CN110346302A - The resonant gas sensor of diaphragm and detection system based on poly - Google Patents
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Abstract
本发明属于光纤传感和微量气体检测技术领域，基于聚一氯对二甲苯的膜片共振式气体传感器及检测系统。该气体传感器采用F‑P干涉仪的结构，F‑P干涉仪的F‑P腔也是光声系统的非共振光声池。Parylene‑C具有较低的杨氏模量和较大的断裂延伸率，通过真空气相聚合沉积的方法制备的Parylene‑C膜具有敷形性强和沉积均匀性好的特点，因此采用真空气相聚合沉积的方法制备的Parylene‑C膜可以同时兼具半径大和厚度薄的特点。而F‑P干涉仪的固有共振频率与膜片的厚度成正比，与膜片半径的平方成反比，因此该F‑P干涉仪的共振频率可以低至几十赫兹。本发明为狭小空间内高灵敏度远距离气体遥测提供一种新的技术手段。
The invention belongs to the technical field of optical fiber sensing and trace gas detection, and relates to a membrane resonant gas sensor and a detection system based on polychlorop-xylene. The gas sensor adopts the structure of F-P interferometer, and the F-P cavity of the F-P interferometer is also the non-resonant photoacoustic cell of the photoacoustic system. Parylene-C has a low Young's modulus and a large elongation at break. The Parylene-C film prepared by vacuum vapor-phase polymerization deposition has the characteristics of strong conformality and good deposition uniformity. Therefore, vacuum vapor-phase polymerization is used. The Parylene-C film prepared by the deposition method can simultaneously have the characteristics of large radius and thin thickness. The natural resonance frequency of the F-P interferometer is proportional to the thickness of the diaphragm and inversely proportional to the square of the diaphragm radius, so the resonance frequency of the F-P interferometer can be as low as tens of Hz. The invention provides a new technical means for high-sensitivity long-distance gas telemetry in a narrow space.
Description
技术领域technical field
本发明属于光纤传感和微量气体检测技术领域，涉及到一种基于聚一氯对二甲苯的膜片共振式气体传感器及检测系统。The invention belongs to the technical field of optical fiber sensing and trace gas detection, and relates to a membrane resonant gas sensor and a detection system based on poly(monochlorop-xylene).
背景技术Background technique
痕量气体检测在大气环境检测、工业过程控制以及生命科学领域有着广泛的应用需求。随着激光技术的发展，光谱技术已经成为一种具有灵敏度高、响应时间快和选择性强等优势的气体检测方法。光声光谱检测技术是一种直接测量物质因吸收光能而产生热能的光谱量热技术。在密闭光声池内，气体分子由于吸收特定波长的光被激发到高能态，高能态分子间的相互碰撞使部分受激分子通过无辐射跃迁返回基态，吸收的光能转变为热能，腔内气体受热膨胀产生声波。通过传声器，如微音器、光纤声波传感器和石英音叉等，将声波信号转换为电信号实现气体浓度的测量。Trace gas detection has a wide range of application requirements in the fields of atmospheric environment detection, industrial process control and life sciences. With the development of laser technology, spectroscopic technology has become a gas detection method with the advantages of high sensitivity, fast response time and strong selectivity. Photoacoustic spectroscopy is a spectral calorimetry technique that directly measures the heat energy produced by a substance due to the absorption of light energy. In the closed photoacoustic cell, gas molecules are excited to a high-energy state due to the absorption of light of a specific wavelength. The collision between the high-energy state molecules makes some excited molecules return to the ground state through a non-radiative transition, and the absorbed light energy is converted into heat energy. The gas in the cavity Thermal expansion produces sound waves. Through microphones, such as microphones, fiber optic acoustic sensors, and quartz tuning forks, the acoustic signal is converted into an electrical signal to measure the gas concentration.
