CN205635849U - Top cap dismantled of epitaxial furnace reacting chamber - Google Patents
Top cap dismantled of epitaxial furnace reacting chamber Download PDFInfo
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- CN205635849U CN205635849U CN201620365709.6U CN201620365709U CN205635849U CN 205635849 U CN205635849 U CN 205635849U CN 201620365709 U CN201620365709 U CN 201620365709U CN 205635849 U CN205635849 U CN 205635849U
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Abstract
The utility model discloses a top cap dismantled of epitaxial furnace reacting chamber, including last top cap and lower top cover, lower top cover includes center circle plug -in components and two at least fan -shaped ring plug -in components, circle plug -in components in center are connected in the middle part of passing through connecting piece and last top cap, the fan -shaped ring plug -in components closely cooperate encircle in the center circle plug -in components outside and respectively with last header connection, wherein meet department and the fan -shaped ring plug -in components department of meeting each other of center circle plug -in components and fan -shaped ring plug -in components all form the step form and cooperate. For traditional full slice system lower top cover, the utility model relates to an it maintains and changes that while multiple spot atress can effectively reduce deformation and prevent the locking to become the easy cleanness of dismantling of multicomponent concatenation.
Description
Technical field
This utility model relates to semiconductor technology, particularly relates to the removable top of a kind of epitaxial furnace reative cell.
Background technology
Epitaxial wafer, such as silicon carbide epitaxy wafer are typically with the method for CVD (chemical gaseous phase deposition) and grow, tool
Body is to be placed in by substrate in epitaxial furnace reative cell, by being passed through reative cell containing the composition compound of thin film element, elementary gas, borrows
Help aperture gas-phase chemical reaction deposition solid thin film on the surface of a substrate.The top cover of reative cell is the important component part of reative cell,
Reative cell internal temperature field distribution can be regulated, improve epitaxial growth conditions.
The top cover of reative cell includes upper top cover and lower top cover, wherein descends top cover to be high purity graphite and outer surface is provided with coating.Make
During with, lower top cover also can deposition reactant and by-product, these deposits along with use the time increase more and more thicker, and
During epitaxial growth, drop to cause on wafer the generation of epitaxial growth defect, so that manually clear up in time.Existing
The lower top cover having is full slice system structure, and its central point is connected fixing with upper top cover, is subject under this single-point stressing conditions in hot environment
Easily deform upon after heat, thus be difficult to disassemble and be cleaned.When carrying out plant maintenance, can only be directly in reative cell
Portion clears up its deposit, can produce substantial amounts of dust etc. and pollute, the quality of subsequently epitaxial growing is caused the biggest shadow in scale removal process
Ringing, maintenance reaction chamber indoor environment cleanliness factor is brought huge difficulty by this.
Utility model content
This utility model provides the removable top of a kind of epitaxial furnace reative cell, which overcomes the deficiency existing for prior art
Part.
This utility model solves its technical problem and be the technical scheme is that
The removable top of a kind of epitaxial furnace reative cell, including upper top cover and lower top cover, described lower top cover includes that a center circle is inserted
Part and at least two eccentric circular ring plug-in unit, described center circle plug-in unit is connected with in the middle part of upper top cover by connector, described eccentric circular ring plug-in unit
Close-fitting it be surrounded on outside center circle plug-in unit and be connected with upper top cover respectively；The wherein phase of center circle plug-in unit and eccentric circular ring plug-in unit
The place of connecing and eccentric circular ring plug-in unit joint each other are respectively formed step-like cooperation.
Preferably, described eccentric circular ring insert back surfaces is provided with rail groove, and described upper top cover is provided with the rail coordinated with described rail groove
Road, described eccentric circular ring plug-in unit realizes removably connecting by rail groove and track grafting with upper top cover.
Preferably, described center circle plug-in unit periphery concave step circlewise, the internal ring evagination of described eccentric circular ring plug-in unit forms circle
Arcuation step, circular step splices with arc-shaped step.
Preferably, the dual-side evagination of eccentric circular ring plug-in unit forms step, and the side step of adjacent eccentric circular ring plug-in unit mutually splices.
