CN102590112A - Surface microstructure silicon cantilever enhancement type optical-thermal spectrum trace gas detection method and device - Google Patents
Surface microstructure silicon cantilever enhancement type optical-thermal spectrum trace gas detection method and device Download PDFInfo
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 79
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 79
- 239000010703 silicon Substances 0.000 title claims abstract description 79
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- 238000010521 absorption reaction Methods 0.000 claims description 19
- 238000001094 photothermal spectroscopy Methods 0.000 claims description 17
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 238000009413 insulation Methods 0.000 claims description 6
- 229910018503 SF6 Inorganic materials 0.000 claims description 5
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 claims description 5
- 229960000909 sulfur hexafluoride Drugs 0.000 claims description 5
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- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
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- 230000007096 poisonous effect Effects 0.000 description 3
- XUIMIQQOPSSXEZ-RNFDNDRNSA-N silicon-32 atom Chemical compound [32Si] XUIMIQQOPSSXEZ-RNFDNDRNSA-N 0.000 description 3
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- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical class N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention relates to a surface microstructure silicon cantilever enhancement type optical-thermal spectrum trace gas detection method and device. The device comprises a tunable laser, a reflective object, a surface microstructure silicon cantilever, a concave mirror, an optical fiber, an optical fiber coupler, a continuous laser, a laser controller, an optical detector, a signal processing system and the like. Modulated light emitted from the tunable laser is reflected on the concave mirror by the reflective object after passing through the gas to be detected, the received reflective light on the concave mirror is focused on a silicon surface of the cantilever beam. After the optical energy is absorbed by the cantilever beam, the optical-thermal deflection occurs to generate resonance. If the gas concentration is higher, the optical intensity absorbed by the gas is larger, and if the optical energy absorbed by the cantilever beam is smaller and the resonance amplitude is smaller. A length adjustable Fabry-Perot cavity is formed by an optical fiber end surface and a metal surface of the cantilever beam, the amplitude of the cantilever beam is demodulated to obtain gas absorption spectrum, furthermore the concentration of the detected trace gas is obtained. The device has the advantages of cheap price, small size, simple structure, convenience in use, strong flexibility, high detection sensitivity, and field work capacity and can be widely used in remotely detecting the components and concentration of a variety of or multi-component trace gas.
Description
Technical field
The present invention relates to the detection of gas technology; Especially a kind of photothermal spectroscopy trace gas detection method and device that trace gas is carried out long-range detection based on the surface micro-structure silicon cantilever of work under open environment can be widely used in fields such as long-distance explosive detection, environmental monitoring and the detection of poisonous and harmful hazardous gas.
Background technology
The development of trace gas remote probing techniques is for atmosphere environment supervision, and the long-range detection of explosive and biological physiology state-detection etc. all has crucial meaning.It is big that the absorption spectrum gas detection technology has measurement range, but the polycomponent measurement, but advantages such as continuous monitoring become desirable trace gas concentration testing tool gradually.The absorption spectrum gas detection technology mainly comprises difference absorption spectrum technology, tunable laser diodes absorption spectrum technology, laser Induced Fluorescence Technology and optoacoustic spectroscopy etc.Characteristics such as wherein, optoacoustic spectroscopy is highly sensitive owing to having, and antijamming capability is strong, dynamic range is big, and explorer response and incident wavelength are irrelevant all are one of most important developing direction of trace gas detection technique all the time.
In order to improve the detection sensitivity of optoacoustic spectroscopy, people are devoted to improve the structure of photoacoustic cell always and adopt sensitiveer microphone to wait and improve this technology of development.For example 2002; The optoacoustic spectroscopy system that the optoacoustic spectroscopy group of Holland Nijmegen university utilizes optical parametric oscillator to build brings up to the 10ppt level with the detection sensitivity of ethane; Anbui Optical Machinery Inst., Chinese Academy of Sciences in 2009 has proposed a kind of device of the quartz tuning fork strengthened optoacoustic spectroscopy gas based on acoustic resonance cavity; And measure the water vapor concentration under the atmospheric pressure in real time, it surveys the normalization equivalent noise is 5.9 * 10
-10Cm
-1W/Hz
1/2People such as Finland V.KOSKINEN have proposed a kind of " based on the optoacoustic spectroscopy sniffer of semi-girder enhancing ", have surveyed the concentration of carbon dioxide, and it surveys normalization equivalent noise is 1.7 * 10
-10Cm
-1W/Hz
1/2Although these class methods have very high detection sensitivity, because the use of photoacoustic cell has limited this method and only can in there is the zone in trace gas, survey, and can not carry out long-range detection.Thereby in the application that hazardous gas such as poisonous, inflammable and explosive is surveyed, received greatly restriction.
In order to overcome above-mentioned deficiency, realize adopting the optoacoustic spectroscopy method that trace gas is realized long-range detection, Oak Ridge National Laboratory proposed a kind of optoacoustic spectroscopy detection system that is used for the long-range detection explosive under the USDOE in 2008.In this system, the laser radiation that the quantum laser instrument sends is surveyed thing after focused on the quartz tuning-fork behind concave mirror by baffle reflection to the 20m place, thereby causes tuning fork vibration.Because the piezoelectric effect of tuning fork, the quartz tuning-fork of vibration will produce the piezoelectric current signal, and this signal carries out demodulation through lock-in amplifier at the resonance frequency place, thereby obtains the absorption spectra of gaseous sample.But this detection method adopts quartz tuning-fork to absorb device as luminous energy, and its absorptance is lower, thereby has limited the further raising of detection sensitivity.In addition,, need bigger laser energy, thereby greatly increased the risk that flammable explosive gas is surveyed if improve the detection sensitivity of tuning fork.Afterwards, this laboratory proposes a kind of Explosives Detection System based on semi-girder again, can be implemented in the detection of three kinds of typical explosives in 1 meter scope, compares quartzy enhanced photo acoustic spectrum investigating system, and this system has higher detection accuracy.But,, greatly reduced its ability that faint optical signal is surveyed, thereby can't carry out remote spectrographic detection because this silicon nitride cantilevers beam is very low to absorption of incident light efficient; And this semi-girder flexibility is lower, and therefore the thermal deflection inefficiency needs to adopt the sensitive detection system of expensive high precision position to pick up the vibration amplitude of semi-girder, causes system architecture complicated, costs an arm and a leg.
Summary of the invention
The objective of the invention is to overcome weak point of the prior art; A kind of photothermal spectroscopy detection method and device based on the surface micro-structure silicon cantilever that trace gas is surveyed that under open environment, be used for proposed; Be a kind of cheapness, volume is little, simple in structure, easy to use, detection sensitivity is high, possess the field environment ability to work, can be used for the long-range detection method and the device of multiple or polycomponent trace gas.
For solving technical matters of the present invention, the technical scheme that is adopted is:
A kind of surface micro-structure silicon cantilever enhancement mode photothermal spectroscopy trace gas detection method; Said method is to let the pulse laser that sends from tunable laser pass through detected gas; Incide on the reflecting object after being absorbed;, to concave mirror, focus on the luminous energy that receives on the surface micro-structure silicon cantilever with concave mirror, through the reflecting object back reflection by behind the surface micro-structure silicon cantilever absorbing light energy resonance taking place; Pick up the vibration signal of this surface micro-structure silicon cantilever simultaneously through the tunable Fabry-perot optical fiber demodulating system of forming based on the metal surface of fiber end face and semi-girder; When semi-girder generation resonance, chamber the changing of long hair of Fa-Po cavity, thus cause the variation of reflection interference light intensity generating period property; Obtain the resonance signal of semi-girder through intensity demodulation, adopt signal processing system to be finally inversed by at last by the concentration of probe gas to this light signal.
Realize the photothermal spectroscopy trace gas sniffer based on the surface micro-structure silicon cantilever of said method, it comprises tunable laser, reflecting object, surface micro-structure silicon cantilever, concave mirror, optical fiber, fiber coupler, continuous wave laser, single-point photodetector, signal processing system, optical fiber, optical fiber and laser controller.
Said surface micro-structure silicon cantilever is a double-decker, and upper strata (being light-absorption layer) is surface micro-structure silicon.It is to go out a plurality of micro-cone structures with the method that femto-second laser pulse adds the sulfur hexafluoride etchant gas in this surface etch; The element sulphur concentration that adopts pressure to mix surface micro-structure silicon to concentration of sulfur hexafluoride corroding method increase between the 80Kpa at 60Kpa; Thereby changed the band structure of surface micro-structure silicon; And then improved semi-girder in the extinction efficient of ultraviolet to infrared band; And more smooth at this wavelength band internal absorptance, realized ultraviolet is absorbed to infrared full wave non-selectivity, laser wavelength is had the non-selectivity absorption characteristic; Can satisfy the requirement of wide spectrographic detection, can survey multiple trace gas or organize the concentration that trace divides gas more.
This structure can greatly improve by the absorption efficiency of exploring laser light, and the photo-thermal conversion coefficient of structure is increased greatly, and under the exciting light energy that equates, the semi-girder vibration amplitude enlarges markedly, thereby greatly improves the detection sensitivity of system.Upper surface microstructure silicon thickness is the 2.5-28 micron, and the micro-cone surface structure is micron and nano-scale, is " pyramid " type, and the ratio of cone height and bottom surface diameter is between 2 to 4.The thickness of semi-girder is the 3-30 micron, and the lower floor of this semi-girder (being reflector layer) is a metal material, is generally gold, silver or aluminium.The elasticity thermal expansion, takes place when arriving the semi-girder silicon face in laser radiation; Because two kinds of material coefficient of thermal expansion coefficients are different; Surface micro-structure silicon cantilever generating period property photothermal deflection based on the photothermal deflection principle, adopts the semi-girder with high quality factor (high Q value) to pick up the gas absorption light intensity signal; Be a kind of picking up signal method, neighbourhood noise is had very strong immunocompetence with high s/n ratio.
The structural relation of this device is: tunable laser and reflecting object and concave mirror are arranged on the same light path; The surface micro-structure silicon cantilever is placed on the along of concave mirror, and the surface micro-structure silicon face of surface micro-structure silicon cantilever is to concave mirror, and the end face of metal surface and optical fiber forms Fa-Po cavity; Continuous wave laser is connected through optical fiber with fiber coupler; Fiber coupler is connected with optical fiber, is connected by optical fiber between photodetector and the fiber coupler, and the photodetector receiving optical signals also to the electric signal of converting; The output terminal of photodetector is electrically connected with the input end of signal processing system; Signal processing system is carried out filtering, denoising, data processing to electric signal, and the output terminal of laser controller is electrically connected with the tunable laser input end, and laser instrument is carried out length scanning and frequency modulation (PFM).
Said optical fiber generally adopts single mode silica fibre or polarization maintaining optical fibre, forms a Fa-Po cavity between the metal surface of its end face and said surface micro-structure silicon cantilever, and its length is generally continuous wave laser and sends 1 ~ 10 times of wavelength.
Said tunable laser generally adopts distributed feed-back formula laser instrument, QCL or vertical cavity surface emitting laser etc.; Its centre wavelength is consistent with the detected gas absorption peak; And can near absorption peak, adjust, for example, when surveying carbon dioxide; Can adopt centre wavelength is 1580nm, range of adjustment is ± and the tunable laser of 1nm.
The present invention is following with respect to the advantage of prior art:
The first, semi-girder adopts compound surface micro-structure silicon to process, and this structure all has very high absorptivity from ultraviolet to the infrared ultra-wide spectrum zone of visible light part that comprises, therefore can use a device to realize the requirement of wide spectrographic detection; Under the situation that does not change system architecture, select the different wavelength of laser device as exciting light source, need not change the concentration detection that the semi-girder sensitive detection parts just can be accomplished multiple or polycomponent trace gas.
