CN206051571U - Reduction furnace - Google Patents
Reduction furnace Download PDFInfo
- Publication number
- CN206051571U CN206051571U CN201621059337.0U CN201621059337U CN206051571U CN 206051571 U CN206051571 U CN 206051571U CN 201621059337 U CN201621059337 U CN 201621059337U CN 206051571 U CN206051571 U CN 206051571U
- Authority
- CN
- China
- Prior art keywords
- cooling
- reduction furnace
- heat exchanger
- mentioned
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a kind of reduction furnace, is related to technical field of mechanical equipment, main purpose is reached and has been to speed up arrheaing the purpose of high-temperature water rate of cooling.Main technical schemes of the present utility model are：A kind of reduction furnace, including：Body of heater；First cooling tube, first cooling tube include water inlet and outlet, are cooling section between the water inlet and the outlet, and the cooling section is arranged in the reduction furnace, for cooling down to the body of heater；Heat exchanger, the heat exchanger are arranged at the outside of the reduction furnace, and one end of the heat exchanger is connected to the water inlet, and the other end is connected to the outlet, for being circulated cooling to the cooling water in the cooling section.This utility model is mainly used in reduction furnace production polysilicon.
Description
Technical field
This utility model is related to technical field of mechanical equipment, more particularly to a kind of reduction furnace.
Background technology
In the production of polycrystalline silicon rod, carry out high-temperature heating by using reduction furnace to be given birth to the continuous crystallize of polysilicon
It is long, after the size of polysilicon reaches the expected diameter of production requirement, need blowing out to lower the temperature, polysilicon dress is taken out from reduction furnace
Enter and unload pack, carry out next step operation, wherein, silicon rod need to be lowered the temperature less than 80 degree and can be loaded interior to pack is unloaded.
For the cooling method of reduction furnace has many kinds, the cool-down method for generally adopting is as follows, after the cessation of the heating, front rank
Section because reduce furnace temperature too it is high cannot, normal-temperature water can be caused to vaporize in the pipeline using normal-temperature water, blast may be caused, so logical
Often reduction furnace bell jar is lowered the temperature using the high temperature water circulation of 125 to 160 degree, when reduction furnace temperature is down to 140 to 200 degree
When, will be unable to play cooling effect, then stop high-temperature water periodical feeding, and lower the temperature into the rear stage.Stage is in reduction furnace afterwards
It is interior to purge silicon rod using cold nitrogen, though now high temperature water circulation stops supplying water, but still rest in pipe with stagnant water, and reduce
High temperature water pressure in stove is higher so that high temperature coolant-temperature gage will not be reduced substantially, when being lowered the temperature using cold nitrogen, the height in pipeline
Warm water can make temperature-fall period time lengthening to silicon rod radiations heat energy on the contrary.
Utility model content
In view of this, this utility model embodiment provides a kind of reduction furnace, and main purpose is to speed up arrheaing high-temperature water cooling
Speed.
To reach above-mentioned purpose, this utility model mainly provides following technical scheme：
This utility model embodiment provides a kind of reduction furnace, including：
Body of heater；
First cooling tube, first cooling tube include water inlet and outlet, the water inlet and the outlet it
Between be cooling section, the cooling section is arranged in the reduction furnace, for cooling down to the body of heater；
Heat exchanger, the heat exchanger are arranged at the outside of the reduction furnace, and one end of the heat exchanger is connected to
The water inlet, the other end are connected to the outlet, for being circulated cooling to the cooling water in the cooling section.
Further, the reduction furnace also includes the second cooling tube, electricity of second cooling tube around the body of heater
Pole, second cooling tube are also attached to the heat exchanger, wherein, in first cooling tube, temperature is cold higher than described second
But temperature in managing.
Further, connected by the first connecting tube between the first cooling tube water inlet and the heat exchanger, institute
State, first connecting tube and described the
First switch is provided between two connecting tubes to be connected.
Further, second cooling tube is connected to the heat exchanger by the 3rd connecting tube and the 4th connecting tube, institute
State second switch is provided between the 3rd connecting tube and the 4th connecting tube and is connected.
