CN205133726U - Nozzle system of coating by vaporization machine - Google Patents
Nozzle system of coating by vaporization machine Download PDFInfo
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- CN205133726U CN205133726U CN201520964646.1U CN201520964646U CN205133726U CN 205133726 U CN205133726 U CN 205133726U CN 201520964646 U CN201520964646 U CN 201520964646U CN 205133726 U CN205133726 U CN 205133726U
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Abstract
The application discloses nozzle system of coating by vaporization machine includes: the carrier that holds the chamber that is used for acceping the coating by vaporization material has, lay the heater that is used for heating the coating by vaporization material in the carrier around, install in the carrier and be arranged in supplying coating by vaporization material from carrier spun nozzle, install in the baroceptor that holds the intracavity, lay in the coating by vaporization material that stops up around the nozzle, in being used for the melting nozzle, receive baroceptor control circuit break -make prevent stopping up the heater, in the embodiment that this application provided, when the nozzle took place to stop up, the coating by vaporization material of jam in the heater melting nozzle was prevented stopping up in baroceptor control to can solve the chronic technical problem of nozzle blockage treatment.
Description
Technical field
The application relates to PVD (PhysicalVaporDeposition) field, particularly relates to a kind of nozzle system of evaporator.
Background technology
Vacuum plating is a kind of technology being produced thin-film material by physical method.In vacuum chamber evaporating materials atom from heating source emanate out get to plated object surface.
Evaporation coating makes it be deposited on a kind of vacuum coating technology of solid surface by certain material of heating evaporation.Evaporating materials is placed in crucible as metal, compound etc. or hangs on heated filament as evaporation source.Workpiece to be plated, as the substrates such as metal, pottery, plastics are placed in crucible front.Be evacuated to after high vacuum until crucible, heating crucible makes evaporating materials wherein and then sprays from nozzle.Atom or the molecule of evaporating materials are deposited on substrate surface with condensing mode.
As illustrated in figs. 1 and 2 is a kind of schematic diagram of nozzle system of evaporator.
Line source 21 is accommodated in crucible 12 as evaporating materials.After crucible 12 is evacuated to high vacuum, well heater 13 heating crucible 12 makes line source 21 evaporate and then sprays from nozzle 11, and the atom of line source 21 or molecule are deposited on workpiece surface to be plated in the mode of condensation.
Realizing in prior art process, contriver finds that in prior art, at least there are the following problems:
When crucible 12 local heating is uneven, or, when the angle of inclination due to nozzle 11 setting is unreasonable, causes evaporating materials skewness in nozzle 11, easily cause nozzle 11 to block.When touching mouth 11 and blocking, need the temperature first reducing crucible 12 in order to avoid scald operator.Then, need to abolish the vacuum in crucible 12, otherwise due to crucible 12 inner and outer air pressure poor, not easily remove the blocking in nozzle 11.During breaking vacuum, there is a large amount of nitrogen effusion keeping vacuum, therefore, after needing to wait for that nitrogen is overflowed completely, just can take the action of removing blocking, otherwise easily cause operator to suffocate.After removal blocking, need to extract air in crucible 12, keep vacuum environment in crucible 12, then, heating makes crucible 12 heat up so that evaporating materials evaporates thus starts working.Lower the temperature from crucible 12, breaking vacuum, removal block, vacuumize, crucible 12 time that whole blocking removes of having heated up is longer.
Therefore, need to provide a kind of technical scheme solving the technical problem of nozzle 11 plugging handling time length.
Utility model content
The embodiment of the present application provides a kind of nozzle system solving the evaporator of the technical problem of spray nozzle clogging treatment time length.
Concrete, a kind of nozzle system of evaporator, comprising:
There is the carrier of the container cavity for accommodating deposition material;
Be laid in the well heater for heating deposition material around carrier;
Be installed on carrier and the nozzle sprayed from carrier for confession deposition material;
Be installed on the baroceptor in container cavity;
To be laid in around nozzle, for the deposition material that blocks in melting nozzle, by the anti-clogging plug well heater of baroceptor pilot circuit break-make.
Preferably, described carrier is crucible;
Described crucible comprises Crucible body and crucible cover;
Described baroceptor is installed on crucible cover inwall.
Preferably, the nozzle system of described evaporator also comprises logic controller;
Described baroceptor and anti-clogging plug well heater andlogic control device are electrically connected, and control by logic controller.