由于声波的产生场所在密闭的光声池中，而传统的光声池要与微音器和激励光源相匹配，因此导致整个光声光谱系统的体积较大，并难以实现远距离的遥测。文献Cao Y,Jin W,Ho H L,et al.Miniature fiber-tip photoacoustic spectrometer for tracegas detection[J].Optics letters,2013,38(4):434-436设计了小型化的光声光谱气体检测系统，利用光纤法布里珀罗(F-P)声波传感器的F-P腔作为光声系统的非共振光声池，将光声激励光源和光纤F-P声波传感器探测光源耦合到一根光纤中，利用光纤声波传感器的传输距离远、可遥测的特征实现光声光谱气体检测系统的小型化和远距离遥测。由于非共振光声系统中光声信号的大小与调制频率成近似反比关系，因此为了提高光声信号的大小，该系统中激励光源的调制频率设置为200Hz，但是该系统中F-P声波传感器的敏感膜片的共振频率远远大于激励光源的调制频率，导致该光纤F-P声波传感器在调制频率处的灵敏度较低，该系统的气体检测灵敏度与传统的光声光谱系统相差几个数量级。综上所述，设计一种既能够远距离遥测，又具有高灵敏度的小型化光声光谱气体传感器具有重要的应用价值。Since the sound wave is generated in a closed photoacoustic cell, and the traditional photoacoustic cell needs to be matched with a microphone and an excitation light source, the entire photoacoustic spectroscopy system is large in size and difficult to achieve long-distance telemetry. Literature Cao Y, Jin W, Ho H L, et al.Miniature fiber-tip photoacoustic spectrometer for tracegas detection[J].Optics letters,2013,38(4):434-436 designed a miniaturized photoacoustic spectrometer gas detection system , using the F-P cavity of the fiber-optic Fabry-Perot (F-P) acoustic wave sensor as the non-resonant photoacoustic cell of the photoacoustic system, coupling the photoacoustic excitation light source and the fiber-optic F-P acoustic wave sensor detection light source into an optical fiber, and using the fiber-optic acoustic wave sensor The characteristics of long transmission distance and telemetry realize the miniaturization and long-distance telemetry of the photoacoustic spectroscopy gas detection system. Since the magnitude of the photoacoustic signal in a non-resonant photoacoustic system is approximately inversely proportional to the modulation frequency, in order to increase the magnitude of the photoacoustic signal, the modulation frequency of the excitation light source in this system is set to 200 Hz, but the sensitivity of the F-P acoustic wave sensor in this system The resonant frequency of the diaphragm is much higher than the modulation frequency of the excitation light source, resulting in low sensitivity of the fiber optic F-P acoustic wave sensor at the modulation frequency, and the gas detection sensitivity of the system is several orders of magnitude lower than that of the traditional photoacoustic spectroscopy system. In summary, it is of great application value to design a miniaturized photoacoustic spectroscopy gas sensor capable of long-distance telemetry and high sensitivity.
发明内容Contents of the invention
本发明的目的在于提出一种基于聚一氯对二甲苯的膜片共振式小型化气体传感器及检测系统，旨在解决传统光声光谱气体检测系统远距离遥测和高灵敏度探测不能同时实现的问题，为光声光谱检测技术在微量气体远距离遥测领域的应用拓展了更大的空间。The purpose of the present invention is to propose a diaphragm resonance miniaturized gas sensor and detection system based on polychlorop-xylylene, aiming to solve the problem that the traditional photoacoustic spectroscopy gas detection system cannot simultaneously realize long-distance telemetry and high-sensitivity detection , which expands a larger space for the application of photoacoustic spectroscopy detection technology in the field of long-distance telemetry of trace gases.