Further, circulating pump is provided with the first connecting tube.
Further, the heat exchanger is plate type heat exchanger.
Further, pressure gauge is provided with the first connecting tube.
Further, pressure monitor is provided with the first connecting tube, the pressure monitor is connected to the circulating pump,
When the pressure detecting instrument detects the first cooling pipe pressure reaches predetermined value, the circulating pump adjusts pressure.
Further, the reduction furnace includes temperature measurer and buzzer, and the temperature measurer is connected to the buzzer, works as institute
Reduction furnace temperature is stated when reaching the temperature measurer predetermined value, the buzzer sounds.
In the technical scheme that this utility model embodiment is provided, a kind of reduction furnace, including：Body of heater, the first cooling tube and heat
Exchanger；Wherein the first cooling tube, the first cooling tube include water inlet and outlet, are cooling between water inlet and outlet
Section, cooling section is arranged in reduction furnace, for cooling down to body of heater；And heat exchanger, heat exchanger is arranged at reduction furnace
Outside, one end of heat exchanger are connected to water inlet, and the other end is connected to outlet, for carrying out to the cooling water in cooling section
Circulating cooling.In the prior art, rear stage cooling is directly purged to silicon rod using cold nitrogen, though high temperature water circulation is
Stop supplying water, but still rest in pipe with stagnant water, and the high temperature water pressure in reduction furnace is higher so that high temperature coolant-temperature gage is basic
Will not reduce, when being lowered the temperature using cold nitrogen, the high-temperature water in pipeline can make the temperature-fall period time to silicon rod radiations heat energy on the contrary
Extend.This utility model embodiment is introduced into the water in the first cooling tube in body of heater in heat exchanger, and the stagnant water for stopping is returned
Turn and lowered the temperature so that the temperature drop in the first cooling tube, not only will not be to silicon rod radiations heat energy, it might even be possible to take away silicon
The heat of rod, effectively accelerates cooling rate, improves efficiency.And silicon rod can be cooled to less than 80 degree, reach pack temperature
Require, accelerate flow of work speed.
Description of the drawings
A kind of structural representation of reduction furnace that Fig. 1 is provided for this utility model embodiment.
Specific embodiment
Further to illustrate that this utility model is to reach technological means and effect that predetermined utility model purpose is taken,
Below in conjunction with accompanying drawing and preferred embodiment, to according to the utility model proposes reduction furnace specific embodiment, structure, feature and
Its effect, describes in detail as after.
As shown in figure 1, this utility model embodiment provides a kind of reduction furnace, including：
Body of heater 1；Above-mentioned body of heater 1 is used to produce polysilicon rod, is that silicon rod produces to form a confined space.
First cooling tube 2, above-mentioned first cooling tube 2 include water inlet and outlet, above-mentioned water inlet and above-mentioned outlet
Between be cooling section, above-mentioned cooling section is arranged in above-mentioned reduction furnace, for cooling down to above-mentioned body of heater 1；Above-mentioned first is cold
But pipe 2 had both been connected to high-temperature water, was connected to above-mentioned heat exchanger 3 again, when lowering the temperature the last stage, opened the switch of high-temperature water, closed
The switch for stating heat exchanger 3 is closed, is made high-temperature water and above-mentioned first cooling tube 2 form loop, above-mentioned body of heater 1 is lowered the temperature.
After the completion of current generation cooling, high temperature tapses are closed, open the switch of above-mentioned heat exchanger 3, make cold nitrogen purging silicon rod
When being lowered the temperature, the high-temperature water in above-mentioned cooling section is lowered the temperature, make the water in above-mentioned cooling section heat radiation will not be produced to silicon rod.
Heat exchanger 3, above-mentioned heat exchanger 3 are arranged at the outside of above-mentioned reduction furnace, one end connection of above-mentioned heat exchanger 3
In above-mentioned water inlet, the other end is connected to above-mentioned outlet, for being circulated cooling to the cooling water in above-mentioned cooling section.On
It is for making heat be delivered to cold flow body from hot fluid, to meet the device of the technological requirement of regulation to state heat exchanger 3.Above-mentioned heat
3 species of exchanger is various, can select plate type heat exchanger, not only small volume, and weight is little, and heat exchanger effectiveness is high.Can also
From vortex hotting mask heat exchanger, it is the stainless heat exchanger using new vortex hotting mask heat transfer technology, by changing fluid motion
State when medium is through vortex pipe surface, strongly washes away tube surface, so as to improve heat exchange efficiency increasing heat-transfer effect.
