CN113687465A - Surface plasmon near-field focusing lens based on all-dielectric super surface - Google Patents
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Abstract
The application discloses surface plasmon near field focusing lens based on all-dielectric super surface includes: the super-surface coupler is used for converting the space incident light waves into surface plasmons and inducing the surface plasmons to propagate to a focus of the surface plasmon near-field focusing lens to form focusing light spots; the metal film is used as a propagation carrier of the surface plasmon, and the section of the metal film is gradually reduced according to a preset constraint condition along the propagation direction of the surface plasmon so as to exert transverse constraint on the surface plasmon; and the dielectric substrate is used for carrying the super-surface coupler and the metal film. The embodiment of the application can focus the electromagnetic wave incident in the free space into the light spot with the sub-wavelength size, breaks through the diffraction limit, is small in size and easy to integrate, and solves the technical problems that in the related technology, a device for converting the space transmission electromagnetic wave into the surface plasmon polariton wave is large in size, difficult to integrate to a system on a chip and low in energy utilization efficiency.
Description
Technical Field
The application relates to the technical field of light wave control, in particular to a surface plasmon near field focusing lens based on an all-dielectric super surface.
Background
The basis driving the rapid development of nanotechnology is the advanced nanofabrication technology, which is the processing of nanomaterials, structures, devices and systems using either top-down or bottom-up approaches. It has wide application in various fields, typically in integrated circuit fabrication, other optical components such as optical super-surface processing, biomimetic surface fabrication such as gene sequencing, drug delivery, and high-density memory disk processing, all without departing from nano-fabrication technology. Of all the nano-processing techniques, photolithography is the most mature top-down processing method, but the processing precision of the photolithography technique is limited by optical diffraction. In the existing photoetching technology, the processing precision is improved by reducing the wavelength of incident light waves, improving the numerical aperture of a light wave focusing system, reducing process factors and the like, and the efficiency and the cost are difficult to be considered. With the development of nanotechnology in various fields, a simpler processing scheme with reasonable price is urgently needed, and the method can be widely applied to the fields of scientific research, industry and the like.
The surface plasmon is an electronic collective oscillation effect at the interface of the dielectric medium and the metal, the surface plasmon wave has a wavelength smaller than that of a free space electromagnetic wave, and a field constraint and a field enhancement effect are generated at the interface, so that the focusing of breaking through the diffraction limit is expected to be realized, and a chance is brought for novel nano processing application. However, due to the lack of a surface plasmon wave source in the visible light or even in the ultraviolet band, only the spatially transmitted electromagnetic wave can be converted into a surface plasmon wave. In order to overcome momentum mismatch between the two, in the conventional scheme, optical elements such as a prism and a grating are adopted to provide tangential wave vectors for space incident electromagnetic waves, so that conversion of surface plasmon waves is realized, but the problem of low energy utilization efficiency generally exists. In addition, the bulky optical elements are difficult to be integrated into the system on chip, which is contrary to the current trend of miniaturization and integration of optical functional devices.
Disclosure of Invention
The application provides a surface plasmon near field focusing lens based on all-dielectric super surface to solve the technical problems that the device for converting space transmission electromagnetic waves into surface plasmon waves in the related art is large in size, difficult to integrate to a system on a chip and low in energy utilization efficiency.
The embodiment of the application provides a surface plasmon near field focusing lens based on all-dielectric super surface, includes: the super surface coupler is used for converting a space incident light wave into a surface plasmon and inducing the surface plasmon to propagate to a focus of the surface plasmon near-field focusing lens to form a focusing light spot, wherein the super surface coupler comprises: the system comprises a plurality of coupling units which are distributed in different directions, wherein each coupling unit is composed of a one-dimensional linear periodic array of a plurality of supercells, and each supercell is composed of a plurality of medium particles with different sizes; the metal thin film is used as a propagation carrier of the surface plasmon, and the section of the metal thin film is gradually reduced according to a preset constraint condition along the propagation direction of the surface plasmon so as to exert transverse constraint on the surface plasmon; a dielectric substrate for carrying the super-surface coupler and the metal film.
According to the all-dielectric super-surface-based surface plasmon near-field focusing lens, momentum matching of space incident light waves and surface plasmons is achieved through the super-surface coupler, the surface plasmons which are converted from the light waves incident to different positions of the super-surface coupler are transmitted along the direction of the one-dimensional linear periodic array by using coupling units with different distributions and different orientations, and when all couplers point to a lens focus, all surface plasmon waves converge at the lens focus; the metal film is used as a propagation carrier of the surface plasmon, and transverse constraint can be applied to the field distribution of the surface plasmon through the design of geometric shapes, so that the surface plasmon can obtain larger field constraint and field enhancement effect in the propagation process, and a focusing light spot breaking through the diffraction limit is generated at the focus of the lens; the dielectric substrate is used as a supporting substrate, the auxiliary function of bearing the super-surface coupler and the metal film is achieved, and an independent surface plasmon lens is formed. Therefore, the electromagnetic wave incident in the free space can be focused into the light spot with the sub-wavelength size, the diffraction limit is broken through, and the technical problems that a device for converting the space transmission electromagnetic wave into the surface plasmon wave in the related technology is large in size, difficult to integrate to a system on a chip and low in energy utilization efficiency are solved.
In addition, the all-dielectric super-surface based surface plasmon near-field focusing lens according to the above embodiments of the present application may further have the following additional technical features:
optionally, in an embodiment of the present application, the transmission phases of the medium particles with different sizes in the supercell to the incident light wave are different, and the transmission phases of the medium particles at different positions are linearly changed.
Optionally, in one embodiment of the present application, the total amount of variation in transmission phase in a single supercell is an integer multiple of 360 degrees.
Optionally, in an embodiment of the present application, the plurality of medium particles with different sizes are arranged along a one-dimensional direction to form a super-cell, so that the difference between the transmission phases of two adjacent medium particles in the super-cell is equal, and the difference between the phases is equal to the difference between the transmission phases of the first and the last medium particles in the super-cell.
Optionally, in an embodiment of the present application, the plurality of supercells form the coupling unit in a one-dimensional linear periodic array, so that the transmission phase of the dielectric particles at different positions in the coupling unit varies linearly with position.
Optionally, in an embodiment of the present application, the metal thin film is a biconical structure with intersecting tips, and the position of the intersecting tips of the biconical structure is a focal point of the surface plasmon near-field focusing lens.
Optionally, in an embodiment of the present application, a thickness of the metal thin film is less than or equal to 120 nm.
Optionally, in an embodiment of the present application, the dielectric substrate is disposed transparent to the incident light wave.
Optionally, in an embodiment of the present application, the plurality of medium particles with different sizes generate Mie scattering under the irradiation of the light wave of the incident light, and modulate the transmitted light wave to obtain different transmission phases, so as to generate a transmission phase with a gradient distribution.
Optionally, in an embodiment of the present application, the super surface coupler and the metal film are embedded or attached on the dielectric substrate.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic structural diagram of a surface plasmon near field focusing lens based on an all-dielectric super surface according to an embodiment of the present application;
FIG. 2 is a schematic diagram of a super-surface coupler according to an embodiment of the present application;
FIG. 3 is a schematic diagram of a coupling element in a super-surface coupler according to an embodiment of the present application;
fig. 4 is a schematic view of a metal film according to an embodiment of the present disclosure.
Reference numerals: a super surface coupler-1, a metal film-2, a dielectric substrate-3, a focus-4, a coupling unit-5, a supercell-6 and dielectric particles-7.
Detailed Description
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present application and should not be construed as limiting the present application.
Specifically, fig. 1 is a schematic structural diagram of a surface plasmon near-field focusing lens based on an all-dielectric super surface according to an embodiment of the present application.
As shown in fig. 1, the all-dielectric super-surface based surface plasmon near-field focusing lens 1000 includes: a super-surface coupler 1, a metal film 2 and a dielectric substrate 3.
The super-surface coupler 1 is used for converting space incident light waves into surface plasmons and inducing the surface plasmons to propagate to a focal point 4 of the surface plasmon near-field focusing lens to form focusing light spots. As shown in fig. 2 and 3, the super surface coupler 1 includes: a plurality of coupling units 5 with different distribution and different orientation, wherein each coupling unit 5 is composed of a one-dimensional linear periodic array of a plurality of supercells 6, and each supercell 6 is composed of a plurality of medium particles 7 with different sizes.
The metal thin film 2 serves as a propagation carrier of the surface plasmon, and the cross section of the metal thin film 2 is gradually reduced in accordance with a preset constraint condition in a propagation direction along the surface plasmon to apply lateral constraint to the surface plasmon.
The dielectric substrate 3 is used for carrying the super surface coupler 1 and the metal film 2.
The surface plasmon near-field focusing lens based on the all-dielectric super surface and the specific structure are described below.
Specifically, under the excitation of the spatial incident light wave, the super-surface coupler 1 converts the spatial incident wave into a surface plasmon wave, propagates on the surface of the metal film 2, and finally converges at the lens focus 4 to form a focused light spot breaking through the diffraction limit. The super-surface coupler 1 is formed by combining medium particles 7 with different sizes according to a certain spatial distribution, as shown in fig. 2, the medium particles 7 with different sizes generate Mie scattering under the irradiation of light waves, and modulate the transmitted light waves to obtain different transmission phases, so as to form transmission phases with gradient distribution. The plurality of medium particles 7 with different sizes are arranged along a one-dimensional direction to form the supercell 6, so that the difference between the transmission phases of two adjacent medium particles 7 in the supercell 6 is equal, and the difference between the phases is equal to the difference between the transmission phases of the first and the last two medium particles 7 in the supercell 6. Thus, the plurality of supercells 6 form the coupling unit 5 in a one-dimensional linear periodic array, and it can be ensured that the transmission phase of the medium particles 7 at different positions in the coupling unit 5 is linearly changed with the position, as shown in fig. 3. When the spatial light waves are incident on different coupling units 5 in the super-surface coupler 1, additional wave vectors in the linear phase gradient direction of the coupling units 5 can be obtained, thereby being converted into surface plasmon waves and propagating in the direction of the one-dimensional linear periodic array. By designing the distribution and the orientation of different coupling units 5 in the super-surface coupler 1, all the super-surface couplers 1 point to the lens focus 4, so that the propagation directions of the surface plasmon polariton waves converted by the spatial light waves incident to different positions of the super-surface coupler 1 all point to the lens focus 4, and interference enhancement occurs at the lens focus 4.
Further, the metal thin film 2 serves as a propagation carrier of the surface plasmon, and the cross section of the metal thin film 2 is gradually reduced in accordance with a preset constraint condition in the propagation direction of the surface plasmon for applying lateral constraint to the surface plasmon.
It is understood that the preset condition may be set according to practical situations, for example, the cross section of the metal thin film 2 is reduced to the intersection of the tips in a linear reduction manner within a set distance, or the cross section is reduced according to a preset cross section reduction rule, and the like, and is not particularly limited.
The metal thin film 2 conducts the surface plasmon while confining it to the metal thin film surface. Transverse constraints can be applied to the field distribution of the surface plasmon through the design of the geometric shape. When the surface plasmon is transmitted on the metal film 2 along the direction that the cross section of the metal film is gradually reduced, the reduction of the guided wave wavelength enables the surface plasmon to obtain larger field constraint and field enhancement effect in the transmission process, and more obvious focusing effect is obtained at the focus of the lens, so that a focusing light spot breaking through the diffraction limit is generated.
Further, a dielectric substrate 3 is used to carry the super surface coupler 1 and the metal thin film 2.
