CN205851218U - A kind of be full of cracks thin-film material continuous automatic spray equipment - Google Patents
A kind of be full of cracks thin-film material continuous automatic spray equipment Download PDFInfo
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- CN205851218U CN205851218U CN201620799812.1U CN201620799812U CN205851218U CN 205851218 U CN205851218 U CN 205851218U CN 201620799812 U CN201620799812 U CN 201620799812U CN 205851218 U CN205851218 U CN 205851218U
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Abstract
The utility model discloses a kind of be full of cracks thin-film material continuous automatic spray equipment, including electric control gear, the unreeling structure set gradually according to flexible substrate conveying direction, normal pressure plasma cleaning device, apparatus for coating, heater and rolling-up mechanism, unreeling structure, normal pressure plasma cleaning device, apparatus for coating, heater is connected with electric control gear respectively with rolling-up mechanism, electric control gear controls flexible substrate and is unreeled by unreeling structure, through normal pressure plasma cleaning device, it is carried out atmospheric plasma cleaning, apparatus for coating coating be full of cracks liquid and heating devices heat are coated with the flexible substrate of be full of cracks liquid, form Craquelure template on flexible substrates and become flexible substrate template, and by rolling-up mechanism rolling.This utility model achieves the be full of cracks seriality of thin-film material, large area produces, and prepares the line continuous automatic spray of leading portion sacrifice layer for metalolic network transparency electrode, shortens the production cycle, and technological process is simple, improves production efficiency.
Description
Technical field
This utility model relates to a kind of be full of cracks thin-film material continuous automatic spray equipment, for metalolic network transparency electrode system
The standby line continuous automatic spray of leading portion sacrifice layer.
Background technology
At present, fast along with the photoelectric devices such as touch screen, solaode, intelligent window and flat faced display and equipment
Speed development, the demand for low resistance, the transparent electrode material of high light transmittance energy is increasing.
Tin indium oxide (ITO) is a kind of N-type oxide semiconductor material, is one of conventional transparent electrode main material.ITO
Advantage be: light transmission is good, chemical stability is good, be easily etched into electrode pattern etc., but, the defect that ITO is difficult to capture exists
In: (1) vacuum coating cost is high and plated film speed is low, early stage fixed assets investment (needs to build large vacuum coating equipment greatly
Line)；(2) the metal-oxide fragility of ITO, and flexible device and equipment cannot be used；(3) the most important is used in ITO
Raw material be rare metal indium, the whole world reserves of indium are the lowest so that ITO price goes up the most therewith, it will have and run out
Dangerous；(4) ITO Waste ammunition is not easy to reclaim, and indium is toxic, and cost recovery is high.Therefore, similar Graphene,
The development process of the ITO substitution material such as Metal Mesh and nano metal is paid close attention to by research institution and market.
Compared with the substitution material such as Graphene, CNT, conduction high polymer, metal nanowire thin-films and metal grill tool
There is obvious advantage.Nano metal line thin film is suitable for using liquid phase method scale to prepare, being suitable for flexible substrate, but, big L/D ratio
Prepared by the batch of nano wire, uniformly the becoming mould and overcome between nano wire the problems such as contact resistance to limit metal to receive of nano wire
The sizable application of rice noodle.Metal grill mainly uses various physical method to prepare (to include mechanical stamping, photoetching, ion etching
Deng), but, expensive equipment limits its large area and extensive preparation technology, additionally, due to using physical method system at present
Standby metal grill size is relatively big (more than 5 microns), causes the most auspicious interference ripple of (typically larger than 200ppi) under high pixel
Clearly.So, research submicron rank metal micro-nano metalolic network electrode material, preparation technology and its special setting
Standby is one of the important research direction of current ITO substitution material.
It is a kind of many based on be full of cracks template preparation that China authorizes utility model patent (ZL201310122824.1) to disclose
The method of mesoporous metal thin-film transparent conductive electrode, although use this preparation method can obtain micro-nano-scale mesh wire
Transparent conductive film, the photoelectric properties of thin film exceed tradition ITO electrode, and have good flexibility, but, the method is sub-micro
The laboratory small size preparation method of rice metalolic network transparency conductive electrode, this preparation method only limits between the little area of laboratory
Formula of having a rest uses, and production cycle length, production efficiency are low, and relatively costly, it is impossible to be applicable to industrialization Automatic continuous magnetron sputtering raw
Produce line.
At present, the most also there is not being capable of the method and apparatus of flexible and transparent conductive electrode large area industrialization,
This is not only the technical barrier that the current industry is urgently to be resolved hurrily, and is badly in need of the technological gap filled up especially.
Utility model content
The purpose of this utility model is to provide a kind of simple in construction, with low cost, technique simple, shorten the production cycle, carry
High efficiency, can realize large area, industrialization automatic Continuity produce be full of cracks thin-film material continuous automatic spray equipment.
The purpose of this utility model is to be realized by following technical measures: a kind of be full of cracks thin-film material is coated with the most automatically
Film device, it is characterised in that: it includes electric control gear, the unreeling structure set gradually according to flexible substrate conveying direction, normal pressure
Plasma body cleaning device, apparatus for coating, heater and rolling-up mechanism, described unreeling structure, atmospheric plasma clean dress
Put, apparatus for coating, heater are connected with electric control gear respectively with rolling-up mechanism, and described electric control gear controls flexible substrate by putting
Volume mechanism unreels, and through normal pressure plasma cleaning device, it is carried out atmospheric plasma cleaning, apparatus for coating coating be full of cracks
Liquid and heating devices heat are coated with the flexible substrate of be full of cracks liquid, form Craquelure template on flexible substrates and become flexible substrate
Template, and by rolling-up mechanism rolling.
This utility model achieves the be full of cracks seriality of thin-film material, large area produces, for metalolic network transparency electrode
Preparing the line continuous automatic spray of leading portion sacrifice layer, shorten the production cycle, technological process is simple, improves production efficiency, permissible
The batch production of flexible micro-nano metalolic network transparency conductive electrode large area seriality is realized based on this.It addition, this practicality is new
Type simple in construction, cheap for manufacturing cost, be suitable to be widely popularized and be suitable for.
Flexible substrate described in the utility model is existing material, such as PET (polyethylene terephthalate), PI
Flexible substrate such as (polyimides).Described normal pressure plasma cleaning device is existing apparatus, for entering flexible substrate surface
Row cleaning, modified, activate and improve surface adhesion force etc..
Main by drive mechanism, volume as a kind of improvement of the present utility model, described unreeling structure and rolling-up mechanism
Axle and the reel composition being rotatably installed on spool, described drive mechanism drives spool turns, described unreeling structure and winder
Structure is respectively by a pair rotating blowing deflector roll being arranged in an elongated mounting frame and a pair rotating rewinding deflector roll
Conveying flexible substrate, described blowing deflector roll is positioned at the front end of described mounting frame, and this is the most corresponding to blowing deflector roll and have
There are the gap passed through for flexible substrate, described rewinding deflector roll to be positioned at the end of described mounting frame, and this is on rewinding deflector roll
Under corresponding and there is the gap passed through for flexible substrate template, described normal pressure plasma cleaning device is mainly by being arranged on
Plasma cleaning head composition above mounting frame, described apparatus for coating is mainly by for spraying the shower nozzle of be full of cracks liquid and for inciting somebody to action
Be full of cracks liquid coating Meyer rod composition on flexible substrates, described shower nozzle is positioned at the top of mounting frame and spray pressure is adjustable,
Described Meyer rod transversely may be rotatably mounted in mounting frame, and described heater uses the heating being fixed in mounting frame
Plate, described Meyer rod is positioned at the top of flexible substrate, and described heating plate is then positioned at the lower section of flexible substrate.
As further improvement of the utility model, described rolling-up mechanism is provided with magnetic powder tension controller and correction dress
Putting, described magnetic powder tension controller has tension pick-up, and described deviation correcting device has photoelectric sensor, described tension pick-up
Experiencing the Tensity size of flexible substrate, tension signal feeds back to magnetic powder tension controller, magnetic powder tension controller is according to tension force
Tension force and the speed of flexible substrate are adjusted by signal, it is achieved constant speed and identical tension；It is anti-that material followed the tracks of by described photoelectric sensor
Feedback signal makes rewinding volume neat to deviation correcting device.
