CN106319453A - Wire feeding mechanism of vacuum film plating machine - Google Patents
Wire feeding mechanism of vacuum film plating machine Download PDFInfo
- Publication number
- CN106319453A CN106319453A CN201610866915.XA CN201610866915A CN106319453A CN 106319453 A CN106319453 A CN 106319453A CN 201610866915 A CN201610866915 A CN 201610866915A CN 106319453 A CN106319453 A CN 106319453A
- Authority
- CN
- China
- Prior art keywords
- wire
- wire feeding
- heating
- aluminum
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Abstract
The invention provides a wire feeding mechanism of a vacuum film plating machine. The wire feeding mechanism comprises a wire supplying disc, a wire feeding mechanism body, a wire discharging nozzle and a heating crucible. The wire discharging nozzle extends into the heating crucible. The wire feeding mechanism body comprises a wire feeding rotating shaft, multiple wire feeding rolls and a power device, wherein the wire feeding rolls are fixed to the wire feeding rotating shaft; the power device provides power for the wire feeding rotating shaft; and the two ends of each wire feeding roll are provided with a wire protection sleeve and a wire pressing block. The wire feeding mechanism has the beneficial effects that the wire feeding speed of each evaporation boat is controlled through different diameters of the wire feeding rolls, thus the wire feeding amount is controlled; square resistance uniformity of a product is improved; product quality is improved; by arranging the wire pressing blocks, a metal wire in the conveying process can be located, the tail end of the aluminum wire can be constrained, and thus the tail end of the aluminum wire can be effectively prevented from sliding on a heating source; furthermore, the situation that generated aluminum chippings splash to an aluminum-plated film to damage the aluminum-plated film is prevented; and production quality of the aluminum-plated film is effectively guaranteed.
Description
Technical field
The present invention relates to metallized film manufacturing technology field, the wire feeder of a kind of vacuum coating equipment.
Background technology
Along with the development of modern membrane science technology, the particularly capacitor extensive work with packaging metallized film
Industry is used, and huge film production and processing film industry are formed in the world.Household electrical appliance, electric apparatus, electronic product with
And packaging product demand increases sharply, so that the demand of metallized film is continuously increased, thus produce high efficiency, Gao Xing
Energy, multi-functional film vapor deposition device requirement are more and more urgent.
Film vapor deposition equipment integrates machinery, vacuum, plated film, freezes, the multidisciplinary technology such as automatically controls, and is at Gao Zhen
Under the conditions of Altitude, aluminum or zinc are evaporated on plastic film substrate by (4 × 10-2Pa) by high-temperature evaporation, so that plastics are thin
The metallized a kind of high-tech sophisticated equipment of film base material.Can be widely used in the plastic film substrates such as BOPP, OPP, PET, PC to steam
Aluminizer and zinc-aluminium composite membrane.
The problem that existing deposition system is primarily present is: (1) aluminium wire end does not retrain, the aluminium wire end when being deposited with operation
End can slide unavoidably on heating source, and then likely result in aluminum slag and be splashed on aluminizer, burns aperture on aluminizer,
Thus leverage the quality of plastics aluminizer；(2) resistance-type heating evaporation source is the portion that evaporating and coating equipment is the most key
One of part, evaporation source internal structure design is the key of quality of forming film quality, and in prior art, evaporation material is easy at oral area
Deposition, the material of mouth deposition is easy to be taken on thin film by steam, and is likely to local temperature mistake during heating
The raw materials from spattering of high yield, thus have impact on the performance of film forming.
Summary of the invention
The invention aims to solve defect of the prior art, it is provided that the wire feeder of a kind of vacuum coating equipment,
Condense and the internal local of crucible heats that uneven to cause materials from spattering to arrive thin crucible evaporation is salty long-pending solving evaporation material
The defect that film causes, forms constraint by limiting component to aluminium wire end, it is thus possible to effectively prevent aluminium wire end on heating source
Slide, and then the aluminum slag prevented is splashed on aluminizer aluminizer is produced injury, and the production of aluminizer has been effectively ensured
Quality.
