CN109870414A - A kind of enhanced gas sensing probe of scattering - Google Patents
A kind of enhanced gas sensing probe of scattering Download PDFInfo
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- CN109870414A CN109870414A CN201910276413.5A CN201910276413A CN109870414A CN 109870414 A CN109870414 A CN 109870414A CN 201910276413 A CN201910276413 A CN 201910276413A CN 109870414 A CN109870414 A CN 109870414A
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Abstract
The invention belongs to Trace gas detection technical fields, there is provided a kind of enhanced gas sensing probe of scattering comprising metal shell, off-resonance PA cell, porous scattering medium, fiber F-P sonic sensor sensitive diaphragm, gold-plated reflecting mirror, optoacoustic motivate light source incident optical, optical fiber collimator, fiber F-P sonic sensor probe source incident optical, F-P cavity, air inlet and air outlet；Wherein, one end of metal shell and off-resonance PA cell is detachably connected, and the other end of off-resonance PA cell is fixed with gold-plated reflecting mirror；The inside of off-resonance PA cell is filled with porous scattering medium；One surface of metal shell has groove, and is sealed by fiber F-P sonic sensor sensitive diaphragm, to form F-P cavity；Metal shell is provided with fiber F-P sonic sensor probe source incident optical and optoacoustic excitation light source incident optical.The absorption light path of gas can be improved in the enhanced gas sensing probe of the scattering, improves the detection sensitivity of trace gas.
Description
Technical field
The invention belongs to Trace gas detection technical fields, and it is scattered to be related to a kind of high sensitivity based on optoacoustic spectroscopy
Penetrate enhanced gas sensing probe.
Background technique
Trace gas detection technology has in the analysis of electric power system fault characteristic gas, the detection of medical field tidal air and industry
It plays an important role in the applications such as evil gas emission monitoring.At present trace gas detection method mainly have gas chromatography,
Semiconductor gas sensor method, electrochemical sensor method, absorption spectrometry and photocaustic spectroscopy.With the development of laser technology,
The gas detection method that photocaustic spectroscopy has become a kind of high sensitivity, the response time is fast and selectivity is strong.Photocaustic spectroscopy
It is a kind of spectrum Calorimetric Techniques for generating thermal energy by directly measuring gas because absorbing luminous energy, is a kind of absorption light of no background
Spectral technology.The basic principle of photocaustic spectroscopy may be summarized to be: when periodic modulated light source covers under test gas molecule absorption
When spectral line, gas molecule is returned to ground state by radiationless transition and releases heat, made gas molecule by ground state transition to excitation state
The expansion of surrounding air generating period is to generate sound wave.Since sound wave size is directly proportional under test gas concentration, lead to
The size for crossing sonic sensor detection photoacoustic signal, can be obtained the concentration information of under test gas.
Two classes can be divided into according to the difference of working model currently based on the trace gas detection system of optoacoustic spectroscopy, point
It is not resonant optoacoustic system and non-resonant optoacoustic system.Since resonant optoacoustic system is easy to be done by external environment
It disturbs, there are resonance frequency shifts, be not suitable in fields such as environment substation complicated and changeable, nuclear power station, hospital and coal mines
Institute's field application, thus commercialized optoacoustic spectroscopy detector generallys use that anti-interference ability is stronger at present but sensitivity is lower
Off-resonance optoacoustic system.With the analysis of electric power system fault characteristic gas, the detection of medical field tidal air and the harmful gas of industry
The sensitivity of the increasingly raising that the fields such as body emission monitoring require security developments, traditional off-resonance photo acoustic spectrometry system is difficult to
It meets the requirements, thus studies the highly sensitive gas sensor based on optoacoustic spectroscopy for real time monitoring as mesh
Preceding problem in the urgent need to address.
Summary of the invention
The purpose of the present invention is to propose to a kind of enhanced gas sensing probes of the scattering based on optoacoustic spectroscopy, to solve
The lower problem of traditional off-resonance optoacoustic system sensitivity.
