CN107024432A - A kind of simple optoacoustic detector for being used to detect highly corrosive gas - Google Patents
A kind of simple optoacoustic detector for being used to detect highly corrosive gas Download PDFInfo
- Publication number
- CN107024432A CN107024432A CN201710190380.3A CN201710190380A CN107024432A CN 107024432 A CN107024432 A CN 107024432A CN 201710190380 A CN201710190380 A CN 201710190380A CN 107024432 A CN107024432 A CN 107024432A
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- cantilever
- detector
- infrared laser
- laser beam
- photoacoustic cell
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- 239000000523 sample Substances 0.000 claims abstract description 26
- 239000010445 mica Substances 0.000 claims abstract description 19
- 229910052618 mica group Inorganic materials 0.000 claims abstract description 19
- 238000001514 detection method Methods 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 6
- 230000011514 reflex Effects 0.000 claims abstract description 6
- 230000011664 signaling Effects 0.000 claims abstract description 6
- 230000005619 thermoelectricity Effects 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 24
- 230000003287 optical effect Effects 0.000 description 6
- 238000004867 photoacoustic spectroscopy Methods 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000002463 transducing effect Effects 0.000 description 3
- 206010021703 Indifference Diseases 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 238000000411 transmission spectrum Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000010895 photoacoustic effect Methods 0.000 description 1
- 238000001834 photoacoustic spectrum Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
Abstract
The present invention relates to optoacoustic detection field, a kind of simple optoacoustic detector for being used to detect highly corrosive gas, including infrared laser, infrared laser beam, photoacoustic cell, energy meter, cantilever, probe laser beam, probe laser device, photodiode detector, differential amplifier circuit, D/A converting circuit, computer, the photodiode detector is sequentially connected the differential amplifier circuit, the D/A converting circuit, the infrared laser, the cantilever is using mica material and in the photoacoustic cell, the photodiode detector is apart from about ten centimetres of cantilever surfaces, the infrared laser beam can enter the photoacoustic cell, the energy meter is located on rear side of the photoacoustic cell, the energy of each laser pulse can be measured and photoacoustic signal is normalized, the probe laser beam can direct irradiation be in the cantilever surfaces and reflexes to the photodiode detector, the other adjustment of signaling zone can be realized by tilting the photodiode detector.
Description
Technical field
The present invention relates to optoacoustic detection field, that particularly a kind of toxic and harmful gas suitable for industrial process is detected,
A kind of simple optoacoustic detector for being used to detect highly corrosive gas of highly corrosive gas can be detected.
Background technology
Optoacoustic spectroscopy (PAS) is a kind of spectral technique based on optoacoustic (PA) effect, is used as a weight of spectroscopy
Branch is wanted, what the technology was detected unlike transmission spectra is not the optical signal after light-matter interaction but sound is believed
Number, so as to overcome transmission spectra method many difficulties present in sample analysis.Optoacoustic spectroscopy detection system it is general by light source,
Photoacoustic cell, acoustic-signal detector are constituted, the transducing unit of the sound pressure signal wherein included in acoustic-signal detector, to that can detect
The sensitivity of gas and the performance of total system play vital effect.
The sound pressure signal transducing unit detected currently used for optoacoustic spectroscopy mainly has following several：Condenser type, quartz tuning-fork
Formula, beam type.With the modulated monochromatic light exposure of a beam intensity to being sealed on the sample in photoacoustic cell, sample absorbs light
Energy, and the de excitation in the way of discharging heat energy, the heat energy of release make sample and surrounding medium be produced periodically by the modulating frequency of light
Heating, so as to cause medium to produce periodic pressure fluctuation, this pressure oscillation can use sensitive microphone or piezoelectric ceramics to pass
Sound device is detected, and obtains photoacoustic signal by amplification, here it is optoacoustic effect；If incident monochromatic wavelength is variable, it can measure
The photoacoustic signal collection of illustrative plates become with wavelength, here it is optoacoustic spectroscopy.For gaseous sample, produced after the energy of molecule absorption exciting light
Heat amount, thus produces acoustic pressure, and the gas detection technology based on optoacoustic spectroscopy can be directed to the monitoring of various toxic and harmful gas,
Development in an all-round way to gas detection technology has important practical significance, but the acoustic pressure letter used in the application of existing photoacoustic spectrum
Number transducing unit does not possess some specific chemical resistances, immediately can not after directly being contacted with corrosive gas in actual applications
Use.
