CN204779925U - Be applied to cooling device of single crystal growing furnace and contain its single crystal growing furnace - Google Patents

Be applied to cooling device of single crystal growing furnace and contain its single crystal growing furnace Download PDF

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Publication number
CN204779925U
CN204779925U CN201520343186.0U CN201520343186U CN204779925U CN 204779925 U CN204779925 U CN 204779925U CN 201520343186 U CN201520343186 U CN 201520343186U CN 204779925 U CN204779925 U CN 204779925U
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China
Prior art keywords
water
single crystal
crystal growing
growing furnace
flange
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Expired - Fee Related
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CN201520343186.0U
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Chinese (zh)
Inventor
边志坚
李德建
张晓朋
李朝阳
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HEBEI NINGTONG ELECTRONIC MATERIAL CO Ltd
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HEBEI NINGTONG ELECTRONIC MATERIAL CO Ltd
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Priority to CN201520343186.0U priority Critical patent/CN204779925U/en
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Publication of CN204779925U publication Critical patent/CN204779925U/en
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Abstract

The utility model relates to a be applied to cooling device of single crystal growing furnace and contain its single crystal growing furnace, cooling device include water cooling jacket, cold water machine and water tank, be provided with annular closed circulation pipeline in the water cooling jacket, water cooling jacket is last along being provided with the flange, be provided with water inlet and water inlet on the flange, the water inlet with the water inlet respectively with the end of intaking of annular closed circulation pipeline links to each other with the play water end (W. E. ), cold water machine through the inlet channel with the water inlet links to each other, the delivery port pass through outlet conduit with the water tank links to each other, the water tank with link to each other through the connecting tube between the cold water machine, be provided with water pump and valve on the connecting tube. The utility model discloses can accelerate the crystallization velocity of silicon liquid to improve crystal growth speed, improve the constant diameter pulling rate, shorten the constant diameter cycle, improve production efficiency.

Description

A kind ofly be applied to the refrigerating unit of single crystal growing furnace and comprise its single crystal growing furnace
Technical field
The utility model relates to solar-photovoltaic technology field, relates to especially being a kind ofly applied to the refrigerating unit of single crystal growing furnace and comprising its single crystal growing furnace.
Background technology
Single silicon is through development for many years, and cost has had and significantly declines, along with continuing to increase of charging capacity, if think that reducing production cost further just must improve single efficiency of furnace.Crystal pulling process comprises dress, material, stable, seeding, shouldering clearly, turns shoulder, isometrical, finish up, cool nine procedures.Wherein, isometrical operation is an of paramount importance operation in crystal pulling process, is also an operation the most consuming time, if the efficiency that will improve isometrical operation just must improve isometrical pulling rate.Existing single crystal growing furnace is divided into main chamber and concubine two portions, the silicon material level melted is in well heater middle and upper part, main chamber, the monocrystalline of pull-out is arranged in main chamber's upper part and concubine, if the thermal radiation of well heater to monocrystalline can be reduced, and the monocrystalline of pull-out can release latent heat in time, the crystallization velocity of silicon liquid will be accelerated, also will improve isometrical pulling rate, improve the whole efficiency of furnace.
In view of this, need to invent a kind of refrigerating unit being applied to single crystal growing furnace can accelerating the crystallization velocity of silicon liquid.
Utility model content
The purpose of this utility model is the defect overcoming prior art, provides one can accelerate silicon liquid crystallization velocity, improves the refrigerating unit being applied to single crystal growing furnace of crystalline silicon pulling rate, and providing package is containing its single crystal growing furnace simultaneously.
To achieve these goals, the technical scheme taked of the utility model is as follows:
The utility model provides a kind of refrigerating unit being applied to single crystal growing furnace on the one hand, its gordian technique is, it comprises water jacket, cooling-water machine and water tank, annular closed cycle pipeline is provided with in described water jacket, along being provided with flange on described water jacket, described flange is provided with water outlet and water-in, described water outlet and described water-in communicate with the feed-water end of described annular closed cycle pipeline and water side respectively, described cooling-water machine is connected with described water-in by inlet channel, described water outlet is communicated with described water tank by outlet conduit, be connected by connecting tube between described water tank with described cooling-water machine, described connecting tube is provided with water pump and valve.
The utility model on the other hand provides a kind of single crystal growing furnace comprising above-mentioned refrigerating unit, and its gordian technique is, described flange is arranged between bell and little concubine, and described water jacket is run through and stretched in upper furnace tube by described bell.
Compared with prior art, the beneficial effect acquired by the utility model is as follows:
Refrigerating unit of the present utility model utilizes water pump to enter in water jacket by recirculated water by cooling-water machine, by reducing the temperature of water jacket, the monocrystalline drawn out is entered in water jacket and can discharge latent heat fast, accelerate the crystallization velocity of silicon liquid, thus raising crystalline growth velocity, improve isometrical pulling rate, shorten the isometrical cycle.Through facts have proved, use the single crystal growing furnace comprising this device can improve isometrical more than pulling rate 0.3mm/min, for enhancing productivity, reducing production cost and there is great meaning.
Accompanying drawing explanation
Accompanying drawing 1 is refrigerating unit structural representation of the present utility model;
Accompanying drawing 2 is Figure 1A portion enlarged view;
In the accompanying drawings: 1 water jacket, 2 flanges, 3 water outlets, 4 water-ins, 5 bells, 6 little concubines, 7 cooling-water machines, 8 water tanks, 9 inlet channels, 10 outlet conduits, 11 valves, 12 water pumps, 13 connecting tubes, 14 upper furnace tubes.
Embodiment
Below in conjunction with attached Fig. 1 and 2, detailed further describing is carried out to the utility model.
As shown in figure 1 and 2, a kind of refrigerating unit being applied to single crystal growing furnace, its gordian technique is, it comprises water jacket 1, cooling-water machine 7 and water tank 8, described water jacket 1 adopts 304 stainless steels, have high temperature resistant, heat conduction is fast, the feature of clean easy to clean, water jacket interlayer is the pipeline of annular closed cycle, along being provided with flange 2 on described water jacket 1, described flange 2 is provided with water outlet 3 and water-in 4, described water-in 3 is connected with the feed-water end of described annular closed cycle pipeline, described water-in 4 is connected with the water side of described annular closed cycle pipeline, described cooling-water machine 7 is connected with described water-in 4 by inlet channel 9, described water outlet 3 is connected with described water tank 8 by outlet conduit 10, described water tank 8 is connected by connecting tube 13 with between described cooling-water machine, water pump 12 and valve 11 is provided with in the middle of described connecting tube 13.
As shown in Figure 2, a kind of single crystal growing furnace comprising refrigerating unit, its gordian technique is, described flange 2 is arranged between bell 5 and little concubine 6, and described water jacket 1 is run through and stretched in upper furnace tube 14 by described bell 5.
Working process of the present utility model is as follows:
When starting pulling monocrystal, open valve 11, open water circulating pump 12, water is made to enter in water jacket 1 by cooling-water machine 7, when monocrystalline length does not grow among water jacket within 300mm, monocrystalline body of heater normal temps can be remained to by adjustment barrel sleeving temperature, to keep the stable of single crystal growing environment; When single crystal growing length is greater than 300mm, arrive among water jacket, the temperature of cooling-water machine 7 can have been regulated, reduced the temperature of water jacket 1, to reduce the temperature around monocrystalline, and then heat unnecessary for monocrystalline is taken away, improved the crystallization velocity of solid-liquid interface; When single crystal growing is to stage casing, monocrystalline length increases, and the heat come out gets more and more, and can reduce water jacket 1 temperature further, to maintain the production rate of monocrystalline; Monocrystalline grows into the later stage, and silicon liquid reduces, and progressively improves the temperature of water jacket, prevents that solid-liquid interface temperature is too low causes liquid level crystallization.By the use of this device, the speed of growth of monocrystalline can be significantly improved, improve single stove cycle.
It will be appreciated by those skilled in the art that single crystal growing furnace is prior art, the utility model is intended to outstanding inventive point place, and other structures for single crystal growing furnace repeat no more herein.
The above embodiment is only preferred embodiment of the present utility model, and is not the exhaustive of the feasible enforcement of the utility model.For persons skilled in the art, to any apparent change done by it under the prerequisite not deviating from the utility model principle and spirit, all should be contemplated as falling with within claims of the present utility model.

