CN205680695U - A kind of diffusion furnace pushing away boat device and being provided with this device for diffusion furnace - Google Patents
A kind of diffusion furnace pushing away boat device and being provided with this device for diffusion furnace Download PDFInfo
- Publication number
- CN205680695U CN205680695U CN201620275210.6U CN201620275210U CN205680695U CN 205680695 U CN205680695 U CN 205680695U CN 201620275210 U CN201620275210 U CN 201620275210U CN 205680695 U CN205680695 U CN 205680695U
- Authority
- CN
- China
- Prior art keywords
- boat
- diffusion furnace
- silicon
- fence
- push
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model relates to a kind of diffusion furnace pushing away boat device and being provided with this device for diffusion furnace.Mainly solve the poor problem of the silicon chip technology parameter consistency processing in existing diffusion furnace.A kind of push away boat device for diffusion furnace, push away boat device and include silicon boat, silicon boat is placed in cantilever push-and-pull boat mechanism, cantilever push-and-pull boat mechanism is evenly distributed fence, and fence is placed in silicon boat surrounding, and fence lateral surface is provided with angular structures, further relate to a kind of diffusion furnace being provided with and pushing away boat device, pushing away boat device, be placed in diffusion furnace this is internal, is connected by the intrinsic guide rail of diffusion furnace is fixing, and diffusion furnace bodies top is provided with purifying tank.This be used for diffusion furnace to push away boat apparatus structure reasonable in design simply, the fence being provided with angular structures can stop that air-flow directly blows to inside silicon boat, reduce the defective work amount that on silicon boat, silicon chip is caused by uneven air-flow, improve the uniformity of the technical parameter of the silicon chip processing, be provided with funnel-form draft hood, drain out boat when distribute toxic gas.
Description
Technical field
The utility model relates to field of photovoltaic technology, is specifically related to a kind of pushing away boat device and being provided with this dress for diffusion furnace
The diffusion furnace put.
Background technology
Growing and ripe with crystal silicon solar energy battery manufacturing technology, is ensureing that existing battery product photoelectricity turns
How effectively to reduce manufacturing cost on the basis of changing efficiency and quality, improving self product competitiveness in the market, to have become photovoltaic circle each
The common concern of cell production companies policymaker institute and the century problem being badly in need of solution.
Diffusion furnace be in large scale integrated circuit manufacture process for silicon chip being diffused, aoxidizing, anneal, alloy and burning
A kind of processing unit (plant) of the techniques such as knot.When being processed silicon chip, silicon chip is generally placed upon in silicon boat, and silicon boat is positioned over expansion
Dissipate in stove, but in process, the silicon chip at the silicon boat two ends silicon chip technology parameter differences middle with silicon boat is relatively big, even can lead
The silicon chip causing to process occurs defective.Therefore, the silicon chip technology parameter consistency that the diffusion furnace commonly used processes is poor.
Utility model content
In order to overcome the deficiency of background technology, the utility model provides a kind of pushing away boat device and being provided with this for diffusion furnace
The diffusion furnace of device, mainly solves the poor problem of the silicon chip technology parameter consistency processing in existing diffusion furnace, should
For diffusion furnace push away boat device and to be provided with the diffusion-furnace structure of this device reasonable in design simply, silicon boat is formed around being provided with corner angle
The fence of structure can stop that air-flow directly blows to inside silicon boat, thus reduce silicon chip on silicon boat and caused by uneven air-flow
Defective work amount, improves the uniformity of the technical parameter of the silicon chip processing, and improves Si wafer quality, is simultaneously provided with diffusion furnace originally
Internal be provided with funnel-form draft hood, drain out boat when a large amount of high temperature toxic gases of distributing, it is ensured that the security performance of operation.
The utility model be the technical scheme is that a kind of expansion pushing away boat device and being provided with this device for diffusion furnace
Dissipating stove, the described boat device that pushes away includes silicon boat, and described silicon boat is placed in cantilever push-and-pull boat mechanism, and described cantilever push-and-pull boat mechanism is uniform
Being arranged with fence, described fence is placed in silicon boat surrounding, and fence lateral surface is provided with angular structures.
Described cantilever push-and-pull boat mechanism includes the transmission mechanism of servomotor, reductor, Timing Belt and Timing Belt.
Described push away boat device be placed in diffusion furnace this is internal, connected by the intrinsic guide rail of diffusion furnace is fixing, described diffusion
Furnace body top is provided with purifying tank, and described diffusion furnace body is provided with funnel-form draft hood, described draft hood near purifying tank top
External exhausting system.
