CN205057766U - Grinding and polishing work piece self -adaptation multi freedom guiding mechanism - Google Patents
Grinding and polishing work piece self -adaptation multi freedom guiding mechanism Download PDFInfo
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- CN205057766U CN205057766U CN201520473969.0U CN201520473969U CN205057766U CN 205057766 U CN205057766 U CN 205057766U CN 201520473969 U CN201520473969 U CN 201520473969U CN 205057766 U CN205057766 U CN 205057766U
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Abstract
The utility model discloses a grinding and polishing work piece self -adaptation multi freedom guiding mechanism, include hierarchical polishing dish device, polishing dish cart face orbit camera device, work piece position appearance self -adaptation adjusting device, control direction adjusting device, fore -and -aft direction adjusting device, upper and lower direction adjusting device and strutting arrangement. The utility model discloses the simple compactness of mechanism, low in production cost, regulation that can be through multiple part to the polishing work piece better fix a position with position appearance adjustment, between the processing of polishing work piece, through relevant parts, to gather polishing dish surface profile orbit data, in the course of working, further data collection adjusts high accuracy adjustment pneumatic cylinder according to data in real time to reach the shape orbit of real -time self -adaptation polishing dish cart face, thereby reach the purpose that improves processingquality and improve machining efficiency.
Description
Technical field
The utility model relates to precise and ultraprecise machining field, in particular, relates to a kind of grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism.
Background technology
At present, along with the development of semiconductor industry and optical industry, need the precision workpiece such as silicon chip surface and optical mirror plane surface definitely smooth, upper and lower surface is absolute parallel, does not have the defects such as protruding and poor flatness.Because of the restriction of current process technology, being used for the polishing disk surface of processing precise workpiece can not be definitely smooth, and upper and lower surface can not be absolute parallel.Even if polishing disk is definitely smooth, upper and lower surface is absolute parallel, because the surface irregularity of workpiece own is parallel, add mounting technology, also can not abswolute level after polishing disk is fixing, other workpiece of adding fixing polishing dish, due to the defect of processing and assembling, finally cause polishing disk can not abswolute level, parallel.Current polishing grinding mechanism can not carry out pose conversion to processing work well in process, to adapt to irregular polishing disk, processing work is fitted the shape on polishing disk surface well.The problems referred to above make processing work surface can not abswolute level, parallel, and surface also there will be rough defect.
In current grinding and polishing mechanism, a lot of polishing disk abrasive material does not have the theory of classification, efficient, high-quality processing work can not be processed, patent No. CN102658520A (the dynamic pressure polishing system based on hierarchy composite elastic polishing dish) structuring theory used by polishing disk in the utility model, can realize processing processing work of high-effect high-quality for new structure.
Utility model content
The purpose of this utility model is to overcome in existing grinding and polishing mechanism can not carry out pose adjustment with the surface and the pose defect that adapt to polishing disk in real time to processing work, provides a kind of novel grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism.
The utility model is achieved through the following technical solutions above-mentioned purpose: a kind of grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism, comprises
Grade polished dish device, for realizing the fixing of grade polished dish and rotating;
Polishing disk surface tracks camera head, for gathering the shape track of grade polished panel surface;
Workpiece pose self-adapting adjusting apparatus, for adjusting the spatial pose of workpiece so that workpiece is better and the surperficial laminating of polishing disk;
Left and right directions adjusting device, drives polishing disk surface tracks camera head and workpiece pose self-adapting adjusting apparatus to move left and right for fixing polishing panel surface track camera head and workpiece pose self-adapting adjusting apparatus;
Fore-and-aft direction adjusting device, for driving left and right directions adjusting device, polishing disk surface tracks camera head and workpiece pose self-adapting adjusting apparatus movable;
Above-below direction adjusting device, moves up and down for driving fore-and-aft direction adjusting device, left and right directions adjusting device, polishing disk surface tracks camera head and workpiece pose self-adapting adjusting apparatus;
Bracing or strutting arrangement, for supporting above-mentioned all parts;
Described workpiece pose self-adapting adjusting apparatus comprises pose adjustment top fixing plate, pose adjustment bottom fixed board, six high accuracy adjustment hydraulic cylinders and high-precision three-dimensional pressure sensor, high-precision three-dimensional pressure sensor and polishing workpiece are fixed on the bottom of described pose adjustment bottom fixed board, and six high accuracy adjustment hydraulic cylinder is arranged all in the same way and the two ends up and down of six high accuracy adjustment hydraulic cylinders are hinged on pose adjustment top fixing plate respectively by universal coupling and pose adjusts on bottom fixed board; The upper end of described pose adjustment top fixing plate connects left and right directions adjusting device.
Further, described bracing or strutting arrangement comprises integrated model bottom support plate, integrated model vertical beam, integrated model midfoot support plate, the vertical gripper shoe of integrated model and integrated model top support plate, the two ends up and down of described integrated model vertical beam are fixedly connected with integrated model bottom support plate with integrated model midfoot support plate respectively, and the two ends up and down of the vertical gripper shoe of described integrated model are fixedly connected with integrated model midfoot support plate with integrated model top support plate respectively.