Preferably, it is provided with the fixture coordinated with described connector in the middle part of described upper top cover, is provided with in the middle part of described center circle plug-in unit
Through hole, described connector includes that connecting portion is through described logical more than the supporting part of described through hole and less than the connecting portion of described through hole
Fixture described in Kong Bingyu connects.
Preferably, described fixture is a male part, and male part is provided with draw-in groove；Described connector is a snap ring, on snap ring
It is provided with buckle；The through hole of described center circle plug-in unit pack into described male part and by the draw-in groove grafting of the buckle of snap ring and male part with
Realization removably connects.
Preferably, described eccentric circular ring plug-in unit is 4, and the central angle of each eccentric circular ring plug-in unit is 90 °.
Preferably, described center circle plug-in unit, eccentric circular ring plug-in unit and connector are made up of graphite, and outer surface has TaC to be coated with
Layer.
Compared to prior art, this utility model has the advantages that
1. descending top cover to include a center circle plug-in unit and at least two eccentric circular ring plug-in unit, center circle plug-in unit passes through connector and upper top cover
Middle part connects, and eccentric circular ring plug-in unit is close-fitting to be surrounded on outside center circle plug-in unit and is connected with upper top cover respectively, defines removable
Unload multiple parts of formula, and each parts are all connected with upper top cover, add stress point, effectively prevent the fixing lower deformation of single-point from causing
The situation of locking, and each parts are detachable and are cleaned maintenance work outside reative cell, improve production environment cleanliness factor；With
Time can carry out regional replacing according to the concrete deposition conditions of reactant, reduce the expenditure of equipment replacement.
2. center circle plug-in unit is respectively formed step-like joining with the joint of eccentric circular ring plug-in unit and eccentric circular ring plug-in unit joint each other
Close, make cooperatively form an entirety between plug-in unit and there is even curface, support each other simultaneously, further increase stress equal
Even property, increases the service life.
3. the mode that connector and rail groove coordinate with track is readily disassembled installation, time saving and energy saving.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present utility model；
Fig. 2 is upper top cover structural representation of the present utility model；
Fig. 3 is center circle dongle configuration schematic diagram of the present utility model, and wherein 3a is top view, and 3b is front view；
Fig. 4 is connecting-piece structure schematic diagram of the present utility model, and wherein 4a is top view, and 4b is front view；
Fig. 5 is eccentric circular ring dongle configuration schematic diagram of the present utility model, and wherein 5a is top view, and 5b is front view.
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention is described in further detail.Each accompanying drawing of the present invention is only signal more to hold
The readily apparent present invention, its relative size ratio can be adjusted according to design requirement.Additionally, in figure described in literary composition relatively
The upper and lower relation of element, will be understood that the relative position referring to component those skilled in the art for, the most all can overturn and
Presenting identical component, this all should belong to the scope disclosed by this specification together.
Embodiment, shown in Figure 1, the removable top of a kind of epitaxial furnace reative cell, including upper top cover 1 and lower top cover.
Lower top cover includes a center circle plug-in unit 2 and at least two eccentric circular ring plug-in unit 3, and center circle plug-in unit 2 is by connector 4 and upper top cover
Connecting in the middle part of in the of 1, close-fitting being surrounded on outside center circle plug-in unit 2 and respectively with upper top cover 1 of eccentric circular ring plug-in unit 3 is connected, its
Middle center circle plug-in unit 2 is respectively formed step-like joining with the joint of eccentric circular ring plug-in unit 3 and eccentric circular ring plug-in unit 3 joint each other
Close.
