CN102603180B - Comprise the manufacture device of the base glass material of quartz jet pipe and raw material supply metal pipe arrangement - Google Patents
Comprise the manufacture device of the base glass material of quartz jet pipe and raw material supply metal pipe arrangement Download PDFInfo
- Publication number
- CN102603180B CN102603180B CN201210016802.2A CN201210016802A CN102603180B CN 102603180 B CN102603180 B CN 102603180B CN 201210016802 A CN201210016802 A CN 201210016802A CN 102603180 B CN102603180 B CN 102603180B
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- China
- Prior art keywords
- pipe arrangement
- metal pipe
- quartz ampoule
- quartz
- reducing portion
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/81—Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
- Gasket Seals (AREA)
Abstract
The present invention provides the manufacture device of a kind of base glass material comprising quartz jet pipe and metal pipe arrangement, and it can improve temperature as far as possible, improves productivity ratio.In the quartz ampoule (31) of the jet pipe as jet flames and the connecting structure between the metal pipe arrangement (51) of quartz ampoule (31) supply gas, on quartz ampoule (31) and metal pipe arrangement (51) connection end each other, form the flange (61,62) abutted each other respectively, utilize the bearing surface against each other (65,66) of flange (61,62) to be connected and sealed.
Description
Technical field
The present invention relates to the manufacture device of a kind of base glass material, it comprises the quartz generating flame
Jet pipe and the metal pipe arrangement to this quartz jet pipe base feed.
Background technology
In Japanese Unexamined Patent Publication 2001-89161 publication, describe manufacture synthetic quartz glass
The technology of ingot (ingot).In the art, in raw material feed device, make the silication of liquid
Compound gasify, while carrying out flow-control together with material containing gas through metal pipe arrangement to stone
English glass jet pipe supplies, the dioxy that will generate in the vapor phase hydrolysis reaction utilizing oxyhydrogen flame to carry out
SiClx microgranule stacks on target, and carries out melten glass, thus manufactures synthetic quartz glass
Glass ingot.At the other end of the metal pipe arrangement making one end be connected with material gas supply device, connect
There is the one end of the quartz ampoule constituting quartz glass jet pipe.
It addition, in Japanese Unexamined Patent Publication 5-301720 publication, describe dual pipe structure
Glass jet pipe connection flexible pipe, its as with in the generation of this glass granules use spray
The pipe arrangement that pipe connects, be arranged on glass jet pipe and the fixing pipe arrangement of stainless steel unstrpped gas supply it
Between.The glass jet pipe connection flexible pipe of this dual pipe structure is made via polytetrafluoroethylene (registered trade mark)
Pipe union supplies mouth with the raw material of glass jet pipe and is connected.
It addition, in Japanese Unexamined Patent Publication 8-81234 publication, describe at fibre parent material
Manufacture in use quartz jet pipe processed and the supply pipe arrangement of unstrpped gas, burning gases each
The connecting structure that the supply of supply pipe arrangement and sealing gas connects with pipe arrangement.At this connection structure
In making, the jet pipe with quartz of pipe arrangement is connected a part for this side and is made by fluororesin, its
He is made by rustless steel part.
As noted above, as the jet pipe of generation glass granules, generally use by quartz glass
The jet pipe constituted, the supplying tubing as gas uses metal pipe arrangement.Constitute above-mentioned quartz glass
Quartz ampoule and the metal pipe arrangement of jet pipe are not directly connected to, but have necessarily via by fluororesin etc.
The joint of the thermostability of degree and the resin formation of corrosion resistance is attached.But, by fluorine tree
Although the joint that fat is constituted has the thermostability of about substantially 200 DEG C, if but using temperature relatively
Relaxing of height, the most aging quickening and generation sealing, therefore so that temperature is the highest, is pressing down
Use in the environment of being made as about about 100 DEG C, so that can use long-term and stably.
On the other hand, if the temperature of unstrpped gas raises, then the stacking density that there is glass granules becomes
The tendency that high, yield rate raises, therefore, it is desirable to improve the temperature of unstrpped gas as far as possible, carries
High production rate.
Summary of the invention
It is an object of the invention to, it is provided that one comprises quartz jet pipe and raw material supply metal is joined
The manufacture device of the base glass material of pipe, it can carry operation at high temperature as far as possible, improve productivity ratio.