Further, described left and right directions adjusting device comprises the first side fixed head, first intermediate support plate, first ball-screw, first feed screw nut, first leading screw support end bearing block, first leading screw stiff end bearing block, first servomotor, first shaft coupling, first servomotor bracing frame, first line slideway, first drags block and the first slide block, described first ball-screw is by the first leading screw support end bearing block, first leading screw stiff end bearing block is supported on described first intermediate support plate, one end of described first ball-screw connects the first servomotor by the first shaft coupling, described first servomotor is fixed on the first intermediate support plate by the first servomotor bracing frame, described first line slideway is fixed on the bottom surface on described first intermediate support plate, and described first slide block set is contained on the first line slideway, described first drags block one end is fixedly connected with the first feed screw nut be sleeved on the first ball-screw, and the other end is fixedly connected with workpiece pose self-adapting adjusting apparatus with polishing disk surface tracks camera head, the left and right sides of described first intermediate support plate is fixed with the first side fixed head supporting described first intermediate support plate, described first servomotor drives the first ball screw turns by the first shaft coupling, thus drives the first feed screw nut to move left and right, and drives polishing disk surface tracks camera head and workpiece pose self-adapting adjusting apparatus to move left and right further.
Further, described fore-and-aft direction adjusting device comprises the second side fixed head, the second intermediate support plate, the second ball-screw, the second feed screw nut, the second leading screw support end bearing block, the second leading screw stiff end bearing block, the second servomotor, the second shaft coupling, the second servomotor bracing frame, the second line slideway, the second slide block and the second dragging block; Described second ball-screw is supported on described second intermediate support plate by the second leading screw support end bearing block, the second leading screw stiff end bearing block, one end of described second ball-screw connects the second servomotor by the second shaft coupling, and described second servomotor is fixed on the second intermediate support plate by the second servomotor bracing frame; The both sides of described second intermediate support plate are fixed with the second side fixed head supporting described second intermediate support plate, described second line slideway is fixed on the second side fixed head, described second slide block set is contained on described second line slideway, and described second slide block is fixedly connected with left and right directions adjusting device; Described second feed screw nut is sleeved on described second ball-screw and the second feed screw nut and second drags block is fixedly connected with, and second drags block is fixedly connected with left and right directions adjusting device; Second servomotor drives the second ball screw turns by the second shaft coupling, thus drives the second feed screw nut to move forward and backward, and drives the second dragging block and left and right directions adjusting device to move forward and backward along the second line slideway further.
Further, described above-below direction adjusting device comprises the 3rd ball-screw, 3rd feed screw nut, 3rd leading screw support end bearing block, 3rd leading screw stiff end bearing block, 3rd servomotor, 3rd servomotor bracing frame, 3rd line slideway, 3rd slide block, 3rd drags block, Timing Belt regulating wheel, the driven synchronous pulley of high moment of torsion, Timing Belt regulating wheel fixed axis, high moment of torsion active synchronization belt wheel and Timing Belt, described 3rd ball-screw is by the 3rd leading screw support end bearing block, 3rd leading screw stiff end bearing block is vertically supported on the side of the vertical gripper shoe of described integrated model, fixing the 3rd line slideway be arranged in parallel with described 3rd ball-screw on the opposite side of the vertical gripper shoe of described integrated model, the upper end of described 3rd ball-screw is fixed with the driven synchronous pulley of high moment of torsion, described 3rd servomotor is fixed on the upper end of described integrated model top support plate by the 3rd servomotor bracing frame, high moment of torsion active synchronization belt wheel is fixed in the front end of described 3rd servomotor, the upper end of described integrated model top support plate is also fixed with Timing Belt regulating wheel fixed axis, Timing Belt regulating wheel is fixed on described Timing Belt regulating wheel fixed axis, described Timing Belt regulating wheel, the driven synchronous pulley of high moment of torsion is connected by Timing Belt with high moment of torsion active synchronization belt wheel, described 3rd feed screw nut is sleeved on described 3rd ball-screw, 3rd one end dragging block is fixedly connected with described 3rd feed screw nut, 3rd drags the other end of block is fixedly connected with fore-and-aft direction adjusting device, and described 3rd slide block set to be contained on the 3rd line slideway and to be fixedly connected with described fore-and-aft direction adjusting device, described 3rd servomotor rotates by driving high moment of torsion active synchronization belt wheel, the passive and synchronous belt wheel of high moment of torsion is driven to rotate by Timing Belt, thus drive the 3rd ball screw turns, the 3rd feed screw nut is driven to move up and down during the 3rd ball screw turns, thus drive the 3rd to drag block to move up and down, and then drive fore-and-aft direction adjusting device linearly guide rail move up and down.
Further, described grade polished dish device comprises grade polished dish stepper motor, grade polished dish stepper motor bracing frame, grade polished dish stepper motor shaft coupling, grade polished dish rotational support bearing, grade polished dish rotational support bearing fixed mount and grade polished dish; The turning cylinder of described grade polished dish lower end connects grade polished dish stepper motor by grade polished dish stepper motor shaft coupling, described turning cylinder is supported by grade polished dish rotational support bearing, described grade polished dish rotational support bearing is fixed in integrated model bottom support plate by grade polished dish rotational support bearing fixed mount, and described grade polished dish stepper motor is fixed in integrated model bottom support plate by grade polished dish stepper motor bracing frame.
