CN205607897U

CN205607897U - A sample platform for EBSD test

Info

Publication number: CN205607897U
Application number: CN201620446615.1U
Authority: CN
Inventors: 唐翠; 曹国剑; 王月月; 刘晗
Original assignee: Harbin University of Science and Technology
Current assignee: Harbin University of Science and Technology
Priority date: 2016-05-17
Filing date: 2016-05-17
Publication date: 2016-09-28
Anticipated expiration: 2026-05-17

Abstract

The utility model provides a sample platform for EBSD test, it relates to a test apparatus, and current EBSD sample platform the sample appears with the fixed not jail of traditional viscose mode and holds easily movable or even drop in test procedure because the sample is heavier in test procedure, causes the problem that the test result is inaccurate or even fail, and it includes base station, a T type cooperation pole and a jackscrew, contained angle between base station inclined plane and the bottom surface is 70, is equipped with a cross section and for the square cuboid hole of (the size is 5mm), is equipped with a screw hole in the cross section perpendicular to cuboid hole direction of base station in base station inclined plane lower part perpendicular to inclined plane direction, after T type cooperation pole inserts the cuboid hole, with jackscrew precession screw hole with fixed T type cooperation pole, after the assembly is accomplished, can at the sample bench with as illustrated in FIG. 1 the placing of sample. The utility model is used for the sample test.

Description

A kind of sample stage for EBSD test

Technical field

The present invention relates to a kind of test tool, be specifically related to a kind of sample stage for EBSD test.

Background technology

In scanning electron microscope (SEM), the electron beam being incident on sample produces several different effect with sample effect, and one of them is exactly generation diffraction on lattice plane regularly arranged in each crystal or crystal grain.Diffraction composition " diffraction pattern " produced from all atomic planes, this can be regarded as the angular relationship figure between a crystal Atom face.Since the nineties in 20th century, electron backscattered style (the Electron Back-scattering Patterns being assemblied on SEM, it being called for short EBSP) crystal microcell is orientated and the analytical technology of crystal structure achieves bigger development, and extensively apply in microstructure and micro-texture characterize.This technology is also referred to as EBSD (Electron Backscattered Diffraction, is called for short EBSD) or orientation mapping microtechnique (Orientation Imaging Microscopy, is called for short OIM) etc..EBSD is mainly characterized by carrying out the diffraction (providing the data of crystallography) of spatial resolution submicron order while retaining the conventional feature of scanning electron microscope.

EBSD is the most conventional material characterization means, and in test process, sample is at 70 ° inclined vertically, and requires that sample can not tilt in the horizontal direction.EBSD sample stage fixes sample at present is to be bonded on sample stage by sample conducting resinl (or elargol), for the sample that weight is little, it is only necessary to sample levels direction is as far as possible parallel with probe.And for heavier sample, owing to being to tilt 70 °, with traditional sample fixing means, sample easily occurs the mobile phenomenon even come off in test process, causing picture position to be susceptible to change, back scattering region offsets, and ultimately results in result of the test inaccurate the most failed.

Summary of the invention

This utility model is heavier due to sample in test process for solving existing EBSD sample stage, loosely occur that sample is the most mobile in test process with traditional viscose glue mode is fixing and even come off, cause result of the test the most failed inaccurate problem, and then a kind of sample stage for EBSD test proposed.

This utility model adopts the technical scheme that for solving above-mentioned technical problem:

A kind of sample stage for EBSD test, it is characterised in that: it includes base station, a T-shaped depending post and a jackscrew；Angle between base station inclined-plane and bottom surface is 70 °, on bevel direction, the cuboid hole that a cross section is square (a size of 5mm × 5mm) it is provided with in base station inclined-plane lower vertical, cross section at base station is perpendicular on cuboid hole direction be provided with a screwed hole, after T-shaped depending post inserts cuboid hole, by jackscrew precession screwed hole with fixing T-shaped depending post.