Preferably, the nozzle system of described evaporator also comprises warning howler;
Described warning howler andlogic control device is electrically connected, for giving the alarm when air pressure exceedes predetermined threshold value.
Preferably, described carrier has original state position and working order position;
The position of carrier is controlled by logic controller;
When a jam does occur, carrier is reset to original state position from working order position by logic controller.
Preferably, described anti-clogging plug well heater is at least one in resistive heating, induction heating, electric-arc heating, electron beam heating, infrared heating and dielectric heating.
Preferably, described anti-clogging plug well heater is resistance coil;
Described resistance coil is wound in around nozzle.
Preferably, the high temperature resistant index of described baroceptor is higher than 400 DEG C.
The nozzle system of the evaporator that the embodiment of the present application provides, at least has following beneficial effect:
When nozzle generation blocking, baroceptor controls the deposition material of blocking in anti-clogging plug well heater melting nozzle, thus can solve the technical problem of spray nozzle clogging treatment time length.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide further understanding of the present application, and form a application's part, the schematic description and description of the application, for explaining the application, does not form the improper restriction to the application.In the accompanying drawings:
Fig. 1 is the nozzle system schematic diagram before the embodiment of the present application is improved.
Fig. 2 is the sectional view of Fig. 1.
The nozzle system schematic diagram that Fig. 3 provides for the embodiment of the present application.
Embodiment
For making the object of the application, technical scheme and advantage clearly, below in conjunction with the application's specific embodiment and corresponding accompanying drawing, technical scheme is clearly and completely described.Obviously, described embodiment is only some embodiments of the present application, instead of whole embodiments.Based on the embodiment in the application, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the application's protection.
Evaporation process a kind ofly makes it be deposited on a kind of vacuum coating technology of solid surface by certain material of heating evaporation.
Evaporator is a kind of specific equipment performing this evaporation process.Evaporator is when performing this evaporation process, and extracting vacuum, then heating evaporation material makes evaporating materials distil or vaporize to be ejected into workpiece surface to be plated in nozzle.
In generative process, workpiece to be plated is placed in the just right position of nozzle.Evaporating materials sprays the processing quality treating plating workpiece continuously in nozzle great impression.
Please refer to Fig. 1 and Fig. 2, as pointed in background technology, line source 21 is accommodated in crucible 12 as evaporating materials.After crucible 12 is evacuated to high vacuum, well heater 13 heating crucible 12 makes line source 21 evaporate and then sprays from nozzle 11, and the atom of line source 21 or molecule are deposited on workpiece surface to be plated in the mode of condensation.
In the embodiment of the present application, in order to solve the problem of spray nozzle clogging, contriver improves original nozzle system.
Refer to Fig. 3, nozzle system 100 comprise the container cavity 10 had for accommodating deposition material carrier 1, be laid in around carrier 1 for heat deposition material evaporation well heater 2, be installed on carrier 1 and nozzle 3, baroceptor (not shown), the anti-clogging plug well heater 4 be installed in container cavity 10 for spraying from carrier 1 for deposition material.
Carrier 1 has the container cavity 10 for accommodating deposition material.Deposition material completes distillation or vaporization as evaporation source in the container cavity 10 of carrier 1.In a kind of embodiment that the application provides, carrier 1 is crucible.Crucible is high temperature resistant, and can ensure the purity of evaporation source.Crucible comprises Crucible body and crucible cover.Deposition material mainly can rely on Crucible body to carry.
Evaporation well heater 2 is for heating deposition material, so that deposition material distillation or vaporization.Evaporation well heater 2, can adopt at least one in the heating of resistive heating, induction heating, electric-arc heating, electron beam, infrared heating and dielectric heating.
Resistive heating can adopt resistive heating circle.When adopting resistance heating manner, resistive heating circle is wound in carrier 1 around.Electric energy conversion, when being energized, is that heat energy finally transfers heat to deposition material through carrier 1 by resistive heating circle.
Induction heating can adopt induction heating circle.When adopting induction heating mode, require that deposition material is conductor.Induction heating circle is when logical exchange current, and the deposition material as conductor is in alternating electromagnetic field, and produce induced current (eddy current), the heat effect that eddy current is formed makes deposition material generate heat, thus distillation or vaporization.
Electric-arc heating can adopt electric-arc heating circle.The heat deposition material that electric arc produces is utilized during electric-arc heating.Electric-arc heating has directly and indirect arc heats two kinds.The flame current of direct arc heating is directly by deposition material, and deposition material can as of an electric arc electrode or medium.During indirect arc heating, the heat heating deposition material of arc radiation.
During electron beam heating, electron beam heating collar can be adopted.Electron beam adds the electronics bombardment deposition material surface of thermal utilization high-speed motion under electric field action, makes it to be heated.
Infrared heating can adopt infrared heating circle.Infrared heating circle utilizes infrared radiation object, and object changes radiating capacity into heat energy and heated after absorbing infrared rays.
Dielectric heating can adopt dielectric heating circle.When adopting induction heating mode, require that deposition material is isolator.Be placed in alternating electric field as dielectric deposition material, repeatedly can be polarized (under electric field action, the phenomenon of equivalent and opposite polarity electric charge appears to dielectric medium in its surface or inside), thus the converting electric energy in electric field is become heat energy.
Nozzle 3 is installed on carrier 1.Nozzle 3 is communicated with the container cavity 10 of carrier 1, so that deposition material is from ejection in nozzle 3.
Baroceptor (not shown) is for measuring the air pressure of deposition material distillation or vaporization in carrier 1.The high temperature resistant index of baroceptor (not shown) higher than 400 DEG C, thus can ensure at high temperature continuous and effective work.When nozzle 3 blocks, air pressure can raise gradually.Baroceptor (not shown) can detect the air pressure of rising.Baroceptor can be installed on crucible cover inwall.
Anti-clogging plug well heater 4, is laid in the deposition material around nozzle 3, for blocking in melting nozzle 3.Anti-clogging plug well heater 4 is similar with evaporation well heater 2, can adopt at least one in the heating of resistive heating, induction heating, electric-arc heating, electron beam, infrared heating and dielectric heating equally.Herein, the principle that the principle of anti-clogging plug well heater 4 melting blocking and evaporation well heater 2 heat deposition material is similar, repeats no more.
Further, in the another embodiment that the application provides, the nozzle system 100 of evaporator also comprises logic controller.Baroceptor (not shown) and anti-clogging plug coil andlogic control device are electrically connected, and control by logic controller.Can set threshold value, when the air pressure that baroceptor (not shown) detects lasting rising is more than or equal to the threshold value of setting, logic controller controls anti-clogging plug well heater 4 and works, thus the deposition material of blocking is fallen in melting, to work continuously.
Further, in the another embodiment that the application provides, the nozzle system 100 of evaporator also comprises warning howler.Warning howler andlogic control device is electrically connected, for giving the alarm when air pressure exceedes predetermined threshold value, to remind operator to note.
Further, in the another embodiment that the application provides, carrier 1 has original state position and working order position.The position of carrier 1 is controlled by logic controller.Such as, the original state position of carrier 1 can be make nozzle 3 position straight up.When a jam does occur, carrier 1 is reset to original state position from working order position by logic controller, to keep deposition material to spray to workpiece to be processed from nozzle 3 equably.
In actual use, when a jam does occur, baroceptor (not shown) detects the air pressure that continues to raise when being more than or equal to the threshold value of setting, sends guard signal to logic controller.Logic controller connects the circuit of anti-clogging plug well heater 4 according to this guard signal.Anti-clogging plug well heater 4 heating and melting blocks.
In the embodiment that the application provides, when nozzle 3 generation blocking, baroceptor controls the deposition material of blocking in anti-clogging plug well heater 4 melting nozzle, thus can solve the technical problem of spray nozzle clogging treatment time length.
The foregoing is only the embodiment of the application, be not limited to the application.To those skilled in the art, the application can have various modifications and variations.Any amendment done within all spirit in the application and principle, equivalent replacement, improvement etc., within the right that all should be included in the application.
Claims (8)
1. a nozzle system for evaporator, is characterized in that, comprising:
There is the carrier of the container cavity for accommodating deposition material;
Be laid in the evaporation well heater for heating deposition material around carrier;
Be installed on carrier and the nozzle sprayed from carrier for confession deposition material;
Be installed on the baroceptor in container cavity;
To be laid in around nozzle, for the deposition material that blocks in melting nozzle, by the anti-clogging plug well heater of baroceptor pilot circuit break-make.
2. the nozzle system of evaporator as claimed in claim 1, it is characterized in that, described carrier is crucible;
Described crucible comprises Crucible body and crucible cover;
Described baroceptor is installed on crucible cover inwall.
3. the nozzle system of evaporator as claimed in claim 1, it is characterized in that, the nozzle system of described evaporator also comprises logic controller;
Described baroceptor and anti-clogging plug well heater andlogic control device are electrically connected, and control by logic controller.
4. the nozzle system of evaporator as claimed in claim 3, it is characterized in that, the nozzle system of described evaporator also comprises warning howler;
Described warning howler andlogic control device is electrically connected, for giving the alarm when air pressure exceedes predetermined threshold value.
5. the nozzle system of evaporator as claimed in claim 3, it is characterized in that, described carrier has original state position and working order position;
The position of carrier is controlled by logic controller;
When a jam does occur, carrier is reset to original state position from working order position by logic controller.
6. the nozzle system of evaporator as claimed in claim 1, is characterized in that, described anti-clogging plug well heater is at least one in resistive heating, induction heating, electric-arc heating, electron beam heating, infrared heating and dielectric heating.
7. the nozzle system of evaporator as claimed in claim 1, it is characterized in that, described anti-clogging plug well heater is resistance coil;
Described resistance coil is wound in around nozzle.
8. the nozzle system of evaporator as claimed in claim 1, it is characterized in that, the high temperature resistant index of described baroceptor is higher than 400 DEG C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520964646.1U CN205133726U (en) | 2015-11-26 | 2015-11-26 | Nozzle system of coating by vaporization machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520964646.1U CN205133726U (en) | 2015-11-26 | 2015-11-26 | Nozzle system of coating by vaporization machine |
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| CN205133726U true CN205133726U (en) | 2016-04-06 |
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| CN201520964646.1U Active CN205133726U (en) | 2015-11-26 | 2015-11-26 | Nozzle system of coating by vaporization machine |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107779824A (en) * | 2017-12-07 | 2018-03-09 | 合肥鑫晟光电科技有限公司 | The production equipment of evaporation source, evaporation coating device and display of organic electroluminescence |
| CN108239750A (en) * | 2018-04-08 | 2018-07-03 | 江阴市光科真空机械有限公司 | Crucible is deposited in OLED |
| CN109082630A (en) * | 2018-09-06 | 2018-12-25 | 武汉华星光电半导体显示技术有限公司 | Evaporation coating device |
| CN109930113A (en) * | 2017-12-15 | 2019-06-25 | 合肥鑫晟光电科技有限公司 | Evaporation coating device |
| CN110373633A (en) * | 2019-07-16 | 2019-10-25 | 福建华佳彩有限公司 | A kind of OLED crucible for vapor plating |
| CN110425890A (en) * | 2019-09-05 | 2019-11-08 | 天津闪速炼铁技术有限公司 | A kind of anticlogging industrial furnace day flare pipe |
| CN113227442A (en) * | 2019-09-09 | 2021-08-06 | 株式会社爱发科 | Vapor deposition source and vacuum processing apparatus |
-
2015
- 2015-11-26 CN CN201520964646.1U patent/CN205133726U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107779824A (en) * | 2017-12-07 | 2018-03-09 | 合肥鑫晟光电科技有限公司 | The production equipment of evaporation source, evaporation coating device and display of organic electroluminescence |
| CN109930113A (en) * | 2017-12-15 | 2019-06-25 | 合肥鑫晟光电科技有限公司 | Evaporation coating device |
| CN108239750A (en) * | 2018-04-08 | 2018-07-03 | 江阴市光科真空机械有限公司 | Crucible is deposited in OLED |
| CN109082630A (en) * | 2018-09-06 | 2018-12-25 | 武汉华星光电半导体显示技术有限公司 | Evaporation coating device |
| CN109082630B (en) * | 2018-09-06 | 2020-08-07 | 武汉华星光电半导体显示技术有限公司 | Evaporation plating device |
| CN110373633A (en) * | 2019-07-16 | 2019-10-25 | 福建华佳彩有限公司 | A kind of OLED crucible for vapor plating |
| CN110425890A (en) * | 2019-09-05 | 2019-11-08 | 天津闪速炼铁技术有限公司 | A kind of anticlogging industrial furnace day flare pipe |
| CN113227442A (en) * | 2019-09-09 | 2021-08-06 | 株式会社爱发科 | Vapor deposition source and vacuum processing apparatus |
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