CN106222614A - A kind of evaporation crucible of vacuum coating equipment - Google Patents
A kind of evaporation crucible of vacuum coating equipment Download PDFInfo
- Publication number
- CN106222614A CN106222614A CN201610836635.4A CN201610836635A CN106222614A CN 106222614 A CN106222614 A CN 106222614A CN 201610836635 A CN201610836635 A CN 201610836635A CN 106222614 A CN106222614 A CN 106222614A
- Authority
- CN
- China
- Prior art keywords
- crucible
- chamber
- runner
- evaporation
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Abstract
The present invention provides the evaporation crucible of a kind of vacuum coating equipment, including the receiving chamber for accommodating heated material, it is centered around the heating chamber that described receiving chamber is peripheral, and surround the outer wall in described heating chamber, described heating intracavity is sequentially provided with the temperature for ensureing crucible evaporation mouth from top to bottom higher than evaporation material condensation point the top heating unit of independent temperature control, it is positioned at the lower heating unit of the peripheral independent temperature control of crucible, described heating top of chamber is provided with the runner passed through for described heated material, the top of described runner is provided with opening, the diameter at the two ends of described runner is more than the diameter in the middle part of described runner, the diameter of one end being provided with described opening of described runner is less than the internal diameter in described receiving chamber.The method have the advantages that double heating system design, it is simple to controlling the temperature of crucible different piece, the temperature at top is slightly above material evaporating temperature, can avoid the condensation of material；By accurately controlling evaporating temperature, it is achieved that stablizing of material vaporization rate.
Description
Technical field
The present invention relates to metallized film manufacturing technology field, the evaporation crucible of a kind of vacuum coating equipment.
Background technology
Along with the development of modern membrane science technology, the particularly capacitor extensive work with packaging metallized film
Industry is used, and huge film production and processing film industry are formed in the world.Household electrical appliance, electric apparatus, electronic product with
And packaging product demand increases sharply, so that the demand of metallized film is continuously increased, thus produce high efficiency, Gao Xing
Energy, multi-functional film vapor deposition device requirement are more and more urgent.
Film vapor deposition equipment integrates machinery, vacuum, plated film, freezes, the multidisciplinary technology such as automatically controls, and is at Gao Zhen
Under the conditions of Altitude, aluminum or zinc are evaporated on plastic film substrate by (4 × 10-2Pa) by high-temperature evaporation, so that plastics are thin
The metallized a kind of high-tech sophisticated equipment of film base material.Can be widely used in the plastic film substrates such as BOPP, OPP, PET, PC to steam
Aluminizer and zinc-aluminium composite membrane.
Resistance-type heating evaporation source is one of the most key parts of evaporating and coating equipment, and evaporation source internal structure design is
Quality of forming film quality key, in prior art, evaporation material be easy in mouth deposition, the material of mouth deposition be easy to by
Steam takes on thin film, and is likely to local temperature too high generation materials from spattering during heating, thus have impact on into
The performance of film.
Summary of the invention
The invention aims to solve defect of the prior art, it is provided that the evaporation crucible of a kind of vacuum coating equipment,
Condense and the internal local of crucible heats that uneven to cause materials from spattering to arrive thin crucible evaporation is salty long-pending solving evaporation material
The defect that film causes.
To achieve these goals, technical scheme is as follows:
The evaporation crucible of a kind of vacuum coating equipment, including the receiving chamber for accommodating heated material, is centered around described receiving chamber
Peripheral heats chamber and surrounds the outer wall in described heating chamber, and described heating intracavity is sequentially provided with from top to bottom for ensureing earthenware
The temperature of crucible evaporation mouth higher than evaporation material condensation point the top heating unit of independent temperature control, be positioned at the peripheral independent temperature control of crucible
Lower heating unit, described heating top of chamber is provided with the runner passed through for described heated material, and the top of described runner sets
Be equipped with opening, the diameter at the two ends of described runner more than the diameter in the middle part of described runner, described runner be provided with described opening
The diameter of one end less than the internal diameter in described receiving chamber.
