CN204944974U - A kind of pick-up unit of air particles - Google Patents
A kind of pick-up unit of air particles Download PDFInfo
- Publication number
- CN204944974U CN204944974U CN201520769773.6U CN201520769773U CN204944974U CN 204944974 U CN204944974 U CN 204944974U CN 201520769773 U CN201520769773 U CN 201520769773U CN 204944974 U CN204944974 U CN 204944974U
- Authority
- CN
- China
- Prior art keywords
- catoptron
- pick
- resonant panel
- unit
- airborne particulate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Abstract
<b> the utility model discloses a kind of pick-up unit and detection method of airborne particulate concentration, described pick-up unit comprises substrate, for collecting Atmospheric particulates resonant panel, be arranged on the first catoptron on described substrate, be arranged on the second catoptron on described resonant panel, for connecting described substrate and the brace summer of resonant panel, beam interference chamber is formed between the first described catoptron and the second catoptron, described brace summer is used for deformation occurring under the driving of AC drive voltage to make described resonant panel vibration, incident light is successively by the first catoptron and the second catoptron, reflect in the second mirror surface, form reflected light.The utility model utilizes the change of the resonance frequency of resonant panel to obtain the change being gathered in air particles quality on resonant panel, thus obtains airborne particulate concentration.Achieve the miniaturization of </b><bGreatT.Gre aT.GTPM2.5</b><b > detecting instrument, overcome the shortcoming that in prior art, light scattering method measuring error is larger simultaneously.</b>
Description
Technical field
The utility model relates to a kind of pick-up unit of airborne particulate concentration, particularly relates to a kind of PM2.5 mass concentration pick-up unit.
Background technology
It is one of leading indicator weighing atmospheric pollution level.The detection method of current PM2.5 is primarily of filter membrane weight method, micro oscillation sedimentation balance method, β rays method and light scattering method.Filter membrane weight method Measuring Time is long, can not realize on-line automatic measurement.Micro oscillation sedimentation balance method and β rays method can be implemented in line and automatically measure, but apparatus structure is complicated, and volume ratio is comparatively large, is not easy to carry, is suitable only for the detection of the fixed-site such as laboratory, monitoring station.Light scattering method is measured convenient, and volume is little, but measuring error is larger.
Summary of the invention
A kind of technical problem to be solved in the utility model overcomes the deficiencies in the prior art, provides a kind of pick-up unit and detection method of airborne particulate concentration of miniaturization.
For solving above technical matters, the utility model takes following technical scheme:
A kind of pick-up unit of airborne particulate concentration, described pick-up unit comprises substrate, for collecting Atmospheric particulates resonant panel, be arranged on the first catoptron on described substrate, be arranged on the second catoptron on described resonant panel, for connecting described substrate and the brace summer of resonant panel, beam interference chamber is formed between the first described catoptron and the second catoptron, described brace summer is used for deformation occurring under the driving of AC drive voltage to make described resonant panel vibration, incident light is successively by the first catoptron and the second catoptron, reflect in the second mirror surface, form reflected light.
Preferably, the first described catoptron and the second catoptron arranged in parallel.
Preferably, the initial optical path difference of described interference cavity is the integral multiple of the wavelength half of incident light.
Preferably, described pick-up unit also comprises Amici prism, for generation of the light source of incident light, for receiving the photodetector of reflected light, the incident light that described light source sends by incide after described Amici prism the first catoptron and second reflection by between interference cavity in, reflected light, through the surface being transferred to described photodetector after Amici prism, records the interference light intensity of reflected light.
Preferably, the first described catoptron and the second catoptron are multilayer dielectric reflective coating, are made up of silicon nitride film, silica membrane and polysilicon membrane.
Preferably, described resonant panel is silicon dioxide rectangular slab, and described pick-up unit comprises 4 brace summers, and described brace summer one end is fixed on described substrate by a support column, and the other end is connected with four summits of described resonant panel respectively.
Preferably, described brace summer comprises silicon dioxide supporting layer, for connecting the first electrode layer of AC driven power and the second electrode lay, be arranged on deformation layer between the first described electrode layer and the second electrode lay, described deformation layer is used for, under the driving of AC drive voltage, deformation occurs, and vibrates to drive described resonant panel.
Preferably, described deformation layer is that piezoceramic material is made.