The beneficial effects of the utility model are: owing to taking technique scheme, effectively improve existing gas decompression
The problem of valve poor sealing performance, this is used for the diffusion-furnace structure letter reasonable in design pushing away boat device and being provided with this device of diffusion furnace
Single, the fence that silicon boat is formed around being provided with angular structures can stop that air-flow directly blows to inside silicon boat, thus reduce on silicon boat
The defective work amount that silicon chip is caused by uneven air-flow, improves the uniformity of the technical parameter of the silicon chip processing, and improves
Si wafer quality, this internal is provided with funnel-form draft hood to be simultaneously provided with diffusion furnace, drain out boat when a large amount of high temperature of distributing have poison gas
Body, it is ensured that the security performance of operation.
Brief description
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation of fence 3 in Fig. 1.
Fig. 3 is diffusion-furnace structure schematic diagram.
1st, silicon boat in figure；2nd, cantilever push-and-pull boat mechanism；3rd, fence；4th, angular structures；10th, boat device is pushed away；11st, diffusion furnace is originally
Body；12nd, guide rail；13rd, purifying tank；14th, draught hood.
Detailed description of the invention
Below in conjunction with the accompanying drawings the utility model embodiment is described further.
As Fig. 1 combines shown in Fig. 2, Fig. 3, a kind of diffusion furnace pushing away boat device and being provided with this device for diffusion furnace, institute
Stating and pushing away boat device and include silicon boat 1, described silicon boat 1 is placed in cantilever push-and-pull boat mechanism 2, and described cantilever push-and-pull boat mechanism 2 uniformly arranges
Showing fence 3, described fence 3 is placed in silicon boat 1 surrounding and higher than silicon boat 1 height, and fence 3 lateral surface is provided with angular structures 4, institute
State angular structures 4 and preferentially select isometric polygonized structure, while angular structures 4 stops that air-flow directly blows to silicon chip inside, make
Air-flow, due to the stop by angular structures 4, flows to all directions by principle of reflection, makes air-flow internal even into silicon boat 1,
Improve the uniformity of the technical parameter of the silicon chip processing.
Described cantilever push-and-pull boat mechanism 2 includes the transmission mechanism of servomotor, reductor, Timing Belt and Timing Belt.
The described boat device 10 that pushes away is placed in diffusion furnace body 11, is connected by the guide rail 12 in diffusion furnace body 11 is fixing,
Push away boat device 10 by the transmission mechanism of servomotor, reductor, Timing Belt and Timing Belt to move integrally along guide rail 12.Institute
Stating diffusion furnace body 11 top and being provided with purifying tank 13, described diffusion furnace body 11 is provided with funnel-form near purifying tank 13 top and bleeds
Cover 14, the external exhausting system of described draft hood 14, described purifying tank 13 connects funnel-form oil pumping cover 14, is provided with net in purifying tank 13
Changing liquid, described scavenging solution is alkaline solution or acid solution, and in being used for neutralizing diffusion furnace, silicon chip reacts generated sour gas
Or alkaline gas, to reach to purify the effect of waste gas, described draught hood 14 be used for draining out boat when a large amount of high temperature of distributing poisonous
Gas, environmental protection.
Funnel-form draft hood 14 can poison gas in collection diffusion furnace body 1 evenly, improve the collection expulsion efficiency of poison gas.
The utility model effectively improves the problem of existing gas pressure reducer poor sealing performance, and this is used for pushing away of diffusion furnace
Boat device and to be provided with the diffusion-furnace structure of this device reasonable in design simply, the fence that silicon boat is formed around being provided with angular structures can
Stop that air-flow directly blows to inside silicon boat, thus reduce the defective work amount that on silicon boat, silicon chip is caused by uneven air-flow, carry
The uniformity of the technical parameter of the silicon chip that height processes, improves Si wafer quality, and this internal is provided with funnel to be simultaneously provided with diffusion furnace
Shape draft hood, drain out boat when a large amount of high temperature toxic gases of distributing, it is ensured that the security performance of operation.
Every technical staff's notice: although the utility model describes according to above-mentioned detailed description of the invention, but this
The invention thought of utility model is not limited to that utility model, the repacking of any utilization inventive concept, all will include this in specially
In profit scope of patent protection.
