CN117309764A - Multi-gas concentration measuring instrument based on integral cavity - Google Patents
Multi-gas concentration measuring instrument based on integral cavity Download PDFInfo
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- CN117309764A CN117309764A CN202311240087.5A CN202311240087A CN117309764A CN 117309764 A CN117309764 A CN 117309764A CN 202311240087 A CN202311240087 A CN 202311240087A CN 117309764 A CN117309764 A CN 117309764A
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 13
- 230000007246 mechanism Effects 0.000 claims abstract description 9
- 238000001914 filtration Methods 0.000 claims abstract description 3
- 238000001035 drying Methods 0.000 claims description 12
- 230000000087 stabilizing effect Effects 0.000 claims description 10
- 239000004642 Polyimide Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 8
- 229920001721 polyimide Polymers 0.000 claims description 8
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 6
- 238000010926 purge Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 abstract description 7
- 239000007789 gas Substances 0.000 description 53
- 238000000034 method Methods 0.000 description 10
- 238000010521 absorption reaction Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 239000013618 particulate matter Substances 0.000 description 4
- 229910001868 water Inorganic materials 0.000 description 4
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 229920000557 Nafion® Polymers 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000001110 calcium chloride Substances 0.000 description 1
- 229910001628 calcium chloride Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000002274 desiccant Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a multi-gas concentration measuring instrument based on an integral cavity, which belongs to the technical field of gas detection and comprises an off-axis integral cavity system, an environment control system, a sample gas acquisition system and an electric control system, wherein the environment control system is used for ensuring that the off-axis integral cavity system works under stable pressure and temperature, the sample gas acquisition system is used for filtering out particulate matters and water vapor in sample gas and sending the gas to be measured into the off-axis integral cavity system; the off-axis integrating cavity system comprises a laser beam combiner, a laser collimator, an incidence angle fine-tuning mechanism, a cavity, a focusing mirror and a detector; the electric control system is provided with a plurality of lasers, each laser is provided with a laser driving plate, laser emitted by the plurality of lasers enters the laser collimator after being combined by the laser beam combiner and enters the detector after passing through the incidence angle fine tuning mechanism, the cavity and the focusing mirror.
Description
Technical Field
The invention relates to the technical field of gas detection, in particular to a multi-gas concentration measuring instrument based on an integral cavity.
Background
The measurement of gas concentration is typically chemical analysis, electrochemical methods, gas chromatography, and optical methods. The optical method has high response speed, high detection precision, no need of complex sampling and other methods, and has very wide application. Optics are subdivided into cavity ring down techniques, integrating cavity techniques and multipass cell techniques. The integrating cavity technology is a technology for acquiring transmitted weak energy signals by utilizing multiple reflections of laser between two cavity mirrors and finally analyzing the information in the cavity by incidence of the laser into an optical resonant cavity. The integrating cavity technology has the characteristics of good stability, low cost, high detection precision and the like. Therefore, the gas concentration measurement technology based on the integral cavity is increasingly widely applied.
In the prior art, chinese patent CN114279996B discloses a "system for detecting hydrogen peroxide concentration in gas phase based on an off-axis integrating cavity", which is a detecting instrument for detecting the concentration of water (H20) and hydrogen peroxide (H2O 2) by using a direct absorption method and an off-axis integrating cavity; chinese patent CN112557322a discloses a device and a method for measuring gas concentration in dual optical paths based on an off-axis integrating cavity system, wherein the method is a method for measuring gas concentration in the same off-axis integrating cavity by using two lasers; chinese patent CN106707524B discloses a "transmission enhanced off-axis integrating cavity structure", which is to add a high reflector off-axis integrating cavity in front of the incident lens, so that the signal intensity can be increased by using the laser reflected back to the cavity to improve the signal-to-noise ratio, and the above-mentioned prior art has drawbacks;
1) Patent CN114279996B and patent CN112557322a can be used to detect two gases, but patent CN114279996B requires two collimators and two detectors, which is costly, and one of the laser beams does not pass through the integrating cavity, so that it is difficult to measure the weakly absorbed, low concentration gas; the patent CN112557322A also uses two sets of collimators to couple laser into the off-axis integrating cavity, so that not only is the debugging difficult, but also the detection of different gases is carried out in a time-sharing manner, and the simultaneous detection cannot be carried out;
2) In the prior art, the temperature and the pressure of the integral cavity are not controlled, the temperature and the pressure are acquired, inversion is carried out according to an algorithm, and the accuracy is difficult to ensure by algorithm correction when the temperature and the pressure change in a large range occurs due to the sensitivity of the absorption intensity to the temperature and the pressure;
3) Meanwhile, in the prior art, the sample gas is directly introduced into the integrating cavity, which is naturally feasible in a laboratory environment, but when the concentration content of components in factories, fields or the atmosphere is actually detected, the problem that particulate matters pollute a high-reflection mirror in the cavity, the problem of water vapor interference and the problem that water vapor is condensed on the reflection mirror at the dew point temperature are encountered.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a multi-gas concentration measuring instrument based on an integral cavity, which can at least solve one technical problem in the prior art.