As a kind of embodiment of the present utility model, the plasma cleaning head of described normal pressure plasma cleaning device is
Several and height adjustable, described plasma cleaning head is arranged at least one row and is across the top of flexible substrate.
As a kind of embodiment of the present utility model, the shower nozzle of described apparatus for coating is several and height adjustable, described
Shower nozzle is arranged at least one row and is across the top of flexible substrate；The Meyer rod of described apparatus for coating is at least one, two with
On Meyer rod along mounting frame length direction arrange.
This utility model can also do following improvement, sets between described normal pressure plasma cleaning device and apparatus for coating
Having vertical dividing plate, be fixed in described mounting frame bottom described dividing plate, it is clear that described atmospheric plasma isolated by described dividing plate
The plasma cleaning head of cleaning device and the shower nozzle of apparatus for coating.Dividing plate may be used for being separated for use in normal pressure plasma cleaning device
The cleaning area cleaned and the spraying area sprayed for apparatus for coating.
As a kind of preferred implementation of the present utility model, the heating-up temperature of heating plate is 40～70 DEG C, described be full of cracks
The width in the crack of slit die plate is 1～10um.
As a kind of way of recommendation of the present utility model, described be full of cracks liquid uses Ovum Gallus domesticus album gel, Ovum Gallus domesticus album gel proportioning
Being Ovum Gallus domesticus album and water volume ratio scope is 1:0.5～1:5, be full of cracks liquid can also select the high polymer gel such as titanium dioxide.
As a kind of preferred implementation of the present utility model, the thickness that described be full of cracks liquid is coated with on flexible substrates is
100～5000nm.
The output of normal pressure plasma cleaning device described in the utility model is 600～1200w.
Compared with prior art, this utility model has a following significantly effect:
(1) this utility model achieves the be full of cracks seriality of thin-film material, large area produces, for metalolic network transparent electrical
The line continuous automatic spray of leading portion sacrifice layer is prepared in pole.
(2) this utility model shortens the production cycle, and technological process is simple, improves production efficiency, can be real based on this
Existing flexible micro-nano metalolic network transparency conductive electrode large area seriality batch production.
(3) this utility model simple in construction, cheap for manufacturing cost, is suitable to be widely popularized and be suitable for.
Accompanying drawing explanation
The utility model is described in further detail with specific embodiment below in conjunction with the accompanying drawings.
Fig. 1 is structural representation of the present utility model.
Detailed description of the invention
As it is shown in figure 1, be this utility model one chap thin-film material continuous automatic spray equipment, including electric control gear,
The unreeling structure 1 that sets gradually according to flexible substrate 4 conveying direction, normal pressure plasma cleaning device 2, vertical dividing plate 18,
Apparatus for coating, heater and rolling-up mechanism 3, unreeling structure 1, normal pressure plasma cleaning device 2, apparatus for coating, add hot charging
Putting and be connected with electric control gear respectively with rolling-up mechanism 3, in the present embodiment, flexible substrate 4 uses PET (poly terephthalic acid second
Diol ester), it would however also be possible to employ other the flexible substrate such as PI (polyimides).The output of normal pressure plasma cleaning device
It is 600～1200w.Electric control gear controls flexible substrate 4 and is unreeled by unreeling structure 1, through normal pressure plasma cleaning device pair
It carries out atmospheric plasma cleaning, apparatus for coating coating be full of cracks liquid and heating devices heat and is coated with the flexible substrate of be full of cracks liquid
4, the liquid that chaps after heating devices heat is contracted in flexible substrate 4 formation Craquelure template becomes flexible substrate template 5, and by receiving
The rolling of volume mechanism 3.The thickness that be full of cracks liquid is coated with on flexible substrates is 100～5000nm, the width in the crack of Craquelure template
Being 1～10um, in the present embodiment, be full of cracks liquid uses Ovum Gallus domesticus album gel, and Ovum Gallus domesticus album gel proportioning is Ovum Gallus domesticus album and water volume ratio
Scope is 1:0.5～1:5, and in other embodiments, be full of cracks liquid can also select the high polymer gel such as titanium dioxide.
