WO2021184624A1 - Method for controlling coherence of light beams by using artificial microstructure - Google Patents

Method for controlling coherence of light beams by using artificial microstructure Download PDF

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WO2021184624A1
WO2021184624A1 PCT/CN2020/103403 CN2020103403W WO2021184624A1 WO 2021184624 A1 WO2021184624 A1 WO 2021184624A1 CN 2020103403 W CN2020103403 W CN 2020103403W WO 2021184624 A1 WO2021184624 A1 WO 2021184624A1
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coherence
artificial
generated
phase
coherent light
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刘磊鑫
刘文玮
王飞
赵承良
陈树琪
蔡阳健
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苏州大学
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals

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  • the invention relates to the technical field of coherent optics, in particular to a method for adjusting the coherence of light beams by using artificial microstructures.
  • Coherence actually represents the result of the correlation between certain quantities of two points in the fluctuating light field. This correlation can be measured by the fringe contrast of Young's double-slit interference. Coherence is an important characteristic of the light field, and the research on the control of the coherence of the light field is of great significance. Research has found that the control of the coherence of the light field is used in free-space optical communications, lidar, laser fusion, special optical imaging, quantum optics, etc. It has important application value in the field.
  • the adjustment of the degree of coherence of the light field mainly used rotating ground glass to generate partially coherent light, and the coherence of the light field was adjusted by adjusting the distance between the ground glass and the focusing lens.
  • the existing methods are mostly based on centimeter-level systems, which are not conducive to integrated and miniaturized designs.
  • the existing method cannot know the coherence of the generated beam without measurement, and the energy utilization rate is low, which limits its further application.
  • Artificial microstructures are artificial optical materials with sub-wavelength scale structural units.
  • the proposal of artificial microstructures provides a new way to achieve the enhancement and effective control of the interaction between light and matter, and is for the miniaturization, lightweight and integration of optical devices. It provides a brand-new approach.
  • artificial microstructures have been able to achieve effective control of the amplitude, phase and polarization state of the light field at the sub-wavelength scale, and have high application value, such as the realization of polarized optical anti-counterfeiting, achromatic lenses, high saturation structural colors, etc.
  • artificial microstructures have rarely been involved in the regulation of the coherence dimension of the light field.
  • one of the objectives of the present invention is to provide a method for adjusting the coherence of light beams by using artificial microstructures with high energy utilization rate and high control precision. It adopts the following technical solutions:
  • a method for adjusting the coherence of light beams by using artificial microstructures which includes the following steps:
  • S10 Determine the phase of each cell position in the corresponding artificial microstructure area according to the coherence of the partial coherent light to be generated;
  • step S10 specifically includes:
  • the range of the random phase corresponding to the partially coherent light to be generated determines its coherence.
  • the coherence degree of the partially coherent light generated by the artificial microstructure with a specific phase distribution is:
  • ⁇ (r 1 , r 2 ) is the degree of coherence of the coherent light to be generated
  • " ⁇ >" represents the time average
  • phase distribution formula of the artificial microstructure in step S10 is:
  • phase corresponding to is a random phase in a fixed interval.
  • step S20 specifically includes:
  • the rotation angle of the nanocells arranged at each cell position is calculated.
  • the step S40 selects the incident area of the artificial microstructure according to requirements, and obtains a partially coherent beam with a corresponding degree of coherence, which specifically includes:
  • the phase distribution at each cell position is controlled by the parameter a.
  • the parameter a can take any non-negative real value, that is, the coherence degree can be generated as Partially coherent light with an arbitrary value from 0 to 1, where, when the degree of coherence is 0, the generated beam is completely incoherent light, when the degree of coherence is 1, the generated beam is completely coherent light, and when the degree of coherence is between 0 and 1. , The generated light beam is partially coherent light.
  • a 0, 0.2, 0.4, 0.6, 0.8, 1 is selected, and the phase difference corresponding to the random phase interval is used to determine the phase at each cell position corresponding to the artificial microstructure area of the partially coherent light to be generated Basis of distribution.
  • the artificial microstructure constructed in the step S30 is an array structure composed of nanocells.
  • the shown nano cell is a titanium dioxide rectangular column cell, which includes a silicon dioxide substrate and a rectangular column on the silicon dioxide substrate.
  • the method of using artificial microstructures to control the coherence of beams calculates the phase distribution corresponding to the partially coherent beams and determines the nanocells with different rotation angles at different cell positions, so that different nanocells can achieve different light field coherence.
  • the coherence of the beam can be controlled quantitatively; the utilization of the beam energy is greatly improved, and the light intensity of the partially coherent beam is increased; the artificial microstructure that realizes the coherence control can be constructed by using nano-cells.
  • the size of the device is reduced to a large extent, which in turn can facilitate the realization of the miniaturized design of the optical system to which the device is applied.
  • Fig. 1 is a schematic diagram of a method for adjusting the coherence of light beams by using artificial microstructures in a preferred embodiment of the present invention
  • Figure 2 is a schematic diagram of the structure of a single nanocell in a preferred embodiment of the present invention.
  • FIG. 3 is a schematic diagram of a square phase distribution gradient of artificial microstructures that generate partially coherent beams with different degrees of coherence in a preferred embodiment of the present invention
  • Fig. 4 is a schematic diagram of a system for adjusting the coherence of light beams by using artificial microstructures in a preferred embodiment of the present invention.
  • Marking description 1. Laser; 2. Beam expander; 3. Focusing lens; 4. Artificial microstructure; 5. Objective; 6. Charge coupled element; 7. First computer; 8. Motorized translation stage; 9. Second computer.
  • FIG. 1 it is a method for adjusting the coherence of light beams by using artificial microstructures in a preferred embodiment of the present invention, and the method includes the following steps:
  • S10 Determine the phase of each cell position of the corresponding artificial microstructure area according to the coherence of the partial coherent light to be generated.
  • the cell position is the spatial arrangement position of each nanocell constructing the artificial microstructure.
  • the range of the random phase corresponding to the partially coherent light to be generated determines the magnitude of its coherence.
  • the coherence degree of the partially coherent light generated by the micro-nano structure with a specific phase distribution is:
  • ⁇ (r 1 , r 2 ) is the degree of coherence of the coherent light to be generated
  • " ⁇ >" represents the time average
  • phase distribution formula of the artificial microstructure is:
  • the phase of the partially coherent light to be generated at its different cell positions Is the phase of the partially coherent light to be generated at its different cell positions, a is the size parameter for adjusting the coherence of the partially coherent light generated in different regions of the artificial microstructure, and rand is a random function, representing each cell of the artificial microstructure
  • the phase corresponding to is a random phase in a fixed interval.
  • the above-mentioned optical parameters are preset by the user based on the actual requirements of the coherence degree of the partially coherent beam.
  • the partially coherent beam is a partially coherent vortex beam at a focal field.
  • the artificial microstructure used to realize the partially coherent beam to be generated is an array structure composed of nanocells. Therefore, each cell position of the artificial microstructure has a corresponding phase.
  • the phase can be determined according to preset optical parameters.
  • it includes: calculating the rotation angle of the nano cells arranged at each cell position according to the phase relation formula and the phase of the partial coherent light to be generated at each cell position.
  • phase relationship formula is:
  • ⁇ i is the rotation angle of the arranged nano-cells at the position of the i-th cell.
  • the nanocell may be a titanium dioxide rectangular column cell with a nanometer size, and different phases can be realized by setting different rotation angles, thereby realizing the generation of partially coherent beams with different coherence degrees.
  • S30 Arranging nanocells with different rotation angles at corresponding cell positions to construct an artificial microstructure for realizing light beam coherence control.
  • the selecting the incident area of the artificial microstructure according to requirements and obtaining a partially coherent beam with a corresponding degree of coherence specifically includes: determining the phase distribution at each cell position of the artificial microstructure according to the required degree of coherence, and each element The phase distribution at the cell position is regulated by the parameter a.
  • the parameter a can take any non-negative real value, that is, it can produce a partial coherent light with a coherence degree of 0 to 1 with any value.
  • the coherence degree is 0, the generated light beam is For completely incoherent light, when the degree of coherence is 1, the generated light beam is completely coherent light, and when the degree of coherence is between 0 and 1, the generated light beam is partially coherent light.
  • a 0, 0.2, 0.4, 0.6, 0.8, 1 is selected, and the phase difference corresponding to the random phase interval is used to determine the phase at each cell position corresponding to the artificial microstructure area of the partially coherent light to be generated Basis of distribution.
  • nanocells with corresponding rotation angles can be prepared at each cell position of the artificial microstructure, or they can be selected from the existing nanocells. And arrange the selected nanocells to the matching cell position of the surface array.
  • the above two methods are only exemplary instructions for constructing an area array, and should not be construed as limitations.
  • the nano-cell is a rectangular column cell of titanium dioxide, which includes a silicon dioxide substrate (SiO 2 ) and a silicon dioxide substrate.
  • All nanocells in the artificial microstructure have the same length, width, and height.
  • Different phase distributions can be achieved by setting different rotation angles ⁇ , thereby realizing the control of optical field coherence; among them, the rotation angle ⁇ can be a rectangular column The angle of rotation about the y axis in the xy plane.
  • the phase distribution corresponding to the partially coherent beam to be generated.
  • a total of 6 partial coherent beams with different degrees of coherence are generated.
  • the artificial microstructure corresponds to 6 phase distributions, and the phase distribution is:
  • phase distribution of the artificial microstructure corresponding to the i-th coherence degree of the partially coherent beam Is the phase distribution of the artificial microstructure corresponding to the i-th coherence degree of the partially coherent beam, and a i is the corresponding optical parameter.
  • the six phase distributions are arranged according to the phase gradient distribution shown in FIG. 3.
  • the nanocell distribution diagram shown in Figure 3 can be used to represent the artificial microstructure that realizes the control of the light field coherence. It is assumed that the artificial microstructure includes X ⁇ Y Nanocells, for ease of description, the two-dimensional coordinates (m, n) of each cell position in the artificial microstructure (the two-dimensional coordinates are any coordinate value in the free space coordinates) can be converted to nanometers according to the number conversion formula.
  • the sequence number i of the cell; among them, the number conversion formula is as follows:
  • i is the sequence number of the nanocell
  • m and n are the horizontal and vertical coordinate parameters of the i-th nanocell in the artificial microstructure respectively
  • Y is the total number of nanocells arranged in the longitudinal direction in the array. .
  • the nanocell arranged at the i-th cell position can be referred to as the i-th nanocell for short.
  • this embodiment uses an artificial microstructure to control the coherence of the beam, which includes the artificial microstructure 4 constructed by the method in the above embodiment, and the system further includes a laser 1, a beam expander 2, Focusing lens 3, objective lens 5, charge-coupled element 6, displacement mechanism, second computer 9.
  • the displacement mechanism is used to drive the displacement of the artificial microstructure 4, and the second computer 9 is used to control the charge-coupled element 6 to collect and record the partially coherent beam generated ;
  • the beam generated by the laser 1 is expanded by the beam expander 2, and the expanded laser beam is focused by the focusing lens 3.
  • the beam waist is about 40um (as shown in Figure 4 for each phase gradient of the artificial microstructure Width), then incident on the surface of the artificial microstructure 4 and transmitted, and then the light beam is amplified by the objective lens 5 and then collected and recorded by the charge-coupled element 6.
  • the displacement mechanism includes a first computer 7 and an electric stage 8.
  • the electric stage 8 is used to carry the artificial microstructure 4, and the first computer 7 is used to control the movement of the electric stage 8.
  • the first computer 7 controls the electric stage 8 to move along the same phase distribution direction of the artificial microstructure 4 at a predetermined frequency, so that the random phase imparted to the incident light beam changes with time, thereby generating a smooth and uniform partially coherent light beam.
  • the partial coherent beam generated by the laser beam passing through the artificial microstructures with the above six phase distributions is basically consistent with the predicted coherence degree using the method of calculating the beam coherence degree by using multiple speckles.
  • the present invention uses artificial microstructures to control the coherence of light beams.
  • different nanocells can achieve light field control, and the nanocells are combined.
  • the method of calculating the phase-control coherence can predict the degree of coherence of the partially coherent beam to be generated in advance.

Abstract

Disclosed is a method for controlling the coherence of light beams by using an artificial microstructure. The method comprises the steps of: S10, determining, according to the coherence of partially coherent light to be generated, the phase of said partially coherent light at each corresponding cell position in an artificial microstructure area; S20, calculating rotation angles of nanocells arranged at the cell positions; S30, arranging the nanocells having different rotation angles at corresponding cell positions to construct an artificial microstructure for light beam coherence control; and S40, enabling a focused light beam to reach the surface of the constructed artificial microstructure, selecting an incident area of the artificial microstructure according to requirements, and obtaining a partially coherent light beam having a corresponding degree of coherence. The present invention can avoid the noise of light field regulation, improve the utilization rate of energy, and achieve the precise modulation of the coherence of the light field. The use of nanocells to construct the structure can greatly reduce the size of the structure, thereby facilitating the miniaturization design of an optical system.

