CN108447813A - A kind of system knot pump heating silicon boat diffusion furnace - Google Patents
A kind of system knot pump heating silicon boat diffusion furnace Download PDFInfo
- Publication number
- CN108447813A CN108447813A CN201810322086.8A CN201810322086A CN108447813A CN 108447813 A CN108447813 A CN 108447813A CN 201810322086 A CN201810322086 A CN 201810322086A CN 108447813 A CN108447813 A CN 108447813A
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- Prior art keywords
- pump
- silicon boat
- heating
- diffusion
- boat
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 58
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 58
- 239000010703 silicon Substances 0.000 title claims abstract description 58
- 238000010438 heat treatment Methods 0.000 title claims abstract description 54
- 238000009792 diffusion process Methods 0.000 title claims abstract description 45
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 5
- 239000010935 stainless steel Substances 0.000 claims description 8
- 229910001220 stainless steel Inorganic materials 0.000 claims description 8
- 230000001360 synchronised effect Effects 0.000 claims description 6
- 229920000742 Cotton Polymers 0.000 claims description 3
- 238000004321 preservation Methods 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 8
- 230000008020 evaporation Effects 0.000 abstract description 4
- 238000001704 evaporation Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 abstract description 2
- 239000002341 toxic gas Substances 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 abstract 1
- 238000005457 optimization Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000003921 oil Substances 0.000 description 2
- 229910000967 As alloy Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention relates to a kind of systems to tie pump heating silicon boat diffusion furnace, it includes furnace body and the silicon boat in furnace interior, pump heat engine structure, mobile mechanism and purifying box is arranged, and is integrally placed in the mobile mechanism wherein the pump heat engine structure is connected to silicon boat bottom, the silicon boat and pump heat engine structure.This system knot pump heating silicon boat small diffusion pump on silicon boat ontology is diffused heating to silicon boat ontology, and the evaporation process in entire diffusion furnace is formed into double layer evaporation, diffusion furnace effectively improves the problem of existing gas pressure reducer poor sealing performance, this for diffusion furnace push away boat device and diffusion-furnace structure reasonable design equipped with the device is simple, silicon boat, which is surrounded by the fence equipped with angular structures, can stop that air-flow directly blows to inside silicon boat, from the consistency of technical parameter, improve Si wafer quality, it is interior equipped with funnel-form draft hood equipped with diffusion furnace body simultaneously, exhaust out a large amount of high temperature toxic gases distributed when boat, ensure the security performance of operation.
Description
Technical field
The present invention relates to a kind of systems to tie pump heating silicon boat diffusion furnace.
Background technology
With crystal silicon solar energy battery manufacturing technology it is growing with it is ripe, ensureing that existing battery product photoelectricity turns
How change on the basis of efficiency and quality effectively reduces that manufacturing cost, improving itself product competitiveness in the market, to have become photovoltaic circle each
Cell production companies policymaker institute's common concern and the century problem for being badly in need of solution.Diffusion furnace is large scale integrated circuit system
During making for being diffused, aoxidizing to silicon chip, annealing, a kind of processing unit (plant) of the techniques such as alloy and sintering.To silicon chip
When being processed, silicon chip is generally placed upon in silicon boat, and silicon boat is positioned in diffusion furnace, however in process, silicon boat both ends
Silicon chip and silicon boat among silicon chip technology parameter differences it is larger, result even in the silicon chip that processes occur it is unqualified.Cause
The silicon chip technology parameter consistency that this common diffusion furnace processes is poor.In addition the heating of silicon boat ontology is to obtained PN junction
Quality has very big influence.
Invention content
The technical problem to be solved by the present invention is to how overcome the drawbacks described above of the prior art, a kind of system knot pump heating is provided
Silicon boat diffusion furnace.
In order to solve the above technical problems, this system knot pump heating silicon boat diffusion furnace includes furnace body and the silicon in furnace interior is arranged
Boat, pump heat engine structure, mobile mechanism and purifying box, wherein the pump heat engine structure is connected to silicon boat bottom, the silicon boat and pump heat engine
Structure is integrally placed in the mobile mechanism.
As an optimization, the pump heat engine structure diffusion pump oil, diffusion pump bottom plate, the diffusion pump bottom plate include heating plate, add
Heat pipe presses closer bolt, stainless steel plate and fixing bolt, wherein groove is provided in the heating plate, the heating tube matching insertion
In the groove, upper part is slightly higher than groove upper edge, and the heating tube in the heating plate and its groove is connected by the puller bolt
It is connected on the diffusion pump bottom plate, and by screwing the puller bolt so that be close to the diffusion pump in the heating plate upper surface
Bottom plate lower surface, the stainless steel plate setting are fastenedly connected below the puller bolt, and by the fixing bolt in institute
It states in heating plate.