Technical conceive of the present utility model is: whole device busy room, left and right directions adjusting device, fore-and-aft direction adjusting device and above-below direction adjusting device are respectively through the first servomotor, the adjustment of the second servomotor and the 3rd servomotor, carry out the location of polishing workpiece, make the polishing workpiece of workpiece pose self-adapting adjusting apparatus bottom surface and polishing workpiece concentric with grade polished dish, start grade polished dish, the surface tracks shape of polishing disk surface tracks camera head to grade polished dish every one-level polishing track carries out data acquisition, for information preparation is carried out in the real-time adjustment of next pose.Then, regulate grade polished dish, left and right directions adjusting device, fore-and-aft direction adjusting device and above-below direction adjusting device, polishing workpiece is made to arrive the central area of grade polished dish, then workpiece pose self-adapting adjusting apparatus is adjusted, make the amount of contraction of six high accuracy adjustment hydraulic cylinders identical, count h
oand then continue adjustment six high accuracy adjustment hydraulic cylinders, polishing workpiece is fitted central area plane completely, according to the warp parameter of six high accuracy adjustment hydraulic cylinders that workpiece pose self-adapting adjusting apparatus regulates, the distribution of shapes situation on record polishing workpiece surface; Wherein the extended length of six high accuracy adjustment hydraulic cylinders is not identical, is designated as h respectively
1, h
2, h
3, h
4, h
5and h
6, this is because polishing workpiece upper and lower surface is not parallel and the out-of-flatness of upper and lower surface own causes, and protruding region needs compression high accuracy adjustment hydraulic cylinder, and the region of depression needs to extend high accuracy adjustment hydraulic cylinder.Between maintenance, polishing workpiece is fitted the attitude of grade polished disk center area planar completely, polishing workpiece is made to arrive the initial polishing position of polishing disk, now part pose self-adapting adjusting apparatus maintains this pose and does not change, grade polished dish starts to rotate, high-precision three-dimensional pressure sensor records the surface location distribution trajectory every position of grade polished dish at every one-level circumferential area, also for next step pose adjusts the information of carrying out preparation in real time, the related data that records of conjunction pose self-adapting adjusting apparatus and polishing disk surface tracks camera head again, draw optimized polishing workpiece pose adjusting device.
Finally, regulate grade polished dish, left and right directions adjusting device, fore-and-aft direction adjusting device and above-below direction adjusting device, polishing workpiece is moved to the top of initial processing position, six high accuracy adjustment hydraulic cylinders of adjustment workpiece pose self-adapting adjusting apparatus, six high accuracy adjustment hydraulic cylinders are made to fit completely with the plane of grade polished panel surface central area retracted position adjustment round about, namely be elongation state before supposing the first high accuracy adjustment hydraulic cylinder, elongation is (h
1-h
o), that will shrink 2* (h at present
1-h
o); Be contraction state before supposing the second high accuracy adjustment hydraulic cylinder, its amount of contraction is (h
o-h
2), 2* (h will be extended so at present
o-h
2), other high accuracy adjustment hydraulic cylinder also will make similar corresponding adjustment.In the process of polishing, according to optimized polishing workpiece pose adjustment parameter, the stroke of six high accuracy adjustment hydraulic cylinders is constantly adjusted on the basis of the warp parameter adjusted.
Make six high accuracy of workpiece pose self-adapting adjusting apparatus adjustment hydraulic cylinders do a reciprocal conversion, be contact with grade polished dish in order to ensure the area preference of the projection of polishing workpiece self, thus make the upper and lower surface of workpiece parallel gradually.Then grade polished dish, left and right directions adjusting device, fore-and-aft direction adjusting device and above-below direction adjusting device is regulated, polishing workpiece is made to move to initial processing position, the data of high-precision three-dimensional pressure sensor are adopted further in polishing process, in real time the data gathered before are revised, the stroke of real-time adjustment six high accuracy adjustment hydraulic cylinders, really accomplish to adjust in real time the pose of polishing workpiece, thus grade polished panel surface of better fitting, accomplish self adaptation, improve crudy.
The beneficial effects of the utility model are: the utility model mechanism is simply compact, and production cost is low, better can be positioned and pose adjustment by the adjustment of multiple parts to polishing workpiece; Between polishing workpiece processing, by relevant parts, polishing disk surface configuration track data is gathered, in process, further image data, according to data, high accuracy adjustment hydraulic cylinder is adjusted in real time, to reach the shape track on real-time adaptive polishing disk surface, thus reach the object improving crudy and improve working (machining) efficiency.
Accompanying drawing explanation
Fig. 1 is the front view of the utility model grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism.
Fig. 2 is the top view of the utility model grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism.
Fig. 3 is the partial enlarged drawing of the utility model workpiece pose self-adapting adjusting apparatus.
Fig. 4 is the left view of the utility model grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism.
Fig. 5 is the right view of the utility model grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism.