Specifically, the dielectric substrate 3 serves as a support base, carrying the super surface coupler 1 and the metal thin film 2 embedded in or attached thereto. It will be appreciated that the dielectric substrate 3, the super surface coupler 1 and the metal film 2 form a multilayer structure, wherein, as a possible implementation, the super surface coupler 1 is embedded in the dielectric substrate 3 and the metal film 2 is attached to the surface of the dielectric substrate 3. The space light wave enters from one side of the medium substrate 3, and a near-field focusing effect is formed on the other side of the medium substrate to which the metal film 2 is attached. The specific setting mode can be set by a person skilled in the art according to actual conditions, and is not particularly limited.
According to one embodiment of the present application, the transmission phases of the medium particles 7 with different sizes in the supercell 6 to the incident light wave are different, the transmission phases of the medium particles 7 at different positions are linearly changed, and the total amount of the change in the transmission phase in one supercell 6 is an integral multiple of 360 degrees.
Specifically, according to Mie scattering theory, when the electric dipole resonance and magnetic dipole resonance frequencies of the dielectric particles 7 overlap or are close to each other, the dielectric particles 7 maintain a high transmittance for the incident electromagnetic wave while the transmission phase is changed by 360 degrees. Thus, by adjusting the geometry of the dielectric particles 7, an arbitrary transmission phase can be achieved, i.e. the transmission phase of the dielectric particles 7 at different positions in the supercell 6 can have an arbitrary position-dependent linear gradient. When the linear gradient of the transmission phase is equal to the wave vector of the surface plasmon, the momentum matching condition of the spatial incident light wave and the surface plasmon is satisfied, and the spatial incident light wave is efficiently converted into the surface plasmon. It should be noted that the total amount of the transmission phase change in one super-cell 6 should be an integral multiple of 360 degrees, so that when a plurality of super-cells 6 form the coupling unit 5 in the form of a one-dimensional linear periodic array, the phases of the surface plasmon waves generated by all super-cells 6 in the coupling unit 5 are the same, and interference enhancement occurs during transmission, and finally the optical field energy density of the lens focus 4 is maximized.
It should be noted that the media particles 7 may have various geometric shapes such as rectangular parallelepiped and elliptic cylinder, and are not particularly limited.
According to one embodiment of the present application, the dielectric particles 7 are composed of a high refractive index, low loss dielectric material. Specifically, the medium particles 7 with high refractive index have a stronger Mie scattering effect, so that full coverage of a 360-degree transmission phase can be achieved by using the medium particles 7 with smaller sizes, and thus, in the supercell 6 with a certain period length, a greater number of medium particles 7 can be arranged, scattering of incident light waves is reduced, conversion efficiency of surface plasmons is increased, and energy utilization rate of the lens is improved. For example, the dielectric particles 7 may be made of silicon, tellurium, or the like, and are not particularly limited.
According to one embodiment of the present application, the metal thin film 2 is a biconical structure with intersecting tips, the tip of the biconical structure being the focal point 4 of the surface plasmon near field focusing lens 1000. Specifically, the strong light localization characteristic of the surface plasmons makes it possible to achieve deep field focusing by fabricating the tapered metal thin film 2, as shown in fig. 4, when the surface plasmons propagate on the tapered structure of the metal thin film 2 in a direction in which its cross section gradually decreases, the optical field energy is continuously concentrated, thereby obtaining a smaller focus. In addition, when the surface plasmon propagates to the tip of the tapered structure, i.e., at the focal point 4 of the lens, the binding force of the tapered tip structure acts on the surface electrons to induce resonance, i.e., localized surface plasmon resonance is generated, further amplifying the electric field of the near field region. It should be noted that, in order to further optimize the localized surface plasmon resonance at the focal point 4, other structures, such as a rectangular groove or a ridge hole structure, may also be designed at the intersection of the tips of the biconical structure, which is not specifically limited.