The configuration achieves corrosion-resistant, high temperature resistant, high pressure resistant, good antiscale property function.The fluid passage of other types of heat exchanger is solid
Determine direction streamed, formed in heat exchange pipe surface and streamed, convection transfer rate is reduced.
Below by way of the working process and principle of reduction furnace in the present embodiment, the reduction furnace in specific illustrative embodiment：
Above-mentioned first cooling tube 2 is connected to into above-mentioned heat exchanger 3, is rested in pipeline originally in making rear stage cooling
High temperature stagnant water is flowed, and is lowered the temperature in above-mentioned heat exchanger 3, is that above-mentioned cooling section prevents or reduces spoke hot to silicon rod
Penetrate.
In the technical scheme that this utility model embodiment is provided, a kind of reduction furnace, including：Body of heater, the first cooling tube and heat
Exchanger；Wherein the first cooling tube, the first cooling tube include water inlet and outlet, are cooling between water inlet and outlet
Section, cooling section is arranged in reduction furnace, for cooling down to body of heater；And heat exchanger, heat exchanger is arranged at reduction furnace
Outside, one end of heat exchanger are connected to water inlet, and the other end is connected to outlet, for carrying out to the cooling water in cooling section
Circulating cooling.In the prior art, rear stage cooling is directly purged to silicon rod using cold nitrogen, though high temperature water circulation is
Stop supplying water, but still rest in pipe with stagnant water, and the high temperature water pressure in reduction furnace is higher so that high temperature coolant-temperature gage is basic
Will not reduce, when being lowered the temperature using cold nitrogen, the high-temperature water in pipeline can make the temperature-fall period time to silicon rod radiations heat energy on the contrary
Extend.This utility model embodiment is introduced into the water in the first cooling tube in body of heater in heat exchanger, and the stagnant water for stopping is returned
Turn and lowered the temperature so that the temperature drop in the first cooling tube, not only will not be to silicon rod radiations heat energy, it might even be possible to take away silicon
The heat of rod, effectively accelerates cooling rate, improves efficiency.And silicon rod can be cooled to less than 80 degree, reach pack temperature
Require, accelerate flow of work speed.
The utility model is described in further detail with reference to the accompanying drawings and examples.
In order to economize on resources, specifically, above-mentioned reduction furnace also include the second cooling tube 4, above-mentioned second cooling tube 4 around
The electrode of above-mentioned body of heater 1, above-mentioned cooling tube are also attached to above-mentioned heat exchanger 3, wherein, in above-mentioned first cooling tube 2, temperature is high
The temperature in above-mentioned second cooling tube 4.Above-mentioned heat exchanger 3 needs hot fluid and cold flow body and carries out heat transfer, generally straight
Connect and use tap water, and the water being used herein as in above-mentioned second cooling tube 4, on the one hand the coolant-temperature gage in above-mentioned second cooling tube 4
Less than the water in above-mentioned first cooling tube 2, temperature is about 30 degree, another aspect, using the water in above-mentioned second cooling tube 4 without
Water source need to be still further accessed, the use of water is reduced, while being attached on the basis of original pipeline, reducing needs the pipe of arrangement
Road, makes water pipe arrange more neat.