本发明的技术方案是：Technical scheme of the present invention is:
一种基于聚一氯对二甲苯的膜片共振式气体传感器，包括单模光纤1、F-P腔2、聚一氯对二甲苯(Parylene-C)膜3、通气孔4和壳体5；该膜片共振式气体传感器采用F-P干涉仪的结构，F-P干涉仪的F-P腔2也是光声系统的非共振光声池；Parylene-C具有较低的杨氏模量和较大的断裂延伸率，通过真空气相聚合沉积的方法制备的Parylene-C膜3具有敷形性强和沉积均匀性好的特点，因此采用真空气相聚合沉积的方法制备的Parylene-C膜3可以同时兼具半径大和厚度薄的特点。而F-P干涉仪的固有共振频率与膜片的厚度成正比，与膜片半径的平方成反比，因此基于Parylene-C膜3的F-P干涉仪的共振频率可以低至几十赫兹。待测气体通过通气孔4充满F-P腔2后，将激励激光器7的调制频率设置在F-P干涉仪的共振频率处，此时光纤气体传感器工作在共振模式状态，产生的光声信号可以达到极大值，实现膜片共振式光声气体传感系统。A membrane resonant gas sensor based on parylene, comprising single-mode optical fiber 1, F-P cavity 2, parylene-C film 3, vent hole 4 and housing 5; the The diaphragm resonant gas sensor adopts the structure of F-P interferometer, and the F-P cavity 2 of the F-P interferometer is also the non-resonant photoacoustic cell of the photoacoustic system; Parylene-C has a lower Young's modulus and a larger elongation at break, The Parylene-C film 3 prepared by vacuum vapor-phase polymerization deposition has the characteristics of strong conformability and good deposition uniformity, so the Parylene-C film 3 prepared by vacuum vapor-phase polymerization deposition can have both large radius and thin thickness specialty. The natural resonance frequency of the F-P interferometer is proportional to the thickness of the diaphragm and inversely proportional to the square of the diaphragm radius, so the resonance frequency of the F-P interferometer based on Parylene-C film 3 can be as low as tens of Hz. After the gas to be measured fills the F-P cavity 2 through the air hole 4, set the modulation frequency of the excitation laser 7 at the resonance frequency of the F-P interferometer. At this time, the fiber optic gas sensor works in the resonance mode state, and the photoacoustic signal generated can reach a maximum value, to realize the diaphragm resonance photoacoustic gas sensing system.
一种基于此气体传感器的气体检测系统。将探测激光器6和激励激光器7通过一个1×2光纤耦合器8耦合到一根光纤中，其中一支激光器的中心波长与待测气体的吸收谱线重合，作为光声信号的激励激光器7；另外一支激光器作为光纤F-P干涉仪的探测激光器6。当激励激光器7发射的激光经过环形器9从光纤耦合到气体传感器10的F-P腔2中时，由于光声效应，在F-P腔2中产生声波信号，引起Parylene-C膜3的周期性振动。探测激光器6发出的激光在光纤1端面和Parylene-C膜3表面分别发生反射，两束反射光发生干涉作用，干涉光从环形器9的另一端口射出，经过可调谐带通滤波器11被光电探测器12所接收，可调谐带通滤波器11的作用是过滤掉激励激光器7的反射光，防止其对探测信号产生干扰。光电探测器12将探测到的光信号转换为电信号，并通过锁相放大模块13实现二次谐波解调。工控机14产生的锯齿波信号和锁相放大模块13产生的正弦信号经过加法器15实现叠加，共同驱动光声激励激光器7。工控机14通过调节F-P干涉仪探测激光器6的波长实现工作点的稳定。A gas detection system based on the gas sensor. The detection laser 6 and the excitation laser 7 are coupled into an optical fiber through a 1×2 fiber coupler 8, and the central wavelength of one of the lasers coincides with the absorption line of the gas to be measured, and is used as the excitation laser 7 of the photoacoustic signal; Another laser is used as the detection laser 6 of the fiber F-P interferometer. When the laser emitted by the excitation laser 7 is coupled from the optical fiber to the F-P cavity 2 of the gas sensor 10 through the circulator 9, due to the photoacoustic effect, an acoustic wave signal is generated in the F-P cavity 2, which causes the periodic vibration of the Parylene-C membrane 3. The laser light emitted by the detection laser 6 is respectively reflected on the end face of the optical fiber 1 and the surface of the Parylene-C film 3, and the two beams of reflected light interfere. Received by the photodetector 12, the function of the tunable band-pass filter 11 is to filter out the reflected light of the excitation laser 7 to prevent it from interfering with the detection signal. The photodetector 12 converts the detected optical signal into an electrical signal, and realizes the second harmonic demodulation through the lock-in amplifier module 13 . The sawtooth wave signal generated by the industrial computer 14 and the sinusoidal signal generated by the lock-in amplifier module 13 are superimposed through the adder 15 to jointly drive the photoacoustic excitation laser 7 . The industrial computer 14 realizes the stability of the working point by adjusting the wavelength of the F-P interferometer detection laser 6 .
所述的光纤F-P声波传感器的敏感膜片Parylene-C膜3的直径为9mm，厚度为800nm，此时气体传感器10的共振频率约为30Hz。The diameter of the sensitive diaphragm Parylene-C film 3 of the optical fiber F-P acoustic wave sensor is 9 mm, and the thickness is 800 nm. At this time, the resonance frequency of the gas sensor 10 is about 30 Hz.
所述的激励激光器7的调制频率设置为30Hz，此时气体传感器10工作在共振状态，从而实现膜片共振式气体传感器。The modulation frequency of the excitation laser 7 is set to 30 Hz, at this time the gas sensor 10 works in a resonant state, thereby realizing a diaphragm resonance gas sensor.
本发明的效果和益处是：采用Parylene-C材料作为F-P干涉仪的敏感膜片，通过控制Parylene-C膜的镀膜厚度，将Parylene-C膜片的共振频率与激励光源调制频率相匹配，实现光声信号的共振增强放大。将F-P干涉仪的F-P腔作为微型非共振式光声池，减小了传感器的体积，同时将激励激光器和探测激光器发出的激光耦合到一根光纤中，简化了系统的结构。本发明为狭小空间内高灵敏度远距离气体遥测提供一种新的技术手段。The effect and benefit of the present invention are: adopt Parylene-C material as the sensitive diaphragm of F-P interferometer, by controlling the coating thickness of Parylene-C film, the resonant frequency of Parylene-C diaphragm is matched with excitation light source modulation frequency, realize Resonance-enhanced amplification of photoacoustic signals. Using the F-P cavity of the F-P interferometer as a miniature non-resonant photoacoustic cell reduces the volume of the sensor, and at the same time couples the lasers emitted by the excitation laser and the detection laser into an optical fiber, which simplifies the structure of the system. The invention provides a new technical means for high-sensitivity long-distance gas telemetry in a narrow space.
附图说明Description of drawings
图1是基于Parylene-C的膜片共振式气体传感器示意图。Fig. 1 is a schematic diagram of a membrane resonance gas sensor based on Parylene-C.
图2是基于此膜片共振式气体传感器的检测系统示意图。Fig. 2 is a schematic diagram of a detection system based on the diaphragm resonance gas sensor.
图3是基于Parylene-C的膜片共振式气体传感器的频率响应谱图。Fig. 3 is the frequency response spectrum of the diaphragm resonance gas sensor based on Parylene-C.
图中：1单模光纤；2F-P腔；3Parylene-C膜；4通气孔；5壳体；6探测激光器；7激励激光器；81×2耦合器；9环形器；10气体传感器；11可调谐带通滤波器；12光电探测器；13锁相放大模块；14工控机；15加法器。In the figure: 1 single-mode optical fiber; 2F-P cavity; 3Parylene-C film; 4 air vent; 5 shell; 6 detection laser; 7 excitation laser; 81×2 coupler; Tuning bandpass filter; 12 photodetector; 13 lock-in amplifier module; 14 industrial computer; 15 adder.
具体实施方式Detailed ways
以下结合附图和技术方案，进一步说明本发明的具体实施方式。The specific implementation manners of the present invention will be further described below in conjunction with the accompanying drawings and technical solutions.
本发明提供了如图1所示的基于Parylene-C的膜片共振式气体传感器，包括单模光纤1、F-P腔2、Parylene-C膜3、通气孔4和壳体5。F-P腔2既是F-P干涉仪的腔体，同时也是微型非共振式光声池，用来产生光声信号。待测气体通过通气孔4进入到F-P腔2中，由于气体的光声效应产生的光声信号引起Parylene-C膜3的周期性振动。Parylene-C膜3的直径为9mm，厚度为800nm，此时该F-P干涉仪的共振频率约为30Hz。The present invention provides a Parylene-C based membrane resonant gas sensor as shown in FIG. The F-P cavity 2 is not only the cavity of the F-P interferometer, but also a miniature non-resonant photoacoustic cell for generating photoacoustic signals. The gas to be measured enters the F-P cavity 2 through the air hole 4, and the photoacoustic signal generated by the photoacoustic effect of the gas causes the periodic vibration of the Parylene-C membrane 3. The diameter of the Parylene-C film 3 is 9 mm, and the thickness is 800 nm. At this time, the resonance frequency of the F-P interferometer is about 30 Hz.
