CN205752119U - A kind of spray equipment preventing spray nozzle clogging - Google Patents
A kind of spray equipment preventing spray nozzle clogging Download PDFInfo
- Publication number
- CN205752119U CN205752119U CN201620665802.9U CN201620665802U CN205752119U CN 205752119 U CN205752119 U CN 205752119U CN 201620665802 U CN201620665802 U CN 201620665802U CN 205752119 U CN205752119 U CN 205752119U
- Authority
- CN
- China
- Prior art keywords
- spray
- pipeline
- control valve
- spray equipment
- liquid feeding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model discloses a kind of spray equipment preventing spray nozzle clogging, including spray pipeline and liquid feeding pipeline, multiple nozzle is connected on described spray pipeline, described liquid feeding pipeline connects with described spray pipeline, described spray equipment is additionally provided with the supply air line connected with described spray pipeline, described liquid feeding pipeline is provided with the first control valve controlling described spray pipeline feed liquor, and described supply air line is provided with the second control valve controlling described spray pipeline air inlet.The spray equipment that this utility model provides is by increasing a supply air line on current spray pipeline, after the liquid feeding pipeline end of job, after i.e. spray stops, close the first control valve, open the second control valve, utilize the pressure of air to force to discharge by the medicinal liquid remaining in spray pipeline, without the medicinal liquid of residual, crystal or jelly would not be had at nozzle to generate, and nature will not block.
Description
Technical field
This utility model relates to wet etching technique field, is specifically related to a kind of spray equipment preventing spray nozzle clogging.
Background technology
The medicinal liquid that part wet etching apparatus is used at present has the phosphoric acid of more thickness, also has the oxalic acid of easily crystallization, this
A little medicinal liquids are understood some after spray terminates and are remained in nozzle, will generate a kind of jelly and crystalline substance through after a while
Nozzle is blocked by body, have impact on the spraying effect of subsequent job, and then have impact on the homogeneity of etching.Therefore, complete when spray
The medicinal liquid that nozzle is artificially periodically remained by rear needs is cleared up, and inefficiency, required clearance time is longer, affects spray simultaneously
The service life of mouth.
Utility model content
Therefore, the technical problems to be solved in the utility model is the prolonging nozzle life-span, reduces the work that artificial cleaning is powerful
Amount, thus a kind of spray equipment preventing spray nozzle clogging is provided.
A kind of spray equipment preventing spray nozzle clogging, including spray pipeline and liquid feeding pipeline, described spray pipeline is provided with
Multiple nozzles, described liquid feeding pipeline connects with described spray pipeline, described spray equipment is additionally provided with described spray pipeline even
Logical supply air line, described liquid feeding pipeline is provided with the first control valve controlling described spray pipeline feed liquor, described supply air line
It is provided with the second control valve controlling described spray pipeline air inlet.
Being additionally provided with a master controller in described spray equipment, described master controller controls described first control valve and respectively
The keying of two control valves.
Described master controller is PLC.
Described master controller is the keying that batch (-type) controls described second control valve.
Described master controller is after controlling described first control valve cut out, and the keying of the second control valve described in continuous control is secondary
Number is for 2-4 time.
Described first control valve and the second control valve are respectively pneumatic control valve.
Described supply air line is arranged on described liquid feeding pipeline.
Described supply air line is directly connected with described spray pipeline.
Technical solutions of the utility model, have the advantage that
A. the spray equipment that this utility model provides is by increasing a supply air line on current spray pipeline,
After the liquid feeding pipeline end of job, after i.e. spray stops, closing the first control valve, open the second control valve, utilize the pressure of air
Force to discharge by the medicinal liquid remained in spray pipeline, without the medicinal liquid of residual, at nozzle, would not have crystal or jelly
Generating, nature will not block.
B. this utility model effectively extends nozzle life, improves etching homogeneity, also eliminates artificial cleaning and is carried
The powerful workload come, it is to avoid the danger that artificial cleaning is potential.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model detailed description of the invention or technical scheme of the prior art, below by right
In detailed description of the invention or description of the prior art, the required accompanying drawing used is briefly described, it should be apparent that, describe below
In accompanying drawing be embodiments more of the present utility model, for those of ordinary skill in the art, do not paying creativeness
On the premise of work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the first spray equipment structural representation provided by the utility model;
Fig. 2 is the second spray equipment structural representation provided by the utility model;
Fig. 3 is the third spray equipment structural representation provided by the utility model.
Description of reference numerals:
1-spray pipeline;2-liquid feeding pipeline;3-nozzle;4-supply air line;5-the first control valve;6-the second control valve;7-
Master controller.
Detailed description of the invention
Below in conjunction with accompanying drawing, the technical solution of the utility model is clearly and completely described, it is clear that described
Embodiment is a part of embodiment of this utility model rather than whole embodiments.Based on the embodiment in this utility model, this
The every other embodiment that field those of ordinary skill is obtained under not making creative work premise, broadly falls into this practicality
Novel protected scope.
In description of the present utility model, it should be noted that unless otherwise clearly defined and limited, term " peace
Dress ", should be interpreted broadly " being connected ", " connection ", for example, it may be fix connection, it is also possible to be to removably connect, or integratedly
Connect;Can be to be mechanically connected, it is also possible to be electrical connection;Can be to be joined directly together, it is also possible to be indirectly connected to by intermediary,
It can be the connection of two element internals.For the ordinary skill in the art, can be in conjunction with in concrete condition understanding
State term concrete meaning in this utility model.
Embodiment 1
As it is shown in figure 1, this utility model provides a kind of spray equipment preventing spray nozzle clogging, including spray pipeline 1 He
Liquid feeding pipeline 2, connects on spray pipeline 1 and has multiple nozzle 3, and liquid feeding pipeline 2 connects with spray pipeline 1, air supply pipe therein
Road 4 is connected directly between on liquid feeding pipeline 2, and liquid feeding pipeline 2 is provided with the first control valve 5 controlling spray pipeline 1 feed liquor, air supply pipe
Road 4 is provided with the second control valve 6 controlling spray pipeline 1 air inlet.
Existing spray equipment is only improved by this utility model a little, can realize nozzle and exempt from blocking.By existing
A supply air line 4 is increased on some spray pipelines 1, in use, after liquid feeding pipeline 2 end of job, after i.e. spray stops,
Close the first control valve 5, open the second control valve 6, utilize the pressure of air that the medicinal liquid remained in spray pipeline 1 is forced row
Go out, without the medicinal liquid of residual, crystal or jelly would not be had at nozzle 3 to generate, it is to avoid block at nozzle 3.
Embodiment 2
As in figure 2 it is shown, compared with Example 1, embodiment 2 adds the automaticity of spray equipment, this utility model
Being additionally provided with a master controller 7 in spray equipment, master controller 7 controls opening of the first control valve 5 and the second control valve 6 respectively
Close.Certainly, preferably master controller 7 is PLC here, and the first control valve 5 and the second control valve 6 are respectively preferably pneumatic
Control valve, periodically can be cleaned spray pipeline 1 and nozzle 3 by PLC, substantially increases the cleaning effect of nozzle
Rate.
In this utility model, master controller 7 controls the keying of the second control valve 6 in batch (-type), i.e. will by an impulse form
Residual liquid in nozzle 3 and spray pipeline 1 carries out rapid cleaning.
In once cleaning, i.e. master controller 7 is after controlling the first control valve 5 cut out, continuous control the second control valve 6
Opening and closing number of times is 2-4 time, is quickly discharged by the residuals in nozzle 3.
When equipment shuts down, at the end of spray, master controller 7 controls the first control valve 5 by PLC program and cuts out, the
Two control valves 6 are opened, and inflate air to pipeline, and the air pressure in pipeline can be discharged remaining in the medicinal liquid at nozzle 3, thus
Stop medicinal liquid crystallization or generated the probability of colloid substance, it is to avoid nozzle 3 has been blocked.
Embodiment 3
As different from Example 2, supply air line 4 can be connected directly between on spray pipeline 1 by this utility model, such as figure
Shown in 3.At the end of spray, master controller 7 controls the first control valve 5 by PLC program and cuts out, i.e. liquid feeding pipeline 2 stops feed flow,
The second control valve 6 being joined directly together on logical supply air line 4 with spray pipeline 1 is opened, and air is directly filled with spray pipeline 1
In, the air pressure in spray pipeline 1 can be discharged remaining in the medicinal liquid at nozzle 3, thus stopped medicinal liquid crystallization or generated
The probability of colloid substance, it is to avoid nozzle 3 is blocked.
This utility model, by clearing up nozzle, effectively extends nozzle life, improves etching homogeneity, also saves
Go the powerful workload that artificial cleaning nozzle is brought, it is to avoid the danger that artificial cleaning is potential.
Obviously, above-described embodiment is only for clearly demonstrating example, and not restriction to embodiment.Right
For those of ordinary skill in the field, can also make on the basis of the above description other multi-form change or
Variation.Here without also cannot all of embodiment be given exhaustive.And the obvious change thus extended out or
Change among the protection domain still in this utility model creation.
Claims (8)
1. prevent a spray equipment for spray nozzle clogging, including spray pipeline (1) and liquid feeding pipeline (2), described spray pipeline (1)
Being provided with multiple nozzle (3), described liquid feeding pipeline (2) connects with described spray pipeline (1), it is characterised in that described spray dress
Putting and be additionally provided with the supply air line (4) connected with described spray pipeline (1), described liquid feeding pipeline (2) is provided with the described spray of control
First control valve (5) of shower pipe road (1) feed liquor, described supply air line (4) is provided with and controls the of described spray pipeline (1) air inlet
Two control valves (6).