Second; The present invention uses surface micro-structure silicon cantilever structure as resonating device; It is a detector that vibration signal is had the narrow-band filtering function; The surrounding environment optical noise is had immunocompetence, and this will make system's antijamming capability under the wide open space environment for use improve greatly, have simultaneously that volume is little, cost is low and characteristics such as portable.
The 3rd; This device can be worked under open environment; Need not adopt photoacoustic cell to reduce ambient noise system is surveyed influence on SNR; Therefore be highly suitable for remote detection, particularly the traditional relatively optoacoustic spectroscopy detection system of the context of detection of poisonous, inflammable and explosive trace gas had great advantage trace gas.
The 4th, adopt the Fabry-perot optical fiber demodulation mode to replace traditional electrolysis to transfer mode, highly sensitive, accuracy of detection is high, and good stability can be eliminated outside electromagnetic interference effectively, has fire-proof and explosion-proof function.
Description of drawings
A kind of surface micro-structure silicon cantilever of Fig. 1 enhancement mode photothermal spectroscopy trace gas sniffer synoptic diagram;
Fig. 2 cantilever beam structure synoptic diagram;
Fig. 3 is tunable method amber demodulating system light pick-up synoptic diagram;
Fig. 4 surface micro-structure silicon synoptic diagram;
The absorption efficiency curve synoptic diagram of Fig. 5 surface micro-structure silicon cantilever.
Embodiment
The photothermal spectroscopy trace gas sniffer based on the surface micro-structure silicon cantilever of work is as shown in Figure 1 under open environment; Tunable laser 1 and reflecting object 2 and concave mirror 4 are on same light path, and surface micro-structure silicon cantilever 3 is placed on the along of concave mirror 4.The metal surface 311 of surface micro-structure silicon cantilever 3 forms Fa-Po cavity with the end face of optical fiber 5 51; Continuous wave laser 7 is connected through optical fiber 10 with fiber coupler 6; Fiber coupler 6 is connected with optical fiber 5; Be connected by optical fiber 11 between photodetector 8 and the fiber coupler 6, the photodetector receiving optical signals also to the electric signal of converting.Output terminal at photodetector 8 is electrically connected with the input end of signal processing system 9, and 9 pairs of electric signal of signal processing system carry out filtering, denoising, data processing etc.The output terminal of laser controller 12 is electrically connected with tunable laser 1 input end, and its effect comprises carries out length scanning and frequency modulation (PFM) to laser instrument.
During work, 12 pairs of tunable laser 1 of laser controller are modulated, and modulating frequency is surface micro-structure silicon cantilever 3 natural frequencys
f 0 1/2.Through the current scanning mode, laser controller 12 is controlled at place, tested gas absorption peak position to the centre wavelength of tunable laser 1.The light modulated of being sent by tunable laser 1 is through arriving reflecting object 2 behind the tested gas.Reflecting object 2 is reflexing on the concave mirror 4 through the light after the gas absorption, and concave mirror 4 focuses on it on semi-girder 3.Resonance took place after semi-girder 3 absorbed this energy.The light that sends from light source 7 passes through coupling mechanism 6, shines on the metal surface 311 of semi-girder through optical fiber 5 again, and fiber end face 51 forms the long tuning Fa-Po cavity in a chamber with semi-girder metal surface 311, and wherein fiber end face 51 is fixing.Laser part in the optical fiber 5 is by fiber end face 51 reflected back optical fiber 5; Another part is by 311 reflections of semi-girder metal surface, and two bundle reflected light transmission in optical fiber 5 simultaneously form interference light.Interference light gets into photodetector 8 through fiber coupler 6, and photodetector output is with the corresponding electric signal of interference light intensity and get into signal processing system 9, and 9 pairs of electric signal of signal processing system carry out data processing, and then calculate tested gas concentration.
Said semi-girder 3 structures are as shown in Figure 2, and it is a double-decker, and the upper strata is a surface micro-structure silicon 32.Lower floor is and surface micro-structure silicon thermal expansivity different metallic material 31.Surface micro-structure silicon 32 is as shown in Figure 4; This surface micro-structure silicon be adopt pressure at 60Kpa under the sulfur hexafluoride etchant gas environment between the 80Kpa, adopt femtosecond laser on upper surface, to etch a plurality of micro-cone structures 321 with silicon on the insulation course of three-decker, erode the middle layer of silicon on the insulation course with hydrofluorite; The superiors are taken off; Promptly obtain ultrathin bendable surface micro-structure silicon 32, its thickness 2.5-28 micron plates layer of metal material 31 at the back side of microstructure silicon again; Promptly obtain semi-girder 3, gross thickness 3-30 micron.
Light intensity after 3 pairs of tested gas absorption of said semi-girder to pick up principle as shown in Figure 3; Based on the photothermal deflection principle; Semi-girder 3 absorbs the generation vibration as shown in the figure behind the light intensity signal after the gas absorption that is focused on by concave mirror 4, and Oscillation Amplitude is linear with the light intensity signal after gas absorption.Gas concentration is high more, and is big more by the light intensity of gas absorption, and the light intensity that incides on the semi-girder 3 is more little, and the amplitude of semi-girder 3 is more little.The Fa-Po cavity that semi-girder metal surface 311 and fiber end face 51 constitute through the interference light intensity that gets into optical fiber 5 is surveyed, thereby can obtain by the light intensity after the gas absorption.
The absorption efficiency curve of said surface micro-structure silicon cantilever is as shown in Figure 5, and this semi-girder is all having very high absorption efficiency from the ultraviolet to the region of ultra-red, and the absorption efficiency curve is more smooth.
Claims (10)
1. surface micro-structure silicon cantilever enhancement mode photothermal spectroscopy trace gas detection method; It is characterized in that; Said method is to let the pulse laser that sends from tunable laser pass through detected gas, incides on the reflecting object after pulse laser is absorbed, and process reflecting object back reflection is to concave mirror; Focus on the luminous energy that receives on the surface micro-structure silicon cantilever with concave mirror; By behind the surface micro-structure silicon cantilever absorbing light energy resonance taking place, pick up the vibration signal of this surface micro-structure silicon cantilever simultaneously through the tunable Fabry-perot optical fiber demodulating system of forming based on the metal surface of fiber end face and semi-girder, promptly when semi-girder generation resonance; Chamber the changing of long hair of Fa-Po cavity; Thereby cause the variation of reflection interference light intensity generating period property, obtain the resonance signal of semi-girder, adopt signal processing system to be finally inversed by at last by the concentration of probe gas through intensity demodulation to this light signal;
Said surface micro-structure silicon cantilever (3) is a double-decker; The upper strata is a surface micro-structure silicon; Lower floor is a metal; The elasticity thermal expansion, pulsed laser irradiation takes place when arriving the semi-girder silicon face, because the thermal expansivity of materials at two layers is different, and surface micro-structure silicon cantilever generating period property photothermal deflection;
The modulating frequency of said tunable laser (1) is 1/2 of a surface micro-structure silicon cantilever resonance frequency, and its centre wavelength is consistent with the detected gas absorption peak;
The chamber length of said Fa-Po cavity is sent 1 ~ 10 times of wavelength for continuous wave laser.
2. surface micro-structure silicon cantilever enhancement mode photothermal spectroscopy trace gas detection method according to claim 1; It is characterized in that; Said surface micro-structure silicon cantilever (3) thickness is the 3-30 micron; The surface micro-structure silicon on its upper strata comprises a plurality of micro-cone structures, and thickness is the 2.5-28 micron;
The upper strata of said surface micro-structure silicon cantilever is to obtain through following method: gas pressure intensity at 60Kpa in the sulfur hexafluoride gas environment between the 80Kpa; The upper surface of silicon on insulation course; Etch a plurality of micro-cone structures with femtosecond laser; Erode the middle layer of silicon on the insulation course then with hydrofluorite, at last uppermost surface is stripped down, promptly obtain ultra-thin surface micro-structure silicon.