In order to realize purpose, and providing the manufacture device of a kind of base glass material, it comprises injection
The quartzy jet pipe of flame and the metal pipe arrangement to quartz jet pipe supply gas, wherein, constituted
One end of the quartz ampoule of quartz jet pipe comprises the first flange being made up of quartz glass, joins at metal
One end of pipe comprises the second flange of metal, quartz ampoule and metal pipe arrangement so that the first flange and
Two flanges state against each other and that seal connects.In this case as well, it is possible to bearing surface that
The packing ring of carbon it is clamped with between this.Alternatively, it is also possible to make one in each bearing surface for recessed
Shape, another is that convex form, concave shape and convex form are fitted together to each other.
Additionally, it is provided that the manufacture device of a kind of base glass material, it comprises the quartz of jet flames
Jet pipe and the metal pipe arrangement to quartz jet pipe supply gas, wherein, constitute the stone of quartz jet pipe
One party in English pipe or metal pipe arrangement comprises the reducing portion being formed on connection end, makes separately
The connection end of one side is chimeric with reducing portion, the end face connecting end of the opposing party and the bottom surface in reducing portion
Close to or docking, by bonding between the connection end of reducing portion and the opposing party chimeric with reducing portion
State under, make quartz ampoule and metal pipe arrangement connect.
Additionally, it is provided that the manufacture device of a kind of base glass material, it comprises the quartz of jet flames
Jet pipe and the metal pipe arrangement to quartz jet pipe supply gas, wherein, constitute the stone of quartz jet pipe
One party in English pipe or metal pipe arrangement, comprises and is formed at the reducing portion connected on end, and this is different
The inner circumferential in footpath portion forms female thread, forms external screw thread on the periphery connecting end of the opposing party,
By being screwed into connection end in reducing portion, so that the end face connecting end of the opposing party and reducing portion
Bottom surface close to or the state of docking under, make quartz ampoule and metal pipe arrangement connect.
In these cases, the packing ring of carbon can be clamped with between end face and bottom surface, also
Another is convex form for concave shape can to make in end face and bottom surface one, concave shape and
Convex form is fitted together to each other.
And, it is provided that the manufacture device of a kind of base glass material, it comprises the quartz of jet flames
Jet pipe and the metal pipe arrangement to quartz jet pipe supply gas, wherein, metal pipe arrangement is included in it
The reducing portion that one end is formed, makes quartz ampoule and metal pipe arrangement connect: to constitute stone under following state
The connection end of the quartz ampoule of English jet pipe is chimeric with reducing portion, installs between reducing portion and quartz ampoule
The pressing component of tubular, the packing ring of the carbon being arranged between the bottom surface in pressing component and reducing portion
It is pressed the end face of parts and the bottom surface clamping in reducing portion, elastic deformation, packing ring and reducing occur
The inner peripheral surface in portion and the outer peripheral face of quartz ampoule are in close contact.
The effect of invention
The manufacture device of the quartz glass mother metal according to the present invention, can be not via resin pipe arrangement
Or resin joint and the quartz quartz ampoule of jet pipe will be constituted and metal pipe arrangement is directly connected to and enters
Row seals.Thus, it is possible to while guaranteeing good sealing state, from metal pipe arrangement with height
Temperature, can be being used for being formed glass granules stacked body to gases such as quartz ampoule base feed gases
When the windrows of going forward side by side such as generation glass granules are folded, improve yield rate, and improve productivity ratio.
Accompanying drawing explanation
Fig. 1 is the concept map of the example manufacturing device representing base glass material.
Fig. 2 is to represent the quartz that the manufacture device of base glass material involved in the present invention is comprised
The concept map of the example of jet pipe and metal pipe arrangement.
Fig. 3 is the quartz ampoule involved by the 1st embodiment and the metal pipe arrangement representing the present invention
Between the profile of connecting structure.
Fig. 4 is to represent the company between the quartz ampoule involved by the 1st embodiment and metal pipe arrangement
Connect the profile of the first variation of structure.
Fig. 5 is to represent the company between the quartz ampoule involved by the 1st embodiment and metal pipe arrangement
Connect the profile of the second variation of structure.