Spray equipment the most according to claim 1, it is characterised in that be additionally provided with a master controller in described spray equipment
(7), described master controller (7) controls described first control valve (5) and the keying of the second control valve (6) respectively.
Spray equipment the most according to claim 2, it is characterised in that described master controller (7) is PLC.
Spray equipment the most according to claim 3, it is characterised in that described master controller (7) controls described in batch (-type)
The keying of the second control valve (6).
Spray equipment the most according to claim 4, it is characterised in that described master controller (7) is controlling described first control
After valve processed (5) cuts out, described in continuous control, the keying number of times of the second control valve (6) is 2-4 time.
Spray equipment the most according to claim 1, it is characterised in that described first control valve (5) and the second control valve (6)
It is respectively pneumatic control valve.
7. according to the arbitrary described spray equipment of claim 1-6, it is characterised in that described supply air line (4) is arranged at described
On liquid feeding pipeline (2).
8. according to the arbitrary described spray equipment of claim 1-6, it is characterised in that described supply air line (4) is directly with described
Spray pipeline (1) is connected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620665802.9U CN205752119U (en) | 2016-06-29 | 2016-06-29 | A kind of spray equipment preventing spray nozzle clogging |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620665802.9U CN205752119U (en) | 2016-06-29 | 2016-06-29 | A kind of spray equipment preventing spray nozzle clogging |
Publications (1)
Publication Number | Publication Date |
---|---|
CN205752119U true CN205752119U (en) | 2016-11-30 |
Family
ID=57381922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201620665802.9U Active CN205752119U (en) | 2016-06-29 | 2016-06-29 | A kind of spray equipment preventing spray nozzle clogging |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN205752119U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109212793A (en) * | 2018-09-30 | 2019-01-15 | 惠科股份有限公司 | A kind of manufacturing equipment and cleaning method for display panel |
-
2016
- 2016-06-29 CN CN201620665802.9U patent/CN205752119U/en active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109212793A (en) * | 2018-09-30 | 2019-01-15 | 惠科股份有限公司 | A kind of manufacturing equipment and cleaning method for display panel |
WO2020062365A1 (en) * | 2018-09-30 | 2020-04-02 | 惠科股份有限公司 | Manufacturing device of display panel and cleaning method therefor |
US11513378B2 (en) | 2018-09-30 | 2022-11-29 | HKC Corporation | Display panel manufacturing device and cleaning method |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10741427B2 (en) | Coating apparatus for reducing waste of coating liquid, method for recycling coating liquid by utilization of the same, and method for cleaning the same | |
EP3020552B1 (en) | Ink cleaning device and ink cleaning method of flexographic press | |
CN206924491U (en) | Purging system and the wet-method etching equipment with the purging system | |
CN108394182A (en) | A kind of ceramic ink jet printer nozzle cleaning control system | |
JP5664986B2 (en) | Air knife chamber with blocking member | |
CN205752119U (en) | A kind of spray equipment preventing spray nozzle clogging | |
CN109619643A (en) | A kind of tobacco double loop flavoring and casing redundancy feeding system and method | |
TWI554326B (en) | Semiconductor exhaust gas treatment equipment | |
JP4850775B2 (en) | Substrate processing equipment | |
CN104971522B (en) | Fluid bubble removal apparatus in semiconductor treatment system and bubble removal method thereof | |
KR20170049303A (en) | Pipe cleaning apparatus using nitrogen | |
CN201017856Y (en) | Ejection apparatus | |
CN205236225U (en) | Easily wash atomizing nozzle | |
KR20170001275A (en) | Mold cleaning apparatus using to inverter Booster Pump | |
CN113921425A (en) | Semiconductor cleaning apparatus and control method thereof | |
CN203875045U (en) | Stirring main machine and cleaning device thereof | |
CN204842382U (en) | Ore pulp pipeline protection device | |
CN103861462A (en) | Filter membrane online washing system and washing method | |
CN113414165A (en) | Liquid inlet device and semiconductor cleaning equipment | |
CN103928372B (en) | Corrosion-resistant wafer cleaning device | |
CN111760372A (en) | Filter equipment and cleaning equipment | |
CN205966182U (en) | Spraying system for wet electrostatic precipitator | |
JP3430826B2 (en) | Continuous surface treatment apparatus for aluminum strip and method for cleaning aluminum strip | |
CN106647164B (en) | Method for preventing etching solution conveying pipeline from crystallizing | |
WO2010097896A1 (en) | Cleaning nozzle and cleaning method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |