CN114660690B - Optical tweezers device based on surface plasmon lens - Google Patents
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- CN114660690B CN114660690B CN202210349997.6A CN202210349997A CN114660690B CN 114660690 B CN114660690 B CN 114660690B CN 202210349997 A CN202210349997 A CN 202210349997A CN 114660690 B CN114660690 B CN 114660690B
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- 238000012576 optical tweezer Methods 0.000 title claims abstract description 44
- 239000002245 particle Substances 0.000 claims abstract description 41
- 239000002184 metal Substances 0.000 claims abstract description 26
- 230000003287 optical effect Effects 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 230000005284 excitation Effects 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 230000005684 electric field Effects 0.000 abstract description 6
- 230000006872 improvement Effects 0.000 description 8
- 239000002105 nanoparticle Substances 0.000 description 8
- 238000005381 potential energy Methods 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000000651 laser trapping Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 241000588724 Escherichia coli Species 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 241001274197 Scatophagus argus Species 0.000 description 1
- 241000723873 Tobacco mosaic virus Species 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/008—Surface plasmon devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
- G02B3/06—Simple or compound lenses with non-spherical faces with cylindrical or toric faces
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention provides an optical tweezers device based on a surface plasmon lens, which comprises a substrate, a metal layer, a grating and a semi-elliptic cylinder lens arranged above the grating, wherein the metal layer is arranged on the substrate; the grating is etched on the metal layer; when incident light vertically enters the grating from the substrate, a surface plasmon is excited between the metal layer and the semi-elliptic cylinder lens; a pair of counter-propagating surface plasmons form interference fringes to form a surface plasmon enhancement point in the center of a semi-elliptical cylindrical lens with the surface plasmons. The optical tweezers device based on the surface plasmon lens provided by the invention realizes the limitation of optical energy in a sub-wavelength range, and can be used for controlling particles with higher spatial accuracy while improving local electric field intensity to capture the particles.
Description
Technical Field
The invention relates to an optical tweezers device based on a surface plasmon lens, and belongs to the field of integrated optics.
Background
Optical trapping, also known as optical tweezers, refers to a technique that uses light scattering to fix micro-nano-sized objects in a specific position. In 1987, arthur Ashkin et al applied optical tweezers to biology for the first time, successfully captured individual tobacco mosaic viruses, E.coli and living cells. In contrast to other conventional mechanical tweezers, optical tweezers are capable of capturing and manipulating whole particles in a non-direct contact and atraumatic manner, suitable for capturing and manipulating vulnerable biological cells. In addition, optical tweezers are widely used in various fields such as biomolecule classification, raman spectroscopy, super-resolution imaging techniques, etc.
Capturing micron-sized dielectric particles using optical tweezers has been a relatively well-established and established technique over several decades of development and research. However, when the capturing object is a particle having a size of a nanometer order, the conventional optical tweezers have a significant defect in precisely capturing the particle due to a diffraction limit of a focused spot size. In addition, when the particle size is much smaller than the incident wavelength, it is called a rayleigh particle. In the rayleigh mechanism, the gradient force acting on the captured particle is proportional to the third power of the particle radius, while the scattering force is proportional to the sixth power of the particle radius. This results in a very limited optical gradient force acting on the particles when the particle diameter is small, and a relatively increased radiation pressure, which does not allow stable particle capture.
In view of the above, it is necessary to provide an optical tweezers device based on a surface plasmon lens to solve the above problems.
Disclosure of Invention
The invention aims to provide an optical tweezers device based on a surface plasmon lens, so that the limitation of optical energy in a sub-wavelength range is realized, and particles can be controlled with higher spatial accuracy while the local electric field intensity is improved to capture the particles.
In order to achieve the above object, the present invention provides an optical tweezers device based on a surface plasmon lens, the optical tweezers device comprising a substrate, a metal layer, a grating and a semi-elliptical cylinder lens arranged above the grating; the grating is etched on the metal layer; when incident light vertically enters the grating from the substrate, a surface plasmon is excited between the metal layer and the semi-elliptic cylinder lens; a pair of counter-propagating surface plasmons form interference fringes to form a surface plasmon enhancement point in the center of a semi-elliptical cylindrical lens with the surface plasmons.
As a further improvement of the invention, the substrate is silicon dioxide, the metal layer is Au, and the semi-elliptic cylindrical lens is Si 3 N 4 A waveguide.
As a further improvement of the invention, the incident light is Gaussian light, the wavelength of the incident light is 785nm, and the initial phase is
As a further improvement of the present invention, the surface plasmon enhancement point is formed by changing the initial phase of the incident lightTo adjust its position on a two-dimensional plane.
As a further improvement of the invention, the grating is a full etched grating with a period of Λ, so as to improve the excitation efficiency of the surface plasmon.
As a further development of the invention, the period of the grating is 360nm and the thickness of the metal layer is 200nm.
As a further improvement of the present invention, the semi-major axis of the surface semi-ellipse of the surface plasmon is a, and the length of the semi-minor axis is identical to the width of the semi-elliptical cylindrical lens.
As a further improvement of the present invention, the semi-major axis a is 2.9um, and the length of the semi-minor axis and the width of the semi-elliptical cylindrical lens are 2.5um.
As a further improvement of the invention, the surface plasmons have local field enhancement of a sub-wavelength range in the longitudinal direction, and the optical field on the upper surface of the metal layer effectively captures particles.
As a further improvement of the present invention, the beam power of the incident light is 50mW.
The beneficial effects of the invention are as follows: compared with the traditional optical tweezers for particle capturing, the optical tweezers device based on the surface plasmon lens has the following advantages:
(1) The invention realizes the limitation of the optical energy in the sub-wavelength range by exciting the surface plasmon, and can control the particles with higher space accuracy while improving the local electric field intensity to capture the particles.
(2) The invention can change the position of the surface plasmon center light field enhancement point on the two-dimensional plane by adjusting the initial phase of the incident light.
(3) The surface plasmon lens optical tweezers provided by the invention have the advantages that the size is in the micron order, and the surface plasmon lens optical tweezers can be better integrated on a chip, so that the surface plasmon lens optical tweezers are beneficial to expansion.
Drawings
Fig. 1 is a schematic structural diagram of an optical tweezers device based on a surface plasmon lens.
Fig. 2 is a surface plasmon interference pattern of an optical tweezers device based on a surface plasmon lens of the present invention.
Fig. 3 is an optical force of an interference field of the optical tweezers device based on a surface plasmon lens of the present invention acting on Au particles with a radius of 35 nm.
Fig. 4 shows the capture potential of an interference field of the optical tweezers device based on a surface plasmon lens acting on an Au particle with a radius of 35 nm.
Fig. 5 is a schematic displacement diagram of surface plasmon interference fringes on an x-y plane under different initial phases of incident light of an optical tweezers device based on a surface plasmon lens.
Fig. 6 is a depth distribution diagram of capturing potential energy of a surface plasmon center light field enhancement point in an x-y plane under different initial phases of incident light of an optical tweezers device based on a surface plasmon lens.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1, the invention discloses an optical tweezers device based on a surface plasmon lens, which comprises a substrate, a metal layer, a grating and a semi-elliptic cylinder lens arranged above the grating; the grating is etched on the metal layer; when incident light is perpendicularly incident to the grating from the substrate, surface plasmons are excited between the metal layer and the semi-elliptic cylinder lens; a pair of counter-propagating surface plasmons form interference fringes to form a surface plasmon enhancement point in the center of the lens of the surface plasmon.
That is, the optical tweezer device is capable of forming an interference field to capture and move the nanoparticles. The invention is preferably composed of four semi-elliptical cylindrical lenses symmetrically placed on the metal layer with the origin of coordinates at the center of the structure. The incident light irradiates the grating surface in the direction indicated by the y-axis, exciting surface plasmons (SPPi, i=1, 2,3, 4). The surface plasmons are transmitted along the metal and medium interface waveguide, and are focused by the semi-elliptical lens to interfere at the center of the structure so as to obtain a high-strength electric field.
Preferably, the substrate is silicon dioxide, the metal layer is Au, and the semi-elliptic cylindrical lens is Si 3 N 4 A waveguide. The incident light is Gaussian light, the wavelength of the incident light is 785nm, and the initial phase isSurface plasmon enhancement Point by varying the initial phase of incident light +.>To adjust its position on a two-dimensional plane. The grating is a full-etched grating with a period lambda, so as to improve the excitation efficiency of the surface plasmon. The period of the grating was 360nm, and the thickness of the Au film was 200nm. The semi-major axis of the surface semi-ellipse of the surface plasmon is a, the length of the semi-minor axis and Si 3 N 4 The width of the waveguides is uniform. Semi-major axis a is 2.9um, length of semi-minor axis and Si 3 N 4 The width of the waveguide was 2.5um. The surface plasmons have local field enhancement of a sub-wavelength range in the longitudinal direction, and the optical field on the upper surface of the Au film effectively captures particles. The beam power of the incident light was 50mW.
The present invention will be further described in detail below with reference to specific examples and with reference to the accompanying drawings, in order to make the objects, technical solutions and advantages of the present invention more apparent.
1. And capturing the nano particles by utilizing the surface plasmon center light field enhancement point.
Fig. 2 is an interference pattern of a surface plasmon in the x-y plane obtained by simulation, in which the initial phases of four incident light beams are all 0. In the interference pattern, surface plasmon waves from four directions interfere to form fringes with alternate brightness, an obvious surface plasmon center light field enhancement point is arranged in the center, and black 'x' is used for marking. To verify the capture ability of the present invention to nanoparticles, the optical forces acting on Au particles with a radius of 35nm in the interference field are shown in fig. 3. Due to structural symmetry considerations, the y-direction stress conditions and the x-direction agreement, no additional calculations were performed, and only the optical gradient forces and scattering forces experienced by the particles in the x-and z-directions are given in fig. 3 (a) and 3 (b), respectively. Since the particle size is much smaller than the wavelength of the incident light, the optical forces acting on the particle can be calculated by the calculation formula of the optical gradient forces in the Rayleigh mechanism
Where α=vε m (ε-ε m )/(ε-2ε m ) Is the polarizability of metal particles of volume V, ε m And epsilon are the dielectric constants of the background medium and the particles, respectively. Epsilon 0 Is the dielectric constant of free space.
On the other hand, the particles are also affected by scattering forces. The calculation formula of the scattering force can be expressed as
In n 1 Is the refractive index of the background medium, in the present invention, the refractive index of water, n 1 ＝1.33。C scat Representing the scattering cross section, which has the value ofc is the speed of light. The scattering forces will push the particles in the direction of propagation of the light, which is detrimental for stable capture of the particles. As can be seen from fig. 3 (a), (b), the Au particles have a much larger optical gradient in the interference field than the scattering force, and therefore the influence of the scattering force will be ignored in the next calculation of the particle force. The optical gradient force in the x direction is 0 at the position of x=0, gradually increases towards positive and negative directions, reaches the maximum value when x= ±0.1 μm, and has a force pointing to the center on the nano particle. The particles are always subjected to downward adsorption force in the z-direction, as shown in fig. 3 (b), which facilitates stable capture of the particles. Due to the size of the particlesAnd the influence of the surface roughness of the Au layer, only the stress condition of the particles when z is larger than 50nm is considered.
The optical capture potential energy can be obtained by integrating the gradient force
FIG. 4 shows the capture potential of the interference field acting on an Au particle with a radius of 35 nm. Effective capture potential energy U of central light field formation eff ＝39.67k b T, according to the stability criterion of Ashkin, the potential well depth required for stable capture is 10k b T, where k b Is the boltzmann constant, and T is the temperature. Thus, the optical trapping potential of the present invention achieves stable trapping of target nanoparticles.
2. The position of the captured particles is controlled by the phase of the incident light.
According to the interference principle, the distribution of interference fringes is related to the phase of the optical field. Fig. 5 shows the distribution of the interference field on the surface plasmon lens apparatus in the x-y plane for different phases of the incident light, and the surface plasmon center light field enhancement points are also marked with black "x", and the changed phases of the incident light are marked under each figure, and the phases which are not shown are all 0. FIGS. 5 (a) - (d) are initial phases of incident light, respectivelyProfile of interference field at 90 °, 180 °, 270 °, 360 °. As can be seen by comparison, when the phase difference of the two light sources in the y direction is changed, the interference fringes move along the y direction. Fig. 5 (e) is an electric field diagram in which the initial phases of the incident light are all 0. From FIG. 5 (f)>And FIG. 5 (g)It can be observed that when the light source is changed by 90 ° in each of the horizontal direction and the vertical direction, the structure is originallyThe center surface plasmon center light field enhancement point "x" has a 45 deg. upward left or 45 deg. downward right movement. The white dotted lines in the transverse and longitudinal directions of fig. 5 (e) - (f) are straight lines of x=0 and y=0, respectively.
FIG. 6 is a depth profile of potential energy captured by a surface plasmon center optical field enhancement point in the x-y plane at different initial phases of incident light, each data point being associated with a different input phase difference Wherein the method comprises the steps ofWhen->Increase by 90 DEG and at the same time-> And the surface plasmon center light field enhancement point moves from bottom to top in the x (y) direction. In the phase difference change period of +/-180 degrees, the light field enhancement point can move by a distance of +/-0.14 um, so that the position of the surface plasmon center light field enhancement point on an x-y plane is moved, and meanwhile, the potential energy well depth enough for stably capturing the target nano particles is kept, and the method can be applied to capturing and manipulating the nano particles.
In summary, the optical tweezers device based on the surface plasmon lens comprises a substrate, a metal layer, a grating and a semi-elliptic cylinder lens arranged above the grating; grating etching on the metal layer; when incident light is perpendicularly incident to the grating from the substrate, surface plasmons are excited between the metal layer and the semi-elliptic cylinder lens; a pair of counter-propagating surface plasmons form interference fringes to form a surface plasmon enhancement point in the center of the lens of the surface plasmon. The optical tweezers device based on the surface plasmon lens realizes the limitation of optical energy in a sub-wavelength range, and can control particles with higher spatial accuracy while improving the local electric field intensity to capture the particles; the invention can change the position of the surface plasmon center light field enhancement point on the two-dimensional plane by adjusting the initial phase of the incident light. The surface plasmon lens optical tweezers provided by the invention have the advantages that the size is in the micron order, and the surface plasmon lens optical tweezers can be better integrated on a chip, so that the surface plasmon lens optical tweezers are beneficial to expansion.
The above embodiments are only for illustrating the technical solution of the present invention and not for limiting the same, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications and equivalents may be made thereto without departing from the spirit and scope of the technical solution of the present invention.
Claims (10)
1. An optical tweezers device based on surface plasmon lens, its characterized in that: the optical tweezers device comprises a substrate, a metal layer, a grating and a semi-elliptic cylinder lens arranged above the grating; the grating is etched on the metal layer; when incident light vertically enters the grating from the substrate, a surface plasmon is excited between the metal layer and the semi-elliptic cylinder lens; a pair of counter-propagating surface plasmons form interference fringes to form surface plasmon enhancement points in the center of a semi-elliptic cylindrical lens with the surface plasmons, and four semi-elliptic cylindrical lenses are symmetrically placed on the metal layer.
2. The surface plasmon lens-based optical tweezers device of claim 1, wherein: the substrate is silicon dioxide, the metal layer is Au, and the semi-elliptic cylindrical lens is Si 3 N 4 A waveguide.
3. The surface plasmon lens-based optical tweezers device of claim 1, wherein: the incident light is Gaussian light, the wavelength of the incident light is 785nm, and the initial phase is phi i (i＝1,2,3,4)。
4. The surface plasmon lens-based optical tweezers device of claim 3 wherein: the surface plasmon enhancement point is obtained by changing the initial phase phi of the incident light i To adjust its position on a two-dimensional plane.
5. The surface plasmon lens-based optical tweezers device of claim 1, wherein: the grating is a full-etched grating with a period lambda so as to improve the excitation efficiency of surface plasmons.
6. The surface plasmon lens-based optical tweezers device of claim 5 wherein: the period of the grating is 360nm, and the thickness of the metal layer is 200nm.
7. The surface plasmon lens-based optical tweezers device of claim 1, wherein: and the semi-major axis of the surface semi-ellipse of the surface plasmon is a, and the length of the semi-minor axis is consistent with the width of the semi-elliptical cylindrical lens.
8. The surface plasmon lens-based optical tweezers device of claim 7 wherein: the semi-major axis a is 2.9um, and the length of the semi-minor axis and the width of the semi-elliptical cylindrical lens are 2.5um.
9. The surface plasmon lens-based optical tweezers device of claim 1, wherein: the surface plasmons have local field enhancement of a sub-wavelength range in the longitudinal direction, and the optical field on the upper surface of the metal layer is used for effectively capturing particles.
10. The surface plasmon lens-based optical tweezers device of claim 1, wherein: the beam power of the incident light was 50mW.
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104090332A (en) * | 2014-07-10 | 2014-10-08 | 南京邮电大学 | Long-focus tight-focusing surface plasmonic lens under radially polarized beam |
| CN113687465A (en) * | 2021-09-27 | 2021-11-23 | 清华大学 | Surface plasmon near-field focusing lens based on all-dielectric super surface |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104090332A (en) * | 2014-07-10 | 2014-10-08 | 南京邮电大学 | Long-focus tight-focusing surface plasmonic lens under radially polarized beam |
| CN113687465A (en) * | 2021-09-27 | 2021-11-23 | 清华大学 | Surface plasmon near-field focusing lens based on all-dielectric super surface |
Non-Patent Citations (3)
| Title |
|---|
| Nanoparticle trapping by counter-surface plasmon polariton lens;Jingjing Hong等;Chinese Optics Letters;第20卷(第2期);023601-1至023601-5 * |
| 介质填充型二次柱面等离激元透镜的亚波长聚焦;胡昌宝;许吉;丁剑平;;物理学报(第13期);230-238 * |
| 基于金属表面等离子激元控制光束的新进展;王庆艳;王佳;张书练;;光学技术(第02期);164-174 * |
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