In figure, 1-grade polished dish device, 101-grade polished dish stepper motor, 102-grade polished dish stepper motor bracing frame, 103-grade polished dish stepper motor shaft coupling, 104-grade polished dish rotational support bearing, 105-grade polished dish rotational support bearing fixed mount, 106-grade polished dish, 2-bracing or strutting arrangement, 201-integrated model bottom support plate, 202-integrated model vertical beam, 203-integrated model midfoot support plate, the vertical gripper shoe of 204-integrated model, 205-integrated model top support plate, 3-above-below direction adjusting device, 301-the 3rd leading screw support end bearing block, 302-the 3rd ball-screw, 303-the 3rd drags block, 304-the 3rd feed screw nut, 305-the 3rd slide block, 306-the 3rd line slideway, 307-the 3rd leading screw stiff end bearing block, the driven synchronous pulley of 308-height moment of torsion, 309-Timing Belt, 310-Timing Belt regulating wheel, 311-Timing Belt regulating wheel fixed axis, 312-the 3rd servomotor, 313-the 3rd servomotor bracing frame, 314-height moment of torsion active synchronization belt wheel, 4-fore-and-aft direction adjusting device, 400-second leading screw support end bearing block, 401-second ball-screw, 402-second drags block, 403-second feed screw nut, 404-second leading screw stiff end bearing block, 405-second shaft coupling, 406-second servomotor, 407-second servomotor bracing frame, 408-second side fixed head, 409-second intermediate support plate, 410-second slide block, 411-second line slideway, 5-left and right directions adjusting device, 501-first servomotor bracing frame, 502-first shaft coupling, 503-first leading screw stiff end bearing block, 505-first feed screw nut, 506-first drags block, 507-first ball-screw, 508-first leading screw support end bearing block, 509-first side fixed head, 510-first intermediate support plate, 511-first line slideway, 512-first slide block, 6-workpiece pose self-adapting adjusting apparatus, 600-pose adjustment top fixing plate, 601-high accuracy adjustment hydraulic cylinder, 602-pose adjustment bottom fixed board, 603-high-precision three-dimensional pressure sensor, 604-polishing workpiece, 7-polishing disk surface tracks camera head.
Detailed description of the invention
Below in conjunction with accompanying drawing, the utility model is described in further detail:
As shown in Fig. 1 ~ 5, a kind of grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism, comprises
Grade polished dish device 1, for realizing the fixing of grade polished dish 106 and rotating;
Polishing disk surface tracks camera head 7, for gathering the shape track on grade polished dish 106 surface;
Workpiece pose self-adapting adjusting apparatus 6, for adjusting the spatial pose of workpiece so that workpiece is better and the surperficial laminating of polishing disk;
Left and right directions adjusting device 5, drives polishing disk surface tracks camera head 7 and workpiece pose self-adapting adjusting apparatus 6 to move left and right for fixing polishing panel surface track camera head 7 and workpiece pose self-adapting adjusting apparatus 6;
Fore-and-aft direction adjusting device 4, moves forward and backward for driving left and right directions adjusting device 5, polishing disk surface tracks camera head 7 and workpiece pose self-adapting adjusting apparatus 6;
Above-below direction adjusting device 3, moves up and down for driving fore-and-aft direction adjusting device 4, left and right directions adjusting device 5, polishing disk surface tracks camera head 7 and workpiece pose self-adapting adjusting apparatus 6;
Bracing or strutting arrangement 2, for supporting above-mentioned all parts;
Described workpiece pose self-adapting adjusting apparatus 6 comprises pose adjustment top fixing plate 600, pose adjustment bottom fixed board 602, six high accuracy adjustment hydraulic cylinders 601 and high-precision three-dimensional pressure sensor 603, high-precision three-dimensional pressure sensor 603 and polishing workpiece 604 are fixed on the bottom of described pose adjustment bottom fixed board 602, and six high accuracy adjustment hydraulic cylinder 601 is arranged all in the same way and the two ends up and down of six high accuracy adjustment hydraulic cylinders 601 are hinged on pose adjustment top fixing plate 600 respectively by universal coupling and pose adjusts on bottom fixed board 602; The upper end of described pose adjustment top fixing plate 600 connects left and right directions adjusting device 5.Pose adjustment top fixing plate 600 drags block 506 with first of left and right directions adjusting device 5 and is fixedly connected with.
Described bracing or strutting arrangement 2 comprises integrated model bottom support plate 201, integrated model vertical beam 202, integrated model midfoot support plate 203, the vertical gripper shoe 204 of integrated model and integrated model top support plate 205, the two ends up and down of described integrated model vertical beam 202 are fixedly connected with integrated model bottom support plate 201 with integrated model midfoot support plate 203 respectively, and the two ends up and down of the vertical gripper shoe 204 of described integrated model are fixedly connected with integrated model midfoot support plate 203 with integrated model top support plate 205 respectively.
Described left and right directions adjusting device 5 comprises the first side fixed head 509, first intermediate support plate 510, first ball-screw 507, first feed screw nut 505, first leading screw support end bearing block 508, first leading screw stiff end bearing block 503, first servomotor 500, first shaft coupling 502, first servomotor bracing frame 501, first line slideway 511, first drags block 506 and the first slide block 512, described first ball-screw 507 is by the first leading screw support end bearing block 508, first leading screw stiff end bearing block 503 is supported on described first intermediate support plate 510, one end of described first ball-screw 507 connects the first servomotor 500 by the first shaft coupling 502, described first servomotor 500 is fixed on the first intermediate support plate 510 by the first servomotor bracing frame 501, described first line slideway 511 is fixed on the bottom surface on described first intermediate support plate 510, and described first slide block 512 is sleeved on the first line slideway 511, described first drags block 506 one end is fixedly connected with the first feed screw nut 505 be sleeved on the first ball-screw 507, and the other end is fixedly connected with workpiece pose self-adapting adjusting apparatus 6 with polishing disk surface tracks camera head 7, the left and right sides of described first intermediate support plate 510 is fixed with the first side fixed head 509 supporting described first intermediate support plate 510, described first servomotor 500 drives the first ball-screw 507 to rotate by the first shaft coupling 502, thus drive the first feed screw nut 505 to move left and right, drive polishing disk surface tracks camera head 7 and workpiece pose self-adapting adjusting apparatus 6 to move left and right further.