According to one embodiment of the present application, the thickness of the metal thin film 2 is less than or equal to 120 nanometers. Specifically, the thickness of the metal thin film 2 should be smaller than the attenuation distance of the surface plasmon in the metal, and may be 50 nm, 80 nm, 100 nm, or the like. Since the spatial light waves are incident from one side of the dielectric substrate 3, after focusing on the interface between the dielectric substrate 3 and the metal film 2, the focal light field also needs to pass through the metal film 2 to reach the surface of one side of the metal film 2 departing from the dielectric substrate 3, and can be used for the nano-machining process. Therefore, as a preferred embodiment, in order to reduce the attenuation of the optical field through the metal thin film 2, a smaller thickness should be selected as much as possible under the precondition that the thickness of the metal thin film 2 is ensured to be uniform.
According to one embodiment of the present application, the dielectric substrate 3 is transparent to incident light waves. Specifically, the spatially incident light wave is converted into surface plasmons by the super surface coupler 1 after passing through the dielectric substrate 3, and therefore the material of the dielectric substrate 3 should have a low refractive index and low loss, for example, silicon dioxide, to reduce reflection and absorption of the spatially incident light wave and improve energy utilization. It will be appreciated that the material of the dielectric substrate 3 is different from the dielectric particles 7 and the refractive index contrast between them should be as large as possible to obtain a stronger Mie scattering effect for the dielectric particles 7.
The following describes a design scheme of the transmission phases of the supercell 6 and the medium particles 7 in the all-dielectric-super-surface-based surface plasmon near field focusing lens according to the present application by using specific examples.
1) When the total amount of the transmission phase change in one supercell 6 is 360 degrees, each supercell 6 contains 2 medium particles 7 with different sizes, and the transmission phases are 0 degree and 180 degree respectively.
2) When the total amount of the change of the transmission phase in one supercell 6 is 720 degrees, each supercell 6 contains 3 medium particles 7 with different sizes, and the transmission phases are 0 degree, 240 degree and 120 degree respectively.
3) When the total amount of the change of the transmission phase in one supercell 6 is 1080 degrees, each supercell 6 contains 5 medium particles 7 with different sizes, and the transmission phases are 0 degree, 216 degree, 72 degree, 288 degree and 144 degree respectively.
In order to implement the all-dielectric-super-surface-based surface plasmon near field focusing lens introduced in the above embodiment, the preparation method of the embodiment of the present application may specifically include the following steps:
and S1, machining the medium substrate with the required geometric dimension by adopting a mechanical machining mode, such as wafer cutting or laser cutting.
And S2, processing the pre-designed super-surface coupler on the medium substrate by adopting an ion beam etching or photoetching process.
And S3, depositing a layer of material which is the same as the medium substrate on the super-surface coupler by adopting a vapor deposition technology, such as vacuum evaporation, ion beam sputtering or magnetron sputtering, and packaging the super-surface coupler into the medium substrate.
And S4, processing a metal film with a biconical structure on the surface of the side, where the super-surface coupler is packaged, of the dielectric substrate by adopting a photoetching process.
It should be noted that the above preparation method is only an example, and those skilled in the art may adopt other preparation methods to realize the preparation of the all-dielectric-super-surface-based surface plasmon near field focusing lens according to actual needs, and are not particularly limited.
According to the all-dielectric super-surface based surface plasmon near-field focusing lens provided by the embodiment of the application, under the excitation of space incident light waves, the super-surface coupler converts the space incident waves into surface plasmon waves, the surface plasmon waves are transmitted on the surface of the metal film, and finally the surface plasmon waves are converged at the focus of the lens to form a focusing light spot breaking through the diffraction limit. The super-surface coupler is formed by combining medium particles with different sizes according to certain spatial distribution, the medium particles with different sizes generate Mie scattering under the irradiation of light waves, and the transmitted light waves are modulated to obtain different transmission phases, so that gradient distribution of the transmission phases is formed. And adjusting the size of the medium particles to ensure that the transmission phase gradient of the medium particles at different positions in the supercell is equal to the wave vector of the surface plasmon, and the period of the supercell is integral multiple of the wavelength of the surface plasmon. By designing the distribution and the orientation of different coupling units in the super-surface coupler, all the super-surface couplers point to the focus of the lens, so that the propagation directions of surface plasmon waves converted by space light waves incident to different positions of the super-surface coupler all point to the focus of the lens, and interference enhancement occurs at the focus of the lens. And applying transverse constraint on the field distribution of the surface plasmon by combining the geometric shape design of the metal film. When the surface plasmons are transmitted on the metal film along the direction that the cross section of the metal film is gradually reduced, the light field energy is continuously concentrated in the transmission process, and finally, a local surface plasmon resonance effect is generated at the tip of the conical structure, namely the focal point of the lens, so that a more obvious focusing effect and a larger field enhancement effect are obtained, and a focusing light spot breaking through the diffraction limit is generated. By means of the mode, the electromagnetic waves incident in the free space are focused into the light spots with the sub-wavelength sizes, the diffraction limit is broken through, the size is small, integration is easy, and the technical problems that in the related technology, a device for converting the space transmission electromagnetic waves into the surface plasmon waves is large in size, difficult to integrate to a system on a chip and low in energy utilization efficiency are solved.
