CN110346302A - The resonant gas sensor of diaphragm and detection system based on poly - Google Patents
The resonant gas sensor of diaphragm and detection system based on poly Download PDFInfo
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- CN110346302A CN110346302A CN201910657619.2A CN201910657619A CN110346302A CN 110346302 A CN110346302 A CN 110346302A CN 201910657619 A CN201910657619 A CN 201910657619A CN 110346302 A CN110346302 A CN 110346302A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
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Abstract
The invention belongs to Fibre Optical Sensors and trace gas detection technical field, the resonant gas sensor of diaphragm and detection system based on poly.The gas sensor uses the structure of F-P interferometer, and the F-P cavity of F-P interferometer is also the off-resonance photoacoustic cell of optoacoustic system.Parylene-C has lower Young's modulus and biggish fracture elongation, have the characteristics that coating property is strong and deposition uniformity is good by Parylene-C film prepared by the method for vacuum gas-phase aggregation deposition, therefore the feature that radius is big and thickness is thin can be had both using Parylene-C film prepared by the method for vacuum gas-phase aggregation deposition simultaneously.And the natural reonant frequency of F-P interferometer is directly proportional to the thickness of diaphragm, and square being inversely proportional for diaphragm radius, therefore the resonant frequency of the F-P interferometer can be down to tens hertz.The present invention provides a kind of new technological means for remote gas remote measurement highly sensitive in small space.
Description
Technical field
The invention belongs to Fibre Optical Sensors and trace gas detection technical field, are related to a kind of based on poly
The resonant gas sensor of diaphragm and detection system.
Background technique
Trace gas detection has a wide range of applications in atmospheric environment detection, industrial stokehold and life science
Demand.With the development of laser technology, spectral technique has become a kind of fast and selective strong with high sensitivity, response time
Etc. advantages gas detection method.Optoacoustic spectroscopy detection technique is that a kind of direct measurement of species because absorbing luminous energy generates thermal energy
Spectrum Calorimetric Techniques.In closed photoacoustic cell, gas molecule is excited to upper state, upper state due to absorbing the light of specific wavelength
Intermolecular mutual collision makes partially-excited molecule return to ground state by radiationless transition, and the luminous energy of absorption is changed into thermal energy, chamber
It is interior when gases are heated, they expand generate sound wave.By microphone, such as microphone, fiber optic acoustic sensors and quartz tuning-fork, by sound wave
Signal is converted to the measurement that electric signal realizes gas concentration.
Since the generation place of sound wave is in closed photoacoustic cell, and traditional photoacoustic cell will be with microphone and excitation light source
Match, therefore cause the volume of entire photo acoustic spectrometry system larger, and is difficult to realize remote telemetering.Document Cao Y,
Jin W,Ho H L,et al.Miniature fiber-tip photoacoustic spectrometer for trace
Gas detection [J] .Optics letters, 2013,38 (4): 434-436 devises the optoacoustic spectroscopy gas of miniaturization
Detection system, using the F-P cavity of optical fiber Fabry Perot (F-P) sonic sensor as the off-resonance photoacoustic cell of optoacoustic system,
It motivates light source and fiber F-P sonic sensor probe source to be coupled in an optical fiber optoacoustic, utilizes fiber optic acoustic sensors
Long transmission distance, can telemetering feature realize photoacoustic spectroscopy gas detecting system miniaturization and remote telemetering.Due to non-
The size with modulating frequency of photoacoustic signal be at approximate inverse relation in resonance light sound system, therefore in order to improve the big of photoacoustic signal
It is small, in the system motivate light source modulating frequency be set as 200Hz, but in the system F-P sonic sensor sensitive diaphragm
Resonant frequency be far longer than excitation light source modulating frequency, lead to the spirit of the fiber F-P sonic sensor at modulating frequency
Sensitivity is lower, and the gas detection sensitivity of the system differs several orders of magnitude with traditional photo acoustic spectrometry system.In conclusion setting
Count one kind can either remote telemetering, and with highly sensitive miniaturization optoacoustic spectroscopy gas sensor with important application
Value.
Summary of the invention
It is an object of the invention to propose a kind of resonant miniaturization gas sensing of the diaphragm based on poly
Device and detection system, it is intended to solve the remote telemetering of traditional photoacoustic spectroscopy gas detecting system and high sensitivity detection cannot be simultaneously
The problem of realization is optoacoustic spectroscopy detection technique in the bigger space of application extension of minimum gas remote domain of telemetry.