Fig. 6 (a) is to represent between the quartz ampoule involved by the 1st embodiment and metal pipe arrangement
The profile of the 3rd variation of connecting structure.Fig. 6 (b) is the 6b-6b of Fig. 6 (a)
Profile.
Fig. 7 is the quartz ampoule involved by the 2nd embodiment and the metal pipe arrangement representing the present invention
Between the profile of connecting structure.
Fig. 8 is the quartz ampoule involved by the 3rd embodiment and the metal pipe arrangement representing the present invention
Between the profile of connecting structure.
Fig. 9 is the quartz ampoule involved by the 4th embodiment and the metal pipe arrangement representing the present invention
Between the profile of connecting structure.
Figure 10 is to represent the flexible pipe in embodiments of the present invention and the connection between metal pipe arrangement
The profile of structure.
Detailed description of the invention
Below, referring to the drawings, embodiments of the present invention are described.Accompanying drawing is with explanation as mesh
, the scope of invention is not defined.In the accompanying drawings, in order to avoid the repetition of explanation,
And represent with a part with identical label.The ratio of the size in accompanying drawing might not be accurate.
Fig. 1 is the concept map manufacturing device 10 of base glass material.The manufacture device of base glass material
10 is the device utilizing stacking that VAD method carries out glass granules, has and is provided with in side
The reaction vessel 12 of exhaustor 11.Lower inside at reaction vessel 12 is provided with fibre core and uses
Jet pipe 14 and covering jet pipe 15.In reaction vessel 12, the most internally hang
Original material 13.Further, original material 13 utilize fibre core jet pipe 14 form fibre core
While portion's porous glass body 21, covering jet pipe 15 is utilized to form cladding part Porous glass
Glass body 22.
The upper end of original material 13 is held by the support shaft 16 of lowering or hoisting gear 18, can be in order to
Carry out rotating and lifting with lowering or hoisting gear 18.Lowering or hoisting gear 18 is by controlling device 19 to upper
Lifting speed is controlled, so that by fiber core part porous glass body 21 and cladding part Porous glass
The uniform external diameter of the glass granules stacked body 20 that glass body 22 is constituted.
Fig. 2 is to represent the quartz that the manufacture device of base glass material involved in the present invention is comprised
The concept map of the example of jet pipe and metal pipe arrangement.Fibre core jet pipe 14 is to have with concentric circles
8 layers of pipe jet pipe of the different multiple quartz ampoules 31～38 of diameter of configuration.Fibre core jet pipe 14
The glass granules that will be produced by the hydrolysis of flame, at the beginning of being arranged on stacking datum mark
Beginning material 13 sprays and stacks.Additionally, in the present invention, fibre core jet pipe 14 is not limited to
8 layers of pipe, are not defined its number of plies and shape.
At fibre core with in jet pipe 14, by inside and the adjacent stone of the quartz ampoule 31 at center
The gap of English pipe is as importing gas the spout sprayed.It addition, except the quartz ampoule at center
On other quartz ampoules 32～38 beyond 31, connect and have the quartz as gas supply arm
Pipe 42～48.Further, at the center quartz ampoule 31 of the spout becoming the 1st layer and the 2nd layer
And on quartz ampoule 42, connect have from raw material feed device 50 extend gas supply pipe arrangement,
The metal pipe arrangement 51,52 i.e. formed by stainless steel and other metal materials.From with not shown gas
The metal pipe arrangement etc. that feedway connects, supplies to quartz ampoule 43～48 via teflon tube etc.
Gas, wherein, quartz ampoule 43～48 is not raw material pipe arrangement.
At fibre core with in jet pipe 14, to the 1st of the Inner Constitution by the quartz ampoule 31 at center the
The spout of layer and the spout of be made up of the gap of quartz ampoule 31,32 the 2nd layer, send into former
Material gas and burning gases.Supply from raw material in quartz ampoule 31 via metal pipe arrangement 51
The gas of feedway 50, supplies from raw material confession to quartz ampoule 42 via metal pipe arrangement 52
Gas to device 50.Thus, fibre core with jet pipe 14 from its front end spray burning gases (H2
Gas), combustion-supporting gas (O2Gas), material containing gas (Ar gas or N2The noble gases such as gas),
Seal gas (Ar gas or N2The noble gases such as gas), unstrpped gas (SiCl4, as mixing
The GeCl of miscellaneous dose4Deng), generate glass granules by the hydrolysis of flame.Additionally, sometimes
Unstrpped gas is only sent in the spout of the 1st layer.
If the temperature to the unstrpped gas of jet pipe supply raises, then there is the heap of glass granules
The tendency that folded density uprises, yield rate raises.At fibre core with in jet pipe 14, in order to improve to
The temperature of gas of the spout supply of the 1st layer and the 2nd layer, can metal pipe arrangement 51,
On 52, winding is built-in with the heater 59 of line with heating function, the temperature of supply gas is heated approximately at
About 400 DEG C.At fibre core with in jet pipe 14, between quartz ampoule 31 and metal pipe arrangement 51
At connecting portion between connecting portion and quartz ampoule 42 and metal pipe arrangement 52, to quartz ampoule
31,42 and metal pipe arrangement 51,52 be directly attached and do not use the resin that thermostability is low to join
Pipe or resin joint.
1st embodiment
Fig. 3 is to represent that the quartz ampoule 31 involved by the 1st embodiment of the present invention and metal are joined
The profile of the connecting structure between pipe 51.On quartz ampoule 31, with metal pipe arrangement 51
Connect on end and form discoideus flange 61.It addition, on metal pipe arrangement 51, with stone
Connecting of English pipe 31 forms discoideus flange 62 on end.Metal pipe arrangement 51 with quartz ampoule
Connect on 31 contrary sides and have the metal flexible pipe 63 with flexibility, in the week of flexible pipe 63
Enclose and be wound with heater.And, it is also possible to around metal pipe arrangement 51, also it is wound with heating
Device (with reference to Fig. 2).
For flange 61,62, bearing surface 65,66 is smooth and against each other.Thus, flange
61,62 respective bearing surfaces 65,66 are in close contact in the way of the contact of face each other and carry out close
Envelope.The flange 61,62 abutted each other is clamped parts 67 and clamps.Clamping part 67 is along week
Multiple to arranging across interval.Thus, flange 61,62 is clamped parts 67 in whole week
Clamp the most securely.
According to the connecting structure involved by the 1st embodiment, can not via resin pipe arrangement or
Resin joint and quartz ampoule 31 and metal pipe arrangement 51 are connected hermetically.Thus, guarantee good
While good sealing state, can supply former with high temperature to quartz ampoule 31 from metal pipe arrangement 51
The gases such as material gas.It is thus possible to improve the yield rate of glass granules, improve glass granules heap
The productivity ratio of stack 20.
Further, since quartz ampoule 31 and metal pipe arrangement 51 are directly connected to, thus with use
The situation of the joint of heavier-weight is compared, and can reduce the root to fibre core jet pipe 14 as far as possible
The load that portion applies.Thus, it is possible to the quartz ampoule 31 at the center of elimination is subjected to displacement and makes center
Spout skew, the problem making flame instability.But, even if in this connecting structure, also
It is preferably provided with bearing the support structure of the load of flexible pipe 63.
Fig. 4 is to represent the company between the quartz ampoule involved by the 1st embodiment and metal pipe arrangement
Connect the profile of the first variation of structure.In the first variation, at quartz ampoule 31 and
The bearing surface 65,66 of the flange 61,62 of metal pipe arrangement 51 sandwiches packing ring 69 each other.
Packing ring 69 is formed by the carbon of excellent heat resistance, pottery etc., with tight with each bearing surface 65,66
The mode of contact is formed as discoideus.According to the first variation, connecting portion can be improved further
The seal of position, it can be ensured that the best sealing.
Fig. 5 is to represent the company between the quartz ampoule involved by the 1st embodiment and metal pipe arrangement
Connect the profile of the second variation of structure.In the second variation, quartz ampoule 31 and gold
One side of the respective bearing surface 65,66 of flange 61,62 belonging to pipe arrangement 51 is concave shape, separately
One side is convex form, and above-mentioned concave shape and convex form are formed in the way of being fitted together to each other.Specifically
Ground is said, the inner circumferential side in the bearing surface 65 of the flange 61 of quartz ampoule 31 forms protuberance 65a,
Inner circumferential side in the bearing surface 66 of the flange 62 of metal pipe arrangement 51 forms recess 66a.And
And, by making the bearing surface 65,66 of flange 61,62 each other dock, thus protuberance 65a
Chimeric with recess 66a.In the second variation, it is also possible to improve the close of connecting portion further
Closing property, it is ensured that the best sealing.