Double heating systems design, it is simple to control the temperature of crucible different piece, and the temperature at top is slightly above material evaporation temperature
Degree, can avoid the condensation of material；By accurately controlling evaporating temperature, it is achieved that stablizing of material vaporization rate, runner be to
Outer expansion horn-like, is conducive to stablizing gaseous molecular stream.
Preferably, it is provided with thermal shield between described heating chamber and outer wall.
It is provided with thermal shield, to whole heating chamber heat-insulation and heat-preservation, prevents from heating scattering and disappearing of chamber internal heat.
Preferably, the heater of described top heating unit and lower heating unit is for prolong around described heating chamber spiral
The resistance wire stretched.
Resistance wire is around the uniform spiral extension in described heating chamber.Here uniform spiral extension refers between adjacent turns
Distance equal, with ensure add thermal medium to material-to-be-heated uniform heating.
The present invention compared with prior art, has the advantages that
Double heating systems design, it is simple to controlling the temperature of crucible different piece, the temperature at top is slightly above material evaporating temperature, can
To avoid the condensation of material；By accurately controlling evaporating temperature, it is achieved that stablizing of material vaporization rate.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
In figure: 1, accommodate chamber；2, heating chamber；3, outer wall；4, top heating unit；5, lower heating unit；6, runner；
7, thermal shield；8, resistance wire.
Detailed description of the invention
By making the architectural feature to the present invention and effect of being reached have a better understanding and awareness, in order to preferably
Embodiment and accompanying drawing coordinate detailed description, are described as follows:
The evaporation crucible of a kind of vacuum coating equipment, including the receiving chamber 1 for accommodating heated material, is centered around described receiving chamber
Heating chamber 2 and surrounding the outer wall 3 in described heating chamber 2 of 1 periphery, is sequentially provided with from top to bottom for protecting in described heating chamber 2
The temperature of card crucible evaporation mouth higher than evaporation material condensation point the top heating unit 4 of independent temperature control, to be positioned at crucible periphery independent
The lower heating unit 5 of temperature control, top, described heating chamber 2 is provided with the runner 6 passed through for described heated material, described runner
The top of 6 is provided with opening, and the diameter at the two ends of described runner 6 is more than the diameter in the middle part of described runner 6, setting of described runner 6
The diameter of the one end being equipped with described opening is less than the internal diameter in described receiving chamber 1.
Double heating systems design, it is simple to control the temperature of crucible different piece, and the temperature at top is slightly above material evaporation temperature
Degree, can avoid the condensation of material；By accurately controlling evaporating temperature, it is achieved that stablizing of material vaporization rate, runner 6 be to
Outer expansion horn-like, is conducive to stablizing gaseous molecular stream.
It is provided with thermal shield 7 between described heating chamber 2 and outer wall 3.
It is provided with thermal shield 7, to whole heating chamber 2 heat-insulation and heat-preservation, prevents from heating scattering and disappearing of chamber 2 internal heat.
The heater of described top heating unit 4 and lower heating unit 5 is around described heating chamber 2 spiral extension
Resistance wire 8.
Resistance wire 8 is around the uniform spiral extension in described heating chamber 2.Here uniform spiral extension refers to adjacent turns
Between distance equal, with ensure add thermal medium to material-to-be-heated uniform heating.
The ultimate principle of the present invention, principal character and advantages of the present invention have more than been shown and described.The technology of the industry
The personnel simply present invention it should be appreciated that the present invention is not restricted to the described embodiments, described in above-described embodiment and description
Principle, the present invention also has various changes and modifications without departing from the spirit and scope of the present invention, these change and
Improvement both falls within the range of claimed invention.The protection domain of application claims by appending claims and
Equivalent defines.
Claims (3)
1. the evaporation crucible of a vacuum coating equipment, it is characterised in that: include the receiving chamber (1) for accommodating heated material,
It is centered around the peripheral heating chamber (2) of described receiving chamber (1) and surrounds the outer wall (3) of described heating chamber (2), described heating chamber
(2) temperature for ensureing crucible evaporation mouth it is sequentially provided with in from top to bottom higher than evaporation material condensation point the top of independent temperature control
Heating unit (4), being positioned at the lower heating unit (5) of the peripheral independent temperature control of crucible, described heating chamber (2) top is provided with for institute
Stating the runner (6) that heated material passes through, the top of described runner (6) is provided with opening, the diameter at the two ends of described runner (6)
More than the diameter at described runner (6) middle part, the diameter of one end being provided with described opening of described runner (6) is less than described receiving
The internal diameter in chamber (1).
The evaporation crucible of vacuum coating equipment the most according to claim 1, it is characterised in that: described heating chamber (2) and outer wall
(3) thermal shield (7) it is provided with between.
The evaporation crucible of vacuum coating equipment the most according to claim 1, it is characterised in that: described top heating unit (4)
It is the resistance wire (8) around described heating chamber (2) spiral extension with the heater of lower heating unit (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610836635.4A CN106222614A (en) | 2016-09-21 | 2016-09-21 | A kind of evaporation crucible of vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610836635.4A CN106222614A (en) | 2016-09-21 | 2016-09-21 | A kind of evaporation crucible of vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106222614A true CN106222614A (en) | 2016-12-14 |
Family
ID=58077531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610836635.4A Pending CN106222614A (en) | 2016-09-21 | 2016-09-21 | A kind of evaporation crucible of vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106222614A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108624849A (en) * | 2018-07-19 | 2018-10-09 | 北京泰科诺科技有限公司 | A kind of thermal resistance evaporation device |
| WO2019000484A1 (en) * | 2017-06-26 | 2019-01-03 | 深圳市华星光电半导体显示技术有限公司 | Evaporation source heating system |
| CN110819945A (en) * | 2019-12-16 | 2020-02-21 | 凯盛光伏材料有限公司 | Evaporation source device for GIGS solar evaporation coating |
| CN114000110A (en) * | 2021-11-03 | 2022-02-01 | 江苏微迈思半导体科技有限公司 | Hierarchical formula evaporation source and coating by vaporization device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060288939A1 (en) * | 2003-08-04 | 2006-12-28 | Kyung-Soo Yi | Evaporation source for evaporating an organic electroluminescent layer |
| CN102268642A (en) * | 2011-07-22 | 2011-12-07 | 上海奕瑞光电子科技有限公司 | Resistance heating evaporation source |
| CN104278239A (en) * | 2014-10-31 | 2015-01-14 | 京东方科技集团股份有限公司 | Evaporation crucible device |
-
2016
- 2016-09-21 CN CN201610836635.4A patent/CN106222614A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060288939A1 (en) * | 2003-08-04 | 2006-12-28 | Kyung-Soo Yi | Evaporation source for evaporating an organic electroluminescent layer |
| CN102268642A (en) * | 2011-07-22 | 2011-12-07 | 上海奕瑞光电子科技有限公司 | Resistance heating evaporation source |
| CN104278239A (en) * | 2014-10-31 | 2015-01-14 | 京东方科技集团股份有限公司 | Evaporation crucible device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019000484A1 (en) * | 2017-06-26 | 2019-01-03 | 深圳市华星光电半导体显示技术有限公司 | Evaporation source heating system |
| CN108624849A (en) * | 2018-07-19 | 2018-10-09 | 北京泰科诺科技有限公司 | A kind of thermal resistance evaporation device |
| CN108624849B (en) * | 2018-07-19 | 2023-09-22 | 北京泰科诺科技有限公司 | Resistance evaporator |
| CN110819945A (en) * | 2019-12-16 | 2020-02-21 | 凯盛光伏材料有限公司 | Evaporation source device for GIGS solar evaporation coating |
| CN114000110A (en) * | 2021-11-03 | 2022-02-01 | 江苏微迈思半导体科技有限公司 | Hierarchical formula evaporation source and coating by vaporization device |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20161214 |
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| RJ01 | Rejection of invention patent application after publication |