The technical scheme is that a kind of enhanced gas sensing probe of scattering comprising metal shell, off-resonance light
The operatic tunes, porous scattering medium, fiber F-P sonic sensor sensitive diaphragm, gold-plated reflecting mirror, optoacoustic excitation light source incident optical,
Optical fiber collimator, fiber F-P sonic sensor probe source incident optical, F-P cavity, air inlet and air outlet；Wherein, the gold
The one end for belonging to shell and off-resonance PA cell is detachably connected, the fixed gold-plated reflecting mirror of the other end of off-resonance PA cell；It is described
Air inlet and air outlet are provided on the side wall of off-resonance PA cell, the air inlet and air outlet are opened by solenoid valve control
It opens and closes, under test gas enters off-resonance PA cell by the air inlet and air outlet respectively and from off-resonance PA cell
Discharge；The inside of the off-resonance PA cell is filled with porous scattering medium；The metal shell is connected with off-resonance PA cell
The surface connect has groove, and the groove is sealed by fiber F-P sonic sensor sensitive diaphragm, so that metal shell is close to non-total
One end of vibration PA cell forms F-P cavity；The metal shell is provided with fiber F-P sonic sensor probe source incident optical,
Probe source enters F-P cavity by the fiber F-P sonic sensor probe source incident optical, and the metal shell is provided with light
Acoustically-driven light source incidence optical fiber, the optoacoustic motivate light source incident optical that one end of off-resonance PA cell is provided with fiber optic collimator
Device, optoacoustic excitation light source enter off-resonance PA cell by optoacoustic excitation light source incident optical and optical fiber collimator.
Further, the porous scattering medium is solid porous scattering material, including zirconium dioxide, aluminum oxide
And titanium dioxide.
The principle of the enhanced gas sensing probe of scattering provided by the invention are as follows: optoacoustic motivates light source to pass through optoacoustic excitation light
Source incident optical and optical fiber collimator enter in off-resonance PA cell, are absorbed by under test gas, porous scattering medium increase to
Survey the absorption light path of gas；End face and fiber F-P sound of the probe source in fiber F-P sonic sensor probe source incident optical
Wave sensor sensitive diaphragm surface is reflected respectively, and two beam reflected lights interfere effect and generate interference fringe；Due to be measured
The optoacoustic effect of gas, off-resonance PA cell is interior to generate periodic photoacoustic signal, so as to cause the long generating period of chamber of F-P cavity
The variation of property；Change of cavity length causes the drift of interference fringe, obtains the information of gas concentration by the variation of demodulated interferential striped；
Since solid porous scattering material is wide band absorption to optoacoustic excitation light source, and under test gas has selection absorbability to light, inhales
It is relatively narrow to receive crest line width.Since the linewidth difference of the two is away under test gas, which absorbs the photoacoustic signal generated, to be resolved out.
On the other hand, trace gas is detected based on the above-mentioned enhanced gas sensing probe of scattering the present invention provides a kind of
Method, the method the following steps are included:
1) air inlet and air outlet are opened, so that under test gas enters off-resonance PA cell；
2) optoacoustic excitation light source enters off-resonance PA cell, light by optoacoustic excitation light source incident optical and optical fiber collimator
Acoustically-driven light source random scatter in the porous scattering medium in off-resonance PA cell, to increase the absorption light path of under test gas；
3) in step 2) under test gas generate absorb light path and the photoacoustic signal that enhances causes light due to increasing gas
The periodic vibration of fine F-P sonic sensor sensitive diaphragm, and then the chamber length of F-P cavity is made to change；
4) probe source enters F-P cavity by fiber F-P sonic sensor probe source incident optical, and reflected two
Shu Guang interferes effect and generates interference fringe；
5) pass through demodulation step 4) in the variation of interference fringe that generates determine the long variable quantity of F-P cavity chamber, and then measure
The concentration of under test gas.
The invention has the advantages that: introducing for porous scattering material can be at the absorption light of the raising gas of the order of magnitude
Journey increases the amplitude of photoacoustic signal, improves the detection sensitivity of trace gas；Utilize high sensitivity optical fiber F-P sonic sensor
It as acoustic detection unit, can be effectively matched with off-resonance photoacoustic cell, while be provided for remote telemetering and multimetering
It is convenient, realize the all-fiber of sensing unit；Motivate incident optical, non-resonant photoacoustic cell and the fiber F-P sound wave of light source
The Integration Design of sensor, reduces the size of whole system, not only makes system that there is electromagnetism to be immunized, anti-vibration interference energy
Power, and the job stability and reliability that system is also substantially increased without mechanical component design at sensor measuring end.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the enhanced gas sensing probe of scattering provided in the embodiment of the present invention.
