CN109030277A - A kind of chain type polycrystalline acid etch automatic weighing device - Google Patents
A kind of chain type polycrystalline acid etch automatic weighing device Download PDFInfo
- Publication number
- CN109030277A CN109030277A CN201811127794.2A CN201811127794A CN109030277A CN 109030277 A CN109030277 A CN 109030277A CN 201811127794 A CN201811127794 A CN 201811127794A CN 109030277 A CN109030277 A CN 109030277A
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- weighing apparatus
- weighing
- chain type
- type polycrystalline
- acid etch
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- 238000005303 weighing Methods 0.000 title claims abstract description 98
- 239000002253 acid Substances 0.000 title claims abstract description 20
- 230000007246 mechanism Effects 0.000 claims abstract description 32
- 238000005530 etching Methods 0.000 claims abstract description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 23
- 239000010703 silicon Substances 0.000 claims abstract description 23
- 208000020442 loss of weight Diseases 0.000 claims abstract description 15
- 230000003628 erosive effect Effects 0.000 claims description 3
- 239000013078 crystal Substances 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 206010044565 Tremor Diseases 0.000 description 1
- 208000003464 asthenopia Diseases 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
- G01N5/04—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by removing a component, e.g. by evaporation, and weighing the remainder
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Weting (AREA)
Abstract
The present invention relates to crystal silicon solar batteries fields, more particularly to a kind of chain type polycrystalline acid etch automatic weighing device, including Weighing mechanism and reading mechanism, the Weighing mechanism includes the first weighing apparatus and the second weighing apparatus, first weighing apparatus is arranged in the feed end, second weighing apparatus is arranged in the discharge end, first weighing apparatus and second weighing apparatus are all connected with the reading mechanism, the reading mechanism obtains the numerical value of first weighing apparatus Yu second weighing apparatus respectively, the numerical value that the numerical value of first weighing apparatus subtracts second weighing apparatus is the etching loss of weight number of the silicon wafer, it can be convenient the real-time etching loss of weight for efficiently obtaining silicon wafer in etching groove using the present invention, technologist is facilitated to control producing line stability, so as to improve difference of the etching caused by unstable, it is final to improve yields, without special Operating personnel manual weighing is set, and high degree of automation, as a result precisely, time saving and energy saving, work efficiency is high, has broad application prospects.
Description
Technical field
The present invention relates to crystal silicon solar batteries fields, and in particular to a kind of chain type polycrystalline acid etch automatic weighing device.
Background technique
It is a vital step in solar energy highly effective battery manufacturing process that solar battery, which etches polishing process, to finished product
The electrical property and EL yield of cell piece have great influence, and the uniformity of silicon chip back side reflectivity determines that back is blunt after etching
Change the uniformity of plated film, the uniformity of plated film determines the uniformity of laser opening rate and size.Therefore etching is in entire crystal silicon
Very important effect is played during manufacture of solar cells.
Chain type polycrystalline acid etch is one of solar cell fabrication process normal method, existing chain type polycrystalline acid etch
Equipment mainly uses the road 5-8-10 while running, and wet process acid etch is the PN that silicon chip back side and surrounding are eroded by chemically reacting
Knot to achieve the purpose that front and back insulate, while removing positive phosphorosilicate glass layer.Silicon wafer is reacted with the different degrees of of acid
Loss of weight also has fluctuation, to cause etching uneven, finally influences yields.The size of loss of weight, which becomes, influences product yield
A key factor, thus need that weighing personnel specially are arranged in existing crystal silicon solar batteries production producing line to weigh in time and subtract
Weight situation facilitates technologist to control producing line stability, so as to accurately hold the real-time loss of weight situation in each road so as to improve quarter
Difference caused by erosion is unstable, finally improves yields.Although this mode can improve the unstable institute of etching to a certain extent
Caused by difference, but due to existing weighting manner be manual weighing, this mode of operation is not only time-consuming and laborious, labor intensity
Greatly, working efficiency is low, and manually weighs easily because of visual fatigue caused by working long hours, and claims to generate leakage, prior
It is that artificial weighting manner causes weighing results uniformity poor, influence product due to having differences between different weighing personnel
Yields.
Summary of the invention
Present invention aim to address the deficiencies of above-mentioned test condition in the prior art, provide a kind of time saving and energy saving, work
The chain type polycrystalline acid etch automatic weighing device high-efficient, weighing results are stable.
The present invention solves technical solution used by above-mentioned the deficiencies in the prior art:
A kind of chain type polycrystalline acid etch automatic weighing device, it is described for being weighed to the silicon chip erosion loss of weight in etching groove
Etching groove is equipped with feed end and discharge end, which is characterized in that including Weighing mechanism and reading mechanism, the Weighing mechanism includes the
One weighing apparatus and the second weighing apparatus, in the feed end, second weighing apparatus is arranged described for the first weighing apparatus setting
Discharge end, first weighing apparatus and second weighing apparatus are all connected with the reading mechanism, and the reading mechanism obtains respectively
The numerical value of first weighing apparatus and second weighing apparatus, the numerical value of first weighing apparatus subtract second weighing apparatus
Numerical value is the etching loss of weight number of the silicon wafer.
Preferably, heretofore described first weighing apparatus and the second weighing apparatus are electronic balance.
Preferably, heretofore described reading mechanism is the general purpose computer with data processing software.
Preferably, heretofore described reading mechanism is dedicated data processor.
Preferably, heretofore described feed end is equipped with feeding manipulator, and the discharge end is equipped with blanking mechanical hand.
Preferably, heretofore described feeding manipulator is equipped with feeding sucker, and the blanking mechanical is equipped with blanking on hand
Sucker.
The invention has the advantages that due to chain type polycrystalline acid etch automatic weighing device of the present invention include Weighing mechanism and
Reading mechanism, the Weighing mechanism include the first weighing apparatus and the second weighing apparatus, and first weighing apparatus is arranged in the charging
End, second weighing apparatus, which is arranged, is all connected with the reading in the discharge end, first weighing apparatus and second weighing apparatus
Number mechanism, the reading mechanism obtain the numerical value of first weighing apparatus Yu second weighing apparatus, first weighing respectively
The numerical value that the numerical value of device subtracts second weighing apparatus is the etching loss of weight number of the silicon wafer, thus can be convenient using the present invention
The real-time etching loss of weight for efficiently obtaining silicon wafer in etching groove, facilitates technologist to control producing line stability, so as to improve etching
Difference caused by shakiness, finally improves yields.And the present invention obtains the etching loss of weight of silicon wafer using reading mechanism automatically,
It is not necessary that operating personnel manual weighing is specially arranged, high degree of automation is time saving and energy saving, and work efficiency is high, and weighing results are accurate, produces
Product yields greatly improves, and has broad application prospects.
Detailed description of the invention
Fig. 1 is the structural schematic block diagram of chain type polycrystalline acid etch automatic weighing device of the present invention.
Specific embodiment
It is described below for disclosing the present invention so that those skilled in the art can be realized the present invention.It is excellent in being described below
Embodiment is selected to be only used as illustrating, it may occur to persons skilled in the art that other obvious modifications.It defines in the following description
Basic principle of the invention can be applied to other embodiments, deformation scheme, improvement project, equivalent program and do not carry on the back
Other technologies scheme from the spirit and scope of the present invention.
In the description of the present invention, it should be noted that the orientation or position of the instructions such as term " on ", "lower", "left", "right"
Setting relationship is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description of the present invention and simplification of the description, rather than
The device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot
It is interpreted as limitation of the present invention.
Fig. 1 shows a kind of structural schematic block diagram of chain type polycrystalline acid etch automatic weighing device of the present invention.Such as Fig. 1 institute
Show, chain type polycrystalline acid etch automatic weighing device described in the present embodiment, for etching loss of weight in etching groove 10 silicon wafer 20
It being weighed, the etching groove is equipped with feed end 11 and discharge end 12, and arrow represents silicon wafer traffic direction in etching groove in Fig. 1,
The automatic weighing device includes Weighing mechanism and reading mechanism 40, wherein as shown in Figure 1, the Weighing mechanism includes first
Weighing apparatus 31 and the second weighing apparatus 32, first weighing apparatus 31 are arranged in the feed end 11, and second weighing apparatus 32 is set
It sets in the discharge end 12, first weighing apparatus 31 and second weighing apparatus 32 are all connected with the reading mechanism 40, described
Reading mechanism 40 obtains the numerical value of first weighing apparatus Yu second weighing apparatus respectively, and the numerical value of first weighing apparatus subtracts
Go the numerical value of second weighing apparatus for the etching loss of weight number of the silicon wafer.
Preferably, the first weighing apparatus 31 described in the present embodiment and the second weighing apparatus 32 are electronics day
Flat, structure is simple, low in cost, and weighing is convenient and accurate.
Preferably, reading mechanism 40 described in the present embodiment is the general-purpose computations with data processing software
Machine.First weighing apparatus 31 and second weighing apparatus 32 weigh weight of the silicon wafer before etching and after etching respectively, and divide
Acquired weight computer is not sent to, computer calculates the second weighing apparatus number using internal data processing software automatically
The difference of value and the first weighing apparatus numerical value, the etching loss of weight number of the as described silicon wafer carry out data processing using computer, convenient fast
Prompt and accuracy rate is high.
Preferably, reading mechanism described in the present embodiment is dedicated data processor.
Preferably, as shown in Figure 1, feed end 11 described in the present embodiment is equipped with feeding manipulator 110, institute
Discharge end 12 is stated equipped with blanking mechanical hand 120.It can be convenient using feeding manipulator 110 and blanking mechanical hand 120 and efficiently will
Weighed silicon wafer is wanted to be placed on the first weighing apparatus and the second weighing apparatus, without manually participating in, high degree of automation, operation is just
Benefit.
Preferably, as shown in Figure 1, feeding manipulator 110 described in the present embodiment is equipped with feeding sucker
111, the blanking mechanical hand 120 is equipped with blanking sucker 121, can be convenient surely using feeding sucker 111 and blanking sucker 121
Fixed will weighed silicon wafer crawl, raising operation stability and safety.
It should be understood by those skilled in the art that foregoing description and the embodiment of the present invention shown in the drawings are only used as illustrating
And it is not intended to limit the present invention.The purpose of the present invention has been fully and effectively achieved.Function and structural principle of the invention exists
It shows and illustrates in embodiment, under without departing from the principle, embodiments of the present invention can have any deformation or modification.
Claims (6)
1. a kind of chain type polycrystalline acid etch automatic weighing device, for being weighed to the silicon chip erosion loss of weight in etching groove, institute
Etching groove is stated equipped with feed end and discharge end, which is characterized in that including Weighing mechanism and reading mechanism, the Weighing mechanism includes
First weighing apparatus and the second weighing apparatus, in the feed end, second weighing apparatus is arranged in institute for the first weighing apparatus setting
Discharge end is stated, first weighing apparatus and second weighing apparatus are all connected with the reading mechanism, and the reading mechanism obtains respectively
The numerical value of first weighing apparatus Yu second weighing apparatus is taken, the numerical value of first weighing apparatus subtracts second weighing apparatus
Numerical value be the silicon wafer etching loss of weight number.
2. chain type polycrystalline acid etch automatic weighing device according to claim 1, which is characterized in that first weighing apparatus
It is electronic balance with the second weighing apparatus.
3. chain type polycrystalline acid etch automatic weighing device according to claim 1, which is characterized in that the reading mechanism is
General purpose computer with data processing software.
4. chain type polycrystalline acid etch automatic weighing device according to claim 1, which is characterized in that the reading mechanism is
Dedicated data processor.
5. chain type polycrystalline acid etch automatic weighing device according to claim 1, which is characterized in that the feed end is equipped with
Feeding manipulator, the discharge end are equipped with blanking mechanical hand.
6. chain type polycrystalline acid etch automatic weighing device according to claim 5, which is characterized in that the feeding manipulator
It is equipped with feeding sucker, the blanking mechanical is equipped with blanking sucker on hand.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811127794.2A CN109030277A (en) | 2018-09-27 | 2018-09-27 | A kind of chain type polycrystalline acid etch automatic weighing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811127794.2A CN109030277A (en) | 2018-09-27 | 2018-09-27 | A kind of chain type polycrystalline acid etch automatic weighing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109030277A true CN109030277A (en) | 2018-12-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811127794.2A Pending CN109030277A (en) | 2018-09-27 | 2018-09-27 | A kind of chain type polycrystalline acid etch automatic weighing device |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004004406A1 (en) * | 2004-01-29 | 2005-08-25 | Infineon Technologies Ag | Determining the volume of an etched structure, comprises weighing the substrate, etching by targeted removal of material, and then weighing the substrate |
| CN204792877U (en) * | 2015-07-18 | 2015-11-18 | 广东爱康太阳能科技有限公司 | Making herbs into wool cleaning machine |
| CN205039132U (en) * | 2015-06-19 | 2016-02-17 | 浙江宝利特新能源股份有限公司 | Losing of solar cell polycrystal making herbs into wool etching equipment weighs monitoring devices |
| CN206040597U (en) * | 2016-09-27 | 2017-03-22 | 苏州阿特斯阳光电力科技有限公司 | A sculpture thickness reduction quantity monitoring device for chain sculpture machine |
| CN209148475U (en) * | 2018-09-27 | 2019-07-23 | 苏州润阳光伏科技有限公司 | A kind of chain type polycrystalline acid etch automatic weighing device |
-
2018
- 2018-09-27 CN CN201811127794.2A patent/CN109030277A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004004406A1 (en) * | 2004-01-29 | 2005-08-25 | Infineon Technologies Ag | Determining the volume of an etched structure, comprises weighing the substrate, etching by targeted removal of material, and then weighing the substrate |
| CN205039132U (en) * | 2015-06-19 | 2016-02-17 | 浙江宝利特新能源股份有限公司 | Losing of solar cell polycrystal making herbs into wool etching equipment weighs monitoring devices |
| CN204792877U (en) * | 2015-07-18 | 2015-11-18 | 广东爱康太阳能科技有限公司 | Making herbs into wool cleaning machine |
| CN206040597U (en) * | 2016-09-27 | 2017-03-22 | 苏州阿特斯阳光电力科技有限公司 | A sculpture thickness reduction quantity monitoring device for chain sculpture machine |
| CN209148475U (en) * | 2018-09-27 | 2019-07-23 | 苏州润阳光伏科技有限公司 | A kind of chain type polycrystalline acid etch automatic weighing device |
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Address after: Room 101, building 1, 58 Xiangjiang Road, Yancheng Economic and Technological Development Zone, Jiangsu Province 224000 Applicant after: Jiangsu Runyang New Energy Technology Co.,Ltd. Address before: 215300 20th floor, Dibao financial building, East Qianjin Road, Kunshan Development Zone, Suzhou City, Jiangsu Province Applicant before: SUZHOU RUNYANG PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. Address after: Room 101, building 1, 58 Xiangjiang Road, Yancheng Economic and Technological Development Zone, Jiangsu Province 224000 Applicant after: Jiangsu Runyang New Energy Technology Co.,Ltd. Address before: Room 101, building 1, 58 Xiangjiang Road, Yancheng Economic and Technological Development Zone, Jiangsu Province 224000 Applicant before: Jiangsu Runyang New Energy Technology Co.,Ltd. |