Concrete, the such as upper top cover of carbide epitaxial furnace reative cell is to be provided with stone inside rustless steel enclosing cover, and rustless steel enclosing cover
Ink froth bed, forms the effect of good heat-insulation and heat-preservation.Middle part inside upper top cover 1 is provided with coordinate with connector 4 fixing
Part.Being provided with through hole 21 in the middle part of center circle plug-in unit 2, connector 4 includes more than the supporting part of through hole 21 and less than through hole 21
Connecting portion, connecting portion through through hole 21 and is connected with fixture.Referring to figs. 2 to Fig. 4, as one preferred embodiment,
Fixture is male part 11, and male part 11 is provided with draw-in groove 111.Connector 4 is a snap ring being provided with buckle, the ring of snap ring
Shape portion 41 i.e. forms supporting part, and its external diameter is more than the diameter of through hole 21, and buckle 42 forms connecting portion.Center circle plug-in unit 2 has
There is the step 22 for accommodating snap ring annulus 41, after its through hole 21 packs into male part 11, then outside the inner circle of snap ring being packed into
Protuberance 11, rotary clip makes buckle 42 precession draw-in groove 111, achieves center circle plug-in unit by buckle 42 and draw-in groove 111 grafting
2 fixing with upper top cover 1.During dismounting, opposite direction rotary clip, it is achieved thereby that removably connect.
In conjunction with Fig. 2 and Fig. 5, the back side of eccentric circular ring plug-in unit 3 is provided with rail groove 31, and upper top cover 1 is provided with joins with rail groove 31
The track 12 closed, eccentric circular ring plug-in unit 3 is fixed with track 12 grafting by rail groove 31 with upper top cover 1, during dismounting, fan-shaped
Ring plug-in unit 3 slides in and out, it is achieved thereby that removably connect.
With reference to Fig. 3 and Fig. 5, center circle plug-in unit 2 periphery concave step 23 circlewise, the internal ring evagination of eccentric circular ring plug-in unit 3
Forming arc-shaped step 32, circular step 23 splices with arc-shaped step 32.The dual-side evagination of eccentric circular ring plug-in unit 3 is formed
Step 33, and the side step 33 of adjacent eccentric circular ring plug-in unit 3 mutually splices, so that center circle plug-in unit 2 and eccentric circular ring plug-in unit
In forming a circular lower top cover entirety in appearance and there is even curface after 3 splicings.Step splicing also makes eccentric circular ring insert
Support each other between part 3, improve the uniformity of overall stress.
As one preferred embodiment, eccentric circular ring plug-in unit 3 can be 4, and the central angle of each eccentric circular ring plug-in unit is 90 °,
Realize splicing symmetrically.Center circle plug-in unit 2, eccentric circular ring plug-in unit 3 and connector 4 are made by high purity graphite, and appearance
Topcoating is covered with TaC coating, to reduce the deposition of carborundum.
Above-described embodiment is only for further illustrating the removable top of a kind of epitaxial furnace reative cell of the present utility model, but this reality
By the novel embodiment that is not limited to, every any simply repaiied according to what above example made by technical spirit of the present utility model
Change, equivalent variations and modification, each fall within the protection domain of technical solutions of the utility model.
Claims (8)
1. a removable top for epitaxial furnace reative cell, including upper top cover and lower top cover, it is characterised in that: described
Lower top cover includes a center circle plug-in unit and at least two eccentric circular ring plug-in unit, and described center circle plug-in unit passes through connector and Shang Ding
Connecting in the middle part of lid, close-fitting being surrounded on outside center circle plug-in unit and respectively with upper top cover of described eccentric circular ring plug-in unit connects
Connect；Wherein center circle plug-in unit is respectively formed platform with joint and the eccentric circular ring plug-in unit joint each other of eccentric circular ring plug-in unit
Scalariform coordinates.
The removable top of epitaxial furnace reative cell the most according to claim 1, it is characterised in that: described sector
Ring insert back surfaces is provided with rail groove, and described upper top cover is provided with the track coordinated with described rail groove, and described eccentric circular ring is inserted
Part realizes removably connecting by rail groove and track grafting with upper top cover.
The removable top of epitaxial furnace reative cell the most according to claim 1, it is characterised in that: described center
Circle plug-in unit periphery concave step circlewise, the internal ring evagination formation arc-shaped step of described eccentric circular ring plug-in unit, ring-type
Rank are spliced with arc-shaped step.
4. according to the removable top of the epitaxial furnace reative cell described in claim 1 or 3, it is characterised in that: fan-shaped
The dual-side evagination of ring plug-in unit forms step, and the side step of adjacent eccentric circular ring plug-in unit mutually splices.