In figure: 1 metal shell；2 off-resonance PA cells；3 porous scattering mediums；4 fiber F-P sonic sensor sensitive membranes
Piece；5 gold-plated reflecting mirrors；6 optoacoustics motivate light source incident optical；7 optical fiber collimators；8 fiber F-P sonic sensor probe sources enter
Penetrate optical fiber；9F-P chamber；10 air inlets；11 gas outlets.
Specific embodiment
Below in conjunction with attached drawing and technical solution, a specific embodiment of the invention is further illustrated.
It is to be appreciated that appended attached drawing is not proportionally drawn, and merely to illustrating each of basic principle of the invention
The suitably simplified technique of painting of kind feature.The specific design feature of invention disclosed herein include for example specific size, direction,
Position and shape will be partly determined by the specific application and use environment.
In appended multiple attached drawings, same or equivalent component (element) is with the index of identical appended drawing reference.
Fig. 1 is the structural schematic diagram of the enhanced gas sensing probe of scattering provided in the embodiment of the present invention.Referring to Fig. 1,
The enhanced gas sensing probe of the scattering provided in the present embodiment includes metal shell 1, off-resonance PA cell 2, porous scattering
Medium 3, fiber F-P sonic sensor sensitive diaphragm 4, gold-plated reflecting mirror 5, optoacoustic motivate light source incident optical 6, optical fiber collimator
7, fiber F-P sonic sensor probe source incident optical 8, F-P cavity 9, air inlet 10 and gas outlet 11.Wherein, metal shell 1
It is detachably connected, such as is threadedly coupled with one end of off-resonance PA cell 2, be conveniently replaceable porous scattering medium 3.Off-resonance optoacoustic
The fixed gold-plated reflecting mirror of the other end of chamber 2, to improve the reflectivity of excitation light source.
Air inlet 10 and gas outlet 11 are provided on the side wall of off-resonance PA cell 2, air inlet 10 and gas outlet 11 are logical
Cross solenoid valve control opening and closing.Under test gas passes through air inlet 10 respectively and gas outlet 11 enters 2 He of off-resonance PA cell
It is discharged from off-resonance PA cell 2.
In the present embodiment, the inside of off-resonance PA cell is filled with porous scattering medium 3.In a specific embodiment party
In case, porous scattering medium 3 is solid porous scattering material, mainly includes zirconium dioxide, aluminum oxide and carbon dioxide three
Kind material.
The surface that metal shell 1 is connected with off-resonance PA cell 2 has groove, which is sensed by fiber F-P sound wave
Device sensitive diaphragm 4 seals, so that metal shell 1 forms F-P cavity 9 close to one end of off-resonance PA cell 2.Metal shell 1
It is provided with fiber F-P sonic sensor probe source incident optical 8, probe source is detected by the fiber F-P sonic sensor
Light source incidence optical fiber 8 enters F-P cavity 9.Metal shell 1 is provided with optoacoustic excitation light source incident optical 6, and optoacoustic excitation light source enters
It penetrates optical fiber 6 and one end of off-resonance PA cell 2 is provided with optical fiber collimator 7, optoacoustic motivates light source to motivate light source by optoacoustic
Incident optical 6 and optical fiber collimator 7 enter off-resonance PA cell 2.
The optoacoustic excitation light source of the enhanced gas sensing probe of scattering provided in the present embodiment by optical fiber collimator 7 into
Enter in off-resonance PA cell 2, light random scatter in porous scattering medium 3 increases under test gas in off-resonance PA cell 2
Absorb light path.By Beer-Lambert law Δ I=I0(1-e-CαL) it is found that increasing absorption light path can effectively improve gas
The size for absorbing light intensity, to increase photoacoustic signal.Enhanced photoacoustic signal causes fiber F-P sonic sensor sensitive diaphragm
4 periodic vibration, and the chamber length of F-P cavity 9 is made to change.Probe source enters in fiber F-P sonic sensor probe source
It penetrates 8 end face of optical fiber and 4 surface of fiber F-P sonic sensor sensitive diaphragm to reflect respectively, two beam reflected lights interfere work
With generation interference fringe.The long variable quantity of the chamber of F-P cavity 9 can be determined by the variation of demodulated interferential striped, and F-P cavity 9
The long variable quantity of chamber with gas concentration at approximate proportional relation, to realize the measurement of under test gas concentration.
Using the enhanced gas sensing probe detection trace gas of scattering in the present embodiment the following steps are included:
1) air inlet 10 and gas outlet 11 are opened, so that under test gas enters off-resonance PA cell 2；
2) optoacoustic excitation light source enters off-resonance PA cell by optoacoustic excitation light source incident optical 6 and optical fiber collimator 7
2, optoacoustic motivates porous scattering medium 3 internal random scattering of the light source in off-resonance PA cell 2, to increase the suction of under test gas
Receive light path；
3) in step 2) under test gas generate absorb light path and the photoacoustic signal that enhances causes light due to increasing gas
The periodic vibration of fine F-P sonic sensor sensitive diaphragm 4, and then the chamber length of F-P cavity 9 is made to change；
4) probe source enters F-P cavity 9 by fiber F-P sonic sensor probe source incident optical 8, reflected
Two-beam interferes effect and generates interference fringe；
5) pass through demodulation step 4) in the variation of interference fringe that generates determine the long variable quantity of 9 chamber of F-P cavity, and then measure
The concentration of under test gas.
To sum up, the enhanced gas sensing probe of scattering provided by the invention can significantly improve light using porous scattering material
The characteristics of journey, integrated porous scattering material, miniaturization off-resonance photoacoustic cell and high sensitivity optical fiber F-P sonic sensor are constituted
Enhanced gas sensing probe is scattered, which has the advantages that high sensitivity, small in size, anti-interference and can telemetering.It should
Scheme will be enlarged by the application prospect of high-precision photo-acoustic spectrometer, provide a kind of new solution party for high sensitivity Trace gas detection
Case.
The description that foregoing exemplary embodiment is presented is merely illustrative of the technical solution of the present invention, and is not intended to become
Without missing, it is also not intended to limit the invention to described precise forms.Obviously, those skilled in the art's root
Many changes are made according to above-mentioned introduction and variation is all possible.The exemplary embodiment was chosen and described for the sake of explanations
Certain principles and practical application of the invention, so that others skilled in the art are easy to understand, realize and utilize
Various illustrative embodiments of the invention and its various selection forms and modification.Protection scope of the present invention is intended to by institute
Attached claims and its equivalents are limited.
Claims (3)
1. a kind of enhanced gas sensing probe of scattering, which is characterized in that the enhanced gas sensing probe of the scattering includes
It is metal shell (1), off-resonance PA cell (2), porous scattering medium (3), fiber F-P sonic sensor sensitive diaphragm (4), gold-plated
Reflecting mirror (5), optoacoustic excitation light source incident optical (6), optical fiber collimator (7), fiber F-P sonic sensor probe source are incident
Optical fiber (8), F-P cavity (9), air inlet (10) and gas outlet (11)；Wherein,
The metal shell (1) and one end of off-resonance PA cell (2) are detachably connected, the other end of off-resonance PA cell (2)
Fixed gold-plated reflecting mirror (5)；
Be provided with air inlet (10) and gas outlet (11) on the side wall of the off-resonance PA cell (2), the air inlet (10) and
Gas outlet (11) is opened and closed by solenoid valve control, and under test gas passes through the air inlet (10) and gas outlet respectively
(11) enter off-resonance PA cell (2) and the discharge from off-resonance PA cell (2)；
The inside of the off-resonance PA cell (2) is filled with porous scattering medium (3)；
The surface that the metal shell (1) is connected with off-resonance PA cell (2) has groove, and the groove is by fiber F-P sound
Wave sensor sensitive diaphragm (4) sealing, so that metal shell (1) forms F-P cavity (9) close to the one end of off-resonance PA cell (2)；
The metal shell (1) is provided with fiber F-P sonic sensor probe source incident optical (8), and probe source is by being somebody's turn to do
Fiber F-P sonic sensor probe source incident optical (8) enters F-P cavity (9)；
The metal shell (1) is provided with optoacoustic excitation light source incident optical (6), and optoacoustic excitation light source incident optical (6) is leaned on
One end of nearly off-resonance PA cell (2) is provided with optical fiber collimator (7), and optoacoustic motivates light source to motivate light source incident light by optoacoustic
Fine (6) and optical fiber collimator (7) enter off-resonance PA cell (2).
2. the enhanced gas sensing probe of scattering according to claim 1, which is characterized in that the porous scattering medium
It (3) is solid porous scattering material, including zirconium dioxide, aluminum oxide and titanium dioxide.
3. a kind of method based on the enhanced gas sensing probe detection trace gas of scattering of any of claims 1 or 2, special
Sign is, the method the following steps are included:
1) air inlet (10) and gas outlet (11) are opened, so that under test gas enters off-resonance PA cell (2)；
2) optoacoustic excitation light source enters off-resonance PA cell by optoacoustic excitation light source incident optical (6) and optical fiber collimator (7)
(2), optoacoustic motivates light source random scatter in the porous scattering medium (3) in off-resonance PA cell (2), to increase under test gas
Absorption light path；
3) in step 2) under test gas generate absorb light path and the photoacoustic signal that enhances causes optical fiber due to increasing gas
The periodic vibration of F-P sonic sensor sensitive diaphragm (4), and then the chamber length of F-P cavity (9) is made to change；
4) probe source enters F-P cavity (9) by fiber F-P sonic sensor probe source incident optical (8), reflected
Two-beam interferes effect and generates interference fringe；
5) pass through demodulation step 4) in the variation of interference fringe that generates determine the long variable quantity of F-P cavity (9) chamber, and then measure to
Survey the concentration of gas.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110346302A (en) * | 2019-07-20 | 2019-10-18 | 大连理工大学 | The resonant gas sensor of diaphragm and detection system based on poly |
| CN110823809A (en) * | 2019-12-03 | 2020-02-21 | 大连理工大学 | Anti-electromagnetic interference in-situ measurement system and method for dissolved gas in oil |
| WO2021158993A1 (en) * | 2020-02-07 | 2021-08-12 | Lumileds Llc | Gas sensing with porous scattering material |
| CN114235707A (en) * | 2021-12-17 | 2022-03-25 | 浙江树人学院（浙江树人大学） | Hydrogen detection device based on palladium absorption |
| WO2022121457A1 (en) * | 2020-12-08 | 2022-06-16 | 国网安徽省电力有限公司电力科学研究院 | Optical fiber photoacoustic sensing probe and sensing system resistant to ambient noise interference |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102590092A (en) * | 2012-03-07 | 2012-07-18 | 哈尔滨工业大学 | Absorption optical path lengthening device and method for laser absorption spectroscopy technology |
| CN104101568A (en) * | 2013-04-03 | 2014-10-15 | 徐元哲 | Device for monitoring SF6 content of air based on photoacoustic spectrum technology |
| CN109060106A (en) * | 2018-09-11 | 2018-12-21 | 中国科学院电子学研究所 | Two-chamber combines interference of light sonic transducer probe and its sensor-based system |
| CN109490217A (en) * | 2019-01-07 | 2019-03-19 | 大连理工大学 | A kind of multi-cavity superposing type off-resonance photoacoustic cell and gas detecting system |
-
2019
- 2019-04-08 CN CN201910276413.5A patent/CN109870414A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102590092A (en) * | 2012-03-07 | 2012-07-18 | 哈尔滨工业大学 | Absorption optical path lengthening device and method for laser absorption spectroscopy technology |
| CN104101568A (en) * | 2013-04-03 | 2014-10-15 | 徐元哲 | Device for monitoring SF6 content of air based on photoacoustic spectrum technology |
| CN109060106A (en) * | 2018-09-11 | 2018-12-21 | 中国科学院电子学研究所 | Two-chamber combines interference of light sonic transducer probe and its sensor-based system |
| CN109490217A (en) * | 2019-01-07 | 2019-03-19 | 大连理工大学 | A kind of multi-cavity superposing type off-resonance photoacoustic cell and gas detecting system |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110346302A (en) * | 2019-07-20 | 2019-10-18 | 大连理工大学 | The resonant gas sensor of diaphragm and detection system based on poly |
| CN110346302B (en) * | 2019-07-20 | 2021-08-10 | 大连理工大学 | Diaphragm resonance type gas sensor based on poly-chloro-p-xylene and detection system |
| CN110823809A (en) * | 2019-12-03 | 2020-02-21 | 大连理工大学 | Anti-electromagnetic interference in-situ measurement system and method for dissolved gas in oil |
| WO2021158993A1 (en) * | 2020-02-07 | 2021-08-12 | Lumileds Llc | Gas sensing with porous scattering material |
| US11740179B2 (en) | 2020-02-07 | 2023-08-29 | Lumileds Llc | Gas sensing system having quadric reflective surface |
| WO2022121457A1 (en) * | 2020-12-08 | 2022-06-16 | 国网安徽省电力有限公司电力科学研究院 | Optical fiber photoacoustic sensing probe and sensing system resistant to ambient noise interference |
| CN114235707A (en) * | 2021-12-17 | 2022-03-25 | 浙江树人学院（浙江树人大学） | Hydrogen detection device based on palladium absorption |
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