The content of the invention
In order to solve the above problems, the present invention uses mica cantilever, has higher in HCl the or HBr gases of high concentration
Stability, disclosure satisfy that high chemical resistance be easily worked again to tens microns of yardstick, surface have enough albedo and
Good optical quality so that less hot spot is produced in photodiode detector.Compared to quartz tuning-fork, cantilever beam is micro-
Sound utensil has higher sensitivity and dynamic range；Compared to traditional microphone, cantilever beam microphone can realize that high sensitivity is visited
Survey, while the mode of full optical modulator is especially suitable for the application of strong electromagnetic interference environment, realize photoacoustic spectroscopy gas detecting system
It is integrated.
The technical solution adopted in the present invention is：
It is described a kind of to be used to detecting the simple optoacoustic detector of highly corrosive gas and mainly include infrared laser, infrared swash
Light beam, photoacoustic cell, energy meter, cantilever, probe laser beam, probe laser device, photodiode detector, differential amplifier circuit,
D/A converting circuit, computer, the cantilever can be vibrated, and the photodiode detector is made up of four silicon diodes
Monolithic quadrature photodiode unit is constituted, and the photodiode of two neighbours can detect the position of the probe laser beam,
The photodiode detector is sequentially connected the differential amplifier circuit, the D/A converting circuit, the infrared laser,
The computer is connected between the D/A converting circuit and the infrared laser, and the energy meter is located at the photoacoustic cell
Rear side, the cantilever is using mica material and in the photoacoustic cell, and the photodiode detector is apart from the cantilever
About ten centimetres of surface, the infrared laser beam that the infrared laser is sent can enter the photoacoustic cell, the photoacoustic cell
Interior to have under test gas, the energy is calculated as thermoelectricity inductor, can measure the energy of each laser pulse, and for optoacoustic
Signal is normalized, and the probe laser beam can direct irradiation be in the cantilever surfaces and reflexes to the photodiode
Detector, the other accurate adjustment of signaling zone can be realized by tilting the photodiode detector.
The need for the cantilever can adapt to micromechanics or fine techniques using mica material, can easily it dissociate to
The thin slice of yardstick is needed, laser has enough reflecting components on its surface；The infrared laser works as infrared laser tuning extremely
Absorption Line, laser pulse produces instantaneous pressure and risen, and is detected by the deviation of the mica cantilever in the photoacoustic cell；
The energy is calculated as thermoelectricity inductor, can measure the energy of each laser pulse, and for photoacoustic signal to be normalized.
Photo-acoustic excitation, the infrared laser beam that the infrared laser is sent enters the photoacoustic cell, when being filled with pond
After under test gas, gas absorbs laser energy, produces pressure wave and passes to the mica cantilever, the size of optoacoustic wave pressure and institute
State that gas in photoacoustic cell is directly related to the degree of absorption of laser energy, light absorbs are stronger, then the photoacoustce signal intensity at this is got over
It is high.
Optical coherence detects that pressure wave make it that the continuous probe laser beam is direct outside the mica cantilever vibration, chamber
It is irradiated in the mica cantilever surfaces and reflexes to the photodiode detector, by measures the change between photo-signal
Change to reflect the vibration of the mica cantilever.
The electric signal that the photodiode detector is produced inputs the number after differential amplifier circuit amplification
Analog conversion circuit, finally by computer disposal, the situation of the mica cantilever vibration can be drawn with this, so as to judge described
Gas type in photoacoustic cell.
When there is no acoustic pressure, by the position adjustment of probe laser hot spot to the output signal one for causing two photodiodes
Indifference is caused, the other accurate adjustment of signaling zone can be realized by tilting the photodiode detector.
The beneficial effects of the invention are as follows：
The present invention uses mica cantilever, it is adaptable to the corrosive gas such as HCl or HBr；Full optical detection, safely and effectively, and is fitted
The application of inflammable and explosive environment is closed, simple structure, cost is low.
Brief description of the drawings
Further illustrated with reference to the figure of the present invention：
Fig. 1 is schematic structural view of the invention.
In figure, 1. infrared lasers, 2. infrared laser beams, 3. photoacoustic cells, 4. energy meters, 5. cantilevers, 6. probe laser beams,
7. probe laser device, 8. photodiode detectors, 9. differential amplifier circuits, 10. D/A converting circuits, 11. computers.
Embodiment
If Fig. 1 is schematic structural view of the invention, a kind of simple optoacoustic detector for being used to detect highly corrosive gas
Mainly include infrared laser 1, infrared laser beam 2, photoacoustic cell 3, energy meter 4, cantilever 5, probe laser beam 6, probe laser device
7th, photodiode detector 8, differential amplifier circuit 9, D/A converting circuit 10, computer 11, the cantilever 5 can vibrate,
The monolithic quadrature photodiode unit that the photodiode detector 8 is made up of four silicon diodes is constituted, two neighbours
Photodiode can detect the position of the probe laser beam 6, the photodiode detector 8 is sequentially connected the difference
Divide amplifying circuit 10, the D/A converting circuit 11, the infrared laser 1, the computer 12 is connected to the digital-to-analogue and turned
Change between circuit 10 and the infrared laser 1, the energy meter 4 is located at the rear side of photoacoustic cell 3, the cantilever 5 uses cloud
Parent material is simultaneously located in the photoacoustic cell 3, and the photodiode detector 8 is described apart from about ten centimetres of the surface of cantilever 5
The infrared laser beam 2 that infrared laser 1 is sent, which can enter, has gas to be measured in the photoacoustic cell 3, the photoacoustic cell 3
Body, the energy meter 4 is thermoelectricity inductor, can measure the energy of each laser pulse, and for returning to photoacoustic signal
One changes, and the probe laser beam 6 can direct irradiation be in the surface of cantilever 5 and reflexes to the photodiode detector 8,
The other accurate adjustment of signaling zone can be realized by tilting the photodiode detector 8.
The need for the cantilever 5 can adapt to micromechanics or fine techniques using mica material, can easily it dissociate
To the thin slice of yardstick is needed, laser has enough reflecting components on its surface；The infrared laser 1 works as infrared laser tuning
To Absorption Line, laser pulse produces instantaneous pressure and risen, by the deviation of the mica cantilever 5 in the photoacoustic cell 3 come
Detection；The energy meter 4 is thermoelectricity inductor, can measure the energy of each laser pulse, and for being carried out to photoacoustic signal
Normalization.
Photo-acoustic excitation, the infrared laser beam 2 that the infrared laser 1 is sent enters the photoacoustic cell 3, when being filled in pond
Enter after under test gas, gas absorbs laser energy, produce pressure wave and pass to the mica cantilever 5, the size of optoacoustic wave pressure
Directly related to the degree of absorption of laser energy with gas in the photoacoustic cell 3, light absorbs are stronger, then the photoacoustic signal at this is strong
Degree is higher.
Optical coherence detects that pressure wave causes the mica cantilever 5 to vibrate, and the continuous probe laser beam 6 is straight outside chamber
Connect and be irradiated in the surface of mica cantilever 5 and reflex to the photodiode detector 8, by measuring between photo-signal
Change reflect the vibration of the mica cantilever 5.
The electric signal that the photodiode detector 8 is produced inputs described after the differential amplifier circuit 10 amplification
D/A converting circuit 11, finally by computer disposal, can draw the situation that the mica cantilever 5 vibrates, so as to judge with this
The gas type gone out in the photoacoustic cell 3.
When there is no acoustic pressure, by the position adjustment of probe laser hot spot to the output signal one for causing two photodiodes
Indifference is caused, the other accurate adjustment of signaling zone can be realized by tilting the photodiode detector 8.
Claims (4)
1. a kind of simple optoacoustic detector for being used to detect highly corrosive gas, mainly including infrared laser (1), infrared laser
Beam (2), photoacoustic cell (3), energy meter (4), cantilever (5), probe laser beam (6), probe laser device (7), photodiode detection
Device (8), differential amplifier circuit (9), D/A converting circuit (10), computer (11), the cantilever (5) can be vibrated, the light
The monolithic quadrature photodiode unit that electric diode detector (8) is made up of four silicon diodes is constituted, the light of two neighbours
Electric diode can detect the position of the probe laser beam (6), and the photodiode detector (8) is sequentially connected the difference
Divide amplifying circuit (10), the D/A converting circuit (11), the infrared laser (1), the computer (12) is connected to institute
State between D/A converting circuit (10) and the infrared laser (1), the energy meter (4) is located on rear side of the photoacoustic cell (3),
It is characterized in that：The cantilever (5) is using mica material and in the photoacoustic cell (3), the photodiode detector (8)
Apart from about ten centimetres of the cantilever (5) surface.