Claims (4)
1. be used for diffusion furnace pushes away a boat device, and the described boat device that pushes away includes silicon boat (1), it is characterised in that: described silicon boat (1)
Being placed on cantilever push-and-pull boat mechanism (2), described cantilever push-and-pull boat mechanism (2) is evenly distributed fence (3), and described fence (3) is put
In silicon boat (1) surrounding, fence (3) lateral surface is provided with angular structures (4).
2. according to claim 1 a kind of push away boat device for diffusion furnace, it is characterised in that: described cantilever push-and-pull boat machine
Structure (2) includes the transmission mechanism of servomotor, reductor, Timing Belt and Timing Belt.
3. one kind is provided with the diffusion furnace pushing away boat device, it is characterised in that: push away boat device (10) as claimed in claim 1 and be placed in expansion
Dissipate in furnace body (11), connected by the guide rail (12) in diffusion furnace body (11) is fixing, described diffusion furnace body (11) top
It is provided with purifying tank (13).
4. it according to claim 3 a kind of is provided with the diffusion furnace pushing away boat device, it is characterised in that: described diffusion furnace body
(11) it is provided with funnel-form draft hood (14), the external exhausting system of described draft hood (14) near purifying tank (13) top.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620275210.6U CN205680695U (en) | 2016-04-05 | 2016-04-05 | A kind of diffusion furnace pushing away boat device and being provided with this device for diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620275210.6U CN205680695U (en) | 2016-04-05 | 2016-04-05 | A kind of diffusion furnace pushing away boat device and being provided with this device for diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205680695U true CN205680695U (en) | 2016-11-09 |
Family
ID=57438370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620275210.6U Expired - Fee Related CN205680695U (en) | 2016-04-05 | 2016-04-05 | A kind of diffusion furnace pushing away boat device and being provided with this device for diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205680695U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108447813A (en) * | 2018-04-11 | 2018-08-24 | 张家港国龙光伏科技有限公司 | A kind of system knot pump heating silicon boat diffusion furnace |
-
2016
- 2016-04-05 CN CN201620275210.6U patent/CN205680695U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108447813A (en) * | 2018-04-11 | 2018-08-24 | 张家港国龙光伏科技有限公司 | A kind of system knot pump heating silicon boat diffusion furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101834224B (en) | Silicon wafer rapid heat treatment phosphorus diffusion gettering technology for manufacture of solar cell | |
| WO2008145231A3 (en) | Method for treating silicon wafers, corresponding treatment liquid and thus treated silicon wafer | |
| CN205680695U (en) | A kind of diffusion furnace pushing away boat device and being provided with this device for diffusion furnace | |
| CN103227245B (en) | A kind of P type quasi-monocrystalline silicon too can the manufacture method of positive electricity pond PN junction | |
| CN108010841A (en) | A kind of manufacture method of diode and thus obtained diode | |
| CN103117331A (en) | N-type heterojunction solar cell and manufacturing method thereof | |
| CN107204388A (en) | A kind of silicon slice processing method of heterojunction solar battery | |
| CN208315518U (en) | A kind of system knot pump heating silicon boat diffusion furnace | |
| CN105720134A (en) | Production technology of solar cell panel | |
| CN105118891A (en) | Anti-oxidation front electrode solar cell and method for preparing same | |
| CN202185420U (en) | Cleaning device of silicon wafer box | |
| CN204243018U (en) | In photovoltaic diffusing procedure, quartz boat loads silicon chip equipment | |
| CN203866406U (en) | Boron diffusion furnace baffle structure capable of achieving uniform diffusion of reaction gas | |
| CN102332501A (en) | Washing method for removing flower basket mark in process of producing solar cell | |
| CN103094423B (en) | A kind of P type heterojunction solar battery and preparation method thereof | |
| CN104465867A (en) | Novel method for manufacturing solar cells | |
| CN106257625B (en) | A kind of stack high-temperature annealing process | |
| CN102891208A (en) | Solar cell texturing method | |
| CN108447813A (en) | A kind of system knot pump heating silicon boat diffusion furnace | |
| CN201194231Y (en) | Spraying type diffuse source conveying apparatus | |
| CN207149539U (en) | A kind of silicon chip cleaning gaily decorated basket | |
| CN102637579A (en) | Cleaning process for removing flower basket imprints on solar battery | |
| CN103887159A (en) | Method for carrying out passivation and alloyage treatment on wafer surface metal | |
| CN205965132U (en) | Waste liquid air separation ware | |
| CN205595346U (en) | Efficiency of conversion is improved solar cell photovoltaic solder strip device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161109 Termination date: 20210405 |