To achieve these goals, technical scheme is as follows:
The wire feeder of a kind of vacuum coating equipment, including for silk thread dish, wire feeder, wire obtained mouth and heating crucible, described wire vent
Mouth extends in heating crucible, described wire feeder include wire feed rotating shaft, the some thread delivering rollers being fixed in wire feed rotating shaft, for giving
Silk rotating shaft provides the power set of power, and described thread delivering roller two ends are provided with wire bushing and wire pressing block；Described heating crucible includes using
In accommodating the receiving chamber of heated material, being centered around peripheral heating chamber, described receiving chamber and surround outside described heating chamber
Wall, described heating intracavity is sequentially provided with the temperature for ensureing crucible evaporation mouth from top to bottom higher than evaporation material condensation point independence
The top heating unit of temperature control, be positioned at the lower heating unit of the peripheral independent temperature control of crucible, described heating top of chamber be provided with for
The runner that described heated material passes through, the top of described runner is provided with opening, and the diameter at the two ends of described runner is more than institute
Stating the diameter in the middle part of runner, the diameter of one end being provided with described opening of described runner is less than the internal diameter in described receiving chamber.
By the different-diameter of thread delivering roller, control the wire feed rate to each evaporation boat, thus control silk feeding quantity, improve and produce
The sheet resistance uniformity of product, improves product quality；By arranging wire bushing, prevent tinsel impaired or card is disconnected in course of conveying,
Ensure persistence and the smoothness of conveying；By arranging wire pressing block, it is possible to the tinsel in conveying is positioned, and to aluminium wire
End forms constraint, it is thus possible to effectively prevent aluminium wire end from sliding on heating source, and then the aluminum slag prevented is splashed to plating
On aluminum film, aluminizer is produced injury, the quality of production of aluminizer has been effectively ensured.
Double heating systems design, it is simple to control the temperature of crucible different piece, and the temperature at top is slightly above material evaporation temperature
Degree, can avoid the condensation of material；By accurately controlling evaporating temperature, it is achieved that stablizing of material vaporization rate, runner be to
Outer expansion horn-like, is conducive to stablizing gaseous molecular stream.
Preferably, it is provided with thermal shield between described heating chamber and outer wall.
It is provided with thermal shield, to whole heating chamber heat-insulation and heat-preservation, prevents from heating scattering and disappearing of chamber internal heat.
Preferably, the heater of described top heating unit and lower heating unit is for prolong around described heating chamber spiral
The resistance wire stretched.
Resistance wire is around the uniform spiral extension in described heating chamber.Here uniform spiral extension refers between adjacent turns
Distance equal, with ensure add thermal medium to material-to-be-heated uniform heating.
The present invention compared with prior art, has the advantages that
By the different-diameter of thread delivering roller, control the wire feed rate to each evaporation boat, thus control silk feeding quantity, improve product
Sheet resistance uniformity, improves product quality；By arranging wire bushing, prevent tinsel impaired or card is disconnected in course of conveying, ensure
The persistence of conveying and smoothness；By arranging wire pressing block, it is possible to the tinsel in conveying is positioned, and to aluminium wire end
Forming constraint, it is thus possible to effectively prevent aluminium wire end from sliding on heating source, and then the aluminum slag prevented is splashed to aluminizer
On to aluminizer produce injury, the quality of production of aluminizer has been effectively ensured.
Double heating systems design, it is simple to control the temperature of crucible different piece, and the temperature at top is slightly above material evaporation temperature
Degree, can avoid the condensation of material；By accurately controlling evaporating temperature, it is achieved that stablizing of material vaporization rate.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the heating crucible structural representation of the present invention.
In figure: 1, accommodate chamber；2, heating chamber；3, outer wall；4, top heating unit；5, lower heating unit；6, runner；
7, thermal shield；8, resistance wire；9, for silk thread dish；10, wire obtained mouth；11, wire feed rotating shaft；12, thread delivering roller；13, wire bushing；14、
Wire pressing block.