In the description herein, reference to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or N embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present application, "N" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
Claims (10)
1. A surface plasmon near-field focusing lens based on an all-dielectric super-surface is characterized by comprising:
the super surface coupler is used for converting a space incident light wave into a surface plasmon and inducing the surface plasmon to propagate to a focus of the surface plasmon near-field focusing lens to form a focusing light spot, wherein the super surface coupler comprises: the system comprises a plurality of coupling units which are distributed in different directions, wherein each coupling unit is composed of a one-dimensional linear periodic array of a plurality of supercells, and each supercell is composed of a plurality of medium particles with different sizes;
the metal thin film is used as a propagation carrier of the surface plasmon, and the section of the metal thin film is gradually reduced according to a preset constraint condition along the propagation direction of the surface plasmon so as to exert transverse constraint on the surface plasmon; and
a dielectric substrate for carrying the super-surface coupler and the metal film.
2. The all-dielectric super-surface based surface plasmon near-field focusing lens of claim 1, wherein the transmission phases of the medium particles with different sizes in the supercell to the incident light wave are different, and the transmission phases of the medium particles at different positions are linearly changed.
3. The all-dielectric-metasurface-based surface plasmon near field focusing lens of claim 1 wherein the total amount of transmission phase variation in a single supercell is an integer multiple of 360 degrees.
4. The all-dielectric super-surface based surface plasmon near-field focusing lens of claim 2, wherein said plurality of dielectric particles with different sizes are arranged along a one-dimensional direction to form a super-cell, so that the difference between the transmission phases of two adjacent dielectric particles in the super-cell is equal, and the difference between the phases is equal to the difference between the transmission phases of the first and the last dielectric particles in the super-cell.
5. The all-dielectric-super-surface-based surface plasmon near field focusing lens of claim 4 wherein said plurality of super cells form said coupling unit in a one-dimensional linear periodic array such that the transmission phase of the dielectric particles at different positions in said coupling unit varies linearly with position.
6. The all-dielectric super-surface based surface plasmon near field focusing lens of claim 1 wherein said metal thin film is a biconic structure with intersecting tips, and the position of the intersection of the tips of said biconic structure is the focal point of said surface plasmon near field focusing lens.
7. The all-dielectric-super-surface-based surface plasmon near field focusing lens of claim 1 wherein the thickness of said metal thin film is less than or equal to 120 nanometers.
8. The all-dielectric-super-surface-based surface plasmon near field focusing lens of claim 1 wherein said dielectric substrate is disposed transparent to said incident light wave.
9. The all-dielectric super-surface based surface plasmon near-field focusing lens of claim 1, wherein said plurality of medium particles of different sizes are subjected to Mie scattering under the irradiation of the light wave of the incident light, and modulate the transmitted light wave to obtain different transmission phases, thereby generating the transmission phases with gradient distribution.
10. The all-dielectric super-surface based surface plasmon near field focusing lens of any of claims 1-9, wherein said super surface coupler is embedded in or attached to said metal thin film on said dielectric substrate.
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