Unreeling structure 1 and rolling-up mechanism 3 are main by drive mechanism, spool 6 and the reel being rotatably installed on spool 6 respectively
7 compositions, drive mechanism drives reel 7 to rotate, and unreeling structure 1 and rolling-up mechanism 3 are respectively by being arranged on an elongated mounting frame 8
On a pair rotating blowing deflector roll 9 and a pair rotating rewinding deflector roll 10 carry flexible substrate 4, blowing deflector roll 9 is positioned at
The front end of mounting frame 8, and this is corresponding to blowing deflector roll about 9 and have the gap passed through for flexible substrate 4, rewinding is led
Roller 10 is positioned at the end of mounting frame 8, and this is corresponding to rewinding deflector roll about 10 and have and pass through for flexible substrate template 5
Gap, normal pressure plasma cleaning device is mainly made up of the plasma cleaning head 11 being arranged on above mounting frame 8, wait from
Sub-cleaning head 11 is several and height adjustable, and plasma cleaning head 11 arranges the top being across flexible substrate 4 in a row, at it
In its embodiment, plasma cleaning head 11 can be arranged to more than two rows.Apparatus for coating is mainly by the spray for spraying be full of cracks liquid
12 and for Meyer rod 13 composition being coated in flexible substrate 4 by be full of cracks liquid, Meyer rod 13 can further will be full of cracks liquid painting
Smearing uniformly, shower nozzle 12 is positioned at the top of mounting frame 8 and spray pressure is adjustable, and shower nozzle 12 is several and height adjustable, shower nozzle 12
Arranging the top being across flexible substrate in a row, in other embodiments, shower nozzle 12 can be arranged to more than two rows.Meyer rod
13 transversely may be rotatably mounted in mounting frame 8, and Meyer rod is two, two excellent length sides along mounting frame 8 of Meyer
To arrangement, in other embodiments, Meyer rod is at least one, and plural Meyer rod is along the length direction of mounting frame
Arrangement.Heater uses the heating plate 14 being fixed in mounting frame 8, and the heating-up temperature of heating plate 14 is 40～70 DEG C, steps
Rod 13 is positioned at the top of flexible substrate 4, and heating plate 14 is positioned at the lower section of flexible substrate 4.Heating plate 14 uses cast molding work
Skill makes, and panel selection rustless steel has superior corrosion resistance, and the condition of high temperature is without buckling deformation.
The bottom of dividing plate 18 is fixed in mounting frame 8, and the plasma of normal pressure plasma cleaning device isolated by dividing plate 18
The shower nozzle 12 of cleaning head 11 and apparatus for coating, in order to be separated for use in cleaning area and use that normal pressure plasma cleaning device cleans
Spraying area in apparatus for coating spraying.Rolling-up mechanism 3 is provided with magnetic powder tension controller 15 and deviation correcting device 16, deviation correcting device
16 have photoelectric sensor 17, and magnetic powder tension controller 15 has tension pick-up, and opening of flexible substrate experienced by tension pick-up
Power size, feeds back to magnetic powder tension controller 15 by tension signal, magnetic powder tension controller 15 according to tension signal to flexible liner
Tension force and the speed at the end are adjusted, it is achieved constant speed and identical tension；Photoelectric sensor 17 is followed the tracks of material and is fed back signal to correction dress
Put and make rewinding volume neat.
Work process of the present utility model is as follows: flexible substrate passes through unreeling structure 1 blowing, by magnetic powder tension controller
15 according to the size of tension force, and regulation dispensing speed is 0.5m/min～2m/min；Flexible substrate 4 is clear through atmosphere plasma
Washing, cleaning power is 600w～1000w, and flexible substrate 4, after plasma clean, by spray equipment, needs spraying
Be full of cracks liquid selects Ovum Gallus domesticus album gel, and Ovum Gallus domesticus album gel proportioning is Ovum Gallus domesticus album and water volume ratio scope is 1:0.5～1:5, spraying pressure
Power is 10psi～20psi；Flexible substrate after spraying Ovum Gallus domesticus album gel is applied through Meyer rod 13；Applied rear flexible substrate warp
The heating plate 14 crossed, the heating-up temperature of heating plate 14 is 40 DEG C～70 DEG C, is coated with the flexible substrate of Ovum Gallus domesticus album gel, in heating
Under the baking of plate 14, form the flexible substrate template 5 that gap width is 1～10um with Craquelure, finally by rolling-up mechanism
Correction, rolling, complete whole be full of cracks thin-film material film.