2. a kind of according to claim 1 be used to detect the simple optoacoustic detector of highly corrosive gas, it is characterized in that：It is described
The infrared laser beam (2) that infrared laser (1) is sent can enter to be had in the photoacoustic cell (3), the photoacoustic cell (3)
Under test gas.
3. a kind of according to claim 1 be used to detect the simple optoacoustic detector of highly corrosive gas, it is characterized in that：It is described
Energy meter (4) is thermoelectricity inductor, can measure the energy of each laser pulse, and for photoacoustic signal to be normalized.
4. a kind of according to claim 1 be used to detect the simple optoacoustic detector of highly corrosive gas, it is characterized in that：It is described
Probe laser beam (6) can direct irradiation be in the cantilever (5) surface and reflexes to the photodiode detector (8), leads to
Cross and tilt the photodiode detector (8) the other accurate adjustment of signaling zone can be realized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710190380.3A CN107024432A (en) | 2017-03-15 | 2017-03-15 | A kind of simple optoacoustic detector for being used to detect highly corrosive gas |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710190380.3A CN107024432A (en) | 2017-03-15 | 2017-03-15 | A kind of simple optoacoustic detector for being used to detect highly corrosive gas |
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| CN107024432A true CN107024432A (en) | 2017-08-08 |
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| CN201710190380.3A Withdrawn CN107024432A (en) | 2017-03-15 | 2017-03-15 | A kind of simple optoacoustic detector for being used to detect highly corrosive gas |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109946234A (en) * | 2017-12-21 | 2019-06-28 | 英飞凌科技股份有限公司 | Utilize the device and method of optoacoustic effect |
| CN113447776A (en) * | 2021-06-25 | 2021-09-28 | 国网江苏省电力有限公司检修分公司 | SF6 decomposed component gas photoacoustic detection device and method |
| CN117629898A (en) * | 2024-01-25 | 2024-03-01 | 杭州泽天春来科技股份有限公司 | Signal processing method, system and readable medium of photoacoustic spectrometry gas analyzer |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013135611A2 (en) * | 2012-03-14 | 2013-09-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Apparatus and method for measuring a target gas |
| CN206638574U (en) * | 2017-03-15 | 2017-11-14 | 金华职业技术学院 | A kind of simple optoacoustic detector for being used to detect highly corrosive gas |
-
2017
- 2017-03-15 CN CN201710190380.3A patent/CN107024432A/en not_active Withdrawn
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013135611A2 (en) * | 2012-03-14 | 2013-09-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Apparatus and method for measuring a target gas |
| CN206638574U (en) * | 2017-03-15 | 2017-11-14 | 金华职业技术学院 | A kind of simple optoacoustic detector for being used to detect highly corrosive gas |
Non-Patent Citations (1)
| Title |
|---|
| J. RAKOVSKÝ, ET AL: "A simple photoacoustic detector for highly corrosive gases", REVIEW OF SCIENTIFIC INSTRUMENTS, pages 1 - 5 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109946234A (en) * | 2017-12-21 | 2019-06-28 | 英飞凌科技股份有限公司 | Utilize the device and method of optoacoustic effect |
| US10996201B2 (en) | 2017-12-21 | 2021-05-04 | Infineon Technologies Ag | Photoacoustic measurement systems and methods using the photoacoustic effect to measure emission intensities, gas concentrations, and distances |
| CN109946234B (en) * | 2017-12-21 | 2021-05-25 | 英飞凌科技股份有限公司 | Apparatus and method for using photoacoustic effect |
| CN113447776A (en) * | 2021-06-25 | 2021-09-28 | 国网江苏省电力有限公司检修分公司 | SF6 decomposed component gas photoacoustic detection device and method |
| CN113447776B (en) * | 2021-06-25 | 2023-01-31 | 国网江苏省电力有限公司检修分公司 | SF6 decomposition component gas photoacoustic detection device and method |
| CN117629898A (en) * | 2024-01-25 | 2024-03-01 | 杭州泽天春来科技股份有限公司 | Signal processing method, system and readable medium of photoacoustic spectrometry gas analyzer |
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Application publication date: 20170808 |
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