Described fore-and-aft direction adjusting device 4 comprises the second side fixed head 408, second intermediate support plate 409, second ball-screw 401, second feed screw nut 403, second leading screw support end bearing block 400, second leading screw stiff end bearing block 404, second servomotor 406, second shaft coupling 405, second servomotor bracing frame 407, second line slideway 411, second slide block 410 and second and drags block 402; Described second ball-screw 401 is supported on described second intermediate support plate 409 by the second leading screw support end bearing block 400, second leading screw stiff end bearing block 404, one end of described second ball-screw 401 connects the second servomotor 406 by the second shaft coupling 405, and described second servomotor 406 is fixed on the second intermediate support plate 409 by the second servomotor bracing frame 407; The both sides of described second intermediate support plate 409 are fixed with the second side fixed head 408 supporting described second intermediate support plate 409, described second line slideway 411 is fixed on the second side fixed head 408, described second slide block 410 is sleeved on described second line slideway 411, and described second slide block 410 is fixedly connected with left and right directions adjusting device 5; Described second feed screw nut 403 is sleeved on described second ball-screw 401 and the second feed screw nut 403 and second drags block 402 is fixedly connected with, and second drags block 402 is fixedly connected with left and right directions adjusting device 5; Second servomotor 406 drives the second ball-screw 401 to rotate by the second shaft coupling 405, thus drives the second feed screw nut 403 to move forward and backward, and drives the second dragging block 402 and left and right directions adjusting device 5 to move forward and backward along the second line slideway 411 further.Second drags block 402 is fixedly connected with the first intermediate support plate 510 of left and right directions adjusting device 5.
Described above-below direction adjusting device 3 comprises the 3rd ball-screw 302, 3rd feed screw nut 304, 3rd leading screw support end bearing block 301, 3rd leading screw stiff end bearing block 307, 3rd servomotor 312, 3rd servomotor bracing frame 313, 3rd line slideway 306, 3rd slide block 305, 3rd drags block 303, Timing Belt regulating wheel 310, the driven synchronous pulley 308 of high moment of torsion, Timing Belt regulating wheel fixed axis 311, high moment of torsion active synchronization belt wheel 314 and Timing Belt 309, described 3rd ball-screw 302 is by the 3rd leading screw support end bearing block 301, 3rd leading screw stiff end bearing block 307 is vertically supported on the side of the vertical gripper shoe 204 of described integrated model, fixing the 3rd line slideway 306 be arranged in parallel with described 3rd ball-screw 302 on the opposite side of the vertical gripper shoe of described integrated model 204, the upper end of described 3rd ball-screw 302 is fixed with the driven synchronous pulley 308 of high moment of torsion, described 3rd servomotor 312 is fixed on the upper end of described integrated model top support plate 205 by the 3rd servomotor bracing frame 313, high moment of torsion active synchronization belt wheel 314 is fixed in the front end of described 3rd servomotor 312, the upper end of described integrated model top support plate 205 is also fixed with Timing Belt regulating wheel fixed axis 311, Timing Belt regulating wheel 310 is fixed on described Timing Belt regulating wheel fixed axis 311, described Timing Belt regulating wheel 310, the driven synchronous pulley of high moment of torsion 308 is connected by Timing Belt 309 with high moment of torsion active synchronization belt wheel 314, described 3rd feed screw nut 304 is sleeved on described 3rd ball-screw 302,3rd one end dragging block 303 is fixedly connected with described 3rd feed screw nut 304,3rd drags the other end of block 303 is fixedly connected with fore-and-aft direction adjusting device 4, and described 3rd slide block 305 to be sleeved on the 3rd line slideway 306 and to be fixedly connected with described fore-and-aft direction adjusting device 4, described 3rd servomotor 312 rotates by driving high moment of torsion active synchronization belt wheel 314, the passive and synchronous belt wheel of high moment of torsion is driven to rotate by Timing Belt, thus drive the 3rd ball-screw 302 to rotate, the 3rd feed screw nut 304 is driven to move up and down when 3rd ball-screw 302 rotates, thus drive the 3rd to drag block 303 to move up and down, and then drive fore-and-aft direction adjusting device 4 linearly guide rail move up and down.3rd drags block 303 is fixedly connected with the second side fixed head 408 of fore-and-aft direction adjusting device 4.
Described grade polished dish device 1 comprises grade polished dish stepper motor 101, grade polished dish stepper motor bracing frame 102, grade polished dish stepper motor shaft coupling 103, grade polished dish rotational support bearing 104, grade polished dish rotational support bearing fixed mount 105 and grade polished dish 106; The turning cylinder of described grade polished dish 106 lower end connects grade polished dish stepper motor 101 by grade polished dish stepper motor shaft coupling 103, described turning cylinder is supported by grade polished dish rotational support bearing 104, described grade polished dish rotational support bearing 104 is fixed in integrated model bottom support plate 201 by grade polished dish rotational support bearing fixed mount 105, and described grade polished dish stepper motor 101 is fixed in integrated model bottom support plate 201 by grade polished dish stepper motor bracing frame 102.Grade polished dish rotational support bearing 104 pairs of grade polished dishes 106 play and support convenient effect of rotating.
Technical conceive of the present utility model is: during whole device busy, left and right directions adjusting device, fore-and-aft direction adjusting device and above-below direction adjusting device are respectively through the first servomotor, the adjustment of the second servomotor and the 3rd servomotor, carry out the location of polishing workpiece, make the polishing workpiece of workpiece pose self-adapting adjusting apparatus bottom surface and polishing workpiece concentric with grade polished dish, start grade polished dish, the surface tracks shape of polishing disk surface tracks camera head to grade polished dish every one-level polishing track carries out data acquisition, for information preparation is carried out in the real-time adjustment of next pose.Then, regulate grade polished dish, left and right directions adjusting device, fore-and-aft direction adjusting device and above-below direction adjusting device, polishing workpiece is made to arrive the central area of grade polished dish, then workpiece pose self-adapting adjusting apparatus is adjusted, make the amount of contraction of six high accuracy adjustment hydraulic cylinders identical, count h
oand then continue adjustment six high accuracy adjustment hydraulic cylinders, polishing workpiece is fitted central area plane completely, according to the warp parameter of six high accuracy adjustment hydraulic cylinders that workpiece pose self-adapting adjusting apparatus regulates, the distribution of shapes situation on record polishing workpiece surface; Wherein the extended length of six high accuracy adjustment hydraulic cylinders is not identical, is designated as h respectively
1, h
2, h
3, h
4, h
5and h
6, this is because polishing workpiece upper and lower surface is not parallel and the out-of-flatness of upper and lower surface own causes, and protruding region needs compression high accuracy adjustment hydraulic cylinder, and the region of depression needs to extend high accuracy adjustment hydraulic cylinder.Between maintenance, polishing workpiece is fitted the attitude of grade polished disk center area planar completely, polishing workpiece is made to arrive the initial polishing position of polishing disk, now part pose self-adapting adjusting apparatus maintains this pose and does not change, grade polished dish starts to rotate, high-precision three-dimensional pressure sensor records the surface location distribution trajectory every position of grade polished dish at every one-level circumferential area, also for next step pose adjusts the information of carrying out preparation in real time, the related data that records of conjunction pose self-adapting adjusting apparatus and polishing disk surface tracks camera head again, draw optimized polishing workpiece pose adjusting device.
Finally, regulate grade polished dish, left and right directions adjusting device, fore-and-aft direction adjusting device and above-below direction adjusting device, polishing workpiece is moved to the top of initial processing position, six high accuracy adjustment hydraulic cylinders of adjustment workpiece pose self-adapting adjusting apparatus, six high accuracy adjustment hydraulic cylinders are made to fit completely with the plane of grade polished panel surface central area retracted position adjustment round about, namely be elongation state before supposing the first high accuracy adjustment hydraulic cylinder, elongation is (h
1-h
o), that will shrink 2* (h at present
1-h
o); Be contraction state before supposing the second high accuracy adjustment hydraulic cylinder, its amount of contraction is (h
o-h
2), 2* (h will be extended so at present
o-h
2), other high accuracy adjustment hydraulic cylinder also will make similar corresponding adjustment.In the process of polishing, according to optimized polishing workpiece pose adjustment parameter, the stroke of six high accuracy adjustment hydraulic cylinders is constantly adjusted on the basis of the warp parameter adjusted.
Make six high accuracy of workpiece pose self-adapting adjusting apparatus adjustment hydraulic cylinders do a reciprocal conversion, be contact with grade polished dish in order to ensure the area preference of the projection of polishing workpiece self, thus make the upper and lower surface of workpiece parallel gradually.Then grade polished dish, left and right directions adjusting device, fore-and-aft direction adjusting device and above-below direction adjusting device is regulated, polishing workpiece is made to move to initial processing position, the data of high-precision three-dimensional pressure sensor are adopted further in polishing process, in real time the data gathered before are revised, the stroke of real-time adjustment six high accuracy adjustment hydraulic cylinders, really accomplish to adjust in real time the pose of polishing workpiece, thus grade polished panel surface of better fitting, accomplish self adaptation, improve crudy.
Above-described embodiment is preferred embodiment of the present utility model; it is not the restriction to technical solutions of the utility model; as long as without the technical scheme that creative work can realize on the basis of above-described embodiment, all should be considered as falling within the scope of the rights protection of the utility model patent.