图2表示的是基于此膜片共振式气体传感器的检测系统示意图。光纤F-P干涉仪的探测激光器6和光声信号的激励激光器7发出的激光经过1×2的光纤耦合器8和光纤环形器9入射到小型化气体传感器10中。调节激励激光器7的调制频率为30Hz，由于激励激光器7的中心波长与待测气体的吸收谱线重合，因此待测气体吸收激光跃迁到高能级，然后经过无辐射跃迁到基态的过程中释放热量使周围空气膨胀，从而产生光声信号引起Parylene-C膜3的周期性振动，振动的频率等于激励激光器7的调制频率，振动的幅度与气体的浓度成正比关系，此时该气体传感器10正好工作在共振状态，形成膜片共振式气体传感系统。光纤F-P干涉仪的探测激光器6发出的激光在单模光纤1的端面和Parylene-C膜3的表面分别发生反射，两束反射光形成干涉光，经过环形器9和可调谐带通滤波器11进入到光电探测器12转化成电信号，可调谐带通滤波器11的作用是将激励激光器7的反射光滤除，防止对光纤F-P干涉仪形成干扰。锁相放大模块13对光电探测器12接收到的信号进行二次谐波解调，实现气体浓度的测量。探测激光器6由工控机14进行控制，通过调节探测激光器6的波长实现F-P干涉仪工作点的稳定。锁相放大模块13产生的正弦信号和工控机14产生的锯齿波信号经过加法器15叠加共同驱动激励激光器7。FIG. 2 shows a schematic diagram of a detection system based on the diaphragm resonance gas sensor. The laser light emitted by the detection laser 6 of the fiber optic F-P interferometer and the excitation laser 7 of the photoacoustic signal enters the miniaturized gas sensor 10 through the 1×2 fiber coupler 8 and the fiber circulator 9 . Adjust the modulation frequency of the excitation laser 7 to 30 Hz. Since the central wavelength of the excitation laser 7 coincides with the absorption line of the gas to be measured, the gas to be measured absorbs the laser and transitions to a high energy level, and then releases heat during the process of non-radiative transition to the ground state The surrounding air is expanded to generate a photoacoustic signal to cause the periodic vibration of the Parylene-C film 3. The frequency of the vibration is equal to the modulation frequency of the excitation laser 7, and the amplitude of the vibration is proportional to the concentration of the gas. At this time, the gas sensor 10 is just Working in a resonance state, forming a diaphragm resonance gas sensing system. The laser light emitted by the detection laser 6 of the fiber F-P interferometer is reflected on the end face of the single-mode fiber 1 and the surface of the Parylene-C film 3 respectively, and the two reflected lights form interference light, which passes through the circulator 9 and the tunable bandpass filter 11 Entering the photodetector 12 and converting it into an electrical signal, the function of the tunable bandpass filter 11 is to filter the reflected light of the exciting laser 7 to prevent interference to the optical fiber F-P interferometer. The lock-in amplifier module 13 performs second harmonic demodulation on the signal received by the photodetector 12 to realize the measurement of the gas concentration. The detection laser 6 is controlled by the industrial computer 14, and the stability of the working point of the F-P interferometer is realized by adjusting the wavelength of the detection laser 6. The sinusoidal signal generated by the lock-in amplifier module 13 and the sawtooth signal generated by the industrial computer 14 are superimposed by the adder 15 to jointly drive the excitation laser 7 .
附图3表示的是基于Parylene-C3的膜片共振式气体传感器的频率响应谱图。Parylene-C膜3的有效直径是9mm，厚度为800nm，该气体传感器的共振频率约为30Hz。Accompanying drawing 3 shows the frequency response spectrogram of the membrane resonant gas sensor based on Parylene-C3. The effective diameter of the Parylene-C film 3 is 9 mm, and the thickness is 800 nm. The resonance frequency of the gas sensor is about 30 Hz.
以上所述仅为本发明的优选实施例，并不用于限制本发明，对于本领域的技术人员来说，本发明可以有各种更改和变化。凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.
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