CN200986562Y - Accelerameter high-frequency vibration amplitude phase behavior measuring device - Google Patents
Accelerameter high-frequency vibration amplitude phase behavior measuring device Download PDFInfo
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- CN200986562Y CN200986562Y CN 200620123695 CN200620123695U CN200986562Y CN 200986562 Y CN200986562 Y CN 200986562Y CN 200620123695 CN200620123695 CN 200620123695 CN 200620123695 U CN200620123695 U CN 200620123695U CN 200986562 Y CN200986562 Y CN 200986562Y
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Abstract
The utility model discloses an amplitude and phase characteristic measuring device for high-frequency vibration of laser heterodyne measurement accelerometers, which mainly includes a heterodyne laser interferometer, a piezoelectric high-frequency vibration station exciting system and a data collecting and processing system. The heterodyne laser interferometer is focused through a combined lens, and can be used for measurement only with scattering-reflected lights, which reduces the error of planar reflectors. The high-frequency vibration station is made from piling of piezoquartz, which includes at least 4 piezoquartz pieces, a vibration isolation pellicle, a station seat and a weight block. The vibration isolation pellicle is arranged on the station seat, the piezoquartz pieces are overlaid on the vibration isolation pellicle in turn, anodes of adjacent piezoquartz pieces are interconnected, and so are cathodes of the adjacent pieces. The utility model can realize accurate measurement of frequency response of amplitude and phase displacement of complex sensitivity of accelerometers within the frequency range of 2-50 kHz and the displacement range of 1-500 nm.
Description
Technical field
The utility model relates to a kind of laser technology and metrology and measurement field, relates in particular to a kind of displacement, speed, the device of acceleration sinusoidal vibration value that can be by the output of focusing heterodyne laser interferometer, data acquisition processing system reproduction piezoelectricity dither; Be mainly used in amplitude and the frequency response of phase shift and the accurate measurement of the linearity of the multiple sensitivity of accelerometer in the vibration measurement field.
Background technology
Existing accelerometer magnitude-phase characteristics measurement mechanism mainly is made up of piezoelectric vibration generator system excitation system, laser interferometer, data acquisition processing system.Traditional high-frequency vibrating table all is an electromagnetic type.And the electromagnetic type shaking table is difficult to reach the above vibration frequency of 20kHz, and its transverse vibration is also bigger; Traditional in addition homodyne laser interferometer and homodyne quadrature laser interferometer all need measured installation one plane mirror on the light path, could obtain enough measuring-signals, but since meeting such as the quality of plane mirror, thickness, installation resonance measurement brings bigger error to dither, thereby influenced the degree of accuracy of dither measurement greatly.
The utility model content
Problem at the prior art existence, the purpose of this utility model is to provide a kind of can accurately measure accelerometer dither magnitude-phase characteristics measurement mechanism, this device can make vibration frequency reach more than the 50kHz, and accurately measures the amplitude of the multiple sensitivity of accelerometer and the frequency response and the linearity of phase shift in the displacement range of the frequency range of (2～50) kHz and (1～500) nm.
For achieving the above object, a kind of accelerometer dither magnitude-phase characteristics measurement mechanism of providing of the utility model comprises: heterodyne system laser interferometer, piezoelectric type high-frequency vibrating table excitation system, data acquisition processing system and vibration measuring system; Described excitation system comprises signal source, power amplifier, variable inductance case, variable capacitance case, described data acquisition processing system comprises data collecting card, related software and computing machine, described vibration measuring system comprises adapter, signal source produces high-frequency signal, after power amplifier amplifies, export the sinusoidal vibration signal through the impedance matching rear drive piezoelectricity high-frequency vibrating table of variable inductance case and variable capacitance case again; Data collecting card is to the vibration signal of the detected vibration table surface of heterodyne laser interferometer, and be installed in that the output signal after adapter amplifies of tested sensor on the vibration table surface is gathered, the A/D conversion, finally finish functions such as mathematical computations, signal analysis and demonstration by application software; Wherein, described piezoelectric type high-frequency vibrating table comprises a moving-mass piece, at least 4 piezoelectric crystal plate, vibration isolation film and stage body pedestal, the vibration isolation film is arranged on the stage body pedestal, piezoelectric crystal plate is superimposed upon on the vibration isolation film successively, adjacent crystal sheet abutted surface is anodal to join with positive pole, and negative pole and negative pole join; Positive pole links to each other with the center of the input port of driving voltage, and negative pole links to each other with the outer end of the input port of driving voltage; The moving-mass piece be seated in that described piezoelectric crystal plate stacks above, dress sensor in this moving-mass piece below or inside are provided with, described tested sensor is installed in this moving-mass piece upper surface.
Further, described heterodyne system laser interferometer comprises frequency stabilized laser, 1/2 wave plate, the 1st polarization spectroscope, the 2nd polarization spectroscope, the 1st catoptron, the 2nd catoptron, acousto-optic driver, acousto-optic modulator, quarter wave plate, the 1st lens and the 2nd lens; Acousto-optic driver drives acousto-optic modulator; The light beam that frequency stabilized laser sends is behind 1/2 wave plate, be separated into measuring beam and reference beam by the 1st polarization spectroscope, reference beam carries out the acoustooptic modulation shift frequency by acousto-optic modulator after through the 1st catoptron, again directive the 2nd polarization spectroscope after the 2nd mirror reflects; Measuring beam passes through quarter wave plate, the 1st lens and the 2nd lens after through the 2nd polarization spectro mirror reflection successively, be radiated on the moving-mass piece, the former road of reflected light is returned behind the 2nd lens and the 1st lens and quarter wave plate, see through the 1st polarization spectroscope, and behind described the 2nd polarization spectroscope, interfere with described reference beam, finish the reception and the detection of interference signal by photelectric receiver; Interference signal carries out mixing with local oscillation signal at frequency mixer after photo amplifier amplifies, again by after the low-pass filter filtering, by the data collecting card collection.
Further, described piezoelectric crystal plate is quartz or novel piezoelectric materials such as barium titanate and lead zirconate titanate series piezoelectric ceramics.
The utility model adopts piezoelectric crystal plate to produce dither by shaking table, not only simple in structure, with low cost, and vibration frequency is reached more than the 50kHz, and in the displacement range of the frequency range of (2～50) kHz and (1～500) nm, accurately measure amplitude and the phase shift frequency response that accelerometer is answered sensitivity.Simultaneously, the combination of employing condenser lens, light can be focused on the surface of testee well, can only come the state of reflection measurement light before having changed, avoid the installation of plane mirror accurately to measure the considerable influence of bringing for dither with plane mirror.
Description of drawings
Fig. 1 is the utility model structural representation.
Fig. 2 is the structural representation of focusing heterodyne laser interferometer.
Fig. 3 is the structural representation of high frequency piezoelectric vibration generator system.
Embodiment
As shown in Figure 1, the utility model comprises: laser interferometer 1, shaking table 2, signal source 3, power amplifier 4, variable inductance case 5, variable capacitance case the 6, the 1st adapter 9 and data collecting card 7.Signal source 3 produces high-frequency signal, after power amplifier 4 amplifies, after the impedance of variable inductance case 5 and variable capacitance case 6 coupling piezoelectric type shaking tables, drives shaking table 2 again.The vibration signal that this shaking table 2 produces is imported data collecting card 7 again by tested sensor 11 outputs after the 1st adapter 9 amplifies.Simultaneously, laser interferometer 1 is transferred to data collecting card 7 with the vibration signal of detected shaking table 2 table tops; Also can by interior dress sensor 12 (following) and the 2nd adapter 10, enter in the lump the data collecting card 7, adopt relative method to handle without laser interferometer with the signal that comes out from the 1st adapter 9.
Wherein, as shown in Figure 3, shaking table 2 comprises a moving-mass piece 47,4 (or more than) quartz piezoelectric crystal sheet 41,42,43,44 and stage body pedestal 45, the one installation screw that is used to install tested sensor is arranged on the moving-mass piece 47, mass 47 belows (or inner) also have dress sensor 12 in, and output of dress sensor 12 links to each other with the output port 48 of shaking table through a lead in this, links to each other with data collecting card 7 by the 2nd adapter 10; Crystal wafer 41,42,43,44 are superimposed upon on the stage body pedestal 45 successively, adjacent two crystal wafer abutted surfaces are anodal to join with positive pole, negative pole and negative pole join, it is the positive pole of the continuous crystal wafer 41 in lower end of 47 of moving-mass, crystal wafer 41 negative poles link to each other with the negative pole of crystal wafer 42, the negative pole of crystal wafer 43 links to each other with the negative pole of crystal wafer 44, with lead the positive pole of crystal wafer 42 is linked to each other with the positive pole of crystal wafer 43 again and be connected to the center of the input port 49 of driving voltage, anode as input stimulus voltage, the negative pole of all crystals sheet links to each other with the outer end of the input port 49 of driving voltage with lead more simultaneously, as the negative terminal of input stimulus voltage.The positive pole of crystal wafer 44 links to each other with vibration isolation film 45 again, then vibration isolation film 45 lower ends is linked to each other with shaking table pedestal 46, and the quality requirements of pedestal 46 is at least more than 2000 times of moving-mass piece 47, therefore should select for use rigidity big, the material that density is high.All like this piezoelectric crystal plates 41,42,43,44 are structurally connected, and but are in parallel on electric, and moving-mass piece 47 is arranged on piezoelectric crystal plate topmost, and sensor 11 to be measured is installed on this moving-mass piece 47.In addition, crystal wafer also can be provided with more than 5, and its connected mode is same as described above.Wherein, piezoelectric crystal plate 41,42,43,44 also can be selected other piezoelectric, for example other new material such as barium titanate and lead zirconate titanate series piezoelectric ceramics etc.
As shown in Figure 2, laser interferometer 1 comprises frequency stabilized laser 21,1/2 wave plate 22, the 1st polarization spectroscope 26, the 2nd polarization spectroscope 27, the 1st catoptron 23, the 2nd catoptron 25, acousto-optic driver 36, acousto-optic modulator 24, quarter wave plate 28, the 1st lens 29 and the 2nd lens 30,36 pairs of acousto-optic modulators 24 of acousto-optic driver drive, the light beam that frequency stabilized laser 21 sends is behind 1/2 wave plate 22, can regulate the luminous energy of two polarization states by 1/2 wave plate 22, be separated into measuring beam and reference beam by the 1st polarization spectroscope 26, reference beam carries out acoustooptic modulation shift frequency (40MHz or 70MHz) through the 1st catoptron 23 backs by acousto-optic modulator 24, directive the 2nd polarization spectroscope 27 after the reflection of the 2nd catoptron 25 again, after 27 reflections of the 2nd polarization spectroscope, directive photelectric receiver 32, measuring beam passes through quarter wave plate 28 after through the 1st polarization spectroscope 26 successively, the 1st lens 29 and the 2nd lens 30, after being radiated at shaking table 2 table tops behind the laser focusing, table top only pastes a microbead glass film or directly utilizes the diffuse reflecting power of body surface, former road is returned after diffuse reflection, promptly behind the 2nd lens 30 and the 1st lens 29 and quarter wave plate, see through the 1st polarization spectroscope 26 again, the 2nd polarization spectroscope 27 backs interfere with reference beam, finish the reception and the detection of interference signal by photelectric receiver 32, and after photo amplifier 33 amplifies and as local oscillation signal (sinusoidal signal of about 40MHz or 70MHz), carry out mixing at frequency mixer 32 with reference to signal, by sending into after low-pass filter 35 filtering, handle by the computing machine 8 that process software is installed at last again according in the capture card 7.
Claims (3)
1, a kind of accelerometer dither magnitude-phase characteristics measurement mechanism comprises: heterodyne system laser interferometer, piezoelectric type high-frequency vibrating table excitation system, data acquisition processing system and vibration measuring system; Described excitation system comprises signal source, power amplifier, variable inductance case, variable capacitance case, described data acquisition processing system comprises data collecting card, related software and computing machine, described vibration measuring system comprises sensor and adapter, signal source produces high-frequency signal, after power amplifier amplifies, export the sinusoidal vibration signal through the impedance matching rear drive piezoelectricity high-frequency vibrating table of variable inductance case and variable capacitance case again; Data collecting card is to the vibration signal of the detected vibration table surface of heterodyne laser interferometer, and be installed in that the output signal after adapter amplifies of tested sensor on the vibration table surface is gathered, the A/D conversion, finally finish mathematical computations, signal analysis and Presentation Function by application software; It is characterized in that, described piezoelectric type high-frequency vibrating table comprises a moving-mass piece, at least 4 piezoelectric crystal plate, vibration isolation film and stage body pedestal, the vibration isolation film is arranged on the stage body pedestal, piezoelectric crystal plate is superimposed upon on the vibration isolation film successively, adjacent crystal sheet abutted surface is anodal to join with positive pole, and negative pole and negative pole join; Positive pole links to each other with the center of the input port of driving voltage, and negative pole links to each other with the outer end of the input port of driving voltage; The moving-mass piece be seated in that described piezoelectric crystal plate stacks above, dress sensor in this moving-mass piece below or inside are provided with, described tested sensor is installed in this moving-mass piece upper surface.
2, a kind of accelerometer dither magnitude-phase characteristics measurement mechanism according to claim 1, it is characterized in that described heterodyne system laser interferometer comprises frequency stabilized laser, 1/2 wave plate, the 1st polarization spectroscope, the 2nd polarization spectroscope, the 1st catoptron, the 2nd catoptron, acousto-optic driver, acousto-optic modulator, quarter wave plate, the 1st lens and the 2nd lens; Acousto-optic driver drives acousto-optic modulator; The light beam that frequency stabilized laser sends is behind 1/2 wave plate, be separated into measuring beam and reference beam by the 1st polarization spectroscope, reference beam carries out the acoustooptic modulation shift frequency by acousto-optic modulator after through the 1st catoptron, again directive the 2nd polarization spectroscope after the 2nd mirror reflects; Measuring beam passes through quarter wave plate, the 1st lens and the 2nd lens after through the 2nd polarization spectro mirror reflection successively, be radiated on the moving-mass piece, the former road of reflected light is returned behind the 2nd lens and the 1st lens and quarter wave plate, see through the 1st polarization spectroscope, and behind described the 2nd polarization spectroscope, interfere with described reference beam, finish the reception and the detection of interference signal by photelectric receiver; Interference signal carries out mixing with local oscillation signal at frequency mixer after photo amplifier amplifies, again by after the low-pass filter filtering, by the data collecting card collection.
3, a kind of accelerometer dither magnitude-phase characteristics measurement mechanism according to claim 1 is characterized in that, described piezoelectric crystal plate is quartz or barium titanate and lead zirconate titanate series piezoelectric material.
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| CN 200620123695 CN200986562Y (en) | 2006-07-14 | 2006-07-14 | Accelerameter high-frequency vibration amplitude phase behavior measuring device |
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| CN 200620123695 CN200986562Y (en) | 2006-07-14 | 2006-07-14 | Accelerameter high-frequency vibration amplitude phase behavior measuring device |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102620809A (en) * | 2012-03-26 | 2012-08-01 | 清华大学 | Optical measuring method for in-plane vibration of micro-electromechanical structure |
| CN101419243B (en) * | 2008-11-28 | 2012-11-28 | 中国地震局工程力学研究所 | Isotropy equilibrium acceleration sensor |
| CN102890165A (en) * | 2012-10-19 | 2013-01-23 | 华锐风电科技(集团)股份有限公司 | Method and device for detecting fan acceleration sensor |
| CN103063878A (en) * | 2011-10-18 | 2013-04-24 | 中联重科股份有限公司 | Device, system and method for verifying dynamic characteristics of speed or acceleration sensor |
| WO2013056427A1 (en) * | 2011-10-18 | 2013-04-25 | 中联重科股份有限公司 | Check device, system and method for dynamic properties of speed or acceleration sensor |
| CN103486956A (en) * | 2013-10-10 | 2014-01-01 | 中国计量科学研究院 | Device and method for achieving vertical movement in high-precision measurement |
| CN106198729A (en) * | 2016-07-08 | 2016-12-07 | 南京大学 | A kind of sound Lamb wave self focusing light interferential scanning detection system |
| CN106546415A (en) * | 2016-11-09 | 2017-03-29 | 石长海 | A kind of quartz wafer（Block）The instrument of non-contact detection positive-negative polarity |
| CN107064559A (en) * | 2017-02-23 | 2017-08-18 | 西安航天精密机电研究所 | A kind of SINS accelerometer frequency characteristic test methods based on angle oscillating motion |
| CN107202835A (en) * | 2017-07-06 | 2017-09-26 | 中山大学 | A kind of glass curtain wall adhesive structure damage monitoring system and monitoring method |