The technical scheme is that
A kind of resonant gas sensor of diaphragm based on poly, including it is single mode optical fiber 1, F-P cavity 2, poly-
One chloro-p-xylene (Parylene-C) film 3, venthole 4 and shell 5；The resonant gas sensor of the diaphragm is interfered using F-P
The structure of instrument, the F-P cavity 2 of F-P interferometer are also the off-resonance photoacoustic cell of optoacoustic system；Parylene-C has lower Young
Modulus and biggish fracture elongation have conformal by Parylene-C film 3 prepared by the method for vacuum gas-phase aggregation deposition
Property strong and good deposition uniformity feature, therefore can using the Parylene-C film 3 of the method for vacuum gas-phase aggregation deposition preparation
To have both the feature that radius is big and thickness is thin simultaneously.And the natural reonant frequency of F-P interferometer is directly proportional to the thickness of diaphragm, with
Diaphragm radius square is inversely proportional, therefore the resonant frequency of the F-P interferometer based on Parylene-C film 3 can be down to tens hertz
Hereby.By venthole 4, full of after F-P cavity 2, being total to for F-P interferometer is arranged in the modulating frequency of excitation laser 7 by under test gas
At vibration frequency, in resonance mode state, the photoacoustic signal of generation can achieve maximum for fiber gas sensor work at this time, real
The existing resonant embodiments of photoacoustic gas sensor systems of diaphragm.
A kind of gas detecting system based on this gas sensor.Detecting laser 6 and excitation laser 7 are passed through one
1 × 2 fiber coupler 8 is coupled in an optical fiber, wherein the absorption line of the central wavelength of a sublaser and under test gas
It is overlapped, the excitation laser 7 as photoacoustic signal；Detecting laser 6 of the other sublaser as fiber F-P interferometer.
When excitation laser 7 emit laser by circulator 9 from fiber coupling to gas sensor in 10 F-P cavity 2 when, due to light
Acoustic effect generates acoustic signals in F-P cavity 2, causes the periodic vibration of Parylene-C film 3.What detecting laser 6 issued
Laser reflects respectively in 1 end face of optical fiber and 3 surface of Parylene-C film, and two beam reflected lights interfere effect, interference light
It projects, is received by tunable bandpass filters 11 by photodetector 12, tunable band logical from the another port of circulator 9
The effect of filter 11 is to filter out the reflected light of excitation laser 7, prevents it from generating interference to detectable signal.Photodetector
The optical signal detected is converted to electric signal by 12, and realizes second harmonic demodulation by locking phase amplification module 13.Industrial personal computer 14
The sinusoidal signal that the sawtooth signal and locking phase amplification module 13 of generation generate realizes superposition by adder 15, drives light jointly
Acoustically-driven laser 7.Industrial personal computer 14 realizes the stabilization of operating point by adjusting the wavelength of F-P interferometer detecting laser 6.
The diameter of the sensitive diaphragm Parylene-C film 3 of the fiber F-P sonic sensor is 9mm, with a thickness of
800nm, the resonant frequency of gas sensor 10 is about 30Hz at this time.
The modulating frequency of the excitation laser 7 is set as 30Hz, and gas sensor 10 works in resonance state at this time,
To realize the resonant gas sensor of diaphragm.
The invention has the advantages that: the sensitive diaphragm using Parylene-C material as F-P interferometer passes through control
The coating film thickness of Parylene-C film processed, the resonant frequency of Parylene-C diaphragm and excitation light source modulation rate are matched,
Realize the resonant check amplification of photoacoustic signal.Using the F-P cavity of F-P interferometer as miniature non-resonant photoacoustic cell, biography is reduced
The volume of sensor, while the laser coupled that excitation laser and detecting laser are issued simplifies system into an optical fiber
Structure.The present invention provides a kind of new technological means for remote gas remote measurement highly sensitive in small space.
Detailed description of the invention
Fig. 1 is the resonant gas sensor schematic diagram of diaphragm based on Parylene-C.
Fig. 2 is the detecting system schematic diagram based on the resonant gas sensor of this diaphragm.
Fig. 3 is the frequency response spectrogram of the resonant gas sensor of diaphragm based on Parylene-C.
In figure: 1 single mode optical fiber；2F-P chamber；3Parylene-C film；4 ventholes；5 shells；6 detecting lasers；7 excitations swash
Light device；81 × 2 couplers；9 circulators；10 gas sensors；11 tunable bandpass filters；12 photodetectors；13 locking phases
Amplification module；14 industrial personal computers；15 adders.
Specific embodiment
Below in conjunction with attached drawing and technical solution, a specific embodiment of the invention is further illustrated.
