A kind of heavy monitoring device of erosion of solar cell polycrystalline making herbs into wool etching machines
Technical field
The utility model belongs to mechanical device technical field, relates to a kind of polycrystalline making herbs into wool etching machines used in manufacture of solar cells process, particularly the heavy monitoring device of a kind of erosion of solar cell polycrystalline making herbs into wool etching machines.
Background technology
In manufacture of solar cells manufactures, making herbs into wool matting is mainly used in processing silicon chip surface, the oils molecule of the silicon chip surface before silicon chip diffusion on manufacture of solar cells line, metal impurities, mechanical damage layer is removed by polycrystalline making herbs into wool etching machines and makes pyramid matte.Important the asking of different erosions is had (principle that damaged layer on surface of silicon slice, greasy dirt etc. are corroded by chemicals to be cleaned for different silicon chips, weight ratio after cleaning and before Wafer Cleaning is called that erosion is heavy), current employing be manually use electronic scale to measure, can only inspect by random samples, and it is inadequate to detect data accuracy.
China's patent (notification number: CN201397822, publication date: 2010-02-03) disclose a kind of Manual etching cleaning machine with preheating, comprise rinse bath assembly, cold water inlet, drainage pipe and electric control unit, the first electric heater unit is respectively equipped with in each work nest of rinse bath assembly, first electric heater unit and electric control unit electrically connect, a preheating water tank is provided with at the support that passes behind of rinse bath assembly, the water inlet of preheating water tank connects cold water inlet, the delivery port of preheating water tank leads in each work nest of rinse bath assembly by pipeline and valve respectively, the second electric heater unit electrically connected with electric control unit is provided with in preheating water tank.
Do not have special erosion re-detection equipment in above-mentioned patent, can only adopt traditional sampling observation method of measurement, workload is large, inefficiency, and is difficult to the accuracy ensureing measurement.
Summary of the invention
The problems referred to above that the utility model exists for existing technology, there is provided a kind of erosion of solar cell polycrystalline making herbs into wool etching machines heavy monitoring device, technical problem to be solved in the utility model is: the Real-Time Monitoring how erosion of solar cell polycrystalline making herbs into wool etching heavily being carried out to automation.
The utility model object realizes by following technical proposal:
A kind of heavy monitoring device of erosion of solar cell polycrystalline making herbs into wool etching machines, polycrystalline making herbs into wool etching machines comprises Etaching device, it is characterized in that, the heavy monitoring device of described erosion comprises controller and can weigh up balance weighing apparatus one and the balance weighing apparatus two of silicon chip weight, described balance weighing apparatus one is positioned at the feed end of Etaching device, described balance weighing apparatus two is positioned at the discharge end of Etaching device, described balance weighing apparatus one has weighing tray one, described balance weighing apparatus two has weighing tray two, all there is live roller between described weighing tray one and described Etaching device and between described weighing tray two and described Etaching device, weighed up silicon chip weight data all can be transferred to described controller by described balance weighing apparatus one and balance weighing apparatus two.
Its principle is as follows: by arranging balance weighing apparatus one at the feed end of Etaching device in the technical program, silicon chip before etching is placed on weighing tray one and weighs up the weight before etching, etched by live roller after weighing, the discharge end of Etaching device arranges balance weighing apparatus two, the weighing tray two that silicon chip after etching enters balance weighing apparatus two weighs up the weight after silicon chip etching, the silicon chip weight data that balance weighing apparatus one and balance weighing apparatus two weigh up all transfers to controller, controller carries out computing, weight ratio before drawing silicon chip etching and after etching, namely etching numerical value is drawn, in advance according to the range intervals of need of production setting permissible error in controller, the etching numerical value drawn and this range intervals are compared, see and whether meet technological requirement, as etched weight not in critical field interval, then by controller automatic alarm reminding technology personnel adjustment technique.
The heavy monitoring device of this erosion can be monitored each silicon chip automatically in real time, realizes on-line monitoring erosion heavy, ensures Product Process quality.Automaticity is high, and detect precisely, error is little.
In the heavy monitoring device of the erosion of above-mentioned solar cell polycrystalline making herbs into wool etching machines, the lifting structure one that weighing tray one can be driven to be elevated is provided with below described balance weighing apparatus one, the lifting structure two that weighing tray two can be driven to be elevated is provided with below described balance weighing apparatus two, above described balance weighing apparatus one and balance weighing apparatus two, both sides are equipped with live roller, described lifting structure one can drive weighing tray one to reach the top of described live roller, and described lifting structure two can drive weighing tray two to reach the top of described live roller.Weighing tray one is high and live roller when there being silicon chip, automatically decline after silicon chip is weighed, silicon chip enters Etaching device through live roller and etches, silicon chip after cleaning etching is transplanted on the top of balance weighing apparatus two through live roller, weighing tray two rises and to weigh to silicon chip, automatically declines after weighing again.The transmission of silicon chip and weighing of silicon chip can be avoided mutually to interfere.
In the heavy monitoring device of the erosion of above-mentioned solar cell polycrystalline making herbs into wool etching machines, described lifting structure one and lifting structure two include at least two width intersections and cut telescopic arm, it is that two middle parts are hinged connecting rod that described intersection cuts telescopic arm, is also provided with the hydraulic cylinder that two connecting rods can be made to do shearing motion between two connecting rods.