Fig. 6 (a) is to represent between the quartz ampoule involved by the 1st embodiment and metal pipe arrangement
The profile of the 3rd variation of connecting structure, Fig. 6 (b) is the 6b-6b of Fig. 6 (a)
Profile.In the 3rd variation, the flange 61a of quartz ampoule 31 sets with quartz ampoule 31 split
Put, when quartz ampoule 31 is fitted together to flange 61a, utilize bonding agent 75 bonding and
Fixing.The material of flange 61a is the quartz glass identical with quartz ampoule 31.As bonding agent
75, ceramic bonding agent (the such as, " ア of the thermostability such as with about 300 DEG C is preferably used
レ system U プ ロ ダ クツ society " " the セ ラ マ ボ Application De " that make).It addition, at flange
61a, 62 bearing surface 65,66 between, sandwich packing ring 69 identically with the first variation.
It addition, in the 3rd variation, replace clamping part 67, and use the one of arc-shaped
To clamping part 68 and the fastening spiral shell of many (being 3 in this example) by they links
Bolt 68a.Preferably fastening bolt 68a flange 61a, 62 circumference on configure equably.Logical
Cross flange 61a, 62 sandwich between a pair clamping part 68, and be screwed into fastening bolt 68a,
Thus by flange 61a, 62 clamp the most securely.In addition it is also possible to for
The flange 61,62 of other variation of 1 embodiment uses clamping part 68.It addition, also
Can be for the flange 61a of the 3rd variation, 62 use clamping parts 67.In the 3rd deformation
In example, it is also possible to by firm for the flange 62 of the flange 61a being made up of quartz and metal pipe arrangement 51
Ground connects, it is ensured that the best sealing.
2nd embodiment
Fig. 7 is the quartz ampoule involved by the 2nd embodiment and the metal pipe arrangement representing the present invention
Between the profile of connecting structure.In the connecting structure involved by the 2nd embodiment,
The connection end of metal pipe arrangement 51 forms reducing portion 71, makes connection end and the reducing of quartz ampoule 31
Portion 71 is fitted together to.Further, the end face 73 of quartz ampoule 31 and the bottom surface 74 in reducing portion 71 are relative.
Additionally, for end face 73 and bottom surface 74, it is not necessary to necessarily make two faces contact, it is also possible to
It is slightly disengaged.It addition, in the reducing portion 71 of metal pipe arrangement 51 and chimeric with reducing portion 71
Between the connection end of quartz ampoule 31, utilize bonding agent 75 bonding and fixing.As bonding agent
75, it is possible to use such as identical the gluing with the bonding agent 75 of the 3rd variation of the 1st embodiment
Connect agent.
According to the connecting structure involved by the 2nd embodiment, can not via resin pipe arrangement or
Resin joint and quartz ampoule 31 and metal pipe arrangement 51 are directly connected in a sealing manner.Thus,
Can be while guaranteeing good sealing state, from metal pipe arrangement 51 with high temperature to quartz ampoule
The gases such as 31 base feed gases, can improve the yield rate of glass granules, and improve glass
The productivity ratio of microgranule stacked body 20.
It addition, in the connecting structure involved by the 2nd embodiment, in order to improve connecting portion
The seal of position, can insert the carbon that is formed as ring-type between end face 73, bottom surface 74
Packing ring, alternatively, it is also possible to be formed as concaveconvex shape by end face 73, bottom surface 74 and carry out each other
Concavo-convex chimeric.Additionally, in above-mentioned example, metal pipe arrangement 51 forms reducing portion 71,
But reducing portion can also be formed on quartz ampoule 31, the connection end of metal pipe arrangement 51 is carried out embedding
Close, and by bonding and fixing to connection end and reducing portion.But, different owing to being formed on quartz ampoule
Footpath portion forms reducing portion difficulty than on metal pipe arrangement, it is advantageous to outside metal pipe arrangement is configured at
Side.