The present invention provides the resonant gas sensors of the diaphragm based on Parylene-C as shown in Figure 1, including single mode
Optical fiber 1, F-P cavity 2, Parylene-C film 3, venthole 4 and shell 5.F-P cavity 2 is both the cavity of F-P interferometer, is also simultaneously
Miniature non-resonant photoacoustic cell, for generating photoacoustic signal.Under test gas is entered in F-P cavity 2 by venthole 4, due to gas
The photoacoustic signal that the optoacoustic effect of body generates causes the periodic vibration of Parylene-C film 3.The diameter of Parylene-C film 3 is
9mm, with a thickness of 800nm, the resonant frequency of the F-P interferometer is about 30Hz at this time.
What Fig. 2 was indicated is the detecting system schematic diagram based on the resonant gas sensor of this diaphragm.Fiber F-P interferometer
The laser that the excitation laser 7 of detecting laser 6 and photoacoustic signal issues passes through 1 × 2 fiber coupler 8 and optical fiber circulator
9 are incident in miniaturization gas sensor 10.The modulating frequency for adjusting excitation laser 7 is 30Hz, due to excitation laser 7
Central wavelength is overlapped with the absorption line of under test gas, therefore under test gas absorbs laser transition to high level, then passes through nothing
Heat is discharged during radiation transistion to ground state expands surrounding air, so that generating photoacoustic signal causes Parylene-C film
3 periodic vibration, the frequency of vibration are equal to the modulating frequency of excitation laser 7, and the amplitude of vibration and the concentration of gas are at just
Than relationship, the positive good berth of gas sensor 10 forms the resonant gas sensing system of diaphragm in resonance state at this time.Optical fiber F-
The laser that the detecting laser 6 of P interferometer issues occurs respectively in the end face of single mode optical fiber 1 and the surface of Parylene-C film 3
Reflection, two beam reflected lights form interference light, enter 12 turns of photodetector by circulator 9 and tunable bandpass filters 11
It is melted into electric signal, the effect of tunable bandpass filters 11 is to filter out the reflected light of excitation laser 7, is prevented to fiber F-P
Interferometer forms interference.Locking phase amplification module 13 carries out second harmonic demodulation to the signal that photodetector 12 receives, and realizes
The measurement of gas concentration.Detecting laser 6 is controlled by industrial personal computer 14, and the wavelength by adjusting detecting laser 6 realizes F-P
The stabilization of interferometer working point.The sawtooth signal that the sinusoidal signal and industrial personal computer 14 that locking phase amplification module 13 generates generate is passed through
Adder 15 is superimposed common driving excitation laser 7.
What attached drawing 3 indicated is the frequency response spectrogram of the resonant gas sensor of diaphragm based on Parylene-C3.
The effective diameter of Parylene-C film 3 is 9mm, and with a thickness of 800nm, the resonant frequency of the gas sensor is about 30Hz.
The above description is only a preferred embodiment of the present invention, is not intended to restrict the invention, for those skilled in the art
For member, the invention may be variously modified and varied.All within the spirits and principles of the present invention, it is made it is any modification,
Equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (3)
1. a kind of resonant gas sensor of diaphragm based on poly, which is characterized in that the diaphragm resonance
Formula gas sensor includes single mode optical fiber (1), F-P cavity (2), Parylene-C film (3), venthole (4) and shell (5)；The film
The resonant gas sensor of piece (10) uses the structure of F-P interferometer, and F-P cavity (2) is both the cavity of F-P interferometer, while
It is miniature non-resonant photoacoustic cell, for generating photoacoustic signal；F-P cavity (2) is equipped with venthole (4)；Parylene-C film (3)
Effective diameter be 9mm, with a thickness of 800nm, the first order resonance frequency of gas sensor is 30Hz at this time；Under test gas passes through logical
After stomata (4) is full of F-P cavity (2), by the setting of the modulating frequency of excitation laser (7) in 30Hz, gas sensor (10) at this time
In resonance mode state, the photoacoustic signal of generation reaches maximum for work, realizes the resonant embodiments of photoacoustic gas sensor systems of diaphragm.
2. a kind of gas detecting system based on the resonant gas sensor of diaphragm, which is characterized in that by detecting laser (6) and
Excitation laser (7) is coupled in an optical fiber by 1 × 2 fiber coupler (8), wherein in excitation laser (7)
Cardiac wave length is overlapped with the absorption line of under test gas；When the laser of excitation laser (7) transmitting passes through circulator (9) from optical fiber coupling
When closing in the F-P cavity (2) of gas sensor (10), due to optoacoustic effect, acoustic signals are generated in F-P cavity (2), are caused
The periodic vibration of Parylene-C film (3)；The laser that detecting laser (6) issues in single mode optical fiber (1) end face and
Parylene-C film (3) surface is reflected respectively, and two beam reflected lights interfere effect, and interference light is another from circulator (9)
Single port projects, and is received by tunable bandpass filters (11) by photodetector (12), tunable bandpass filters
(11) effect is to filter out the reflected light of excitation laser (7), prevents it from generating interference to detectable signal；Photodetector
(12) optical signal detected is converted into electric signal, and realizes second harmonic demodulation by locking phase amplification module (13)；Industry control
The sinusoidal signal that the sawtooth signal and locking phase amplification module (13) that machine (14) generates generate realizes superposition by adder (15),
Common driving optoacoustic excitation laser (7)；Industrial personal computer (14) realizes the steady of operating point by adjusting the wavelength of detecting laser (6)
It is fixed.
3. the gas detecting system according to claim 2 based on the resonant gas sensor of diaphragm, which is characterized in that institute
The modulating frequency for the excitation laser (7) stated is set as 30Hz, and gas sensor (10) work at this time is in resonance state, thus real
The existing resonant gas sensor of diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201910657619.2A CN110346302B (en) | 2019-07-20 | 2019-07-20 | Diaphragm resonance type gas sensor based on poly-chloro-p-xylene and detection system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910657619.2A CN110346302B (en) | 2019-07-20 | 2019-07-20 | Diaphragm resonance type gas sensor based on poly-chloro-p-xylene and detection system |
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Cited By (7)
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| CN111024211A (en) * | 2019-12-30 | 2020-04-17 | 西安石油大学 | High-sensitivity differential optical fiber F-P micro-vibration sensor and demodulation method thereof |
| CN111413281A (en) * | 2020-04-14 | 2020-07-14 | 大连理工大学 | High-sensitivity telemetering type gas sensor |
| CN111595432A (en) * | 2020-06-23 | 2020-08-28 | 徐孟然 | Vibration detection mechanism |
| CN112683806A (en) * | 2020-12-08 | 2021-04-20 | 大连理工大学 | Method for realizing sensitivity enhancement of photoacoustic system and polishing-free photoacoustic cell by using acetate fiber membrane |
| CN114235707A (en) * | 2021-12-17 | 2022-03-25 | 浙江树人学院（浙江树人大学） | Hydrogen detection device based on palladium absorption |
| WO2022121457A1 (en) * | 2020-12-08 | 2022-06-16 | 国网安徽省电力有限公司电力科学研究院 | Optical fiber photoacoustic sensing probe and sensing system resistant to ambient noise interference |
| CN115112570A (en) * | 2022-05-26 | 2022-09-27 | 国网新疆电力有限公司乌鲁木齐供电公司 | SF based on optical fiber transmission and differential resonance technology 6 Gas decomposition product detection system |
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| CN101344447A (en) * | 2007-07-13 | 2009-01-14 | 清华大学 | Micro-electromechanical pressure transducer |
| CN101998212A (en) * | 2009-08-12 | 2011-03-30 | 暳星泰克比株式会社 | Micro speaker for using linear vibration motor |
| CN109490217A (en) * | 2019-01-07 | 2019-03-19 | 大连理工大学 | A kind of multi-cavity superposing type off-resonance photoacoustic cell and gas detecting system |
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| US20050075612A1 (en) * | 2003-10-03 | 2005-04-07 | Baxter International Inc. | Parylene coated fluid flow regulator |
| CN101055243A (en) * | 2007-04-04 | 2007-10-17 | 南京旭飞光电有限公司 | Optical fiber gas sensing method and sensor |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111024211A (en) * | 2019-12-30 | 2020-04-17 | 西安石油大学 | High-sensitivity differential optical fiber F-P micro-vibration sensor and demodulation method thereof |
| CN111413281A (en) * | 2020-04-14 | 2020-07-14 | 大连理工大学 | High-sensitivity telemetering type gas sensor |
| CN111595432A (en) * | 2020-06-23 | 2020-08-28 | 徐孟然 | Vibration detection mechanism |
| CN112683806A (en) * | 2020-12-08 | 2021-04-20 | 大连理工大学 | Method for realizing sensitivity enhancement of photoacoustic system and polishing-free photoacoustic cell by using acetate fiber membrane |
| WO2022121457A1 (en) * | 2020-12-08 | 2022-06-16 | 国网安徽省电力有限公司电力科学研究院 | Optical fiber photoacoustic sensing probe and sensing system resistant to ambient noise interference |
| CN114235707A (en) * | 2021-12-17 | 2022-03-25 | 浙江树人学院（浙江树人大学） | Hydrogen detection device based on palladium absorption |
| CN114235707B (en) * | 2021-12-17 | 2024-05-03 | 浙江树人学院（浙江树人大学） | Hydrogen detection device based on palladium absorption |
| CN115112570A (en) * | 2022-05-26 | 2022-09-27 | 国网新疆电力有限公司乌鲁木齐供电公司 | SF based on optical fiber transmission and differential resonance technology 6 Gas decomposition product detection system |
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