CN207483838U - For the thermal resistance evaporation source of antifouling membrane material - Google Patents
For the thermal resistance evaporation source of antifouling membrane material Download PDFInfo
- Publication number
- CN207483838U CN207483838U CN201721195496.8U CN201721195496U CN207483838U CN 207483838 U CN207483838 U CN 207483838U CN 201721195496 U CN201721195496 U CN 201721195496U CN 207483838 U CN207483838 U CN 207483838U
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- Prior art keywords
- nut
- cooling water
- electrode
- water channel
- metal wiring
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Abstract
The utility model discloses a kind of thermal resistance evaporation sources for antifouling membrane material, it includes evaporation boat etc., evaporation boat is located at one end of electrode, the other end of electrode and one end of electrode bar connect, the other end connection metal wiring terminal of electrode bar, heater is located at the top of electrode bar, first cooling water channel is located at the side of metal wiring terminal, heater is located at the side of metal wiring terminal, first cooling water channel and the second cooling water channel are connected, metal wiring terminal is located at the side of the second cooling water channel, second cooling water channel is located in electrode, upper cap nut is located at the top of lower nut, top nut is located at the top of lower nut, upper cap nut is located at the top of top nut, lower nut is located at the top of lower nut, connecting hole is located on metal wiring terminal and positioned at the side of electrode.The utility model can effectively control the temperature of heating, evaporator temperature be made to be maintained in the range of the evaporating temperature of anti-soil film always, ensure that antifouling membrane material uniformly can evaporate to form uniform coating effects.
Description
Technical field
The utility model is related to a kind of field of vacuum coating, more particularly to a kind of thermal resistance evaporation for antifouling membrane material
Source.
Background technology
Vacuum vapor plating, which generally refers to heating film-coated material, makes its surface component be evaporated with atomic group or ionic species
Out, and the material surface for needing plated film is deposited in, film is formed by film forming procedure.Vacuum coating equipment generally use resistance
Evaporation source carries out low temperature plated film, and Coating Materials is positioned in evaporation boat, by the way that electrode bar electrified regulation, heat is by electrode bar
Evaporation boat, after temperature rises to Coating Materials boiling point, Coating Materials starts gradually to evaporate.Anti-soil film is now more commonly used plated film
Material, film layer is easy to clean, is widely used, in the evaporation coating practical application of anti-soil film, it is desirable that evaporating temperature control exists
80 DEG C or so, structure is steamed in the resistance of traditional form, and temperature distribution gradients are big, it is difficult to control the temperature of evaporation boat, and usually evaporate
Temperature is about 400 DEG C at boat, significantly larger than the evaporating temperature of anti-soil film, its flash evapn is made after heating, causes plated film uneven,
Influence coating effects.
Therefore, it is necessary to which coating temperature can be controlled by providing one kind, especially can evaporator temperature be ensured with low temp operation
It is maintained at the thermal resistance evaporation source in the range of the evaporating temperature conducive to anti-soil film so that anti-soil film can uniformly evaporate, and obtain uniform
Coating effects.
Invention content
The technical problem to be solved by the utility model is to provide a kind of thermal resistance evaporation source for antifouling membrane material, energy
The temperature of enough effectively control heating, makes evaporator temperature be maintained in the range of the evaporating temperature of anti-soil film, ensures anti-soil film always
Material uniformly can evaporate to form uniform coating effects.
The utility model is to solve above-mentioned technical problem by following technical proposals：It is a kind of for antifouling membrane material
Thermal resistance evaporation source, which is characterized in that it includes evaporation boat, electrode, electrode bar, heater, the first cooling water channel, metal terminal
Son, the second cooling water channel, upper cap nut, lower nut, top nut, lower nut, upper stud, lower stud, connecting hole, evaporation boat are located at electricity
One end of pole, the other end of electrode and one end of electrode bar connect, the other end connection metal wiring terminal of electrode bar, heater
Positioned at the top of electrode bar, the first cooling water channel is located at the side of metal wiring terminal, and heater is located at metal wiring terminal
Side, the first cooling water channel and the second cooling water channel are connected, and metal wiring terminal is located at the side of the second cooling water channel, and second
Cooling water channel is located in electrode, and upper cap nut is located at the top of lower nut, and top nut is located at the top of lower nut, and upper cap nut is located at upper
The top of nut, lower nut are located at the top of lower nut, and upper stud is located at the top of lower stud, upper cap nut, top nut all with it is upper
Stud connection, all with lower Stud connection, connecting hole is located on metal wiring terminal and positioned at the one of electrode for lower nut, lower nut
Side.