Embodiment of the present utility model is not limited to this, according to foregoing of the present utility model, utilizes the general of this area
Logical technological know-how and customary means, without departing under this utility model above-mentioned basic fundamental thought premise, this utility model also may be used
To make the amendment of other various ways, to replace or change, within the scope of all falling within this utility model rights protection.
Claims (10)
1. a be full of cracks thin-film material continuous automatic spray equipment, it is characterised in that: it includes electric control gear, according to flexible substrate
Unreeling structure, normal pressure plasma cleaning device, apparatus for coating, heater and the rolling-up mechanism that conveying direction sets gradually,
Described unreeling structure, normal pressure plasma cleaning device, apparatus for coating, heater and rolling-up mechanism respectively with electric control gear phase
Even, described electric control gear controls flexible substrate and is unreeled by unreeling structure, carries out it often through normal pressure plasma cleaning device
Pressure plasma clean, apparatus for coating coating be full of cracks liquid and heating devices heat are coated with the flexible substrate of be full of cracks liquid, in flexibility
Form Craquelure template on substrate and become flexible substrate template, and by rolling-up mechanism rolling.
Be full of cracks thin-film material the most according to claim 1 continuous automatic spray equipment, it is characterised in that: described unreeling structure
Mainly being made up of drive mechanism, spool and the reel being rotatably installed on spool respectively with rolling-up mechanism, described drive mechanism is driven
Movable reel rotates, and described unreeling structure and rolling-up mechanism are rotating by be arranged in an elongated mounting frame a pair respectively
Blowing deflector roll and a pair rotating rewinding deflector roll conveying flexible substrate, before described blowing deflector roll is positioned at described mounting frame
End, and this is the most corresponding to blowing deflector roll and have the gap passed through for flexible substrate, described rewinding deflector roll is positioned at described
The end of mounting frame, and this is the most corresponding to rewinding deflector roll and have the gap passed through for flexible substrate template, described
Normal pressure plasma cleaning device is mainly made up of the plasma cleaning head being arranged on above mounting frame, described apparatus for coating master
Will be by for spraying the shower nozzle of be full of cracks liquid and for being formed by be full of cracks liquid coating Meyer rod on flexible substrates, described shower nozzle position
Adjustable in the top of mounting frame and spray pressure, described Meyer rod transversely may be rotatably mounted in mounting frame, described in add
Thermal uses the heating plate that is fixed in mounting frame, and described Meyer rod is positioned at the top of flexible substrate, and described heating plate
Then it is positioned at the lower section of flexible substrate.
Be full of cracks thin-film material the most according to claim 2 continuous automatic spray equipment, it is characterised in that: described rolling-up mechanism
Being provided with magnetic powder tension controller and deviation correcting device, described magnetic powder tension controller has tension pick-up, described deviation correcting device
Having photoelectric sensor, the Tensity size of flexible substrate experienced by described tension pick-up, and tension signal feeds back to magnetic powder tension force
Controller, tension force and the speed of flexible substrate are adjusted by magnetic powder tension controller according to tension signal, it is achieved constant speed and perseverance
Tension force；Described photoelectric sensor tracking material feeds back signal to deviation correcting device makes rewinding volume neat.
Be full of cracks thin-film material the most according to claim 3 continuous automatic spray equipment, it is characterised in that: described normal pressure etc. from
Daughter clean device plasma cleaning head be several and height adjustable, described plasma cleaning head be arranged at least one row across
Top in flexible substrate.
Be full of cracks thin-film material the most according to claim 4 continuous automatic spray equipment, it is characterised in that: described apparatus for coating
Shower nozzle be several and height adjustable, described shower nozzle is arranged at least one row and is across the top of flexible substrate；Described painting arranges
The Meyer rod put is at least one, and plural Meyer rod arranges along the length direction of mounting frame.