Detailed description of the invention
By making the architectural feature to the present invention and effect of being reached have a better understanding and awareness, in order to preferably
Embodiment and accompanying drawing coordinate detailed description, are described as follows:
A kind of wire feeder of vacuum coating equipment, including for silk thread dish 9, wire feeder, wire obtained mouth 10 and heating crucible, described in go out
Silk mouth 10 extends in heating crucible, and described wire feeder includes wire feed rotating shaft 11, some sending of being fixed in wire feed rotating shaft 11
Roll dies 12, providing the power set of power for wire feed rotating shaft 11, described thread delivering roller 12 two ends are provided with wire bushing 13 and wire pressing block 14；
Described heating crucible is for accommodating the receiving chamber 1 of heated material, the heating chamber 2 being centered around periphery, described receiving chamber 1 and bag
Enclose the outer wall 3 in described heating chamber 2, be sequentially provided with the temperature for ensureing crucible evaporation mouth in described heating chamber 2 from top to bottom high
In evaporation material condensation point the top heating unit 4 of independent temperature control, the lower heating unit 5 being positioned at the peripheral independent temperature control of crucible,
Top, described heating chamber 2 is provided with the runner 6 passed through for described heated material, and the top of described runner 6 is provided with opening, institute
The diameter at the two ends stating runner 6 is more than the diameter in the middle part of described runner 6, one end being provided with described opening of described runner 6
Diameter is less than the internal diameter in described receiving chamber 1.
By the different-diameter of thread delivering roller, control the wire feed rate to each evaporation boat, thus control silk feeding quantity, improve and produce
The sheet resistance uniformity of product, improves product quality；By arranging wire bushing, prevent tinsel impaired or card is disconnected in course of conveying,
Ensure persistence and the smoothness of conveying；By arranging wire pressing block, it is possible to the tinsel in conveying is positioned, and to aluminium wire
End forms constraint, it is thus possible to effectively prevent aluminium wire end from sliding on heating source, and then the aluminum slag prevented is splashed to plating
On aluminum film, aluminizer is produced injury, the quality of production of aluminizer has been effectively ensured.
Double heating systems design, it is simple to control the temperature of crucible different piece, and the temperature at top is slightly above material evaporation temperature
Degree, can avoid the condensation of material；By accurately controlling evaporating temperature, it is achieved that stablizing of material vaporization rate, runner 6 be to
Outer expansion horn-like, is conducive to stablizing gaseous molecular stream.
It is provided with thermal shield 7 between described heating chamber 2 and outer wall 3.
It is provided with thermal shield 7, to whole heating chamber 2 heat-insulation and heat-preservation, prevents from heating scattering and disappearing of chamber 2 internal heat.
The heater of described top heating unit 4 and lower heating unit 5 is around described heating chamber 2 spiral extension
Resistance wire 8.
Resistance wire 8 is around the uniform spiral extension in described heating chamber 2.Here uniform spiral extension refers to adjacent turns
Between distance equal, with ensure add thermal medium to material-to-be-heated uniform heating.
The ultimate principle of the present invention, principal character and advantages of the present invention have more than been shown and described.The technology of the industry
The personnel simply present invention it should be appreciated that the present invention is not restricted to the described embodiments, described in above-described embodiment and description
Principle, the present invention also has various changes and modifications without departing from the spirit and scope of the present invention, these change and
Improvement both falls within the range of claimed invention.The protection domain of application claims by appending claims and
Equivalent defines.
Claims (3)
1. the wire feeder of a vacuum coating equipment, it is characterised in that: include for silk thread dish (9), wire feeder, wire obtained mouth (10)
And heating crucible, described wire obtained mouth (10) extends in heating crucible, and described wire feeder includes wire feed rotating shaft (11), is fixed on
Some thread delivering rollers (12) in wire feed rotating shaft (11), provide the power set of power for wire feed rotating shaft (11), described thread delivering roller
(12) two ends are provided with wire bushing (13) and wire pressing block (14)；Described heating crucible includes the receiving chamber for accommodating heated material
(1), be centered around the peripheral heating chamber (2) of described receiving chamber (1) and surround the outer wall (3) of described heating chamber (2), described in add
The temperature for ensureing crucible evaporation mouth it is sequentially provided with from top to bottom higher than evaporation material condensation point independent temperature control in hot chamber (2)
Top heating unit (4), being positioned at the lower heating unit (5) of the peripheral independent temperature control of crucible, described heating chamber (2) top is provided with use
In the runner (6) that described heated material passes through, the top of described runner (6) is provided with opening, the two ends of described runner (6)
Diameter is more than the diameter at described runner (6) middle part, and the diameter of one end being provided with described opening of described runner (6) is less than described
Accommodate the internal diameter in chamber (1).
The wire feeder of vacuum coating equipment the most according to claim 1, it is characterised in that: described heating chamber (2) and outer wall
(3) thermal shield (7) it is provided with between.
The wire feeder of vacuum coating equipment the most according to claim 1, it is characterised in that: described top heating unit (4)
It is the resistance wire (8) around described heating chamber (2) spiral extension with the heater of lower heating unit (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610866915.XA CN106319453A (en) | 2016-09-30 | 2016-09-30 | Wire feeding mechanism of vacuum film plating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610866915.XA CN106319453A (en) | 2016-09-30 | 2016-09-30 | Wire feeding mechanism of vacuum film plating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106319453A true CN106319453A (en) | 2017-01-11 |
Family
ID=57821168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610866915.XA Pending CN106319453A (en) | 2016-09-30 | 2016-09-30 | Wire feeding mechanism of vacuum film plating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106319453A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108315698A (en) * | 2018-03-27 | 2018-07-24 | 长兴宇通机械厂 | A kind of metal surface vacuum and evaporation coating device |
| CN111655898A (en) * | 2018-01-23 | 2020-09-11 | 应用材料公司 | Evaporator for evaporating source material, material deposition source, deposition apparatus and method thereof |
| CN113235053A (en) * | 2021-05-21 | 2021-08-10 | 辽宁分子流科技有限公司 | Evaporation coating method with intelligently adjustable evaporation rate |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63277753A (en) * | 1987-05-08 | 1988-11-15 | Mitsubishi Electric Corp | Vaporizer for vacuum deposition |
| CN202246836U (en) * | 2011-07-22 | 2012-05-30 | 上海奕瑞光电子科技有限公司 | Resistance heating type evaporation source |
| CN203904445U (en) * | 2014-04-18 | 2014-10-29 | 芜湖市德宝新材料股份有限公司 | Synchronous wire feeding system for coating machine |
| CN105506555A (en) * | 2014-09-25 | 2016-04-20 | 江门市兆业科技有限公司 | Automatic wire feeding apparatus of evaporation system |
-
2016
- 2016-09-30 CN CN201610866915.XA patent/CN106319453A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63277753A (en) * | 1987-05-08 | 1988-11-15 | Mitsubishi Electric Corp | Vaporizer for vacuum deposition |
| CN202246836U (en) * | 2011-07-22 | 2012-05-30 | 上海奕瑞光电子科技有限公司 | Resistance heating type evaporation source |
| CN203904445U (en) * | 2014-04-18 | 2014-10-29 | 芜湖市德宝新材料股份有限公司 | Synchronous wire feeding system for coating machine |
| CN105506555A (en) * | 2014-09-25 | 2016-04-20 | 江门市兆业科技有限公司 | Automatic wire feeding apparatus of evaporation system |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111655898A (en) * | 2018-01-23 | 2020-09-11 | 应用材料公司 | Evaporator for evaporating source material, material deposition source, deposition apparatus and method thereof |
| CN108315698A (en) * | 2018-03-27 | 2018-07-24 | 长兴宇通机械厂 | A kind of metal surface vacuum and evaporation coating device |
| CN113235053A (en) * | 2021-05-21 | 2021-08-10 | 辽宁分子流科技有限公司 | Evaporation coating method with intelligently adjustable evaporation rate |
| CN113235053B (en) * | 2021-05-21 | 2023-03-28 | 辽宁分子流科技有限公司 | Evaporation coating method with intelligently adjustable evaporation rate |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170111 |