is it is characterised in that described displacement adjustment device also includes driving institute State the driving means of driving link movement, described driving means are Piezoelectric driving means.

9. LDMS according to claim 1, it is characterised in that described Multiplexing apparatus include closing light mirror, makes one The one side of closing light mirror described in Shu Jiguang directive, the another side of closing light mirror, the transmission of this beam of laser described in another beam of laser directive Light forms a branch of recombination laser with the reflected light of this another beam of laser by after the same position injection of described closing light mirror.

10. LDMS according to claim 1, it is characterised in that described light-dividing device includes spectroscope, is combined It is intended that the laser of wavelength occurs transmission/reflection/angle, there is reflection/transmission in the laser of other wavelength with spectroscope described in laser beam directive.