Due to the enforcement of above technical scheme, the utility model compared with prior art tool has the following advantages:
The utility model utilizes the change of the resonance frequency of resonant panel to obtain the change being gathered in air particles quality on resonant panel, thus obtains airborne particulate concentration.The apparatus structure that the utility model uses is simple, simple to operate, achieves the miniaturization of PM2.5 detecting instrument, overcomes the shortcoming that in prior art, light scattering method measuring error is larger simultaneously.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of air particles pick-up unit described in the utility model;
Fig. 2 is the structural representation of substrate described in the utility model and the first catoptron;
Fig. 3 is the structural representation of resonant panel described in the utility model and the second catoptron;
Fig. 4 is the structural representation of interference cavity;
The structural representation that Fig. 5 (a) is brace summer;
The structural representation when vibrating that Fig. 5 (b) is brace summer;
Fig. 6 is the described structural representation of pick-up unit when vibrating;
Fig. 7 is the schematic diagram of described pick-up unit duty,
100, substrate; 101, the first catoptron; 101a, 202a, silicon nitride film; 101b, 202b, silica membrane; 101c, 202c, polysilicon membrane; 200, resonator; 201, resonant panel; 202, the second catoptron; 300, brace summer; 301, support column; 302, silicon dioxide supporting layer; 303, the first electrode layer; 304, deformation layer; 305, the second electrode lay; 401, incident light; 402, reflected light; 5, light source; 6, Amici prism; 7, photodetector; 8, photoelectric detector.
Embodiment
As shown be a kind of air particles pick-up unit described in the utility model, described pick-up unit comprises substrate 100, be arranged on the upside of substrate 100 for collecting Atmospheric particulates resonator 200, the first catoptron 101 be arranged on described substrate 100, described resonator 200 comprises resonant panel 201, the second catoptron 202 be arranged on described resonant panel 201, for connecting the brace summer 300 of described substrate 100 and resonant panel 201, the first described catoptron 101 and the second catoptron 202 arranged in parallel.The first described catoptron 101 and the second catoptron 202 are multilayer dielectric reflective coating, by silicon nitride film 101a, 202a, silica membrane 101b, 202b and polysilicon membrane 101c, 202c forms, preferably, resonator 200 is disposed with polysilicon membrane 202c, silica membrane 202b, silicon nitride film 202a, resonant panel 201 from top to bottom, described substrate 100 is disposed with from top to bottom polysilicon membrane 101c, silica membrane 202a, silicon nitride film 101a.Described substrate 100 is made for quartz material.
Described resonant panel 201 is silicon dioxide rectangular slab, described brace summer 300 is by 4, one end of brace summer 300 is fixed on described substrate 100 by support column 301, the other end is connected with four summits of described resonant panel 201 respectively, and described brace summer 300 is separately positioned on around four limits of resonant panel 201.Preferably, resonant panel 201 by long and wide be 50 microns, thickness is the silicon dioxide rectangular slab of 1 micron.
Described brace summer 300 comprises silicon dioxide supporting layer 302, for connecting the first electrode layer 303 of AC driven power and the second electrode lay, be arranged on deformation layer 304 between the first described electrode layer 303 and the second electrode lay 305, preferably, described deformation layer 304 is PZT layer, and namely described deformation layer 304 is made for piezoceramic material.
Beam interference chamber is formed between the first described catoptron 101 and the second catoptron 202, first electrode layer 303 of described brace summer 300 with the second electrode lay 305 when being communicated with AC drive voltage, there is deformation in described deformation layer 304, when vibration occurs the deformation layer 304 of described four brace summers 300 together, the resonant panel 201 described in drive vibrates.
Described pick-up unit also comprises Amici prism 6, for generation of the laser light source 5 of incident light 401, for receiving the photodetector 7 of reflected light 402, for the photoelectric detector 8 of the interference light intensity of computational reflect light 402, the incident light 401 that described light source 5 sends by incide after described Amici prism 6 first catoptron 101 and the second reflection by between interference cavity in, reflected light 402 is through the surface being transferred to described photodetector 7 after Amici prism 6, described photoelectric detector 8 is connected with described photodetector 7, calculate the interference light intensity of reflected light 402.In the utility model, described light source 5 is semiconductor laser, and the light that described light source 5 sends is homogeneous beam, and preferably, wavelength is 0.78 micron.
The initial optical path difference of described interference cavity is the integral multiple of the wavelength half of incident light 401, when the first electrode layer 303 is connected AC drive voltage with the second electrode lay 305, there is deformation in described deformation layer 304, resonant panel 201 described in drive vibrates, when vibration occurs resonant panel 201, incident light 401 wavelength that the displacement of oscillating plate is less than 1/4, after incident light 401 enters interference cavity from substrate 100, radiative generation multiple-beam interference, the interference light intensity of reflected light 402 is:
Wherein,
i 0 for incident light the last 401,
rfor the reflectivity of minute surface,
lthe optical path difference of interference cavity,
λfor the wavelength in incident light 401 source, when
lwhen the optical path difference of interference cavity is the integral multiple of wavelength half of incident light 401, in the ideal case, the interference light intensity of described reflected light 402 is 0.
When the first electrode layer 303 is connected AC drive voltage with the second electrode lay 305, there is deformation in described deformation layer 304, and whole brace summer 300 is bent upwards, thus resonator 200 is raised, change the optical path difference of interference cavity, the displacement that resonant panel 201 occurs is Δ, Δ≤1/4
λ,the interference light intensity can being tried to achieve now reflected light 402 by formula (1) is:
When the interference light intensity amplitude of variation detected is maximum, the resonance frequency of resonator 200 is the driving frequency of driving voltage, and the resonance frequency of resonator 200 is formulated as:
Wherein, K is effective stiffness coefficient, and m is the effective mass of resonant panel 201, when the effective mass of resonant panel 201 changes time, the resonant vibratory frequency of resonant panel 201 also changes, to formula (3) ask first order derivative can obtain resonance frequency change and effective mass change between relation:
Therefore show that the quality of the Atmospheric particulates be gathered on resonant panel 201 is:
，
Airborne particulate concentration is obtained from the quality of Atmospheric particulates.
PM2.5 particle in air is gathered in the upper surface of resonator 200 under the effect of air sampler, and the effective mass of resonator 200 changes, and causes the resonance frequency of resonator 200 to change.By formula (5), the change of resonator 200 effective mass can be obtained according to the change of resonance frequency, calculate the quality of the PM2.5 particle being gathered in resonator 200 surface, thus obtain the PM2.5 concentration in air.
Above the utility model is described in detail, but the utility model is not limited to the above embodiments.All equivalences done according to Spirit Essence of the present utility model change or modify, and all should be encompassed in protection domain of the present utility model.
Claims (8)
1. the pick-up unit of an airborne particulate, it is characterized in that: described pick-up unit comprises substrate, for collecting Atmospheric particulates resonant panel, the first catoptron be arranged on described substrate, the second catoptron be arranged on described resonant panel, for connecting described substrate and the brace summer of resonant panel
Beam interference chamber is formed between the first described catoptron and the second catoptron, described brace summer is used for deformation occurring under the driving of AC drive voltage to make described resonant panel vibration, incident light is successively by the first catoptron and the second catoptron, reflect in the second mirror surface, form reflected light.
2. the pick-up unit of a kind of airborne particulate according to claim 1, is characterized in that: the first described catoptron and the second catoptron arranged in parallel.
3. the pick-up unit of a kind of airborne particulate according to claim 1, is characterized in that: the initial optical path difference of described interference cavity is the integral multiple of the wavelength half of incident light.
4. the pick-up unit of a kind of airborne particulate according to claim 1, it is characterized in that: described pick-up unit also comprises Amici prism, for generation of the light source of incident light, for receiving the photodetector of reflected light, the incident light that described light source sends is by inciding in the interference cavity between the first catoptron and the second catoptron after described Amici prism, reflected light, through the surface being transferred to described photodetector after Amici prism, records the interference light intensity of reflected light.
5. the pick-up unit of a kind of airborne particulate according to claim 1, is characterized in that: the first described catoptron and the second catoptron are multilayer dielectric reflective coating, are made up of silicon nitride film, silica membrane and polysilicon membrane.
6. the pick-up unit of a kind of airborne particulate according to claim 1, it is characterized in that: described resonant panel is silicon dioxide rectangular slab, described pick-up unit comprises 4 brace summers, described brace summer one end is fixed on described substrate by a support column, and the other end is connected with four summits of described resonant panel respectively.
7. the pick-up unit of a kind of airborne particulate according to claim 6, it is characterized in that: described brace summer comprises silicon dioxide supporting layer, for connecting the first electrode layer of AC driven power and the second electrode lay, be arranged on deformation layer between the first described electrode layer and the second electrode lay, described deformation layer is used for, under the driving of AC drive voltage, deformation occurs, and vibrates to drive described resonant panel.