This utility model has the advantages that

One, firm being fixed on sample stage of heavier sample can not had sample and moves, cause final image to drift about；Two, it is plane due to the face of T-shaped depending post regular shape and contact sample, well solves the tradition bonding method problem that is difficult to control to sample water Pingdu and perpendicularity；Three, owing to being to utilize T-shaped depending post to fix, solve and a period of time wait glue volatilization after utilizing adhesive means to be bonded on sample stage by sample, must be stood, prevent from polluting the problem of vacuum chamber, saved the test used time；Four, utilize T-shaped depending post to fix, solve sample back side remnants viscose glue and pollute the problem of sample, this sample can be reused and carry out other experiments.

Accompanying drawing explanation

Fig. 1 is schematic perspective view during this utility model use, and Fig. 2 is the front view of base station, and Fig. 3 is the top view of Fig. 2, and Fig. 4 is the sectional view of Fig. 1, and Fig. 5 is the schematic perspective view of this T-shaped depending post, and Fig. 6 is the front view of jackscrew.

Detailed description of the invention

Detailed description of the invention one: combine Fig. 1-Fig. 6 explanation, present embodiment is a kind of sample stage for EBSD test, including the T-shaped depending post 2 of base station 1, and a jackscrew 3；Angle between base station inclined-plane and bottom surface is 70 °, it is foursquare cuboid hole 4 that inclined-plane lower vertical at base station is provided with a cross section on bevel direction, cross section at base station is perpendicular on cuboid hole direction be provided with a screwed hole 5, after T-shaped depending post 2 inserts cuboid hole 4, by jackscrew 3 precession screwed hole 5 with fixing T-shaped depending post 2.

Detailed description of the invention two: combine Fig. 1-Fig. 3 and present embodiment is described, the square sectional of cuboid hole 4 a size of 5mm × 5mm set by base station, length is not to penetrate through base station as the upper limit, and other is identical with detailed description of the invention one.

Detailed description of the invention three: combine Fig. 2 and Fig. 3 and present embodiment is described, jackscrew 3 is the interior hexagonal jackscrew of M5, to prevent the relative motion between T-shaped depending post 2 and cuboid hole 4 in the screwed hole 4 of precession base station 1 during use, play fixation, fixed form is simple and convenient, and other is identical with detailed description of the invention one or two.

Detailed description of the invention four: combine Fig. 4 and Fig. 5 and present embodiment is described, it is foursquare cuboid that " | " portion of T-shaped depending post 2 and " " portion are cross section, square dimensions is 5mm × 5mm, " | " minister degree is less than length 5mm of cuboid hole 4, coordinating the cuboid hole 4 inserting base station 1 to use, other is identical with detailed description of the invention three.

Work process

In conjunction with Fig. 1-Fig. 6 explanation, during use, T-shaped depending post 2 is inserted in the cuboid hole 4 of base station 1, make " " portion of T-shaped depending post and the contact of incline plane of base station 1, T-shaped depending post 2 is withstood in jackscrew 3 is screwed in the screwed hole 5 of base station 1, it is fixed, after having assembled, sample is placed on sample stage as shown in Figure 1.

Claims

1. the sample stage for EBSD test, it is characterised in that: it includes base station, a T-shaped depending post and a jackscrew；Angle between base station inclined-plane and bottom surface is 70 °；Being provided with a cross section on bevel direction in base station inclined-plane lower vertical is foursquare cuboid hole；Cross section at base station is perpendicular on cuboid hole direction be provided with a screwed hole.

A kind of sample stage for EBSD test the most according to claim 1, it is characterised in that: the cross-sectional square shape a size of 5mm × 5mm of cuboid hole (4) set by base station (1), length is not to penetrate through base station as the upper limit.

A kind of sample stage for EBSD test the most according to claim 1, it is characterised in that: jackscrew (3) is the interior hexagonal jackscrew of M5.