CN205295509U - 一种泡沫镍及泡沫镍基合金电镀装置 - Google Patents
一种泡沫镍及泡沫镍基合金电镀装置 Download PDFInfo
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105401205A (zh) * | 2015-11-26 | 2016-03-16 | 有研粉末新材料(北京)有限公司 | 一种泡沫镍及泡沫镍基合金电镀装置 |
CN107858737A (zh) * | 2017-11-30 | 2018-03-30 | 江门市联兴高频设备有限公司 | 一种金属加工用电镀装置 |
CN110552048A (zh) * | 2019-09-30 | 2019-12-10 | 上海华力集成电路制造有限公司 | 电镀腔体以及包括其的ecp设备 |
US10858748B2 (en) * | 2017-06-30 | 2020-12-08 | Apollo Energy Systems, Inc. | Method of manufacturing hybrid metal foams |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105401205A (zh) * | 2015-11-26 | 2016-03-16 | 有研粉末新材料(北京)有限公司 | 一种泡沫镍及泡沫镍基合金电镀装置 |
US10858748B2 (en) * | 2017-06-30 | 2020-12-08 | Apollo Energy Systems, Inc. | Method of manufacturing hybrid metal foams |
US11274376B2 (en) * | 2017-06-30 | 2022-03-15 | Apollo Energy Systems, Inc. | Device for manufacturing hybrid metal foams |
CN107858737A (zh) * | 2017-11-30 | 2018-03-30 | 江门市联兴高频设备有限公司 | 一种金属加工用电镀装置 |
CN110552048A (zh) * | 2019-09-30 | 2019-12-10 | 上海华力集成电路制造有限公司 | 电镀腔体以及包括其的ecp设备 |
CN110552048B (zh) * | 2019-09-30 | 2021-10-15 | 上海华力集成电路制造有限公司 | 电镀腔体以及包括其的ecp设备 |
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Address after: 101407 Beijing city Huairou District Yanqi Yanqi Economic Development Zone South four Street No. 12 Co-patentee after: GENERAL Research Institute FOR NONFERROUS METALS Patentee after: Youyan Powder New Materials Co.,Ltd. Address before: 101407 Beijing city Huairou District Yanqi Yanqi Economic Development Zone South four Street No. 12 Co-patentee before: General Research Institute for Nonferrous Metals Patentee before: GRIPM ADVANCED MATERIALS Co.,Ltd. |
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Effective date of registration: 20190802 Address after: 101407 Beijing city Huairou District Yanqi Yanqi Economic Development Zone South four Street No. 12 Patentee after: Youyan Powder New Materials Co.,Ltd. Address before: 101407 Beijing city Huairou District Yanqi Yanqi Economic Development Zone South four Street No. 12 Co-patentee before: General Research Institute for Nonferrous Metals Patentee before: Youyan Powder New Materials Co.,Ltd. |