| CN107314792A (en) * | 2017-07-06 | 2017-11-03 | 中山大学 | A kind of glass curtain wall safety monitoring system and monitoring method |
| CN107560562A (en) * | 2016-06-30 | 2018-01-09 | 上海微电子装备（集团）股份有限公司 | A kind of interference formula Topography Measuring System and method |
| CN109001491A (en) * | 2018-07-26 | 2018-12-14 | 北京卫星环境工程研究所 | Micro-vibration magnitude acceleration sensor calibration device |
| CN111198282A (en) * | 2018-11-16 | 2020-05-26 | 西门子工业软件公司 | Method and system for calibrating an integrated volumetric acceleration sensor of a loudspeaker |
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2006
- 2006-07-14 CN CN 200620123695 patent/CN200986562Y/en not_active Expired - Fee Related
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101419243B (en) * | 2008-11-28 | 2012-11-28 | 中国地震局工程力学研究所 | Isotropy equilibrium acceleration sensor |
| CN103063878A (en) * | 2011-10-18 | 2013-04-24 | 中联重科股份有限公司 | Device, system and method for verifying dynamic characteristics of speed or acceleration sensor |
| WO2013056427A1 (en) * | 2011-10-18 | 2013-04-25 | 中联重科股份有限公司 | Check device, system and method for dynamic properties of speed or acceleration sensor |
| CN103063878B (en) * | 2011-10-18 | 2015-11-18 | 中联重科股份有限公司 | Device, system and method for verifying dynamic characteristics of speed or acceleration sensor |
| CN102620809A (en) * | 2012-03-26 | 2012-08-01 | 清华大学 | Optical measuring method for in-plane vibration of micro-electromechanical structure |
| CN102620809B (en) * | 2012-03-26 | 2014-06-18 | 清华大学 | Optical measuring method for in-plane vibration of micro-electromechanical structure |
| CN102890165A (en) * | 2012-10-19 | 2013-01-23 | 华锐风电科技(集团)股份有限公司 | Method and device for detecting fan acceleration sensor |
| CN102890165B (en) * | 2012-10-19 | 2014-07-09 | 华锐风电科技(集团)股份有限公司 | Method and device for detecting fan acceleration sensor |
| CN103486956A (en) * | 2013-10-10 | 2014-01-01 | 中国计量科学研究院 | Device and method for achieving vertical movement in high-precision measurement |
| CN103486956B (en) * | 2013-10-10 | 2015-12-23 | 中国计量科学研究院 | A kind of device and method realizing the vertical moving direction of high-acruracy survey |
| CN107560562A (en) * | 2016-06-30 | 2018-01-09 | 上海微电子装备（集团）股份有限公司 | A kind of interference formula Topography Measuring System and method |
| CN106198729A (en) * | 2016-07-08 | 2016-12-07 | 南京大学 | A kind of sound Lamb wave self focusing light interferential scanning detection system |
| CN106198729B (en) * | 2016-07-08 | 2019-04-19 | 南京大学 | A kind of sound Lamb wave self focusing light interferential scanning detection system |
| CN106546415A (en) * | 2016-11-09 | 2017-03-29 | 石长海 | A kind of quartz wafer（Block）The instrument of non-contact detection positive-negative polarity |
| CN107064559A (en) * | 2017-02-23 | 2017-08-18 | 西安航天精密机电研究所 | A kind of SINS accelerometer frequency characteristic test methods based on angle oscillating motion |
| CN107202835A (en) * | 2017-07-06 | 2017-09-26 | 中山大学 | A kind of glass curtain wall adhesive structure damage monitoring system and monitoring method |
| CN107314792A (en) * | 2017-07-06 | 2017-11-03 | 中山大学 | A kind of glass curtain wall safety monitoring system and monitoring method |
| CN109001491A (en) * | 2018-07-26 | 2018-12-14 | 北京卫星环境工程研究所 | Micro-vibration magnitude acceleration sensor calibration device |
| CN111198282A (en) * | 2018-11-16 | 2020-05-26 | 西门子工业软件公司 | Method and system for calibrating an integrated volumetric acceleration sensor of a loudspeaker |
| CN111198282B (en) * | 2018-11-16 | 2022-05-27 | 西门子工业软件公司 | Method and system for calibrating an integrated volumetric acceleration sensor of a loudspeaker |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071205 Termination date: 20100714 |