3rd embodiment
Fig. 8 is the quartz ampoule involved by the 3rd embodiment and the metal pipe arrangement representing the present invention
Between the profile of connecting structure.In the connecting structure involved by the 3rd embodiment,
The connection end of metal pipe arrangement 51 forms reducing portion 81, and the inner circumferential in reducing portion 81 forms interior spiral shell
Stricture of vagina 82.It addition, form external screw thread 83 in the periphery connecting end of quartz ampoule 31.Further, logical
Cross the connection end being screwed into quartz ampoule 31 in the reducing portion 81 of metal pipe arrangement 51, so that stone
The female thread 82 of the external screw thread 83 and reducing portion 81 that connect end of English pipe 31 screws togather.It addition,
(support at the end face (bearing surface) 85 connecting end of quartz ampoule 31 and the bottom surface in reducing portion 81
Junction) between 86, the packing ring 84 being formed as ring-type carbon system or ceramic etc. is set, logical
Cross the connection end being screwed into quartz ampoule 31 in the reducing portion 81 of metal pipe arrangement 51, thus respectively
From end face 85, sandwich packing ring 84 between bottom surface 86.
According to the connecting structure involved by the 3rd embodiment, can not via resin pipe arrangement or
Resin joint and quartz ampoule 31 and metal pipe arrangement 51 are directly connected in a sealing manner.Thus,
Can be while guaranteeing good sealing state, from metal pipe arrangement 51 with high temperature to quartz ampoule
The gases such as 31 base feed gases, can improve the yield rate of glass granules, improve glass micro-
The productivity ratio of grain stacked body 20.Especially, the female thread 82 in the reducing portion 81 screwed togather each other
Become labyrinth sealing with the external screw thread 83 of quartz ampoule 31, the highly dense of connecting portion can be obtained
Feng Xing.
Furthermore it is possible to by packing ring 84, prevent in the reducing portion 81 of metal pipe arrangement 51
Institute is peeled off due to end face 85 each other, bottom surface 86 friction when being screwed into the connection end of quartz ampoule 31
Cause is airtight bad etc..In addition it is also possible to be not provided with packing ring 84, but to metal pipe arrangement
The reducing portion 81 of 51 is screwed into connecting end and making end face 85 each other, bottom surface of quartz ampoule 31
86 directly abut, thus are connected and sealed, alternatively, it is also possible to make end face 85, bottom surface 86
Be formed as concaveconvex shape and carry out concavo-convex chimeric each other.Additionally, in above-mentioned example, at gold
Belong to and on pipe arrangement 51, form reducing portion 81 but it also may on quartz ampoule 31, form reducing portion,
The connection end making metal pipe arrangement 51 is screwed into and is attached.But, with the 2nd embodiment phase
With ground, form reducing portion difficulty than on metal pipe arrangement owing to forming reducing portion on quartz ampoule,
It is advantageous to metal pipe arrangement to be arranged at outside.
4th embodiment
Fig. 9 is the quartz ampoule involved by the 4th embodiment and the metal pipe arrangement representing the present invention
Between the profile of connecting structure.In the connecting structure involved by the 4th embodiment,
The connection end of metal pipe arrangement 51 forms reducing portion 91, makes connection end and the reducing of quartz ampoule 31
Portion 91 is fitted together to.The inner peripheral surface in reducing portion 91 is formed female thread 92.It addition, to different
Footpath portion 91 is screwed into be formed on outer peripheral face external screw thread 93 tubular by pressure ring (press section
Part) 94, thus, it is provided with by pressure ring 94 between reducing portion 91 and quartz ampoule 31.Press
Pressure ring 94 is such as formed by metal, carbon or pottery.
By between end face and the bottom surface in reducing portion 91 of pressure ring 94, it is provided with and is formed as ring
The packing ring 95 of the carbon of shape.Packing ring 95 is by being screwed into the quilt by pressure ring 94 in reducing portion 91
Clamped by the end face of pressure ring 94 and the bottom surface in reducing portion 91 and carried out elastic deformation, this packing ring
95 are in close contact with the inner peripheral surface in reducing portion 91 and the outer peripheral face of quartz ampoule 31.
According to the connecting structure involved by the 4th embodiment, can not via resin pipe arrangement or
Resin joint and quartz ampoule 31 and metal pipe arrangement 51 are directly connected in a sealing manner.Thus,
Can be while guaranteeing good sealing state, from metal pipe arrangement 51 with high temperature to quartz ampoule
The gases such as 31 base feed gases, can improve the yield rate of glass granules, improve glass micro-
The productivity ratio of grain stacked body 20.
Additionally, in the 1st～the 4th embodiment, in metal pipe arrangement 51 and stone
The side that English pipe 31 is contrary connects metal flexible pipe 63, as shown in Figure 10, as long as using
Metal joint 98.Metal joint 98 has connector portions 98a at two ends, makes a joint
Portion 98a engages with metal pipe arrangement 51, makes another connector portions 98a engage with flexible pipe 63.By
This, easily can connect metal pipe arrangement 51 and flexible pipe 63.
It addition, in the above-described embodiment, to the fibre core quartz ampoule at the center of jet pipe 14
Connecting portion between 31 and metal pipe arrangement 51 illustrates and illustrates, but the connection of the present invention
Structure can apply to the connection between the quartz ampoule 42 of base feed gas and metal pipe arrangement 52
In position.It addition, can be applied not only to utilize VAD method (gas phase axle sedimentation)
Fibre core jet pipe, it is also possible to be applied to use the glass granules stacking of the cladding part of VAD method
(jacket layer (jacket) deposition), OVD method (external sediment method), MMD method are (many
Jet pipe plane SH wave method) etc. in quartz ampoule and metal pipe arrangement between connecting portion.
Claims (8)
1. a manufacture device for base glass material, its comprise jet flames quartzy jet pipe and
To the metal pipe arrangement of described quartz jet pipe supply gas,
It is characterized in that,
The be made up of quartz glass is comprised in the one end of quartz ampoule constituting described quartz jet pipe
One flange,
The second flange of metal is comprised in one end of described metal pipe arrangement,
Described quartz ampoule and described metal pipe arrangement are so that described first flange and described second flange
State that is against each other and that seal connects so that reduce the load applied to described quartz jet pipe,
Described metal pipe arrangement connect on the side contrary with described quartz ampoule have have flexibility
Metal flexible pipe, from described metal pipe arrangement with high temperature to described quartz ampoule base feed gas.
The manufacture device of base glass material the most according to claim 1, it is characterised in that
The packing ring of carbon it is clamped with each other at bearing surface.
The manufacture device of base glass material the most according to claim 1, it is characterised in that
In each bearing surface one is concave shape, and another is convex form, described concave shape
And described convex form is fitted together to each other.
4. a manufacture device for base glass material, its comprise jet flames quartzy jet pipe and
To the metal pipe arrangement of described quartz jet pipe supply gas,
It is characterized in that,
The one party constituted in the described quartz quartz ampoule of jet pipe or described metal pipe arrangement comprises
It is formed at the reducing portion connected on end,
Chimeric with described reducing portion at the connection end making the opposing party, the end connecting end of the opposing party
The bottom surface in face and described reducing portion close to or docking, by described reducing portion and with described reducing portion
Under state bonding between the described connection end of chimeric the opposing party, make described quartz ampoule and described
Metal pipe arrangement connects so that reduce the load applied to described quartz jet pipe,
Described metal pipe arrangement connect on the side contrary with described quartz ampoule have have flexibility
Metal flexible pipe, from described metal pipe arrangement with high temperature to described quartz ampoule base feed gas.
5. a manufacture device for base glass material, its comprise jet flames quartzy jet pipe and
To the metal pipe arrangement of described quartz jet pipe supply gas,
It is characterized in that,
Constitute the one party in the described quartz quartz ampoule of jet pipe or described metal pipe arrangement, bag
Containing being formed at the reducing portion connected on end, the inner circumferential in this reducing portion forms female thread, the opposing party
Connect end periphery on formed external screw thread,
By being screwed into described connection end in described reducing portion, so that described the opposing party
Connect the bottom surface in the end face of end and described reducing portion close to or the state of docking under, make described stone
Metal pipe arrangement described in Ying Guanhe connects so that reduce the load applied to described quartz jet pipe,
Described metal pipe arrangement connect on the side contrary with described quartz ampoule have have flexibility
Metal flexible pipe, from described metal pipe arrangement with high temperature to described quartz ampoule base feed gas.
6., according to the manufacture device of the base glass material described in claim 4 or 5, its feature exists
In,
The packing ring of carbon it is clamped with between described end face and described bottom surface.
7., according to the manufacture device of the base glass material described in claim 4 or 5, its feature exists
In,
In described end face and described bottom surface one is concave shape, and another is convex form, institute
State concave shape and described convex form is fitted together to each other.
8. a manufacture device for base glass material, its comprise jet flames quartzy jet pipe and
To the metal pipe arrangement of described quartz jet pipe supply gas,
It is characterized in that,
Described metal pipe arrangement is included in the reducing portion that its one end is formed,
Described quartz ampoule and described metal pipe arrangement is made to connect under following state: to constitute described quartz
The connection end of the quartz ampoule of jet pipe is chimeric with described reducing portion, at described reducing portion and described quartz
The pressing component of tubular is installed between pipe, is arranged at described pressing component and the end in described reducing portion
The packing ring of the carbon between face is pressed from both sides by the end face of described pressing component and the bottom surface in described reducing portion
Hold, elastic deformation occurs, the inner peripheral surface in described packing ring and described reducing portion and described quartz ampoule
Outer peripheral face is in close contact so that reduce the load applied to described quartz jet pipe,
Described metal pipe arrangement connect on the side contrary with described quartz ampoule have have flexibility
Metal flexible pipe, from described metal pipe arrangement with high temperature to described quartz ampoule base feed gas.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011007536A JP5750900B2 (en) | 2011-01-18 | 2011-01-18 | Connection structure of quartz tube and metal tube |
| JP2011-007536 | 2011-01-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102603180A CN102603180A (en) | 2012-07-25 |
| CN102603180B true CN102603180B (en) | 2016-09-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210016802.2A Active CN102603180B (en) | 2011-01-18 | 2012-01-18 | Comprise the manufacture device of the base glass material of quartz jet pipe and raw material supply metal pipe arrangement |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5750900B2 (en) |
| CN (1) | CN102603180B (en) |
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| CN105240630B (en) * | 2015-11-05 | 2018-07-06 | 攀钢集团攀枝花钢钒有限公司 | Non-bolt fast-assembling large-sized flange pair |
| CN108105495A (en) * | 2017-11-17 | 2018-06-01 | 江苏壹鼎崮机电科技有限公司 | A kind of antidetonation tube bundle devices being easily installed |
| JP6619838B2 (en) * | 2018-04-26 | 2019-12-11 | 株式会社フジクラ | Optical fiber manufacturing method and optical fiber preform |
Citations (2)
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|---|---|---|---|---|
| JP2002289602A (en) * | 2001-03-27 | 2002-10-04 | Hitachi Kokusai Electric Inc | Semiconductor substrate processing apparatus |
| TW201021126A (en) * | 2008-08-14 | 2010-06-01 | Shinetsu Handotai Kk | Vertical heat treatment apparatus and heat treatment method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11315988A (en) * | 1998-05-01 | 1999-11-16 | Iwatani Internatl Corp | Structure for connecting quartz glass tube and stainless steel tube |
| JP4114903B2 (en) * | 1998-10-16 | 2008-07-09 | 信越石英株式会社 | Quartz glass tube with tapered groove and optical fiber preform manufacturing method using the same |
| JP2000161555A (en) * | 1998-12-01 | 2000-06-16 | Koyo Thermo System Kk | Pipe joint device |
| JP2001089161A (en) * | 1999-09-24 | 2001-04-03 | Tokuyama Toshiba Ceramics Co Ltd | Method for producing synthetic silica glass ingot and equipment therefor |
| US7648177B2 (en) * | 2003-09-02 | 2010-01-19 | Atomate Corporation | Apparatus and method for actuating or maintaining a seal by differential pressure |
| JP2006316987A (en) * | 2005-05-16 | 2006-11-24 | Atsunori Yamauchi | Glass pipe joint and glass pipe connecting technology |
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2011
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002289602A (en) * | 2001-03-27 | 2002-10-04 | Hitachi Kokusai Electric Inc | Semiconductor substrate processing apparatus |
| TW201021126A (en) * | 2008-08-14 | 2010-06-01 | Shinetsu Handotai Kk | Vertical heat treatment apparatus and heat treatment method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102603180A (en) | 2012-07-25 |
| JP5750900B2 (en) | 2015-07-22 |
| JP2012148911A (en) | 2012-08-09 |
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