CN205521021U - A specimen grip utensil for t -EBSD test - Google Patents

A specimen grip utensil for t -EBSD test Download PDF

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Publication number
CN205521021U
CN205521021U CN201620064493.XU CN201620064493U CN205521021U CN 205521021 U CN205521021 U CN 205521021U CN 201620064493 U CN201620064493 U CN 201620064493U CN 205521021 U CN205521021 U CN 205521021U
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CN
China
Prior art keywords
straight section
base station
sample
big bottom
big
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Expired - Fee Related
Application number
CN201620064493.XU
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Chinese (zh)
Inventor
曹国剑
刘晗
范国华
唐光泽
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Harbin University of Science and Technology
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Harbin University of Science and Technology
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Priority to CN201620064493.XU priority Critical patent/CN205521021U/en
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Publication of CN205521021U publication Critical patent/CN205521021U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model provides a specimen grip utensil for t -EBSD test, it relates to a test apparatus. For thin sample in solving current t -EBSD test procedure need glue the defect on anchor clamps with the viscose, the fixed unsatisfactory removal that then can appear of sample leads to the final image drift, experimental problem of failing. It includes base station and two sets of preforming, and every group preforming mainly comprises first straight section, second straight section and third straight section, the base station is for the cross section is inverted right -angled trapezoids's six prisms, and be close to inclined plane department on the big bottom surface at big base place and seted up the rectangle step, length direction along the base station on the big bottom surface is provided with two preformings side by side, the one end and the one end of third straight section of second straight section are connected and are formed the contained angle, and the one end of first straight section is connected with the one end of second straight section through the spring hinge who installs on big bottom surface, the utility model is used for the sample test.

Description

A kind of sample clamp for t-EBSD test
Technical field
The present invention relates to a kind of test tool, be specifically related to a kind of sample clamp for t-EBSD test.
Background technology
In scanning electron microscope (SEM), the electron beam being incident on sample produces several different effect with sample effect, and one of them is exactly generation diffraction on lattice plane regularly arranged in each crystal or crystal grain.Diffraction composition " diffraction pattern " produced from all atomic planes, this can be regarded as the angular relationship figure between a crystal Atom face.Since the nineties in 20th century, electron backscattered style (the Electron Back-scattering Patterns being assemblied on SEM, it being called for short EBSP) crystal microcell is orientated and the analytical technology of crystal structure achieves bigger development, and extensively apply in microstructure and micro-texture characterize.This technology is also referred to as EBSD (Electron Backscattered Diffraction, is called for short EBSD) or orientation mapping microtechnique (Orientation Imaging Microscopy, is called for short OIM) etc..EBSD is mainly characterized by carrying out the diffraction (providing the data of crystallography) of spatial resolution submicron order while retaining the conventional feature of scanning electron microscope.
When using traditional E BSD pattern, incident electron is big with the sphere of action of bulk sample, and the cross-directional zone width producing backscattered electron is typically larger than 150nm, therefore traditional E BSD spatial discrimination rate variance;Using t-EBSD pattern incident penetration of electrons sample, its lateral expansion area is typically smaller than 100nm so that phase resolution is high.
Currently used method of testing is by specimen holder on specimen holder platform, then is fixed on by specimen holder platform on a support tilting 70 °.Owing to specimen holder platform is heavier, the drift of image can occur in experimentation, cause result to there is bigger error, it addition, can only accommodate a sample on a folder platform, testing efficiency is poor.
Summary of the invention
The present invention solves the defect that in existing t-EBSD test process, thin sample need to be bonded on fixture with viscose glue, sample is fixed undesirable, there will be movement, causes final image to drift about, the problem of test failure, and then proposes a kind of sample clamp for t-EBSD test
This utility model adopts the technical scheme that for solving above-mentioned technical problem:
A kind of sample clamp for t-EBSD test includes base station and two groups of tablettings, and often group tabletting is mainly made up of the first straight section, the second straight section and the 3rd straight section;Base station be cross section be trapezoidal six prisms of chamfer, angle β between big base and hypotenuse that chamfer is trapezoidal is 70 °, at inclined-plane, rectangular step is offered on the big bottom surface at big place, base, the table top of rectangular step is 0.1mm to distance h of big bottom surface, and on described big bottom surface, the length direction along base station has been arranged side by side two tablettings;The
One end of second straight section is connected and is formed angle with one end of the 3rd straight section, this angle is towards big bottom surface, the other end of the 3rd straight section is placed in the top of semicircle step, one end of first straight section connects by being arranged on one end of the spring hinge on big bottom surface and the second straight section, and the other end of the first straight section extends to the straight waist that chamfer is trapezoidal;
This utility model has the advantages that
One, sample can not had on the semicircle step being fixed on clamp body firm for thin for t-ebsd sample and moves, cause final image to drift about.
Two, due to sample clamp step length direction and width all with the sides aligned parallel of fixture, well solve the problem that tradition bonding method is difficult to control to levelness and perpendicularity.
Three, owing to being to utilize tabletting to fix, solve and must stand a period of time after utilizing viscose glue to be bonded on fixture by sample so that glue volatilization, prevent from polluting the problem of vacuum chamber, saved the test used time.
Four, utilize tabletting to fix, solve sample back side remnants viscose glue and pollute the problem of sample, this sample can be reused and carry out other experiments.
Five, due to sample clamp step length direction and width all with the sides aligned parallel of fixture, utilize tabletting and sample clamp step edge to fix sample, repeatedly same sample can be fixed on same position, resetting is effective.
Accompanying drawing explanation
Fig. 1 is front view of the present utility model, and Fig. 2 is the left view of Fig. 1, and Fig. 3 is the top view of Fig. 1, and Fig. 4 is the partial enlarged drawing of Fig. 1, Fig. 5 be this utility model be placed on sample stage when t-EBSD tests with the use of time front view.
Detailed description of the invention
Detailed description of the invention one: combine Fig. 1-Fig. 5 explanation, a kind of sample clamp for t-EBSD test of present embodiment includes base station 1-1 and two tablettings, and each tabletting is mainly made up of the first straight section 1-2, the second straight section 1-3 and the 3rd straight section 1-4;Base station 1-1 be cross section be trapezoidal six prisms of chamfer, angle β between big base and hypotenuse that chamfer is trapezoidal is 70 °, at inclined-plane, rectangular step 1-5 is offered on the big bottom surface 1-1-1 at big place, base, rectangular step 1-5 is arranged along the length direction of base station 1-1, distance h of the table top 1-5-1 of rectangular step to big bottom surface 1-1-1 is 0.1mm, and on described big bottom surface 1-1-1, the length direction along base station 1-1 has been arranged side by side two tablettings;
One end of second straight section 1-3 is connected and is formed angle with one end of the 3rd straight section 1-4, this angle is towards big bottom surface 1-1-1, the other end of the 3rd straight section 1-4 is placed in the top of semicircle step 1-5, one end of first straight section 1-2 connects by being arranged on one end of the spring hinge on big bottom surface 1-1-1 and the second straight section 1-3, and the other end of the first straight section 1-2 extends to the straight waist that chamfer is trapezoidal.
Detailed description of the invention two: combining Fig. 4 explanation, distance h of the table top 1-5-1 of the rectangular step of present embodiment to big bottom surface 1-1-1 is 0.1mm.Being arranged such, sample can be positioned on rectangular step, is conducive to test.Other is identical with detailed description of the invention one.
Detailed description of the invention three: combining Fig. 4 explanation, the angle α between the second segment 1-2-2 of present embodiment and the 3rd section of 1-2-3 is 160 °.It is arranged such, meets tabletting and fix sample on semicircle step.Other is identical with detailed description of the invention one or two.
Detailed description of the invention four: combining Fig. 1 and Fig. 4 explanation, the tabletting of present embodiment is rustless steel tabletting.Intensity is big, meets the design requirements and the actual needs.Other is identical with detailed description of the invention three.
Detailed description of the invention five: combining Fig. 4 explanation, the thickness of the tabletting of present embodiment is 2mm.It is arranged such, meets the design requirements and the actual needs.One, two or four are identical with detailed description of the invention for other.
Work process
In conjunction with Fig. 1-Fig. 5 explanation, two groups of tablettings are had to fix sample at rectangular step, first straight section 2-2 and the second straight section 2-3 is equipped with spring hinge, press the other end of the first straight section 2-2, then the other end of the 3rd straight section 2-4 can be made upwards to open by the effect of spring hinge, sample is dialled on rectangular step, unclamp the 3rd straight section 2-4 of tabletting, then during sample is secured to rectangular step.
As shown in Figure 5, of the present utility model for t-EBSD test sample clamp need to be placed on EBSD sample stage with the use of, by EBSD sample stage slide block 3-1 along guide rail 3-2 slide near limited block 3-3 time, the sample clamp being used for t-EBSD test can be arranged on the front end of EBSD sample stage slide block 3-1.