Claims (6)
1. grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism is by spending a guiding mechanism, it is characterized in that: comprise grade polished dish device (1), for realizing the fixing of grade polished dish (106) and rotating; Polishing disk surface tracks camera head (7), for gathering the shape track on grade polished dish (106) surface; Workpiece pose self-adapting adjusting apparatus (6), for adjusting the spatial pose of workpiece so that workpiece is better and the surperficial laminating of polishing disk; Left and right directions adjusting device (5), drives polishing disk surface tracks camera head (7) and workpiece pose self-adapting adjusting apparatus (6) to move left and right for fixing polishing panel surface track camera head (7) and workpiece pose self-adapting adjusting apparatus (6); Fore-and-aft direction adjusting device (4), for driving left and right directions adjusting device (5), polishing disk surface tracks camera head (7) and workpiece pose self-adapting adjusting apparatus (6) movable; Above-below direction adjusting device (3), moves up and down for driving fore-and-aft direction adjusting device (4), left and right directions adjusting device (5), polishing disk surface tracks camera head (7) and workpiece pose self-adapting adjusting apparatus (6); Bracing or strutting arrangement (2), for supporting above-mentioned all parts;
Described workpiece pose self-adapting adjusting apparatus (6) comprises pose adjustment top fixing plate (600), pose adjustment bottom fixed board (602), six high accuracy adjustment hydraulic cylinder (601) and high-precision three-dimensional pressure sensor (603), high-precision three-dimensional pressure sensor (603) and polishing workpiece (604) are fixed on the bottom of described pose adjustment bottom fixed board (602), six high accuracy adjustment hydraulic cylinder (601) are arranged all in the same way and the two ends up and down of six high accuracy adjustment hydraulic cylinder (601) are hinged on pose adjustment top fixing plate (600) respectively by universal coupling and pose adjusts on bottom fixed board (602), the upper end of described pose adjustment top fixing plate (600) connects left and right directions adjusting device (5).
2. a kind of grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism according to claim 1 is by spending guiding mechanism, it is characterized in that: described bracing or strutting arrangement (2) comprises integrated model bottom support plate (201), integrated model vertical beam (202), integrated model midfoot support plate (203), the vertical gripper shoe of integrated model (204) and integrated model top support plate (205), the two ends up and down of described integrated model vertical beam (202) are fixedly connected with integrated model bottom support plate (201) with integrated model midfoot support plate (203) respectively, the two ends up and down of the vertical gripper shoe of described integrated model (204) are fixedly connected with integrated model midfoot support plate (203) with integrated model top support plate (205) respectively.
3. a kind of grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism according to claim 1 is by spending guiding mechanism, it is characterized in that: described left and right directions adjusting device (5) comprises the first side fixed head (509), first intermediate support plate (510), first ball-screw (507), first feed screw nut (505), first leading screw support end bearing block (508), first leading screw stiff end bearing block (503), first servomotor (500), first shaft coupling (502), first servomotor bracing frame (501), first line slideway (511), first drags block (506) and the first slide block (512), described first ball-screw (507) is by the first leading screw support end bearing block (508), first leading screw stiff end bearing block (503) is supported on described first intermediate support plate (510), one end of described first ball-screw (507) connects the first servomotor (500) by the first shaft coupling (502), described first servomotor (500) is fixed on the first intermediate support plate (510) by the first servomotor bracing frame (501), described first line slideway (511) is fixed on the bottom surface on described first intermediate support plate (510), and described first slide block (512) is sleeved on the first line slideway (511), described first drags block (506) one end is fixedly connected with the first feed screw nut (505) be sleeved on the first ball-screw (507), and the other end is fixedly connected with workpiece pose self-adapting adjusting apparatus (6) with polishing disk surface tracks camera head (7), the left and right sides of described first intermediate support plate (510) is fixed with the first side fixed head (509) supporting described first intermediate support plate (510), described first servomotor (500) drives the first ball-screw (507) to rotate by the first shaft coupling (502), thus drive the first feed screw nut (505) to move left and right, drive polishing disk surface tracks camera head (7) and workpiece pose self-adapting adjusting apparatus (6) to move left and right further.
4. a kind of grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism according to claim 1 is by spending guiding mechanism, it is characterized in that: described fore-and-aft direction adjusting device (4) comprises the second side fixed head (408), second intermediate support plate (409), second ball-screw (401), second feed screw nut (403), second leading screw support end bearing block (400), second leading screw stiff end bearing block (404), second servomotor (406), second shaft coupling (405), second servomotor bracing frame (407), second line slideway (411), second slide block (410) and second drags block (402), described second ball-screw (401) is supported on described second intermediate support plate (409) by the second leading screw support end bearing block (400), the second leading screw stiff end bearing block (404), one end of described second ball-screw (401) connects the second servomotor (406) by the second shaft coupling (405), and described second servomotor (406) is fixed on the second intermediate support plate (409) by the second servomotor bracing frame (407), the both sides of described second intermediate support plate (409) are fixed with the second side fixed head (408) supporting described second intermediate support plate (409), described second line slideway (411) is fixed on the second side fixed head (408), described second slide block (410) is sleeved on described second line slideway (411), and described second slide block (410) is fixedly connected with left and right directions adjusting device (5), described second feed screw nut (403) is sleeved on that described second ball-screw (401) is upper and the second feed screw nut (403) and second drags block (402) is fixedly connected with, and the second dragging block (402) is fixedly connected with left and right directions adjusting device (5), second servomotor (406) drives the second ball-screw (401) to rotate by the second shaft coupling (405), thus drive the second feed screw nut (403) to move forward and backward, drive the second dragging block (402) and left and right directions adjusting device (5) to move forward and backward along the second line slideway (411) further.
5. a kind of grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism according to claim 2 is by spending guiding mechanism, it is characterized in that: described above-below direction adjusting device (3) comprises the 3rd ball-screw (302), 3rd feed screw nut (304), 3rd leading screw support end bearing block (301), 3rd leading screw stiff end bearing block (307), 3rd servomotor (312), 3rd servomotor bracing frame (313), 3rd line slideway (306), 3rd slide block (305), 3rd drags block (303), Timing Belt regulating wheel (310), the driven synchronous pulley of high moment of torsion (308), Timing Belt regulating wheel fixed axis (311), high moment of torsion active synchronization belt wheel (314) and Timing Belt (309), described 3rd ball-screw (302) is by the 3rd leading screw support end bearing block (301), 3rd leading screw stiff end bearing block (307) is vertically supported on the side of the vertical gripper shoe of described integrated model (204), fixing the 3rd line slideway (306) be arranged in parallel with described 3rd ball-screw (302) on the opposite side of the vertical gripper shoe of described integrated model (204), the upper end of described 3rd ball-screw (302) is fixed with the driven synchronous pulley of high moment of torsion (308), described 3rd servomotor (312) is fixed on the upper end of described integrated model top support plate (205) by the 3rd servomotor bracing frame (313), high moment of torsion active synchronization belt wheel (314) is fixed in the front end of described 3rd servomotor (312), the upper end of described integrated model top support plate (205) is also fixed with Timing Belt regulating wheel fixed axis (311), Timing Belt regulating wheel (310) is fixed on described Timing Belt regulating wheel fixed axis (311), described Timing Belt regulating wheel (310), the driven synchronous pulley of high moment of torsion (308) is connected by Timing Belt (309) with high moment of torsion active synchronization belt wheel (314), described 3rd feed screw nut (304) is sleeved on described 3rd ball-screw (302), 3rd one end dragging block (303) is fixedly connected with described 3rd feed screw nut (304), 3rd other end dragging block (303) is fixedly connected with fore-and-aft direction adjusting device (4), and described 3rd slide block (305) is sleeved on the 3rd line slideway (306) and goes up and be fixedly connected with described fore-and-aft direction adjusting device (4), described 3rd servomotor (312) is by driving the rotation of high moment of torsion active synchronization belt wheel (314), the passive and synchronous belt wheel of high moment of torsion is driven to rotate by Timing Belt, thus drive the 3rd ball-screw (302) to rotate, the 3rd feed screw nut (304) is driven to move up and down when 3rd ball-screw (302) rotates, thus drive the 3rd drag block (303) move up and down, and then drive fore-and-aft direction adjusting device (4) linearly guide rail move up and down.
6. a kind of grinding and polishing workpiece self adaptation degree-of-freedom adjusting mechanism according to claim 2 is by spending guiding mechanism, it is characterized in that: described grade polished dish device (1) comprises grade polished dish stepper motor (101), grade polished dish stepper motor bracing frame (102), grade polished dish stepper motor shaft coupling (103), grade polished dish rotational support bearing (104), grade polished dish rotational support bearing fixed mount (105) and grade polished dish (106), the turning cylinder of described grade polished dish (106) lower end connects grade polished dish stepper motor (101) by grade polished dish stepper motor shaft coupling (103), described turning cylinder is supported by grade polished dish rotational support bearing (104), described grade polished dish rotational support bearing (104) is fixed in integrated model bottom support plate (201) by grade polished dish rotational support bearing fixed mount (105), described grade polished dish stepper motor (101) is fixed in integrated model bottom support plate (201) by grade polished dish stepper motor bracing frame (102).
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| CN106054831A (en) * | 2016-06-06 | 2016-10-26 | 佛山市智人机器人有限公司 | Self-adaptive automatic processing method and system based on shape-variable workpiece |
| CN104985524B (en) * | 2015-07-03 | 2017-04-26 | 浙江工业大学 | Self-adaptive and multi-degree-of-freedom adjusting mechanism for grinding and polishing workpieces |
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| CN104985524B (en) * | 2015-07-03 | 2017-04-26 | 浙江工业大学 | Self-adaptive and multi-degree-of-freedom adjusting mechanism for grinding and polishing workpieces |
| CN106054831A (en) * | 2016-06-06 | 2016-10-26 | 佛山市智人机器人有限公司 | Self-adaptive automatic processing method and system based on shape-variable workpiece |
| CN107160259A (en) * | 2017-04-11 | 2017-09-15 | 济南大学 | A kind of casting tracking edging floating installation and its floating edging method |
| CN107160259B (en) * | 2017-04-11 | 2018-12-28 | 济南大学 | A kind of casting tracking edging floating installation and its floating edging method |
| CN107009256A (en) * | 2017-06-12 | 2017-08-04 | 济南大学 | A kind of metallographic-sample polisher of ability of swimming polishing any angle metal surface |
| CN107322464A (en) * | 2017-07-17 | 2017-11-07 | 北京航天控制仪器研究所 | A kind of accelerometer mounting surface lapping device |
| CN107322464B (en) * | 2017-07-17 | 2019-04-09 | 北京航天控制仪器研究所 | A kind of accelerometer mounting surface grinding device |
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