8. the pick-up unit of a kind of airborne particulate according to claim 7, is characterized in that: described deformation layer is that piezoceramic material is made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520769773.6U CN204944974U (en) | 2015-09-30 | 2015-09-30 | A kind of pick-up unit of air particles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520769773.6U CN204944974U (en) | 2015-09-30 | 2015-09-30 | A kind of pick-up unit of air particles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204944974U true CN204944974U (en) | 2016-01-06 |
Family
ID=55012390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520769773.6U Withdrawn - After Issue CN204944974U (en) | 2015-09-30 | 2015-09-30 | A kind of pick-up unit of air particles |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204944974U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105241795A (en) * | 2015-09-30 | 2016-01-13 | 江苏苏净集团有限公司 | Atmospheric particle concentration detection device and detection method |
| CN110462371A (en) * | 2017-03-31 | 2019-11-15 | 第一精工株式会社 | Substance detecting element |
-
2015
- 2015-09-30 CN CN201520769773.6U patent/CN204944974U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105241795A (en) * | 2015-09-30 | 2016-01-13 | 江苏苏净集团有限公司 | Atmospheric particle concentration detection device and detection method |
| CN105241795B (en) * | 2015-09-30 | 2018-12-07 | 江苏苏净集团有限公司 | A kind of detection device and detection method of airborne particulate concentration |
| CN110462371A (en) * | 2017-03-31 | 2019-11-15 | 第一精工株式会社 | Substance detecting element |
| US11448619B2 (en) | 2017-03-31 | 2022-09-20 | Dai-Ichi Seiko Co., Ltd. | Substance detecting element |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN200986562Y (en) | Accelerameter high-frequency vibration amplitude phase behavior measuring device | |
| CN102735646B (en) | Measuring apparatus and measuring method for refractive index of transparent medium | |
| CN101995328B (en) | Method for measuring transmission loss of optical element | |
| CN104579224B (en) | For driving and/or detecting the opto-mechanical device of the movement of mechanical organ | |
| CN204944974U (en) | A kind of pick-up unit of air particles | |
| CN105241795A (en) | Atmospheric particle concentration detection device and detection method | |
| CN102053007B (en) | Absolute measuring method for intramembranous loss parameter of high-reflectivity membrane | |
| CN106442411A (en) | Graphene surface wave based high-sensitivity ultrafast refractive index detecting device and method | |
| WO2022267555A1 (en) | Radial cavity quartz-enhanced photoacoustic spectrophone and gas detection device comprising same | |
| CN103185665B (en) | The measuring method of birefringence element optical axis | |
| CN102868445A (en) | Device and method for counting micro-particles based on micro-nanofiber | |
| RU2006105198A (en) | PROBE FOR THE PROBE MICROSCOPE USING TRANSPARENT SUBSTRATE, METHOD FOR PRODUCING THE PROBE AND DEVICE OF THE PROBE MICROSCOPE | |
| US5260562A (en) | High-resolution light microscope using coherent light reflected from a target to modulate the power output from a laser | |
| CN108981898A (en) | It is a kind of to realize the method for micro-cantilever resonant frequency tuning using photo-thermal effect, realizing system and application | |
| CN204177733U (en) | Based on the excitation formula passive source gas sensor of surface acoustic wave principle | |
| CN1186247C (en) | Carbon nano tube film micromechanical infrared detector | |
| CN107024432A (en) | A kind of simple optoacoustic detector for being used to detect highly corrosive gas | |
| CN203178030U (en) | Optical fiber harmonic oscillator vacuum sensor | |
| CN103217228A (en) | Temperature sensor based on capacitive micromachined ultrasonic transducer (CMUT) and preparation and application method of temperature sensor | |
| CN110389110A (en) | It is a kind of based on stick-ring structure medium nanometer optical wave antenna sensor and application | |
| CN108693247B (en) | Laser surface acoustic wave detection system based on double measuring beams and use method thereof | |
| CN101149275A (en) | Single light source resonance sensor for excitation and vibration testing | |
| CN110823835B (en) | Waveguide coupling long-range surface plasma resonance sensor and measuring method thereof | |
| CN206638574U (en) | A kind of simple optoacoustic detector for being used to detect highly corrosive gas | |
| CN100538338C (en) | The analytical approach of the part in the sample and the device of the part in the analytical sample |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160106 Effective date of abandoning: 20181207 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20160106 Effective date of abandoning: 20181207 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160106 Effective date of abandoning: 20190104 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20160106 Effective date of abandoning: 20190104 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |