CN204808719U - Interferometry experimental system - Google Patents
Interferometry experimental system Download PDFInfo
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- CN204808719U CN204808719U CN201520394750.1U CN201520394750U CN204808719U CN 204808719 U CN204808719 U CN 204808719U CN 201520394750 U CN201520394750 U CN 201520394750U CN 204808719 U CN204808719 U CN 204808719U
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- interferometry
- spectroscope
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- 238000005305 interferometry Methods 0.000 title claims abstract description 16
- 238000003384 imaging method Methods 0.000 claims abstract description 13
- 239000005338 frosted glass Substances 0.000 claims description 12
- 238000010168 coupling process Methods 0.000 claims description 11
- 238000005859 coupling reaction Methods 0.000 claims description 11
- 230000008878 coupling Effects 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 9
- 239000005337 ground glass Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 abstract 2
- 230000001427 coherent effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 230000007812 deficiency Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 241000834287 Cookeolus japonicus Species 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
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- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The utility model relates to an interferometry experimental system, by laser emitter (1), coupler (2), beam expanding lens (3), ware (4) are transferred to space light, hair glass (5), spectroscope (6), imaging lens (7) and CCD (10) constitute, set gradually laser emitter (1) according to the light path direction, coupler (2), beam expanding lens (3), ware (4) are transferred to space light, hair glass (5), spectroscope (6) and imaging lens (7), be provided with measured lens (8) at imaging lens (7) rear side, still be provided with CCD (10) in spectroscope (6) and laser emitter (1) lasing direction vertically direction. The utility model provides an interferometry experimental system utilizes single -mode laser and spatial light modulator to constitute adjustable extension light source, has realized the function of utilizing light source energy distribution parameter change interferometer spatial coherence, makes the spatial coherence length adjustment enable of interferometer.
Description
Technical field
The utility model relates to a kind of interferometry experimental system based on expansion light source, belongs to interferometer field.
Background technology
Interference is the most strictly, the most effectively proving of the undulatory property of light, and this phenomenon is due to two bundle or the overlaps of multi-beam, makes the result of energy volume density spatially regular distribution.Optical interferometry method is as one of the most traditional, effective means detecting high-accuracy optical element and system, and a large amount of is applied among scientific research and commercial production.In actual use, present stage, interferometer adopted laser instrument as lighting source mostly, and laser instrument has extremely strong Time and place coherence, therefore, in interference testing process, do not need the restriction considering that interference cavity is long, interference fringe just can be made to have good contrast, and along with the development of electronics and computer technology, the position interference detection technique of generation, make measuring limit improve a more than order of magnitude by traditional λ/10, and there is very high repeatability.But, just because of the high coherence that laser has, although it reduces the use difficulty of interferometer, but due to the extreme sensitivity of optical interference, the defects such as the microcosmic hole point produced in optical element process and element surface pollute the scattered light produced and coherence stack can occur, in interferogram, there will be the coherent noises such as many bull eye rings or target center, they change the space structure of interferogram to a certain extent, thus cause the measuring error of tested surface face type or wavefront shape.
The commercial phase-shifting interferometer of present stage, often be subject to having a strong impact on of coherent noise, the precision of interference testing is difficult to be further enhanced, and the optical element face type information detected often lost the face type error of part high band, cannot meet the testing requirement to the optical elements of large caliber in high power solid-state laser drive unit.Just because of this, suppress the coherent noise of system, improve the signal to noise ratio (S/N ratio) of interference system, expand its measurement space frequency range, eliminate non-measured face interference of stray light, be one of core difficult problem of development heavy caliber high resolving power interference system always.
Utility model content
In order to overcome the deficiencies in the prior art, resolving the problem of prior art, making up the deficiency of existing existing product in the market.
The utility model provides a kind of interferometry experimental system, be made up of generating laser, coupling mechanism, beam expanding lens, space light modulator, frosted glass, spectroscope, imaging len and CCD, generating laser, coupling mechanism, beam expanding lens, space light modulator, frosted glass, spectroscope and imaging len is set gradually according to optical path direction, on rear side of imaging len, be provided with measured lens, the direction vertical with laser transmitter projects laser direction at spectroscope is also provided with CCD.
Preferably, above-mentioned frosted glass is rotating ground glass, is equipped with a DC micromotor.
Preferably, above-mentioned generating laser is He-Ne laser instrument, and the light beam wavelength of outgoing is 632.8nm.
Preferably, above-mentioned coupling mechanism is made up of multiple lens.
Preferably, collimating mirror is provided with between above-mentioned spectroscope and CCD.
The interferometry experimental system that the utility model provides utilizes single-mode laser and spatial light modulator to form adjustable expansion light source, achieve the function utilizing energy of light source distribution parameter to change interferometer spatial coherence, the Spatially coherent length of interferometer is regulated becomes possibility.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Reference numeral: 1-generating laser; 2-coupling mechanism; 3-beam expanding lens; 4-space light modulator; 5-frosted glass; 6-spectroscope; 7-imaging len; 8-measured lens; 9-collimating mirror; 10-CCD.
Embodiment
Understand for the ease of those of ordinary skill in the art and implement the utility model, below in conjunction with the drawings and the specific embodiments, the utility model being described in further detail.
As shown in Figure 1, the interferometry experimental system that the utility model provides, be made up of generating laser 1, coupling mechanism 2, beam expanding lens 3, space light modulator 4, frosted glass 5, spectroscope 6, imaging len 7 and CCD10, generating laser 1, coupling mechanism 2, beam expanding lens 3, space light modulator 4, frosted glass 5, spectroscope 6 and imaging len 7 is set gradually according to optical path direction, on rear side of imaging len 7, be provided with measured lens 8, the direction vertical with generating laser 1 Emission Lasers direction at spectroscope 6 is also provided with CCD10.
Wherein, frosted glass 5 is rotating ground glass, is equipped with a DC micromotor.Generating laser 1 is He-Ne laser instrument, and the light beam wavelength of outgoing is 632.8nm.Coupling mechanism 2 is made up of multiple lens.Collimating mirror 9 is provided with between spectroscope 6 and CCD10.
The light wave that generating laser 1 sends laser outgoing after coupling mechanism 2 is that light wave is assembled in taper, and when movable generating laser 1 and beam expanding lens are apart from the distance of rotating ground glass 5, the spot size beaten on frosted glass 5 will change.Along with the High Rotation Speed of frosted glass 5, can make on it is the sphere shape light that illuminated region forms incoherent (or partial coherence).
The interferometry experimental system that the utility model provides utilizes single-mode laser and spatial light modulator to form adjustable expansion light source, achieve the function utilizing energy of light source distribution parameter to change interferometer spatial coherence, the Spatially coherent length of interferometer is regulated becomes possibility.
The embodiment of the above is better embodiment of the present utility model; not limit concrete practical range of the present utility model with this; scope of the present utility model comprises and is not limited to this embodiment, and the equivalence change that all shapes according to the utility model, structure are done is all in protection domain of the present utility model.
Claims (5)
1. an interferometry experimental system, it is characterized in that: interferometry experimental system is by generating laser (1), coupling mechanism (2), beam expanding lens (3), space light modulator (4), frosted glass (5), spectroscope (6), imaging len (7) and CCD (10) are formed, generating laser (1) is set gradually according to optical path direction, coupling mechanism (2), beam expanding lens (3), space light modulator (4), frosted glass (5), spectroscope (6) and imaging len (7), imaging len (7) rear side is provided with measured lens (8), CCD (10) is also provided with in the direction that spectroscope (6) is vertical with generating laser (1) Emission Lasers direction.
2. interferometry experimental system according to claim 1, is characterized in that: described frosted glass (5) is rotating ground glass, is equipped with a DC micromotor.
3. interferometry experimental system according to claim 1, is characterized in that: described generating laser (1) is He-Ne laser instrument, and the light beam wavelength of outgoing is 632.8nm.
4. interferometry experimental system according to claim 1, is characterized in that: described coupling mechanism (2) is made up of multiple lens.
5. interferometry experimental system according to claim 1, is characterized in that: be provided with collimating mirror (9) between described spectroscope (6) and CCD (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520394750.1U CN204808719U (en) | 2015-06-03 | 2015-06-03 | Interferometry experimental system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520394750.1U CN204808719U (en) | 2015-06-03 | 2015-06-03 | Interferometry experimental system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204808719U true CN204808719U (en) | 2015-11-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520394750.1U Expired - Fee Related CN204808719U (en) | 2015-06-03 | 2015-06-03 | Interferometry experimental system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204808719U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021184625A1 (en) * | 2020-03-16 | 2021-09-23 | 苏州大学 | Artificial microstructure construction method and optical system comprising artificial microstructure |
| WO2021184624A1 (en) * | 2020-03-16 | 2021-09-23 | 苏州大学 | Method for controlling coherence of light beams by using artificial microstructure |
-
2015
- 2015-06-03 CN CN201520394750.1U patent/CN204808719U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021184625A1 (en) * | 2020-03-16 | 2021-09-23 | 苏州大学 | Artificial microstructure construction method and optical system comprising artificial microstructure |
| WO2021184624A1 (en) * | 2020-03-16 | 2021-09-23 | 苏州大学 | Method for controlling coherence of light beams by using artificial microstructure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| CB03 | Change of inventor or designer information |
Inventor after: Yang Shunfeng Inventor after: Zhong Wenliang Inventor before: Chen Qiaozhen |
|
| COR | Change of bibliographic data | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20161024 Address after: 511450 Guangdong city of Guangzhou province Panyu District Shi Ji Zhen Jin Shan Cun CRE Animation Industrial Park C22 Patentee after: Guangzhou Dexinyi Laboratory Equipment Technology Co., Ltd. Address before: 350211 Fujian city of Changle province Samsung village, Jinfeng town pier No. 32 Patentee before: Chen Qiaozhen |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151125 Termination date: 20200603 |