In order to achieve the above object, the present invention provides the following technical solutions:
the invention discloses a multi-gas concentration measuring instrument based on an integral cavity, which comprises the following components:
the system comprises an off-axis integral cavity system, an environment control system, a sample gas acquisition system and an electric control system, wherein the environment control system is used for ensuring that the off-axis integral cavity system works under stable pressure and temperature, and the sample gas acquisition system is used for filtering out particulate matters and water vapor in sample gas and sending the gas to be detected into the off-axis integral cavity system;
the off-axis integrating cavity system comprises a laser beam combiner, a laser collimator, an incidence angle fine-tuning mechanism, a cavity, a focusing mirror and a detector;
the electric control system is provided with a plurality of lasers, each laser is provided with a laser driving plate, and laser emitted by the lasers enters the laser collimator after being synthesized by the laser beam combiner, and enters the detector after passing through the incidence angle fine tuning mechanism, the cavity and the focusing mirror.
Further, the environment control system comprises a temperature control device, a temperature sensor, a pressure stabilizing valve, a mass flowmeter and a throttle valve;
the temperature control device and the temperature sensor are arranged in the cavity, the mass flowmeter and the pressure stabilizing valve are sequentially connected to a pipeline of an air inlet of the cavity, the input end of the pressure stabilizing valve is connected with the output end of the sample gas collecting system, and the throttle valve is arranged on a pipeline of an air outlet of the cavity.
Further, the temperature control device is a polyimide heating plate or a TEC refrigerating plate.
Further, the sample gas collection system comprises a particulate filter, a sample air pump with an input end connected with the particulate filter, and a drying pipe with an input end connected with an output end of the sample air pump, wherein the drying pipe is further connected with a purging air pump through a pipeline.
Further, the electric control system also comprises a data acquisition card connected with the computer, wherein the input end of the data acquisition card is connected with the detector, and the output end of the data acquisition card is connected with the laser driving plate.
Further, a front reflecting mirror is arranged at one end of the cavity, a rear reflecting mirror is arranged at the other end of the cavity, and the front reflecting mirror and the rear reflecting mirror are arranged in parallel.
Further, the detector is an InGaAs detector.
Further, the lasers include three.
In the technical scheme, the multi-gas concentration measuring instrument based on the integral cavity has the beneficial effects that:
the multi-gas concentration measuring instrument based on the integral cavity, which is designed by the invention, adopts a group of collimators and a detector for various gases to be measured, reduces the cost and the debugging difficulty, and can detect various gas information simultaneously by combining wavelength modulation by adopting the frequency division multiplexing technology. The instrument is provided with a pressure and temperature control system at the same time, so that the sample gas can be detected under a stable environmental condition, and meanwhile, the sample gas of the instrument can pass through the particulate filter and the drying tube before entering the integrating cavity, so that the high-reflection mirror cannot be polluted. The multi-gas concentration measuring instrument based on the integral cavity is an instrument which considers complex environments and can really and efficiently work in severe environments such as outdoors, factories and the like.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings may be obtained according to these drawings for a person having ordinary skill in the art.
Fig. 1 is a schematic diagram of a multiple gas concentration meter based on an integrating cavity in accordance with the present disclosure.
Reference numerals illustrate:
a laser beam combiner 101; a laser collimator 102; an incidence angle fine adjustment mechanism 103; a front mirror 104; a rear mirror 105; a focusing mirror 106; an InGaAs detector 107; a cavity 108; an air inlet 109; an air outlet 110;
polyimide heating sheet 201; PT1000 temperature sensor 202; a pressure stabilizing valve 203; a mass flowmeter 204; a throttle valve 205;
a particulate filter 301; a sample pump 302; a drying pipe 303; a purge air pump 304;
a laser 401; a laser drive plate 402; a data acquisition card DAQ403; a computer 404.
Detailed Description
In order to make the technical scheme of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings.
See fig. 1;
the invention discloses a multi-gas concentration measuring instrument based on an integral cavity, which comprises the following components:
the system comprises an off-axis integrating cavity system, an environment control system, a sample gas acquisition system and an electric control system;
the off-axis integrating cavity system comprises: a laser combiner 101, a laser collimator 102, an incidence angle fine tuning mechanism 103, a front mirror 104, a back mirror 105, a focusing mirror 106, a detector, a cavity 108, an air inlet 109, and an air outlet 110.
The detector in the off-axis integrating cavity system is an InGaAs detector 107;
the front mirror 104 and the back mirror 105 are mounted parallel to each other on the cavity 108 to form an off-axis integrating cavity. The air inlet 109 and the air outlet 110 are arranged at two ends of the cavity, so that rapid gas exchange can be realized, and different lasers in the front and back reflector working wave bands and the InGaAs detector 107 working wave bands are required to be selected to correspond to absorption peaks of different gases in order to realize detection of different gases in the same integrating cavity. The laser is coupled into the same optical fiber through a laser beam combiner 101, collimated into space light through a laser collimator 102, and enters the off-axis integrating cavity through a fine adjustment mechanism 103 with an incident angle.
The environmental control system includes a temperature control device, a temperature sensor 202, a pressure stabilizing valve 203, a mass flow meter 204, and a throttle valve 205.
The temperature control device in the environment control system is a polyimide heating plate 201 or a TEC refrigerating plate, that is to say, the polyimide heating plate 201 can be replaced by the TEC refrigerating plate according to the requirement for temperature control;
the temperature sensor 202 is a Pt1000 temperature sensor, but of course, the temperature sensor can also be replaced by a sensitive resistor or thermocouple temperature sensor with other resistance values, and the embodiment takes the polyimide heating plate 201 and the Pt1000 temperature sensor 202 as examples;
among them, the polyimide heating sheet 201 and PT1000202 are responsible for controlling the temperature of the chamber. In order to accurately control the temperature of the cavity, the whole cavity is divided into three areas along the axis, the temperature control area of the cavity can be increased or reduced as required, a group of polyimide heating plates 201 and a pt1000 temperature sensor 202 are arranged in each area, and the three areas are respectively subjected to temperature control. The pressure stabilizing valve 203, the mass flowmeter 204 and the throttle valve 205 are responsible for controlling the pressure in the cavity, the mass flowmeter 204 can be replaced by a steady flow valve according to the requirement, and the sample gas is pumped by the sample gas pump 302 and passes through the pressure stabilizing valve 203, so that the pressure of the gas before entering the mass flowmeter 204 is stable. The sample gas at a steady pressure is subjected to closed loop control by the mass flowmeter 204, which will produce a steady flow of gas into the cavity 8. The throttle valve 205 at the rear end can adjust the air outlet flow, thereby adjusting the pressure in the cavity 8. The environment control system ensures that the off-axis integrating cavity system works under stable pressure and temperature, and prevents drift and instability of gas absorption caused by external environment change.
The sample gas collection system includes a particulate filter 301, a sample pump 302, a dry tube 303, and a purge pump 304.
The operating environment of the measuring instrument includes urban, field and factory environments, and the sample gas of these environments typically contains a large amount of particulate matter and water vapor. Particulate matter enters the cavity and contaminates the high precision mirror, increasing the scattering of the laser and reducing the specular reflectivity. If the ambient temperature is lower than the dew point temperature, water vapor enters the cavity, then the water vapor is condensed into liquid water to pollute the reflecting mirror, and absorption peaks of the water vapor in a plurality of wave bands are overlapped with the absorption peaks of the gas to be measured, so that the measurement accuracy is affected. The sample gas collection system therefore functions to filter out particulate matter and water vapor from the sample gas and to deliver the gas to be measured into the chamber. Wherein the outside of the particulate filter 301 is directly connected with the gas to be sampled, and is connected with the sample sucking pump 302 through a pipeline. The particulate filter 301 uses a HEPA H13 or higher grade filter element to effectively remove particulate matter of a common size from the air. The gas pumped by the sample pump 302 is sent to the drying tube 303, preferably, the drying tube 303 is a nafion tube, the material is composed of two layers, the sample gas enters the inner layer, and water molecules are selectively transmitted to the outer layer through the affinity difference of the tube wall to different molecules, and other gas molecules are not affected. The purging air pump 304 is connected to the outer layer of the drying pipe 303, and the outside is communicated with the atmosphere to blow out the high-humidity gas on the outer layer of the drying pipe, so that the drying pipe 303 can continuously work. Of course, the drying tube 303 can also be replaced by a cold well or an adsorption type drying agent in the prior art, such as molecular sieve, calcium chloride, color-changing silica gel, etc.;
the electronic control system comprises a laser 401, a laser drive board 402, a data acquisition card 403 and a computer 404.
The data acquisition card 403 may be other digital-to-analog conversion chips in the prior art, and the computer 404 may be replaced by other micro-processing chips such as DSP, FPGA, etc.;
since different gases have different absorption peaks, lasers 401 of different wavelengths are required. The number of lasers 401 may be increased or decreased as needed, and in this embodiment, only three lasers 401 are used as examples to detect methane (1651 nm), carbon dioxide (1578 nm), and carbon monoxide (1566 nm), respectively. Each laser 401 requires a laser driver board 402 to drive, which can control the temperature parameters and current modulation of the laser 401. The data acquisition card 403 sends a control signal to the laser driving board 402, and the modulation signal of the laser 401 is composed of two parts, one part is a sawtooth wave signal of 10Hz, and the wavelength output by the laser 401 is scanned to complete absorption peak. The sawtooth wave signals of the three lasers have the same frequency and phase; the other part is a high frequency sine wave modulation component, and the frequency is usually above 1 kHz. The part of signals provide modulation for the phase-locked amplifier, so that the signal-to-noise ratio can be improved to extract weak signals. Under the working of multiple lasers, two working modes, time division multiplexing and frequency division multiplexing, are adopted, the lasers work in sequence under the time division multiplexing, the detector only receives the signal of one laser at a certain moment, only analyzes the concentration of one gas, and no interference is generated. In the frequency division multiplexing working mode, the sine high-frequency modulation of the laser adopts different frequencies, namely 1kHz, 1.2kHz and 1.5kHz, and is overlapped with sawtooth waves to modulate the laser. The InGaAs photodetector 107 receives signals of three lasers and inputs the signals to the data acquisition card 403, the data acquisition card 403 converts analog voltage quantity into digital quantity and transmits the digital quantity to the computer 404, and a phase-locked amplifier in the computer 404 demodulates the sinusoidal signals with different frequencies to analyze the concentration of different gases to be detected.
While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that modifications may be made to the described embodiments in various different ways without departing from the spirit and scope of the invention. Accordingly, the drawings and description are to be regarded as illustrative in nature and not as restrictive of the scope of the invention, which is defined by the appended claims.
Claims (8)
1. A multiple gas concentration meter based on an integrating cavity, comprising:
the system comprises an off-axis integral cavity system, an environment control system, a sample gas acquisition system and an electric control system, wherein the environment control system is used for ensuring that the off-axis integral cavity system works under stable pressure and temperature, and the sample gas acquisition system is used for filtering out particulate matters and water vapor in sample gas and sending the gas to be detected into the off-axis integral cavity system;
the off-axis integrating cavity system comprises a laser beam combiner (101), a laser collimator (102), an incidence angle fine-tuning mechanism (103), a cavity (108), a focusing mirror (106) and a detector;
the electric control system is provided with a plurality of lasers (401), each laser (401) is provided with a laser driving plate (402), and laser emitted by the plurality of lasers (401) enters the laser collimator (102) after being synthesized by the laser beam combiner (101) and enters the detector after passing through the incidence angle fine tuning mechanism (103), the cavity (108) and the focusing mirror (106).
2. The integrating-cavity-based multi-gas concentration meter of claim 1 wherein;
the environment control system comprises a temperature control device, a temperature sensor (202), a pressure stabilizing valve (203), a mass flowmeter (204) and a throttle valve (205);
the temperature control device and the temperature sensor (202) are installed in the cavity (108), the mass flowmeter (204) and the pressure stabilizing valve (203) are sequentially connected to a pipeline of an air inlet of the cavity (108), an input end of the pressure stabilizing valve (203) is connected with an output end of the sample gas collecting system, and the throttle valve (205) is installed on a pipeline of an air outlet of the cavity (108).
3. The multiple gas concentration measuring instrument based on an integral cavity according to claim 2, wherein the multiple gas concentration measuring instrument comprises a plurality of sensors;
the temperature control device is a polyimide heating plate 201 or a TEC refrigerating plate.
4. The integrating-cavity-based multi-gas concentration meter of claim 1 wherein;
the sample gas collection system comprises a particulate filter (301), a sample air pump (302) with an input end connected with the particulate filter (301), and a drying pipe (303) with an input end connected with an output end of the sample air pump (302), wherein the drying pipe (303) is further connected with a purging air pump (304) through a pipeline.
5. The integrating-cavity-based multi-gas concentration meter of claim 1 wherein;
the electronic control system further comprises a data acquisition card (403) connected with the computer, wherein the input end of the data acquisition card (403) is connected with the detector, and the output end of the data acquisition card is connected with the laser driving plate (402).
6. The integrating-cavity-based multi-gas concentration meter of claim 1 wherein;
a front reflecting mirror (104) is arranged at one end of the cavity (108), a rear reflecting mirror (105) is arranged at the other end of the cavity, and the front reflecting mirror (104) and the rear reflecting mirror (105) are arranged in parallel.
7. A multiple gas concentration measuring instrument based on an integrating cavity according to any of claims 1-6, characterized in that;
the detector is an InGaAs detector (107).
8. A multiple gas concentration measuring instrument based on an integrating cavity according to any of claims 1-6, characterized in that;
the laser (401) comprises three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311240087.5A CN117309764A (en) | 2023-09-25 | 2023-09-25 | Multi-gas concentration measuring instrument based on integral cavity |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311240087.5A CN117309764A (en) | 2023-09-25 | 2023-09-25 | Multi-gas concentration measuring instrument based on integral cavity |
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| CN117309764A true CN117309764A (en) | 2023-12-29 |
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| CN202311240087.5A Pending CN117309764A (en) | 2023-09-25 | 2023-09-25 | Multi-gas concentration measuring instrument based on integral cavity |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117589294A (en) * | 2024-01-19 | 2024-02-23 | 中国科学院长春光学精密机械与物理研究所 | Spherical integrating cavity structure and off-axis integrating cavity gas measuring instrument |
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2023
- 2023-09-25 CN CN202311240087.5A patent/CN117309764A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117589294A (en) * | 2024-01-19 | 2024-02-23 | 中国科学院长春光学精密机械与物理研究所 | Spherical integrating cavity structure and off-axis integrating cavity gas measuring instrument |
| CN117589294B (en) * | 2024-01-19 | 2024-04-09 | 中国科学院长春光学精密机械与物理研究所 | Spherical integrating cavity structure and off-axis integrating cavity gas measuring instrument |
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