Description

一种利用人工微结构调控光束相干性的方法A method for adjusting the coherence of light beams by using artificial microstructures 技术领域Technical field
本发明涉及相干光学技术领域,特别涉及一种利用人工微结构调控光束相干性的方法。The invention relates to the technical field of coherent optics, in particular to a method for adjusting the coherence of light beams by using artificial microstructures.
背景技术Background technique
相干光学作为现代光学的重要分支,吸引了国内外大量研究者的关注。相干性实际上表示涨落光场中两个点的某些量之间的相关的结果,这种相关可以用杨氏双缝干涉的条纹衬比度测定。相干性是光场的一个重要特性,对光场相干性调控的研究具有重要意义,研究发现光场相干性调控在自由空间光通讯、激光雷达、激光核聚变、特种光学成像、量子光学等众多领域中具有重要的应用价值。过去对光场相干度大小的调控主要利用旋转的毛玻璃产生部分相干光,通过调控毛玻璃与聚焦透镜之间的距离来调控光场相干性。但是现有的方法多是基于厘米量级的系统,不利于集成化和微型化设计。并且现有的方法不能在未测量的情况下已知产生光束的相干度,能量利用率低,对其进一步的应用存在限制。As an important branch of modern optics, coherent optics has attracted the attention of a large number of researchers at home and abroad. Coherence actually represents the result of the correlation between certain quantities of two points in the fluctuating light field. This correlation can be measured by the fringe contrast of Young's double-slit interference. Coherence is an important characteristic of the light field, and the research on the control of the coherence of the light field is of great significance. Research has found that the control of the coherence of the light field is used in free-space optical communications, lidar, laser fusion, special optical imaging, quantum optics, etc. It has important application value in the field. In the past, the adjustment of the degree of coherence of the light field mainly used rotating ground glass to generate partially coherent light, and the coherence of the light field was adjusted by adjusting the distance between the ground glass and the focusing lens. However, the existing methods are mostly based on centimeter-level systems, which are not conducive to integrated and miniaturized designs. In addition, the existing method cannot know the coherence of the generated beam without measurement, and the energy utilization rate is low, which limits its further application.
人工微结构是具有亚波长尺度结构单元的人造光学材料,人工微结构的提出为实现对光与物质相互作用的增强和有效控制提供了全新方式,为光学器件的小型化、轻质化和集成化提供了全新手段。目前,人工微结构已经能够在亚波长尺度下实现对光场振幅、相位和偏振态的有效控制,具有很高的应用价值,例如实现偏振光学防伪、消色差透镜、高饱和度结构色等等,而目前为止,人工微结构对于光场相干性这一维度的调控还少有涉及。Artificial microstructures are artificial optical materials with sub-wavelength scale structural units. The proposal of artificial microstructures provides a new way to achieve the enhancement and effective control of the interaction between light and matter, and is for the miniaturization, lightweight and integration of optical devices. It provides a brand-new approach. At present, artificial microstructures have been able to achieve effective control of the amplitude, phase and polarization state of the light field at the sub-wavelength scale, and have high application value, such as the realization of polarized optical anti-counterfeiting, achromatic lenses, high saturation structural colors, etc. However, so far, artificial microstructures have rarely been involved in the regulation of the coherence dimension of the light field.
发明内容Summary of the invention
针对现有技术的不足,本发明目的之一在于提供一种能量利用率高,调控精度高的利用人工微结构调控光束相干性的方法。其采用如下技术方案:In view of the shortcomings of the prior art, one of the objectives of the present invention is to provide a method for adjusting the coherence of light beams by using artificial microstructures with high energy utilization rate and high control precision. It adopts the following technical solutions:
一种利用人工微结构调控光束相干性的方法,其包括以下步骤:A method for adjusting the coherence of light beams by using artificial microstructures, which includes the following steps:
S10、根据待生成部分相干光的相干性确定其在对应人工微结构区域各元胞位置处的相位;S10: Determine the phase of each cell position in the corresponding artificial microstructure area according to the coherence of the partial coherent light to be generated;
S20、计算各元胞位置处所排布纳米元胞的旋转角度;S20. Calculate the rotation angle of the nanocells arranged at each cell position;
S30、将具有不同的旋转角度的纳米元胞在对应的元胞位置处进行排布,构建用于实现光束相干性调控的人工微结构;S30. Arrange nano cells with different rotation angles at corresponding cell positions to construct an artificial microstructure for realizing beam coherence control;
S40、将聚焦后的光束入射到构建的人工微结构表面,根据需求选取所述人工微结构的入射区域,并获得相应相干度大小的部分相干光束。S40. Incident the focused light beam to the constructed artificial microstructure surface, select the incident area of the artificial microstructure according to requirements, and obtain a partially coherent light beam with a corresponding degree of coherence.
作为本发明的进一步改进,所述步骤S10,具体包括:As a further improvement of the present invention, the step S10 specifically includes:
根据部分相干光的产生条件可知,待生成部分相干光对应的随机相位的范围决定了其相干性的大小,其中,由特定相位分布的人工微结构产生的部分相干光的相干度为:
Figure PCTCN2020103403-appb-000001
According to the generation conditions of the partially coherent light, the range of the random phase corresponding to the partially coherent light to be generated determines its coherence. Among them, the coherence degree of the partially coherent light generated by the artificial microstructure with a specific phase distribution is:
Figure PCTCN2020103403-appb-000001
其中,μ(r 1,r 2)为所述待生成部分相干光的相干度,
Figure PCTCN2020103403-appb-000002
为所述待生成部分相干光所对应的人工微结构区域各元胞位置处的相位分布,“<>”代表时间平均。
Where μ(r 1 , r 2 ) is the degree of coherence of the coherent light to be generated,
Figure PCTCN2020103403-appb-000002
Is the phase distribution at each cell position of the artificial microstructure area corresponding to the partial coherent light to be generated, and "<>" represents the time average.
作为本发明的进一步改进,所述步骤S10中人工微结构的相位分布公式为:
Figure PCTCN2020103403-appb-000003
As a further improvement of the present invention, the phase distribution formula of the artificial microstructure in step S10 is:
Figure PCTCN2020103403-appb-000003
其中,
Figure PCTCN2020103403-appb-000004
为所述待生成部分相干光在其不同元胞位置处的相位,a为调节人工微结构不同区域产生的部分相干光的相干性的大小参数,rand为随机函数,代表人工微结构各个元胞处对应的相位为固定区间内的随机相位。
in,
Figure PCTCN2020103403-appb-000004
Is the phase of the partially coherent light to be generated at its different cell positions, a is the size parameter for adjusting the coherence of the partially coherent light generated in different regions of the artificial microstructure, and rand is a random function, representing each cell of the artificial microstructure The phase corresponding to is a random phase in a fixed interval.
作为本发明的进一步改进,所述步骤S20,具体包括:As a further improvement of the present invention, the step S20 specifically includes:
根据相位关系公式和所述待生成部分相干光在各元胞位置处的相位分别计算各元胞位置处所排布纳米元胞的旋转角度。According to the phase relationship formula and the phase of the partial coherent light to be generated at each cell position, the rotation angle of the nanocells arranged at each cell position is calculated.
作为本发明的进一步改进,所述步骤S40中根据需求选取所述人工微结构的入射区域,并获得相应相干度大小的部分相干光束,具体包括:As a further improvement of the present invention, the step S40 selects the incident area of the artificial microstructure according to requirements, and obtains a partially coherent beam with a corresponding degree of coherence, which specifically includes:
根据所需相干度的大小确定人工微结构各元胞位置处的相位分布,各元胞位置处的相位分布由参数a调控,参数a可以取任意的非负实数值,即可以产生相干度为0到1的任意值的部分相干光,其中,相干度为0时,产生光束为 完全非相干光,相干度为1时,产生光束为完全相干光,相干度介于0到1之间时,产生光束为部分相干光。Determine the phase distribution at each cell position of the artificial microstructure according to the required degree of coherence. The phase distribution at each cell position is controlled by the parameter a. The parameter a can take any non-negative real value, that is, the coherence degree can be generated as Partially coherent light with an arbitrary value from 0 to 1, where, when the degree of coherence is 0, the generated beam is completely incoherent light, when the degree of coherence is 1, the generated beam is completely coherent light, and when the degree of coherence is between 0 and 1. , The generated light beam is partially coherent light.
作为本发明的进一步改进,选取a=0、0.2、0.4、0.6、0.8、1,其对应随机相位区间的相位差作为确定待产生部分相干光对应人工微结构区域的各元胞位置处的相位分布的依据。As a further improvement of the present invention, a=0, 0.2, 0.4, 0.6, 0.8, 1 is selected, and the phase difference corresponding to the random phase interval is used to determine the phase at each cell position corresponding to the artificial microstructure area of the partially coherent light to be generated Basis of distribution.
作为本发明的进一步改进,所述步骤S30中构建的人工微结构为纳米元胞排列组成的阵列结构。As a further improvement of the present invention, the artificial microstructure constructed in the step S30 is an array structure composed of nanocells.
作为本发明的进一步改进,所示纳米元胞为二氧化钛长方柱元胞,包括二氧化硅衬底和位于二氧化硅衬底上的长方柱。As a further improvement of the present invention, the shown nano cell is a titanium dioxide rectangular column cell, which includes a silicon dioxide substrate and a rectangular column on the silicon dioxide substrate.
作为本发明的进一步改进,所述二氧化硅衬底为方形,边长p=330nm,长方柱的尺寸为:长a=260nm,宽b=90nm,高h=450nm。As a further improvement of the present invention, the silicon dioxide substrate is square, side length p=330nm, and the dimensions of the rectangular column are: length a=260nm, width b=90nm, and height h=450nm.
本发明的有益效果:The beneficial effects of the present invention:
该利用人工微结构调控光束相干性的方法通过计算部分相干光束对应的相位分布,确定不同元胞位置处具有不同的旋转角度的纳米元胞,可以使不同的纳米元胞实现不同的光场相干性调控,可以实现定量地控制光束的相干性;对光束能量的利用率大大提高,产生的部分相干光束的光强增大;通过采用纳米元胞来构建实现相干性调控的人工微结构,可以较大程度地缩减器件的尺寸,进而可以有利于实现应用该器件的光学系统的微型化设计。The method of using artificial microstructures to control the coherence of beams calculates the phase distribution corresponding to the partially coherent beams and determines the nanocells with different rotation angles at different cell positions, so that different nanocells can achieve different light field coherence. The coherence of the beam can be controlled quantitatively; the utilization of the beam energy is greatly improved, and the light intensity of the partially coherent beam is increased; the artificial microstructure that realizes the coherence control can be constructed by using nano-cells. The size of the device is reduced to a large extent, which in turn can facilitate the realization of the miniaturized design of the optical system to which the device is applied.
上述说明仅是本发明技术方案的概述,为了能够更清楚了解本发明的技术手段,而可依照说明书的内容予以实施,并且为了让本发明的上述和其他目的、特征和优点能够更明显易懂,以下特举较佳实施例,并配合附图,详细说明如下。The above description is only an overview of the technical solution of the present invention. In order to understand the technical means of the present invention more clearly, it can be implemented in accordance with the content of the specification, and in order to make the above and other objectives, features and advantages of the present invention more obvious and understandable. In the following, the preferred embodiments are cited in conjunction with the drawings, and the detailed description is as follows.
附图说明Description of the drawings
图1是本发明优选实施例中利用人工微结构调控光束相干性的方法的示意图;Fig. 1 is a schematic diagram of a method for adjusting the coherence of light beams by using artificial microstructures in a preferred embodiment of the present invention;
图2是本发明优选实施例中单个纳米元胞的结构示意图;Figure 2 is a schematic diagram of the structure of a single nanocell in a preferred embodiment of the present invention;
图3是本发明优选实施例中产生不同相干度的部分相干光束的人工微结构方形相位分布梯度示意图;3 is a schematic diagram of a square phase distribution gradient of artificial microstructures that generate partially coherent beams with different degrees of coherence in a preferred embodiment of the present invention;
图4是本发明优选实施例中利用人工微结构调控光束相干性的系统的示意图。Fig. 4 is a schematic diagram of a system for adjusting the coherence of light beams by using artificial microstructures in a preferred embodiment of the present invention.
标记说明:1、激光器;2、扩束镜;3、聚焦透镜;4、人工微结构;5、物镜;6、电荷耦合元件;7、第一计算机;8、电动位移台;9、第二计算机。Marking description: 1. Laser; 2. Beam expander; 3. Focusing lens; 4. Artificial microstructure; 5. Objective; 6. Charge coupled element; 7. First computer; 8. Motorized translation stage; 9. Second computer.
具体实施方式Detailed ways
下面结合附图和具体实施例对本发明作进一步说明,以使本领域的技术人员可以更好地理解本发明并能予以实施,但所举实施例不作为对本发明的限定。The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention, but the examples cited are not intended to limit the present invention.
如图1所示,为本发明优选实施例中利用人工微结构调控光束相干性的方法,该方法包括以下步骤:As shown in FIG. 1, it is a method for adjusting the coherence of light beams by using artificial microstructures in a preferred embodiment of the present invention, and the method includes the following steps:
S10、根据待生成部分相干光的相干性确定其在对应人工微结构区域各元胞位置处的相位。S10: Determine the phase of each cell position of the corresponding artificial microstructure area according to the coherence of the partial coherent light to be generated.
其中,元胞位置为构建所述人工微结构的各纳米元胞的空间排布位置。Wherein, the cell position is the spatial arrangement position of each nanocell constructing the artificial microstructure.
根据部分相干光的产生条件可知,待生成部分相干光对应的随机相位的范围决定了其相干性的大小,其中,由特定相位分布的微纳结构产生的部分相干光的相干度为:
Figure PCTCN2020103403-appb-000005
According to the generation conditions of the partially coherent light, the range of the random phase corresponding to the partially coherent light to be generated determines the magnitude of its coherence. Among them, the coherence degree of the partially coherent light generated by the micro-nano structure with a specific phase distribution is:
Figure PCTCN2020103403-appb-000005
其中,μ(r 1,r 2)为所述待生成部分相干光的相干度,
Figure PCTCN2020103403-appb-000006
为所述待生成部分相干光所对应的人工微结构区域各元胞位置处的相位分布,“<>”代表时间平均。
Where μ(r 1 , r 2 ) is the degree of coherence of the coherent light to be generated,
Figure PCTCN2020103403-appb-000006
Is the phase distribution at each cell position of the artificial microstructure area corresponding to the partial coherent light to be generated, and "<>" represents the time average.
其中,上述人工微结构的相位分布公式为:Among them, the phase distribution formula of the artificial microstructure is:
Figure PCTCN2020103403-appb-000007
Figure PCTCN2020103403-appb-000007
其中,
Figure PCTCN2020103403-appb-000008
为所述待生成部分相干光在其不同元胞位置处的相位,a为调节人工微结构不同区域产生的部分相干光的相干性的大小参数,rand为随机函数,代表人工微结构各个元胞处对应的相位为固定区间内的随机相位。上述光学参数为用户基于对部分相干光束的相干度的实际需求而预先设定的。在本实施例中,所述部分相干光束为焦场处的部分相干涡旋光束。
in,
Figure PCTCN2020103403-appb-000008
Is the phase of the partially coherent light to be generated at its different cell positions, a is the size parameter for adjusting the coherence of the partially coherent light generated in different regions of the artificial microstructure, and rand is a random function, representing each cell of the artificial microstructure The phase corresponding to is a random phase in a fixed interval. The above-mentioned optical parameters are preset by the user based on the actual requirements of the coherence degree of the partially coherent beam. In this embodiment, the partially coherent beam is a partially coherent vortex beam at a focal field.
在本实施例中,用于实现待生成的部分相干光束的人工微结构是一种由纳米元胞排列组成的阵列结构,因此,人工微结构的每个元胞位置处均具有相应 的相位,该相位可以根据预先设定的光学参数确定。In this embodiment, the artificial microstructure used to realize the partially coherent beam to be generated is an array structure composed of nanocells. Therefore, each cell position of the artificial microstructure has a corresponding phase. The phase can be determined according to preset optical parameters.
S20、计算各元胞位置处所排布纳米元胞的旋转角度;S20. Calculate the rotation angle of the nanocells arranged at each cell position;
具体包括:根据相位关系公式和所述待生成部分相干光在各元胞位置处的相位分别计算各元胞位置处所排布纳米元胞的旋转角度。Specifically, it includes: calculating the rotation angle of the nano cells arranged at each cell position according to the phase relation formula and the phase of the partial coherent light to be generated at each cell position.
所述相位关系公式为:
Figure PCTCN2020103403-appb-000009
The phase relationship formula is:
Figure PCTCN2020103403-appb-000009
其中,
Figure PCTCN2020103403-appb-000010
为所述调控光束相干性人工微结构在第i个元胞位置处的相位,θ i为第i个元胞位置处所排布纳米元胞的旋转角度。
in,
Figure PCTCN2020103403-appb-000010
In order to regulate the phase of the coherence artificial microstructure of the beam at the position of the i-th cell, θ i is the rotation angle of the arranged nano-cells at the position of the i-th cell.
在其中一种实施例中,该纳米元胞可以为纳米级尺寸的二氧化钛长方柱元胞,并通过设置不同的旋转角度实现不同的相位,进而实现不同相干度的部分相干光束的产生。In one of the embodiments, the nanocell may be a titanium dioxide rectangular column cell with a nanometer size, and different phases can be realized by setting different rotation angles, thereby realizing the generation of partially coherent beams with different coherence degrees.
S30、将具有不同的旋转角度的纳米元胞在对应的元胞位置处进行排布,构建用于实现光束相干性调控的人工微结构。S30: Arranging nanocells with different rotation angles at corresponding cell positions to construct an artificial microstructure for realizing light beam coherence control.
S40、将聚焦后的光束入射到构建的人工微结构表面,根据需求选取所述人工微结构的入射区域,并获得相应相干度大小的部分相干光束。S40. Incident the focused light beam to the constructed artificial microstructure surface, select the incident area of the artificial microstructure according to requirements, and obtain a partially coherent light beam with a corresponding degree of coherence.
所述根据需求选取所述人工微结构的入射区域,并获得相应相干度大小的部分相干光束,具体包括:根据所需相干度的大小确定人工微结构各元胞位置处的相位分布,各元胞位置处的相位分布由参数a调控,参数a可以取任意的非负实数值,即可以产生相干度为0到1的任意值的部分相干光,其中,相干度为0时,产生光束为完全非相干光,相干度为1时,产生光束为完全相干光,相干度介于0到1之间时,产生光束为部分相干光。The selecting the incident area of the artificial microstructure according to requirements and obtaining a partially coherent beam with a corresponding degree of coherence specifically includes: determining the phase distribution at each cell position of the artificial microstructure according to the required degree of coherence, and each element The phase distribution at the cell position is regulated by the parameter a. The parameter a can take any non-negative real value, that is, it can produce a partial coherent light with a coherence degree of 0 to 1 with any value. When the coherence degree is 0, the generated light beam is For completely incoherent light, when the degree of coherence is 1, the generated light beam is completely coherent light, and when the degree of coherence is between 0 and 1, the generated light beam is partially coherent light.
在其中一实施例中,选取a=0、0.2、0.4、0.6、0.8、1,其对应随机相位区间的相位差作为确定待产生部分相干光对应人工微结构区域的各元胞位置处的相位分布的依据。In one of the embodiments, a=0, 0.2, 0.4, 0.6, 0.8, 1 is selected, and the phase difference corresponding to the random phase interval is used to determine the phase at each cell position corresponding to the artificial microstructure area of the partially coherent light to be generated Basis of distribution.
采用纳米元胞构建光学人工微结构的方式有多种,诸如可以在人工微结构的各元胞位置处加工制备对应的旋转角度的纳米元胞,也可以在现有纳米元胞中选取满足元胞位置处对应的旋转角度的纳米元胞,并将选取出的纳米元胞排列至面阵的匹配元胞位置处。当然,以上两种方式仅为构建面阵的示例性说明,不应理解为限制。There are many ways to construct optical artificial microstructures by using nanocells. For example, nanocells with corresponding rotation angles can be prepared at each cell position of the artificial microstructure, or they can be selected from the existing nanocells. And arrange the selected nanocells to the matching cell position of the surface array. Of course, the above two methods are only exemplary instructions for constructing an area array, and should not be construed as limitations.
具体的,如图2所示,为其中一实施例中单个纳米元胞的结构示意图,该纳米元胞为二氧化钛长方柱元胞,其包括二氧化硅衬底(SiO 2)和位于二氧化硅衬底上的长方柱(TiO 2)。更具体的,二氧化硅衬底可以为边长p=330nm,长方柱的尺寸包括:长a=260nm,宽b=90nm,高h=450nm。人工微结构中全部纳米元胞具有相同的长、宽、高,通过设置不同的旋转角度θ来实现不同的相位分布,进而实现光场相干性的调控;其中,旋转角度θ可以为长方柱在x-y平面内关于y轴的旋转角度。 Specifically, as shown in FIG. 2, it is a schematic diagram of the structure of a single nano-cell in one of the embodiments. The nano-cell is a rectangular column cell of titanium dioxide, which includes a silicon dioxide substrate (SiO 2 ) and a silicon dioxide substrate. The rectangular column (TiO 2 ) on the bottom. More specifically, the silicon dioxide substrate may have a side length p=330 nm, and the dimensions of the rectangular column include: length a=260 nm, width b=90 nm, and height h=450 nm. All nanocells in the artificial microstructure have the same length, width, and height. Different phase distributions can be achieved by setting different rotation angles θ, thereby realizing the control of optical field coherence; among them, the rotation angle θ can be a rectangular column The angle of rotation about the y axis in the xy plane.
关于待生成不同相干度的部分相干光,在本实施例中可以用
Figure PCTCN2020103403-appb-000011
表示对应待生成部分相干光束的相位分布,在本实施例中,共有6种不同相干度的部分相干光束产生,所述人工微结构对应6种相位分布,相位分布为:
Regarding the partial coherent light to be generated with different degrees of coherence, in this embodiment, you can use
Figure PCTCN2020103403-appb-000011
Indicates the phase distribution corresponding to the partially coherent beam to be generated. In this embodiment, a total of 6 partial coherent beams with different degrees of coherence are generated. The artificial microstructure corresponds to 6 phase distributions, and the phase distribution is:
Figure PCTCN2020103403-appb-000012
Figure PCTCN2020103403-appb-000012
其中,
Figure PCTCN2020103403-appb-000013
为第i种相干度的部分相干光束对应的人工微结构的相位分布,a i为对应的光学参数,在本实施例中,取a 1=0,a 2=0.2,a 3=0.4,a 4=0.6,a 5=0.8,a 6=1。所述6种相位分布按照图3所示相位梯度分布排布。
in,
Figure PCTCN2020103403-appb-000013
Is the phase distribution of the artificial microstructure corresponding to the i-th coherence degree of the partially coherent beam, and a i is the corresponding optical parameter. In this embodiment, a 1 =0, a 2 =0.2, a 3 =0.4, a 4 = 0.6, a 5 = 0.8, and a 6 =1. The six phase distributions are arranged according to the phase gradient distribution shown in FIG. 3.
基于以上对纳米元胞和待生成部分相干光束的描述,可以采用如图3所示的纳米元胞分布示意图表示实现光场相干性调控的人工微结构,假设该人工微结构包括X×Y个纳米元胞,为便于描述,可以根据编号转换公式将人工微结构中各元胞位置的二维坐标(m,n)(该二维坐标是自由空间坐标中的任意一个坐标值)转换为纳米元胞的顺序编号i;其中,编号转换公式如下:Based on the above description of the nanocell and the partial coherent beam to be generated, the nanocell distribution diagram shown in Figure 3 can be used to represent the artificial microstructure that realizes the control of the light field coherence. It is assumed that the artificial microstructure includes X×Y Nanocells, for ease of description, the two-dimensional coordinates (m, n) of each cell position in the artificial microstructure (the two-dimensional coordinates are any coordinate value in the free space coordinates) can be converted to nanometers according to the number conversion formula. The sequence number i of the cell; among them, the number conversion formula is as follows:
i=(m-1)×Y+ni=(m-1)×Y+n
其中,i为纳米元胞的顺序编号,m、n分别为第i个纳米元胞在人工微结构中的横、纵坐标参数,Y为面阵中沿纵向排布的纳米元胞总个数。基于此,可以将第i个元胞位置处所排布纳米元胞简称为第i个纳米元胞。Among them, i is the sequence number of the nanocell, m and n are the horizontal and vertical coordinate parameters of the i-th nanocell in the artificial microstructure respectively, and Y is the total number of nanocells arranged in the longitudinal direction in the array. . Based on this, the nanocell arranged at the i-th cell position can be referred to as the i-th nanocell for short.
如图4所示,为本实施例中利用人工微结构调控光束相干性的系统,其包含上述实施例中的方法所构建的人工微结构4,该系统还包括激光器1、扩束镜2、聚焦透镜3、物镜5、电荷耦合元件6、位移机构、第二计算机9,位移机构用于驱动人工微结构4位移,第二计算机9用于控制电荷耦合元件6采集并记录产生的部分相干光束;As shown in FIG. 4, this embodiment uses an artificial microstructure to control the coherence of the beam, which includes the artificial microstructure 4 constructed by the method in the above embodiment, and the system further includes a laser 1, a beam expander 2, Focusing lens 3, objective lens 5, charge-coupled element 6, displacement mechanism, second computer 9. The displacement mechanism is used to drive the displacement of the artificial microstructure 4, and the second computer 9 is used to control the charge-coupled element 6 to collect and record the partially coherent beam generated ;
激光器1产生的光束经过扩束镜2扩束,扩束后的激光束经聚焦透镜3聚焦,在本实施例中,光束束腰约为40um(如图4所示人工微结构每一相位梯度的宽度),接着入射到人工微结构4表面并透射,然后经物镜5将光束放大后由电荷耦合元件6采集记录。The beam generated by the laser 1 is expanded by the beam expander 2, and the expanded laser beam is focused by the focusing lens 3. In this embodiment, the beam waist is about 40um (as shown in Figure 4 for each phase gradient of the artificial microstructure Width), then incident on the surface of the artificial microstructure 4 and transmitted, and then the light beam is amplified by the objective lens 5 and then collected and recorded by the charge-coupled element 6.
具体的,位移机构包括第一计算机7和电动位移台8,电动位移台8用于承载人工微结构4,第一计算机7用于控制电动位移台8移动。第一计算机7控制电动位移台8以预定的频率沿人工微结构4同一种相位分布的方向移动,使得对入射光束赋予的随机相位是随时间变化的,进而产生平滑均匀的部分相干光束。Specifically, the displacement mechanism includes a first computer 7 and an electric stage 8. The electric stage 8 is used to carry the artificial microstructure 4, and the first computer 7 is used to control the movement of the electric stage 8. The first computer 7 controls the electric stage 8 to move along the same phase distribution direction of the artificial microstructure 4 at a predetermined frequency, so that the random phase imparted to the incident light beam changes with time, thereby generating a smooth and uniform partially coherent light beam.
如图3所示,利用多张散斑求光束相干度的方法测得激光束通过上述六种相位分布的人工微结构所产生的部分相干光束与预测的相干度基本符合。As shown in Fig. 3, the partial coherent beam generated by the laser beam passing through the artificial microstructures with the above six phase distributions is basically consistent with the predicted coherence degree using the method of calculating the beam coherence degree by using multiple speckles.
可以看出,通过设置光学参数a=0,0.2,0.4,0.6,0.8,1对入射光束进行相干性的调控,可以产生相干度由高到低的部分相干光束,其中当a=0时,产生的光束为完全相干光束,其相干度可以看作为1,当a=0时,产生光束的相干度为0.08,可近似看作完全非相干光束(相干度为0)。这里的相干度为全局相干度,即实验测得相干长度/光束束腰。It can be seen that by setting the optical parameters a=0, 0.2, 0.4, 0.6, 0.8, 1 to control the coherence of the incident beam, a partially coherent beam with a degree of coherence from high to low can be generated, and when a=0, The generated beam is a completely coherent beam, and its coherence degree can be regarded as 1, when a=0, the coherence degree of the generated beam is 0.08, which can be approximately regarded as a completely incoherent beam (coherence degree is 0). The degree of coherence here is the degree of global coherence, that is, the experimentally measured coherence length/beam waist.
综上,本发明利用人工微结构调控光束相干性的方法,通过相位确定不同元胞位置处具有不同旋转角度的纳米元胞,可以使不同的纳米元胞实现光场调控,由纳米元胞组合而成的人工微结构实现光场相干性调控,相对于现有利用旋转的毛玻璃产生部分相干光束的方法,采用计算相位调控相干性的方式可以提前预知所述待生成部分相干光束的相干度,实现定量地控制光束的相干性;通过采用透过率高达90%以上的纳米元胞构建的人工微结构,相对于现有的通过毛玻璃调控相干性的方式,对光束的利用率大大提高,产生的部分相干光束的光强增大;通过采用纳米元胞来构建实现相干性调控的人工微结构,可以较大程度地缩减器件的尺寸,进而可以有利于实现应用该器件的光学系统的微型化设计。To sum up, the present invention uses artificial microstructures to control the coherence of light beams. By determining the phases of nanocells with different rotation angles at different cell positions, different nanocells can achieve light field control, and the nanocells are combined. Compared with the existing method of using rotating ground glass to generate a partially coherent beam, the method of calculating the phase-control coherence can predict the degree of coherence of the partially coherent beam to be generated in advance. Realize quantitative control of the coherence of the light beam; by adopting the artificial microstructure constructed by nano-cells with a transmittance of more than 90%, compared with the existing method of adjusting the coherence through ground glass, the utilization rate of the light beam is greatly improved, resulting in The light intensity of part of the coherent beam is increased; by using nano-cells to construct artificial microstructures that achieve coherence control, the size of the device can be reduced to a large extent, which can be beneficial to realize the miniaturization of the optical system using the device design.
以上实施例仅是为充分说明本发明而所举的较佳的实施例,本发明的保护范围不限于此。本技术领域的技术人员在本发明基础上所作的等同替代或变换,均在本发明的保护范围之内。本发明的保护范围以权利要求书为准。The above embodiments are only preferred embodiments for fully illustrating the present invention, and the protection scope of the present invention is not limited thereto. Equivalent substitutions or alterations made by those skilled in the art on the basis of the present invention are all within the protection scope of the present invention. The protection scope of the present invention is subject to the claims.

Claims (10)

  1. 一种利用人工微结构调控光束相干性的方法,其特征在于,包括以下步骤:A method for adjusting the coherence of light beams by using artificial microstructures, which is characterized in that it comprises the following steps:
    S10、根据待生成部分相干光的相干性确定其在对应人工微结构区域各元胞位置处的相位;S10: Determine the phase of each cell position in the corresponding artificial microstructure area according to the coherence of the partial coherent light to be generated;
    S20、计算各元胞位置处所排布纳米元胞的旋转角度;S20. Calculate the rotation angle of the nanocells arranged at each cell position;
    S30、将具有不同的旋转角度的纳米元胞在对应的元胞位置处进行排布,构建用于实现光束相干性调控的人工微结构;S30. Arrange nano cells with different rotation angles at corresponding cell positions to construct an artificial microstructure for realizing beam coherence control;
    S40、将聚焦后的光束入射到构建的人工微结构表面,根据需求选取所述人工微结构的入射区域,并获得相应相干度大小的部分相干光束。S40. Incident the focused light beam to the constructed artificial microstructure surface, select the incident area of the artificial microstructure according to requirements, and obtain a partially coherent light beam with a corresponding degree of coherence.
  2. 如权利要求1所述的利用人工微结构调控光束相干性的方法,其特征在于,所述步骤S10,具体包括:The method for adjusting the coherence of light beams using artificial microstructures according to claim 1, wherein the step S10 specifically includes:
    根据部分相干光的产生条件可知,待生成部分相干光对应的随机相位的范围决定了其相干性的大小,其中,由特定相位分布的人工微结构产生的部分相干光的相干度为:
    Figure PCTCN2020103403-appb-100001
    According to the generation conditions of the partially coherent light, the range of the random phase corresponding to the partially coherent light to be generated determines its coherence. Among them, the coherence degree of the partially coherent light generated by the artificial microstructure with a specific phase distribution is:
    Figure PCTCN2020103403-appb-100001
    其中,μ(r 1,r 2)为所述待生成部分相干光的相干度,
    Figure PCTCN2020103403-appb-100002
    为所述待生成部分相干光所对应的人工微结构区域各元胞位置处的相位分布,“< >”代表时间平均。
    Where μ(r 1 , r 2 ) is the degree of coherence of the coherent light to be generated,
    Figure PCTCN2020103403-appb-100002
    Is the phase distribution at each cell position of the artificial microstructure area corresponding to the partial coherent light to be generated, and "<>" represents the time average.
  3. 如权利要求1所述的利用人工微结构调控光束相干性的方法,其特征在于,所述步骤S10中人工微结构的相位分布公式为:
    Figure PCTCN2020103403-appb-100003
    The method for adjusting the coherence of light beams using artificial microstructures according to claim 1, wherein the phase distribution formula of the artificial microstructures in step S10 is:
    Figure PCTCN2020103403-appb-100003
    其中,
    Figure PCTCN2020103403-appb-100004
    为所述待生成部分相干光在其不同元胞位置处的相位,a为调节人工微结构不同区域产生的部分相干光的相干性的大小参数,rand为随机函数,代表人工微结构各个元胞处对应的相位为固定区间内的随机相位。
    in,
    Figure PCTCN2020103403-appb-100004
    Is the phase of the partially coherent light to be generated at its different cell positions, a is the size parameter for adjusting the coherence of the partially coherent light generated in different regions of the artificial microstructure, and rand is a random function, representing each cell of the artificial microstructure The phase corresponding to is a random phase in a fixed interval.
  4. 如权利要求1所述的利用人工微结构调控光束相干性的方法,其特征在于,所述步骤S20,具体包括:The method for adjusting the coherence of light beams using artificial microstructures according to claim 1, wherein the step S20 specifically includes:
    根据相位关系公式和所述待生成部分相干光在各元胞位置处的相位分别计算各元胞位置处所排布纳米元胞的旋转角度。According to the phase relationship formula and the phase of the partial coherent light to be generated at each cell position, the rotation angle of the nanocells arranged at each cell position is calculated.
  5. 如权利要求4所述的利用人工微结构调控光束相干性的方法,其特征在于,所述相位关系公式为:
    Figure PCTCN2020103403-appb-100005
    The method for adjusting the coherence of light beams using artificial microstructures according to claim 4, wherein the phase relationship formula is:
    Figure PCTCN2020103403-appb-100005
    其中,
    Figure PCTCN2020103403-appb-100006
    为所述调控光束相干性人工微结构在第i个元胞位置处的相位,θ i为第i个元胞位置处所排布纳米元胞的旋转角度。
    in,
    Figure PCTCN2020103403-appb-100006
    In order to regulate the phase of the coherence artificial microstructure of the beam at the position of the i-th cell, θ i is the rotation angle of the arranged nano-cells at the position of the i-th cell.
  6. 如权利要求1所述的利用人工微结构调控光束相干性的方法,其特征在于,所述步骤S40中根据需求选取所述人工微结构的入射区域,并获得相应相干度大小的部分相干光束,具体包括:The method for adjusting the coherence of light beams using artificial microstructures according to claim 1, wherein in step S40, the incident area of the artificial microstructures is selected according to requirements, and a partially coherent light beam with a corresponding degree of coherence is obtained. Specifically:
    根据所需相干度的大小确定人工微结构各元胞位置处的相位分布,各元胞位置处的相位分布由参数a调控,参数a可以取任意的非负实数值,即可以产生相干度为0到1的任意值的部分相干光,其中,相干度为0时,产生光束为完全非相干光,相干度为1时,产生光束为完全相干光,相干度介于0到1之间时,产生光束为部分相干光。Determine the phase distribution at each cell position of the artificial microstructure according to the required degree of coherence. The phase distribution at each cell position is controlled by the parameter a. The parameter a can take any non-negative real value, that is, the coherence degree can be generated as Partially coherent light with an arbitrary value from 0 to 1, where, when the degree of coherence is 0, the generated beam is completely incoherent light, when the degree of coherence is 1, the generated beam is completely coherent light, and when the degree of coherence is between 0 and 1. , The generated light beam is partially coherent light.
  7. 如权利要求6所述的利用人工微结构调控光束相干性的方法,其特征在于,选取a=0、0.2、0.4、0.6、0.8、1,其对应随机相位区间的相位差作为确定待产生部分相干光对应人工微结构区域的各元胞位置处的相位分布的依据。The method for adjusting the coherence of light beams using artificial microstructures according to claim 6, characterized in that a=0, 0.2, 0.4, 0.6, 0.8, 1 is selected, and the phase difference corresponding to the random phase interval is used to determine the part to be generated. Coherent light corresponds to the basis of the phase distribution at each cell position in the artificial microstructure area.
  8. 如权利要求1所述的利用人工微结构调控光束相干性的方法,其特征在于,所述步骤S30中构建的人工微结构为纳米元胞排列组成的阵列结构。The method for adjusting the coherence of light beams using artificial microstructures according to claim 1, wherein the artificial microstructure constructed in step S30 is an array structure composed of nanocells.
  9. 如权利要求8所述的利用人工微结构调控光束相干性的方法,其特征在于,所示纳米元胞为二氧化钛长方柱元胞,包括二氧化硅衬底和位于二氧化硅衬底上的长方柱。The method for adjusting the coherence of light beams by using artificial microstructures according to claim 8, wherein the nano-cell is a rectangular column cell of titanium dioxide, which includes a silicon dioxide substrate and a rectangular column on the silicon dioxide substrate. column.
  10. 如权利要求9所述的利用人工微结构调控光束相干性的方法,其特征在于,所述二氧化硅衬底为方形,边长p=330nm,长方柱的尺寸为:长a=260nm,宽b=90nm,高h=450nm。9. The method for adjusting the coherence of light beams using artificial microstructures according to claim 9, wherein the silicon dioxide substrate is square with side length p=330nm, and the size of the rectangular column is: length a=260nm, Width b=90nm, height h=450nm.
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