3. surface micro-structure silicon cantilever enhancement mode photothermal spectroscopy trace gas sniffer of realizing claim 1 or 2 said methods; It is characterized in that, comprise tunable laser (1), reflecting object (2), surface micro-structure silicon cantilever (3), concave mirror (4), optical fiber (5), fiber coupler (6), continuous wave laser (7), photodetector (8), signal processing system (9), optical fiber (10), optical fiber (11) and laser controller (12);
Said surface micro-structure silicon cantilever (3) is a double-decker; The upper strata is a surface micro-structure silicon, and lower floor is a metal, and the elasticity thermal expansion takes place when the semi-girder silicon face is arrived in laser radiation; Because the thermal expansivity of materials at two layers is different, surface micro-structure silicon cantilever generating period property photothermal deflection;
Said tunable laser (1) is arranged on the same light path with reflecting object (2) and concave mirror (4); Surface micro-structure silicon cantilever (3) is placed on the along of concave mirror (4); The surface micro-structure silicon face of surface micro-structure silicon cantilever (3) is to concave mirror (4); Metal surface (311) forms Fa-Po cavity with the end face (51) of optical fiber (5), and continuous wave laser (7) is connected through optical fiber (10) with fiber coupler (6), and fiber coupler (6) is connected with optical fiber (5); Be connected by optical fiber (11) between photodetector (8) and the fiber coupler (6); The photodetector receiving optical signals also to the electric signal of converting, and the output terminal of photodetector (8) is electrically connected with the input end of signal processing system (9), and signal processing system (9) is carried out filtering, denoising, data processing to electric signal; The output terminal of laser controller (12) is electrically connected with tunable laser (1) input end, and laser instrument is carried out length scanning and pulse frequency modulation;
The modulating frequency of said tunable laser (1) is 1/2 of a surface micro-structure silicon cantilever resonance frequency, and its centre wavelength is consistent with the detected gas absorption peak;
The chamber length of said Fa-Po cavity is sent 1 ~ 10 times of wavelength for continuous wave laser.
4. surface micro-structure silicon cantilever enhancement mode photothermal spectroscopy trace gas sniffer according to claim 3; It is characterized in that; Said surface micro-structure silicon cantilever (3) thickness is the 3-30 micron, and upper surface microstructure silicon comprises a plurality of micro-cone structures, and thickness is the 2.5-28 micron.
5. surface micro-structure silicon cantilever enhancement mode photothermal spectroscopy trace gas sniffer according to claim 3 is characterized in that, said micro-cone structure is micron and nano-scale, is pyramid, and the ratio of cone height and bottom surface diameter is between 2 to 4.
6. surface micro-structure silicon cantilever enhancement mode photothermal spectroscopy trace gas sniffer according to claim 3; It is characterized in that; Said upper surface microstructure silicon is to obtain through following method: gas pressure intensity at 60Kpa in the sulfur hexafluoride gas environment between the 80Kpa; The upper surface of silicon on insulation course etches a plurality of micro-cone structures with femtosecond laser, erodes the middle layer of silicon on the insulation course then with hydrofluorite; At last uppermost surface is stripped down, promptly obtain ultra-thin surface micro-structure silicon.
7. surface micro-structure silicon cantilever enhancement mode photothermal spectroscopy trace gas sniffer according to claim 3 is characterized in that, said tunable laser adopts distributed feed-back formula laser instrument, QCL or vertical cavity surface emitting laser.
8. surface micro-structure silicon cantilever enhancement mode photothermal spectroscopy trace gas sniffer according to claim 3 is characterized in that said photodetector is the single-point photodetector.
9. surface micro-structure silicon cantilever enhancement mode photothermal spectroscopy trace gas sniffer according to claim 3; It is characterized in that; Said optical fiber adopts single mode silica fibre or polarization maintaining optical fibre, forms a Fa-Po cavity between the metal surface of its end face and said surface micro-structure silicon cantilever.