As an optimization, evenly distributed in the mobile mechanism to there is fence, the fence to be placed in silicon boat surrounding, fence lateral surface
Equipped with angular structures.
As an optimization, the groove opened in the heating plate is several annular concentric grooves, and heating tube top is slightly higher than ditch
Slot upper edge 1mm.
As an optimization, the heating plate is filled with heat-preservation cotton before with stainless steel plate.
As an optimization, the mobile mechanism includes the transmission mechanism of servomotor, gear reducer, synchronous belt and synchronous belt；
In mobile mechanism's furnace body, it is fixedly connected by the guide rail in furnace body.
A kind of system knot pump heating silicon boat small diffusion pump on silicon boat ontology of the present invention is diffused heating to silicon boat ontology,
And the evaporation process in entire diffusion furnace is formed into double layer evaporation, diffusion furnace effectively improves existing gas pressure reducer leakproofness
Can difference problem, this be used for diffusion furnace push away boat device and diffusion-furnace structure reasonable design equipped with the device is simple, silicon boat four
Week is equipped with can stop that air-flow directly blows to inside silicon boat equipped with the fence of angular structures, to reduce on silicon boat silicon chip by unevenness
Defective work amount caused by even air-flow improves the consistency of the technical parameter of the silicon chip processed, improves Si wafer quality, together
When be equipped with diffusion furnace body in be equipped with funnel-form draft hood, exhaust out a large amount of high temperature toxic gases distributed when boat, it is ensured that operation
Security performance.
Description of the drawings
Knot pump heating silicon boat diffusion furnace is made to the present invention below in conjunction with the accompanying drawings to be described further：
Fig. 1 is the planar structure schematic diagram of this system knot pump heating silicon boat diffusion furnace；
Fig. 2 is the planar structure schematic diagram of the pump heat engine structure of this system knot pump heating silicon boat diffusion furnace；
Fig. 3 is the planar structure schematic diagram of the mobile mechanism of this system knot pump heating silicon boat diffusion furnace.
Specific implementation mode
If Fig. 1 is to shown, this system knot pump heating silicon boat diffusion furnace include include furnace body 1 and the silicon boat in furnace interior is set
2, pump heat engine structure 3, mobile mechanism 4 and purifying box 5, wherein the pump heat engine structure 3 is connected to 2 bottom of silicon boat, the silicon boat 2 and pump
Heat engine structure 3 is integrally placed in the mobile mechanism 4.
3 diffusion pump oil 301 of pump heat engine structure, diffusion pump bottom plate 302, the diffusion pump bottom plate 302 include heating plate
303, heating tube 304, press closer bolt 305, stainless steel plate 306 and fixing bolt 307, wherein being provided with ditch in the heating plate 303
Slot, in the embedded groove of the matching of the heating tube 304, upper part is slightly higher than groove upper edge, in the heating plate 303 and its groove
Heating tube 304 be connected on the diffusion pump bottom plate 302 by the puller bolt 305, and by screwing the puller bolt
305 so that 302 lower surface of diffusion pump bottom plate is close in 303 upper surface of the heating plate, and the setting of the stainless steel plate 306 exists
305 lower section of the puller bolt, and be fastenedly connected in the heating plate 303 by the fixing bolt 307.The heating plate
The groove opened on 303 is several annular concentric grooves, and 304 top of heating tube is slightly higher than groove upper edge 1mm.The heating plate
303 are filled with heat-preservation cotton 308 before with stainless steel plate 306.
It is evenly distributed in the mobile mechanism 4 to there is fence 401, the fence 401 to be placed in 1 surrounding of silicon boat, 401 outside of fence
Face is equipped with angular structures 402.The mobile mechanism 4 includes the driver of servomotor, gear reducer, synchronous belt and synchronous belt
Structure；In 4 furnace body 1 of the mobile mechanism, it is fixedly connected by the guide rail 101 in furnace body 1.
It can be that professional and technical personnel in the field realize or use that the above embodiment, which is intended to illustrate the present invention, to above-mentioned
Embodiment, which is modified, will be apparent to those skilled in the art, therefore the present invention includes but not limited to
The above embodiment, it is any to meet the claims or specification description, meet with principles disclosed herein and novelty,
The method of inventive features, technique, product, each fall within protection scope of the present invention.