The removable top of epitaxial furnace reative cell the most according to claim 1, it is characterised in that: described upper top
It is provided with the fixture coordinated with described connector in the middle part of lid, in the middle part of described center circle plug-in unit, is provided with through hole, described connector
Including more than the supporting part of described through hole and less than the connecting portion of described through hole, connecting portion is through described through hole and with described
Fixture connects.
The removable top of epitaxial furnace reative cell the most according to claim 5, it is characterised in that: described fixing
Part is a male part, and male part is provided with draw-in groove；Described connector is a snap ring, and snap ring is provided with buckle；In described
The through hole of heart circle plug-in unit packs into described male part removable to realize with the draw-in groove grafting of male part by the buckle of snap ring
Unload connection.
The removable top of epitaxial furnace reative cell the most according to claim 1, it is characterised in that: described sector
Ring plug-in unit is 4, and the central angle of each eccentric circular ring plug-in unit is 90 °.
The removable top of epitaxial furnace reative cell the most according to claim 1, it is characterised in that: described center
Circle plug-in unit, eccentric circular ring plug-in unit and connector are made up of graphite, and outer surface has TaC coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620365709.6U CN205635849U (en) | 2016-04-27 | 2016-04-27 | Top cap dismantled of epitaxial furnace reacting chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620365709.6U CN205635849U (en) | 2016-04-27 | 2016-04-27 | Top cap dismantled of epitaxial furnace reacting chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205635849U true CN205635849U (en) | 2016-10-12 |
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ID=57060231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620365709.6U Active CN205635849U (en) | 2016-04-27 | 2016-04-27 | Top cap dismantled of epitaxial furnace reacting chamber |
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| CN (1) | CN205635849U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107747525A (en) * | 2017-11-27 | 2018-03-02 | 湖北拓宇水电科技有限公司 | A kind of modified hydraulic turbine, water pump blade angle hydraulic isochronous controller |
-
2016
- 2016-04-27 CN CN201620365709.6U patent/CN205635849U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107747525A (en) * | 2017-11-27 | 2018-03-02 | 湖北拓宇水电科技有限公司 | A kind of modified hydraulic turbine, water pump blade angle hydraulic isochronous controller |
| CN107747525B (en) * | 2017-11-27 | 2024-02-13 | 湖北拓宇水电科技股份有限公司 | Improved hydraulic synchronous regulator for blade angle of water turbine and water pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder |
Address after: 361101 first floor, building B, Jianye Building, No. 96, Xiangxing Road, Xiamen Torch High tech Zone (Xiangjiao) Industrial Zone, Xiamen, Fujian Patentee after: EPIWORLD INTERNATIONAL CO.,LTD. Address before: 361101 room 803, qiangye building, No. 98, Xiangxing Road, Xiang'an District, Xiamen City, Fujian Province (Yucheng center, torch high tech Industrial Park) Patentee before: EPIWORLD INTERNATIONAL CO.,LTD. |
|
| CP02 | Change in the address of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 361101 first floor, building B, Jianye Building, No. 96, Xiangxing Road, Xiamen Torch High tech Zone (Xiangjiao) Industrial Zone, Xiamen, Fujian Patentee after: Hantiantiancheng Electronic Technology (Xiamen) Co.,Ltd. Address before: 361101 first floor, building B, Jianye Building, No. 96, Xiangxing Road, Xiamen Torch High tech Zone (Xiangjiao) Industrial Zone, Xiamen, Fujian Patentee before: EPIWORLD INTERNATIONAL CO.,LTD. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP02 | Change in the address of a patent holder |
Address after: 1st Floor, Building B, Jianye Building, No. 96 Xiangxing Road, Xiang'an Industrial Zone, Xiamen Torch High tech Zone, Fujian Province, 361101 Patentee after: Hantiantiancheng Electronic Technology (Xiamen) Co.,Ltd. Address before: 361101 first floor, building B, Jianye Building, No. 96, Xiangxing Road, Xiamen Torch High tech Zone (Xiangjiao) Industrial Zone, Xiamen, Fujian Patentee before: Hantiantiancheng Electronic Technology (Xiamen) Co.,Ltd. |
|
| CP02 | Change in the address of a patent holder |