10. surface micro-structure silicon cantilever enhancement mode photothermal spectroscopy trace gas sniffer according to claim 3 is characterized in that the metal material of semi-girder lower floor is gold, silver or aluminium.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103884419A (en) * | 2014-04-17 | 2014-06-25 | 山西大学 | Tuning fork type quartz crystal oscillator resonant frequency measurement method based on optical excitation and device |
| CN104655587A (en) * | 2015-02-14 | 2015-05-27 | 合肥知常光电科技有限公司 | Extra-high sensitive gas absorption spectrum measuring system and method based on MEMS |
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| CN107271546A (en) * | 2017-07-04 | 2017-10-20 | 滨州学院 | Photoacoustic spectroscopy gas detecting system based on silicon cantilever and its matching resonantron |
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| CN109916853A (en) * | 2019-03-28 | 2019-06-21 | 内江师范学院 | Laser infrared spectrum trace materials detection device and method based on fiber grating |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103884419A (en) * | 2014-04-17 | 2014-06-25 | 山西大学 | Tuning fork type quartz crystal oscillator resonant frequency measurement method based on optical excitation and device |
| CN104655587A (en) * | 2015-02-14 | 2015-05-27 | 合肥知常光电科技有限公司 | Extra-high sensitive gas absorption spectrum measuring system and method based on MEMS |
| CN105911022A (en) * | 2016-06-06 | 2016-08-31 | 安徽大学 | Hazardous chemical substance remote sensing detection method and device based on wide-tuning external cavity quantum cascade laser |
| CN105911022B (en) * | 2016-06-06 | 2019-01-18 | 安徽大学 | Hazardous chemical substance remote sensing detection method and device based on wide-tuning external cavity quantum cascade laser |
| CN109416318A (en) * | 2016-07-13 | 2019-03-01 | 维也纳技术大学 | Photothermal interference measuring device and method |
| CN107271546B (en) * | 2017-07-04 | 2023-07-21 | 滨州学院 | Photoacoustic spectrum gas detection system based on silicon cantilever beam and matched resonance tube thereof |
| CN107271546A (en) * | 2017-07-04 | 2017-10-20 | 滨州学院 | Photoacoustic spectroscopy gas detecting system based on silicon cantilever and its matching resonantron |
| CN107576822A (en) * | 2017-09-30 | 2018-01-12 | 武汉锐科光纤激光技术股份有限公司 | One kind scanning probe detection device |
| CN107576822B (en) * | 2017-09-30 | 2018-12-14 | 武汉锐科光纤激光技术股份有限公司 | A kind of scanning probe detection device |
| CN110361446A (en) * | 2018-04-10 | 2019-10-22 | 天马日本株式会社 | Gas sensor and gas detection method |
| CN110361446B (en) * | 2018-04-10 | 2023-09-19 | 天马日本株式会社 | Gas sensor and gas detection method |
| CN109916853A (en) * | 2019-03-28 | 2019-06-21 | 内江师范学院 | Laser infrared spectrum trace materials detection device and method based on fiber grating |
| CN109916853B (en) * | 2019-03-28 | 2021-06-08 | 内江师范学院 | Device and method for detecting trace substance by laser infrared spectrum based on fiber bragg grating |
| CN110441242A (en) * | 2019-08-14 | 2019-11-12 | 郑州大学 | Gas detecting system and method based on diamond micro-cantilever |
| CN111289085A (en) * | 2020-02-11 | 2020-06-16 | 中国科学院电子学研究所 | Microphone diaphragm amplitude measuring method and device |
| CN113218873A (en) * | 2021-04-09 | 2021-08-06 | 南方电网科学研究院有限责任公司 | Differential type photoacoustic spectroscopy gas detection device based on single cantilever beam |
| CN114324182A (en) * | 2021-12-24 | 2022-04-12 | 中国科学院电工研究所 | High-pressure SF6Decomposed gas detection device |
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