Preferably, the heater is band thermocouple heater.
Preferably, the metal wiring terminal is bopper lug.
Preferably, the heater is arranged and along the extending direction of the second cooling water channel apart from 1.5~3cm of evaporation boat.
Preferably, the shape of the heater is bending.
The positive effect of the utility model is：The utility model can effectively control the temperature of heating, make always
Evaporator temperature is maintained in the range of the evaporating temperature of anti-soil film, ensures that antifouling membrane material uniformly can evaporate to form uniform plating
Film effect, it is simple in structure, it is at low cost.
Description of the drawings
Fig. 1 is the structure diagram of the utility model.
Specific embodiment
The utility model preferred embodiment is provided below in conjunction with the accompanying drawings, the technical solution of the utility model is described in detail.
As shown in Figure 1, the utility model includes evaporation boat 1, electrode 2, electrode for the thermal resistance evaporation source of antifouling membrane material
Stick 3, heater 4, the first cooling water channel 5, metal wiring terminal 6, the second cooling water channel 7, upper cap nut 8, lower nut 9, top nut
10th, lower nut 11, upper stud 12, lower stud 13, connecting hole 14, evaporation boat 1 are located at one end of electrode 2, the other end of electrode 2 with
One end connection of electrode bar 3, the other end connection metal wiring terminal 6 of electrode bar 3, heater 4 are located at the top of electrode bar 3,
First cooling water channel 5 is located at the side of metal wiring terminal 6, and heater 4 is located at the side of metal wiring terminal 6, the first cooling
Water route 5 is connected with the second cooling water channel 7, and metal wiring terminal 6 is located at the side of the second cooling water channel 7, the second cooling water channel
In electrode 2, upper cap nut 8 is located at the top of lower nut 9, and top nut 10 is located at the top of lower nut 11, and upper cap nut 8 is located at upper
The top of nut 10, lower nut 11 are located at the top of lower nut 9, and upper stud 12 is located at the top of lower stud 13, upper cap nut 8, on
Nut 10 is all connect with upper stud 12, and lower nut 9, lower nut 11 are all connect with lower stud 13, and connecting hole 14 is located at metal connection
On terminal 6 and positioned at the side of electrode 2.
Heater 4 is band thermocouple heater, effectively controls the temperature of heating in this way.
Metal wiring terminal 6 be bopper lug, such good conductivity.
The shape of heater is bending, electrode, electrode bar can be heated simultaneously in this way, heating is more comprehensive.
The operation principle of the utility model is as follows：When in use, antifouling membrane material is positioned in evaporation boat, by electricity
Electrified regulation after the metal wiring terminal wiring of pole stick one end, heat conduct the evaporation boat to electrode, temperature liter by electrode bar
After to antifouling membrane material boiling point, antifouling membrane material starts gradually to evaporate, the second cooling of the first cooling water channel connection in electrode bar
Water route is extended at evaporation boat, and cooling down is integrally carried out to thermal resistance evaporation source so that antifouling membrane material is heated evenly, electricity
Heater is equipped with outside pole and electrode bar, if more than limiting temperature, heater can be automatically stopped heating, if temperature is relatively low, heating
Device, which then voluntarily starts, to be reheated, and the temperature of evaporation boat is made to be maintained in the range of the evaporating temperature of anti-soil film always, ensures it uniformly
Evaporation.Heater is arranged and along the extending direction of the second cooling water channel apart from 1.5~3cm of evaporation boat, improves heating effect in this way.