Be full of cracks thin-film material the most according to claim 5 continuous automatic spray equipment, it is characterised in that: at described normal pressure etc.
Gas ions is cleaned and is provided with vertical dividing plate between device and apparatus for coating, is fixed in described mounting frame bottom described dividing plate,
Plasma cleaning head and the shower nozzle of apparatus for coating of described normal pressure plasma cleaning device isolated by described dividing plate.
Be full of cracks thin-film material the most according to claim 6 continuous automatic spray equipment, it is characterised in that: the heating of heating plate
Temperature is 40～70 DEG C, and the width in the crack of described Craquelure template is 1～10um.
8. according to the be full of cracks thin-film material continuous automatic spray equipment described in any one of claim 1～7, it is characterised in that: institute
State be full of cracks liquid and use Ovum Gallus domesticus album gel.
Be full of cracks thin-film material the most according to claim 8 continuous automatic spray equipment, it is characterised in that: described be full of cracks liquid exists
In flexible substrate, the thickness of coating is 100～5000nm.
Be full of cracks thin-film material the most according to claim 9 continuous automatic spray equipment, it is characterised in that: described normal pressure etc.
It is 600～1200w that gas ions cleans the output of device.
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| CN201620799812.1U CN205851218U (en) | 2016-07-26 | 2016-07-26 | A kind of be full of cracks thin-film material continuous automatic spray equipment |
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| CN201620799812.1U CN205851218U (en) | 2016-07-26 | 2016-07-26 | A kind of be full of cracks thin-film material continuous automatic spray equipment |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106935315A (en) * | 2017-04-30 | 2017-07-07 | 苏州思创源博电子科技有限公司 | A kind of preparation method of the carbon nanotube conductive thin film with flexible substrate |
| CN106992032A (en) * | 2017-04-24 | 2017-07-28 | 苏州思创源博电子科技有限公司 | A kind of preparation method for the carbon-based conductive film for possessing flexible substrate |
| CN107435148A (en) * | 2017-08-08 | 2017-12-05 | 无锡格菲电子薄膜科技有限公司 | Apparatus and method for etching a continuous product |
| CN108212628A (en) * | 2018-03-30 | 2018-06-29 | 苏州维洛克电子科技有限公司 | A kind of reagent flush coater |
| CN109772635A (en) * | 2019-03-22 | 2019-05-21 | 金继余 | A kind of holographic imaging film coating apparatus and its production method |
| CN112495671A (en) * | 2020-12-04 | 2021-03-16 | 绍兴权电科技有限公司 | Ultrasonic atomization pyrolysis spraying device and spraying method |
| CN113731736A (en) * | 2021-09-06 | 2021-12-03 | 山东科技大学 | Processing method of flexible electrode |
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2016
- 2016-07-26 CN CN201620799812.1U patent/CN205851218U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106992032A (en) * | 2017-04-24 | 2017-07-28 | 苏州思创源博电子科技有限公司 | A kind of preparation method for the carbon-based conductive film for possessing flexible substrate |
| CN106935315A (en) * | 2017-04-30 | 2017-07-07 | 苏州思创源博电子科技有限公司 | A kind of preparation method of the carbon nanotube conductive thin film with flexible substrate |
| CN107435148A (en) * | 2017-08-08 | 2017-12-05 | 无锡格菲电子薄膜科技有限公司 | Apparatus and method for etching a continuous product |
| CN108212628A (en) * | 2018-03-30 | 2018-06-29 | 苏州维洛克电子科技有限公司 | A kind of reagent flush coater |
| CN109772635A (en) * | 2019-03-22 | 2019-05-21 | 金继余 | A kind of holographic imaging film coating apparatus and its production method |
| CN109772635B (en) * | 2019-03-22 | 2020-11-13 | 浙江宇狮包装材料有限公司 | Holographic imaging film coating device and production method thereof |
| CN112495671A (en) * | 2020-12-04 | 2021-03-16 | 绍兴权电科技有限公司 | Ultrasonic atomization pyrolysis spraying device and spraying method |
| CN113731736A (en) * | 2021-09-06 | 2021-12-03 | 山东科技大学 | Processing method of flexible electrode |
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