Claims (6)
1. a kind of system knot pump heating silicon boat diffusion furnace, it is characterized in that：Including furnace body (1) and be arranged furnace interior silicon boat (2),
Heat engine structure (3), mobile mechanism (4) and purifying box (5) are pumped, wherein the pump heat engine structure (3) is connected to silicon boat (2) bottom, described
Silicon boat (2) is integrally placed in pump heat engine structure (3) in the mobile mechanism (4).
2. system knot pump heating silicon boat diffusion furnace according to claim 1, it is characterized in that：Pump heat engine structure (3) diffusion pump
Oily (301), diffusion pump bottom plate (302), the diffusion pump bottom plate (302) include heating plate (303), heating tube (304), press closer spiral shell
Bolt (305), stainless steel plate (306) and fixing bolt (307), wherein being provided with groove, the heating tube in the heating plate (303)
(304) it matches in the embedded groove, upper part is slightly higher than groove upper edge, the heating tube in the heating plate (303) and its groove
(304) it is connected on the diffusion pump bottom plate (302) by the puller bolt (305), and by screwing the puller bolt
(305) so that be close to diffusion pump bottom plate (302) lower surface, the stainless steel plate in heating plate (303) upper surface
(306) setting is below the puller bolt (305), and is fastenedly connected in the heating plate by the fixing bolt (307)
(303) on.
3. system knot pump heating silicon boat diffusion furnace according to claim 1, it is characterized in that：On the mobile mechanism (4) uniformly
It is arranged with fence (401), the fence (401) is placed in silicon boat (1) surrounding, and fence (401) lateral surface is equipped with angular structures
(402)。
4. system knot pump heating silicon boat diffusion furnace according to claim 2, it is characterized in that：It is opened on the heating plate (303)
Groove be several annular concentric grooves, heating tube (304) top is slightly higher than groove upper edge 1mm.
5. system knot pump heating silicon boat diffusion furnace according to claim 2, it is characterized in that：The heating plate (303) with it is stainless
Heat-preservation cotton (308) is filled with before steel plate (306).
6. system knot pump heating silicon boat diffusion furnace according to claim 3, it is characterized in that：The mobile mechanism (4) includes
The transmission mechanism of servomotor, gear reducer, synchronous belt and synchronous belt；In mobile mechanism (4) furnace body (1), pass through furnace body (1)
Interior guide rail (101) is fixedly connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810322086.8A CN108447813A (en) | 2018-04-11 | 2018-04-11 | A kind of system knot pump heating silicon boat diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810322086.8A CN108447813A (en) | 2018-04-11 | 2018-04-11 | A kind of system knot pump heating silicon boat diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108447813A true CN108447813A (en) | 2018-08-24 |
Family
ID=63199333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810322086.8A Pending CN108447813A (en) | 2018-04-11 | 2018-04-11 | A kind of system knot pump heating silicon boat diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108447813A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204532997U (en) * | 2015-03-26 | 2015-08-05 | 青州市宝丰镀膜科技有限公司 | Thermal trough structure bottom a kind of diffusion pump |
| CN204539495U (en) * | 2015-03-26 | 2015-08-05 | 青州市宝丰镀膜科技有限公司 | A kind of heating diffusion pumps plate structure |
| CN205680695U (en) * | 2016-04-05 | 2016-11-09 | 温州巨亮光伏科技有限公司 | A kind of diffusion furnace pushing away boat device and being provided with this device for diffusion furnace |
| CN208315518U (en) * | 2018-04-11 | 2019-01-01 | 张家港国龙光伏科技有限公司 | A kind of system knot pump heating silicon boat diffusion furnace |
-
2018
- 2018-04-11 CN CN201810322086.8A patent/CN108447813A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204532997U (en) * | 2015-03-26 | 2015-08-05 | 青州市宝丰镀膜科技有限公司 | Thermal trough structure bottom a kind of diffusion pump |
| CN204539495U (en) * | 2015-03-26 | 2015-08-05 | 青州市宝丰镀膜科技有限公司 | A kind of heating diffusion pumps plate structure |
| CN205680695U (en) * | 2016-04-05 | 2016-11-09 | 温州巨亮光伏科技有限公司 | A kind of diffusion furnace pushing away boat device and being provided with this device for diffusion furnace |
| CN208315518U (en) * | 2018-04-11 | 2019-01-01 | 张家港国龙光伏科技有限公司 | A kind of system knot pump heating silicon boat diffusion furnace |
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