In conclusion first, the utility model to electrode and electrode bar by integrally carrying out cooling down so that uniformity of temperature profile,
Secondly, electrode and electrode bar are heated equipped with heater, ensures that evaporating temperature needed for anti-soil film is maintained at the steaming of anti-soil film
It sends out in temperature range, makes plated film uniform.Upper cap nut, lower nut, top nut, lower nut, upper stud, lower stud facilitate and are consolidated
It is fixed.Metal wiring terminal is connect by the way that connecting hole is convenient with other elements.
In conclusion the utility model can effectively control the temperature of heating, evaporator temperature is made to be maintained at antifouling always
In the range of the evaporating temperature of film, ensure that antifouling membrane material can uniformly evaporate to form uniform coating effects, simple in structure, cost
It is low.
Particular embodiments described above, the technical issues of to the solution of the utility model, technical solution and advantageous effect
It has been further described, it should be understood that the foregoing is merely specific embodiment of the utility model, not
For limiting the utility model, within the spirit and principle of the utility model, any modification for being made, changes equivalent replacement
Into etc., it should be included within the scope of protection of this utility model.
Claims (5)
1. a kind of thermal resistance evaporation source for antifouling membrane material, which is characterized in that it includes evaporation boat, electrode, electrode bar, heating
Device, the first cooling water channel, metal wiring terminal, the second cooling water channel, upper cap nut, lower nut, top nut, lower nut, upper stud,
Lower stud, connecting hole, evaporation boat are located at one end of electrode, and the other end of electrode and one end of electrode bar connect, electrode bar it is another
One end connects metal wiring terminal, and heater is located at the top of electrode bar, and the first cooling water channel is located at the one of metal wiring terminal
Side, heater are located at the side of metal wiring terminal, and the first cooling water channel and the second cooling water channel are connected, metal wiring terminal
Positioned at the side of the second cooling water channel, the second cooling water channel is located in electrode, and upper cap nut is located at the top of lower nut, top nut position
In the top of lower nut, upper cap nut is located at the top of top nut, and lower nut is located at the top of lower nut, and upper stud is located at lower stud
Top, upper cap nut, top nut all connect with upper stud, and all with lower Stud connection, connecting hole is located at metal for lower nut, lower nut
On wire connection terminal and positioned at the side of electrode.
2. it to be used for the thermal resistance evaporation source of antifouling membrane material as described in claim 1, which is characterized in that the heater is band heat
Galvanic couple heater.
3. it to be used for the thermal resistance evaporation source of antifouling membrane material as described in claim 1, which is characterized in that the metal wiring terminal
For bopper lug.
4. it to be used for the thermal resistance evaporation source of antifouling membrane material as described in claim 1, which is characterized in that the heater is along second
The extending direction of cooling water channel is arranged and apart from 1.5~3cm of evaporation boat.
5. it to be used for the thermal resistance evaporation source of antifouling membrane material as described in claim 1, which is characterized in that the shape of the heater
For bending.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721195496.8U CN207483838U (en) | 2017-09-19 | 2017-09-19 | For the thermal resistance evaporation source of antifouling membrane material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721195496.8U CN207483838U (en) | 2017-09-19 | 2017-09-19 | For the thermal resistance evaporation source of antifouling membrane material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207483838U true CN207483838U (en) | 2018-06-12 |
Family
ID=62482406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721195496.8U Expired - Fee Related CN207483838U (en) | 2017-09-19 | 2017-09-19 | For the thermal resistance evaporation source of antifouling membrane material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207483838U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109487218A (en) * | 2018-11-27 | 2019-03-19 | 北京铂阳顶荣光伏科技有限公司 | Evaporation source heats electric gatherer and vacuum evaporation coating film device |
| CN113154889A (en) * | 2021-03-23 | 2021-07-23 | 无锡中工热控科技有限公司 | Heater terminal structure of high-temperature furnace |
-
2017
- 2017-09-19 CN CN201721195496.8U patent/CN207483838U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109487218A (en) * | 2018-11-27 | 2019-03-19 | 北京铂阳顶荣光伏科技有限公司 | Evaporation source heats electric gatherer and vacuum evaporation coating film device |
| CN113154889A (en) * | 2021-03-23 | 2021-07-23 | 无锡中工热控科技有限公司 | Heater terminal structure of high-temperature furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180612 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |