CN204808718U - Extension light source interferometry collimating system - Google Patents
Extension light source interferometry collimating system Download PDFInfo
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- CN204808718U CN204808718U CN201520388461.0U CN201520388461U CN204808718U CN 204808718 U CN204808718 U CN 204808718U CN 201520388461 U CN201520388461 U CN 201520388461U CN 204808718 U CN204808718 U CN 204808718U
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- light source
- interferometry
- interference
- amici prism
- expansion
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- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The utility model relates to an extension light source interferometry collimating system, by laser lamp -house (1), beam splitting Prism (2), coupled system (3), interference chamber (4), collimating mirror (5), imaging lens (6), CCD (7), standard optical flat (8) and rotatory hair glass (9) constitution, standard optical flat (8) sets up between laser lamp -house (1) and beam splitting Prism (2), rotatory hair glass (9) sets up between beam splitting Prism (2) and coupled system (3). The utility model provides a demand of extension light source interferometry collimating system in order to satisfy interference measuring apparatus can the analysis verifies that optical system wavefront aberration to interference fringe's influence, can be used for the matched edge along the distortion and distortion influence to the interference pattern of the aberration of visual field through emulation.
Description
Technical field
The utility model relates to a kind of expansion light source interferometry colimated light system based on expansion light source, belongs to interferometer field.
Background technology
Interference is the most strictly, the most effectively proving of the undulatory property of light, and this phenomenon is due to two bundle or the overlaps of multi-beam, makes the result of energy volume density spatially regular distribution.Optical interferometry method is as one of the most traditional, effective means detecting high-accuracy optical element and system, and a large amount of is applied among scientific research and commercial production.In actual use, present stage, interferometer adopted laser instrument as lighting source mostly, and laser instrument has extremely strong Time and place coherence, therefore, in interference testing process, do not need the restriction considering that interference cavity is long, interference fringe just can be made to have good contrast, and along with the development of electronics and computer technology, the position interference detection technique of generation, make measuring limit improve a more than order of magnitude by traditional λ/10, and there is very high repeatability.But, just because of the high coherence that laser has, although it reduces the use difficulty of interferometer, but due to the extreme sensitivity of optical interference, the defects such as the microcosmic hole point produced in optical element process and element surface pollute the scattered light produced and coherence stack can occur, in interferogram, there will be the coherent noises such as many bull eye rings or target center, they change the space structure of interferogram to a certain extent, thus cause the measuring error of tested surface face type or wavefront shape.
The commercial phase-shifting interferometer of present stage, often be subject to having a strong impact on of coherent noise, the precision of interference testing is difficult to be further enhanced, and the optical element face type information detected often lost the face type error of part high band, cannot meet the testing requirement to the optical elements of large caliber in high power solid-state laser drive unit.Just because of this, suppress the coherent noise of system, improve the signal to noise ratio (S/N ratio) of interference system, expand its measurement space frequency range, eliminate non-measured face interference of stray light, be one of core difficult problem of development heavy caliber high resolving power interference system always.
Utility model content
In order to overcome the deficiencies in the prior art, resolving the problem of prior art, making up the deficiency of existing existing product in the market.
The utility model provides a kind of expansion light source interferometry colimated light system, be made up of LASER Light Source, Amici prism, coupled system, interference cavity, collimating mirror, imaging len, CCD, standard optic plane glass crystal and rotating ground glass, described standard optic plane glass crystal is arranged between LASER Light Source and Amici prism, and described rotating ground glass is arranged between Amici prism and coupled system.
Preferably, above-mentioned imaging len is arranged between collimating mirror and CCD, and described coupled system is made up of multiple lens.
Preferably, above-mentioned LASER Light Source is monochromatic source, and described interference cavity is made up of reference mirror and measured lens.
Preferably, above-mentioned rotating ground glass is also equipped with a motor.
Preferably, set gradually LASER Light Source, Amici prism, coupled system and interference cavity according to optical path direction, the direction vertical with LASER Light Source Emission Lasers direction at Amici prism is provided with collimating mirror and CCD.
The expansion light source interferometry colimated light system that the utility model provides is in order to meet the demand of interference measuring instrument, can analysis verification optical system wavefront aberration on the impact of interference fringe, may be used for checking the aberration of peripheral field to the distortion of interferogram and distortion effects by emulation.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Reference numeral: 1-LASER Light Source; 2-Amici prism; 3-coupled system; 4-interference cavity; 5-collimating mirror; 6-imaging len; 7-CCD; 8-standard optic plane glass crystal; 9-rotating ground glass; 10-motor.
Embodiment
Understand for the ease of those of ordinary skill in the art and implement the utility model, below in conjunction with the drawings and the specific embodiments, the utility model being described in further detail.
As shown in Figure 1, the expansion light source interferometry colimated light system that the utility model provides, be made up of LASER Light Source 1, Amici prism 2, coupled system 3, interference cavity 4, collimating mirror 5, imaging len 6, CCD7, standard optic plane glass crystal 8 and rotating ground glass 9, standard optic plane glass crystal 8 is arranged between LASER Light Source 1 and Amici prism 2, and rotating ground glass 9 is arranged between Amici prism 2 and coupled system 3.
Wherein, imaging len 6 is arranged between collimating mirror 5 and CCD7, and coupled system 3 is made up of multiple lens.LASER Light Source 1 is monochromatic source, and interference cavity 4 is made up of reference mirror and measured lens.Rotating ground glass 9 is also equipped with a motor 10.
Set gradually LASER Light Source 1, Amici prism 2, coupled system 3 and interference cavity 4 according to optical path direction, the direction vertical with LASER Light Source 1 Emission Lasers direction at Amici prism 2 is provided with collimating mirror 5 and CCD7.
The expansion light source interferometry colimated light system that the utility model provides is in order to meet the demand of interference measuring instrument, can analysis verification optical system wavefront aberration on the impact of interference fringe, may be used for checking the aberration of peripheral field to the distortion of interferogram and distortion effects by emulation.
The embodiment of the above is better embodiment of the present utility model; not limit concrete practical range of the present utility model with this; scope of the present utility model comprises and is not limited to this embodiment, and the equivalence change that all shapes according to the utility model, structure are done is all in protection domain of the present utility model.
Claims (5)
1. an expansion light source interferometry colimated light system, it is characterized in that: expansion light source interferometry colimated light system is made up of LASER Light Source (1), Amici prism (2), coupled system (3), interference cavity (4), collimating mirror (5), imaging len (6), CCD (7), standard optic plane glass crystal (8) and rotating ground glass (9), described standard optic plane glass crystal (8) is arranged between LASER Light Source (1) and Amici prism (2), and described rotating ground glass (9) is arranged between Amici prism (2) and coupled system (3).
2. expansion light source interferometry colimated light system according to claim 1, it is characterized in that: described imaging len (6) is arranged between collimating mirror (5) and CCD (7), and described coupled system (3) is made up of multiple lens.
3. expansion light source interferometry colimated light system according to claim 1, it is characterized in that: described LASER Light Source (1) is monochromatic source, described interference cavity (4) is made up of reference mirror and measured lens.
4. expansion light source interferometry colimated light system according to claim 1, is characterized in that: described rotating ground glass (9) is also equipped with a motor (10).
5. according to the expansion light source interferometry colimated light system one of claim 1-4 Suo Shu, it is characterized in that: set gradually LASER Light Source (1), Amici prism (2), coupled system (3) and interference cavity (4) according to optical path direction, be provided with collimating mirror (5) and CCD (7) in the direction that Amici prism (2) is vertical with LASER Light Source (1) Emission Lasers direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520388461.0U CN204808718U (en) | 2015-06-03 | 2015-06-03 | Extension light source interferometry collimating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520388461.0U CN204808718U (en) | 2015-06-03 | 2015-06-03 | Extension light source interferometry collimating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204808718U true CN204808718U (en) | 2015-11-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520388461.0U Expired - Fee Related CN204808718U (en) | 2015-06-03 | 2015-06-03 | Extension light source interferometry collimating system |
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| CN (1) | CN204808718U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116045836A (en) * | 2023-04-03 | 2023-05-02 | 成都太科光电技术有限责任公司 | Phi 1200mm extremely large caliber plane optical interference testing device |
-
2015
- 2015-06-03 CN CN201520388461.0U patent/CN204808718U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116045836A (en) * | 2023-04-03 | 2023-05-02 | 成都太科光电技术有限责任公司 | Phi 1200mm extremely large caliber plane optical interference testing device |
| CN116045836B (en) * | 2023-04-03 | 2023-06-02 | 成都太科光电技术有限责任公司 | Phi 1200mm extremely large caliber plane optical interference testing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151125 Termination date: 20160603 |
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| CF01 | Termination of patent right due to non-payment of annual fee |