Claims (4)

1. the sample clamp for t-EBSD test, it is characterized in that: it includes base station (1-1) and two groups of tablettings, and often group tabletting is mainly made up of the first straight section (1-2), the second straight section (1-3) and the 3rd straight section (1-4);Base station (1-1) be cross section be trapezoidal six prisms of chamfer, angle β between big base and hypotenuse that chamfer is trapezoidal is 70 °, the big bottom surface (1-1-1) at big place, base is upper offers rectangular step (1-5) at inclined-plane, the table top (1-5-1) of rectangular step is 0.1mm to distance h of big bottom surface (1-1-1), and on described big bottom surface (1-1-1), the length direction along base station (1-1) has been arranged side by side two tablettings;One end of second straight section (1-3) is connected and is formed angle with one end of the 3rd straight section (1-4), this angle is towards big bottom surface (1-1-1), the other end of the 3rd straight section (1-4) is placed in the top of rectangular step (1-5), one end of first straight section (1-2) connects by being arranged on one end of the spring hinge on big bottom surface (1-1-1) and the second straight section (1-3), and the other end of the first straight section (1-2) extends to the straight waist that chamfer is trapezoidal.
A kind of sample clamp for t-EBSD test the most according to claim 1, it is characterized in that: the length of rectangular step (1-5) is consistent with base station, it is all 132mm, width is 10mm, and distance h of the table top (1-5-1) of rectangular step to big bottom surface (1-1-1) is 0.1mm.
A kind of sample clamp for t-EBSD test the most according to claim 1 and 2, it is characterised in that: the angle α between second segment (1-2-2) and the 3rd section (1-2-3) is 160 °.
A kind of sample clamp for t-EBSD test the most according to claim 3, it is characterised in that: tabletting is rustless steel tabletting and by being hingedly connected on the big bottom surface of base station (1-1-1).
CN201620064493.XU 2016-01-25 2016-01-25 A specimen grip utensil for t -EBSD test Expired - Fee Related CN205521021U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620064493.XU CN205521021U (en) 2016-01-25 2016-01-25 A specimen grip utensil for t -EBSD test

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620064493.XU CN205521021U (en) 2016-01-25 2016-01-25 A specimen grip utensil for t -EBSD test

Publications (1)

Publication Number Publication Date
CN205521021U true CN205521021U (en) 2016-08-31

Family

ID=56767915

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201620064493.XU Expired - Fee Related CN205521021U (en) 2016-01-25 2016-01-25 A specimen grip utensil for t -EBSD test

Country Status (1)

Country Link
CN (1) CN205521021U (en)

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160831

Termination date: 20180125