Claims (2)

1. one kind is applied to the refrigerating unit of single crystal growing furnace, it is characterized in that, it comprises water jacket (1), cooling-water machine (7) and water tank (8), annular closed cycle pipeline is provided with in described water jacket (1), described water jacket (1) is upper along being provided with flange (2), described flange (2) is provided with water outlet (3) and water-in (4), described water outlet (3) and described water-in (4) communicate with the feed-water end of described annular closed cycle pipeline and water side respectively, described cooling-water machine (7) is connected with described water-in (4) by inlet channel (9), described water outlet (3) is connected with described water tank (8) by outlet conduit (10), described water tank (8) is communicated by connecting tube (13) with between described cooling-water machine, described connecting tube (13) is provided with water pump (12) and valve (11).
2. one kind comprises the single crystal growing furnace of the refrigerating unit being applied to single crystal growing furnace as claimed in claim 1, it is characterized in that, described flange (2) is arranged between bell (5) and little concubine (6), and described water jacket (1) is run through and stretched in upper furnace tube (14) by described bell (5).
CN201520343186.0U 2015-05-26 2015-05-26 Be applied to cooling device of single crystal growing furnace and contain its single crystal growing furnace Expired - Fee Related CN204779925U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520343186.0U CN204779925U (en) 2015-05-26 2015-05-26 Be applied to cooling device of single crystal growing furnace and contain its single crystal growing furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520343186.0U CN204779925U (en) 2015-05-26 2015-05-26 Be applied to cooling device of single crystal growing furnace and contain its single crystal growing furnace

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CN204779925U true CN204779925U (en) 2015-11-18

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105603520A (en) * 2016-01-20 2016-05-25 西安交通大学 High-speed single crystal growth device and method
CN111254499A (en) * 2020-03-05 2020-06-09 上海磐盟电子材料有限公司 Single crystal furnace structure and using method thereof
CN113774482A (en) * 2021-09-16 2021-12-10 青海高景太阳能科技有限公司 Water cooling system for drawing large-size single crystal

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105603520A (en) * 2016-01-20 2016-05-25 西安交通大学 High-speed single crystal growth device and method
CN105603520B (en) * 2016-01-20 2018-10-30 西安交通大学 A kind of high speed single-crystal growing apparatus and method
CN111254499A (en) * 2020-03-05 2020-06-09 上海磐盟电子材料有限公司 Single crystal furnace structure and using method thereof
CN113774482A (en) * 2021-09-16 2021-12-10 青海高景太阳能科技有限公司 Water cooling system for drawing large-size single crystal

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20151118

Termination date: 20180526

CF01 Termination of patent right due to non-payment of annual fee