In the heavy monitoring device of the erosion of above-mentioned solar cell polycrystalline making herbs into wool etching machines, described lifting structure one and lifting structure two are cylinder.
In the heavy monitoring device of the erosion of above-mentioned solar cell polycrystalline making herbs into wool etching machines, described controller is singlechip controller or PLC.Singlechip controller has the advantages such as system configuration is simple, use convenience, reliability high-low voltage, low-power consumption; PLC has the advantages such as perfect in shape and function, reliability is high, antijamming capability is strong.
Compared with prior art, advantage of the present utility model is as follows:
1, the heavy monitoring device of this erosion can be monitored each silicon chip automatically in real time, and realize on-line monitoring erosion heavy, ensure Product Process quality, its automaticity is high, and detect precisely, error is little.
2, this loses heavy monitoring device by arranging lifting structure one and lifting structure two, drives weighing tray one and weighing tray two to be elevated respectively, the transmission of silicon chip and weighing of silicon chip can be avoided mutually to interfere.
Accompanying drawing explanation
Fig. 1 is the heavy monitoring device structural representation of this erosion.
In figure, 1, Etaching device; 2, balance weighing apparatus one; 3, balance weighing apparatus two; 4, weighing tray one; 5, weighing tray two; 6, live roller; 7, controller; 8, lifting structure one; 9, lifting structure two.
Embodiment
Be below specific embodiment of the utility model and by reference to the accompanying drawings, the technical solution of the utility model is further described, but the utility model be not limited to these embodiments.
As shown in Figure 1, polycrystalline making herbs into wool etching machines comprises Etaching device 1, this loses balance weighing apparatus 1 and balance weighing apparatus 23 that heavy monitoring device comprises controller 7 and can weigh up silicon chip weight, balance weighing apparatus 1 is positioned at the feed end of Etaching device 1, balance weighing apparatus 23 is positioned at the discharge end of Etaching device 1, balance weighing apparatus 1 has weighing tray 1, balance weighing apparatus 23 has weighing tray 25, between weighing tray 1 and Etaching device 1 and between weighing tray 25 and Etaching device 1, all there is live roller 6, weighed up silicon chip weight data all can be transferred to controller 7 by balance weighing apparatus 1 and balance weighing apparatus 23.
By arranging balance weighing apparatus 1 at the feed end of Etaching device 1 in the technical program, silicon chip before etching is placed on weighing tray 1 and weighs up the weight before etching, etched by live roller 6 after weighing, the discharge end of Etaching device 1 arranges balance weighing apparatus 23, the weighing tray 25 that silicon chip after etching enters balance weighing apparatus 23 weighs up the weight after silicon chip etching, the silicon chip weight data that balance weighing apparatus 1 and balance weighing apparatus 23 weigh up all transfers to controller 7, controller 7 carries out computing, weight ratio before drawing silicon chip etching and after etching, namely etching numerical value is drawn, in advance according to the range intervals of need of production setting permissible error in controller 7, the etching numerical value drawn and this range intervals are compared, see and whether meet technological requirement, as etched weight not in critical field interval, then by controller 7 automatic alarm reminding technology personnel adjustment technique.
The heavy monitoring device of this erosion can be monitored each silicon chip automatically in real time, realizes on-line monitoring erosion heavy, ensures Product Process quality.Automaticity is high, and detect precisely, error is little.
The lifting structure 1 that weighing tray 1 can be driven to be elevated is provided with below balance weighing apparatus 1, the lifting structure 29 that weighing tray 25 can be driven to be elevated is provided with below balance weighing apparatus 23, above balance weighing apparatus 1 and balance weighing apparatus 23, both sides are equipped with live roller 6, lifting structure 1 can drive weighing tray 1 to reach the top of live roller 6, and lifting structure 29 can drive weighing tray 25 to reach the top of live roller 6; Lifting structure 1 and lifting structure 29 include at least two width and intersect and cut telescopic arm, intersect that to cut telescopic arm be that two middle parts are hinged connecting rod, are also provided with the hydraulic cylinder that two connecting rods can be made to do shearing motion between two connecting rods; Weighing tray 1 is high and live roller 6 when there being silicon chip, automatically decline after silicon chip is weighed, silicon chip enters Etaching device 1 through live roller 6 and etches, silicon chip after cleaning etching is transplanted on the top of balance weighing apparatus 23 through live roller 6, weighing tray 25 rises and weighs to silicon chip, automatically declines after weighing again.The transmission of silicon chip and weighing of silicon chip can be avoided mutually to interfere.
Alternatively, lifting structure 1 and lifting structure 29 can also be cylinder.
The present embodiment middle controller 7 is singlechip controller, and singlechip controller has the advantages such as system configuration is simple, use convenience, reliability high-low voltage, low-power consumption.
Specific embodiment described herein is only to the explanation for example of the utility model spirit.The utility model person of ordinary skill in the field can make various amendment or supplements or adopt similar mode to substitute to described specific embodiment, but can't depart from spirit of the present utility model or surmount the scope that appended claims defines.
Although more employ 1 herein, Etaching device; 2, balance weighing apparatus one; 3, balance weighing apparatus two; 4, weighing tray one; 5, weighing tray two; 6, live roller; 7, controller; 8, lifting structure one; 9, the second-class term of lifting structure, but do not get rid of the possibility using other term.These terms are used to be only used to describe and explain essence of the present utility model more easily; The restriction that they are construed to any one additional is all contrary with the utility model spirit.