In order to guarantee that water will not freeze when stopping production, specifically, above-mentioned first cooling tube, 2 water inlet and above-mentioned heat exchanger
Connected by the first connecting tube 5 between 3, by the second connection between above-mentioned first cooling tube, 2 outlet and above-mentioned heat exchanger 3
Pipe 6 connects, and is provided with first switch 7 and is connected between above-mentioned first connecting tube 5 and above-mentioned second connecting tube 6.It is northerly
Winter, day QI exhaustion tremble with fear, if the water during stopping production in pipeline does not flow, may freeze, and volume meeting after being freezed due to water
Become big, easily cause pipeline breaking, accident can occur when waiting production again, particularly the coolant-temperature gage in above-mentioned first cooling tube 2
It is high, easily staff is damaged.Arranging above-mentioned first switch 7 makes connection enter above-mentioned the first of above-mentioned heat exchanger 3
Connecting tube 5 is connected with above-mentioned second connecting tube 6, need not pass through above-mentioned heat exchanger 3 while forming loop.
In the same manner, specifically, above-mentioned second cooling tube 4 is connected to above-mentioned heat exchange by the 3rd connecting tube 8 and the 4th connecting tube 9
Device 3, is provided with second switch 10 between above-mentioned 3rd connecting tube 8 and above-mentioned 4th connecting tube 9 and is connected.The northerly winter
My god, day QI exhaustion is trembled with fear, if the water during stopping production in pipeline does not flow, may freeze, and volume can become after being freezed due to water
Greatly, pipeline breaking is easily caused, accident can occurs when waiting production again, particularly the coolant-temperature gage temperature in above-mentioned second cooling tube 4
Though degree is not high, the medicated clothing drenched by dress is easy to sick.Arranging above-mentioned second switch 10 makes connection enter above-mentioned heat exchanger 3
Above-mentioned 3rd connecting tube 8 connect with above-mentioned 4th connecting tube 9, formed loop while need not pass through above-mentioned heat exchanger 3.
Reduce as water temperature after heat exchange is carried out in above-mentioned first cooling tube 2, pressure can reduce, in order to ensure above-mentioned first
In cooling tube 2 and above-mentioned heat exchanger 3, water energy is enough circulated, and specifically, is provided with circulating pump in above-mentioned first connecting tube 5
11.It is above-mentioned to follow bad pump for pressurizeing to the water in above-mentioned first connecting tube 5, it is ensured that in pipe, water temperature drop can also be followed
Ring.
As above-mentioned reduction furnace pipeline is more, above-mentioned heat exchanger 3 is placed for convenience, specifically, above-mentioned heat exchanger 3
It is plate type heat exchanger.The characteristics of above-mentioned plate type heat exchanger is maximum is small volume, is conveniently placed at and is covered with by the body of heater 1 of pipeline.And
It is and heat-exchangers of the plate type 3 is made up using special process of Polymer Synthesizing fiber, good, anti-with water vapour permeability height, air-tightness
Tear, it is ageing-resistant the features such as, while its energy-saving effect has reached Foreign Advanced Lerel.
Check whether enough pressure in above-mentioned first cooling tube 2 for convenience, and facilitate the pressure of above-mentioned circulating pump 11 to adjust
It is whole, specifically, on above-mentioned cooling tube, it is provided with pressure gauge 12.Above-mentioned pressure gauge 12 intuitively expresses above-mentioned first cooling tube 2
Pressure in circulating with above-mentioned heat exchanger 3, facilitates staff to be adjusted its pressure.
Due to needing manual detection using above-mentioned pressure gauge 12 and making feedback, in order to make above-mentioned circulating pump 11 automatic
Adjustment, is monitored at any time, is realized intelligent production, specifically, pressure monitor, above-mentioned pressure monitoring is provided with above-mentioned cooling tube
Instrument is connected to above-mentioned circulating pump 11, when above-mentioned pressure detecting instrument detects above-mentioned first cooling tube, 2 pressure reaches predetermined value, on
State circulating pump 11 and adjust pressure.Above-mentioned pressure monitor can be changed with monitoring pressure in real time, when pressure in above-mentioned first connecting tube 5
When reaching the preset value of above-mentioned pressure monitor, above-mentioned pressure monitor can make feedback, make above-mentioned circulating pump 11 increase pressure,
Without the need for staff's special detection, ensure that the water circulation in above-mentioned first cooling tube 2 is normally carried out.
As above-mentioned reduction furnace completes, after the cooling of second stage, to need staff to be actively discovered, there may come a time when cannot and
Shi Kailu is packed, and increased stand-by time, and specifically, above-mentioned reduction furnace includes temperature measurer and buzzer, above-mentioned temperature measurer connection
In above-mentioned buzzer, when above-mentioned reduction furnace temperature reaches above-mentioned temperature measurer predetermined value, above-mentioned buzzer sounds.Above-mentioned buzzer
Staff can be reminded in time to carry out blow-on, the carrying out for enabling work occasionally orderly in time, while reduce above-mentioned reduction furnace treating
The machine time, enable above-mentioned reduction furnace to put into next production as early as possible, improve production capacity.
In the technical scheme that this utility model embodiment is provided, a kind of reduction furnace, including：Body of heater, the first cooling tube and heat
Exchanger；Wherein the first cooling tube, the first cooling tube include water inlet and outlet, are cooling between water inlet and outlet
Section, cooling section is arranged in reduction furnace, for cooling down to body of heater；And heat exchanger, heat exchanger is arranged at reduction furnace
Outside, one end of heat exchanger are connected to water inlet, and the other end is connected to outlet, for carrying out to the cooling water in cooling section
Circulating cooling.In the prior art, rear stage cooling is directly purged to silicon rod using cold nitrogen, though high temperature water circulation is
Stop supplying water, but still rest in pipe with stagnant water, and the high temperature water pressure in reduction furnace is higher so that high temperature coolant-temperature gage is basic
Will not reduce, when being lowered the temperature using cold nitrogen, the high-temperature water in pipeline can make the temperature-fall period time to silicon rod radiations heat energy on the contrary
Extend.This utility model embodiment is introduced into the water in the first cooling tube in body of heater in heat exchanger, and the stagnant water for stopping is returned
Turn and lowered the temperature so that the temperature drop in the first cooling tube, not only will not be to silicon rod radiations heat energy, it might even be possible to take away silicon
The heat of rod, effectively accelerates cooling rate, improves efficiency.And silicon rod can be cooled to less than 80 degree, reach pack temperature
Require, accelerate flow of work speed.
The above, specific embodiment only of the present utility model, but protection domain of the present utility model do not limit to
In this, any those familiar with the art can readily occur in change in the technical scope that this utility model is disclosed
Or replace, should all cover within protection domain of the present utility model.Therefore, protection domain of the present utility model should be with the power
The protection domain that profit is required is defined.
Claims (9)
1. a kind of reduction furnace, it is characterised in that include：
Body of heater；
First cooling tube, first cooling tube include water inlet and outlet, between the water inlet and the outlet are
Cooling section, the cooling section are arranged in the reduction furnace, for cooling down to the body of heater；
Heat exchanger, the heat exchanger are arranged at the outside of the reduction furnace, and one end of the heat exchanger is connected to described
Water inlet, the other end are connected to the outlet, for being circulated cooling to the cooling water in the cooling section.
2. reduction furnace according to claim 1, it is characterised in that the reduction furnace also includes the second cooling tube, described the
Electrode of two cooling tubes around the body of heater, second cooling tube are also attached to the heat exchanger, wherein, described first
In cooling tube, temperature is higher than temperature in second cooling tube.
3. reduction furnace according to claim 2, it is characterised in that the first cooling tube water inlet and the heat exchanger
Between by the first connecting tube connect, between the first cooling tube outlet and the heat exchanger by the second connecting tube company
Connect, first switch is provided between first connecting tube and second connecting tube and is connected.
4. reduction furnace according to claim 3, it is characterised in that second cooling tube is connected by the 3rd connecting tube and the 4th
Adapter is connected to the heat exchanger, is provided with second switch and is connected between the 3rd connecting tube and the 4th connecting tube
It is logical.
5. reduction furnace according to claim 4, it is characterised in that be provided with circulating pump in first connecting tube.
6. reduction furnace according to claim 5, it is characterised in that the heat exchanger is plate type heat exchanger.
7. reduction furnace according to claim 6, it is characterised in that be provided with pressure gauge in the first connecting tube.
8. reduction furnace according to claim 6, it is characterised in that pressure monitor is provided with the first connecting tube, it is described
Pressure monitor is connected to the circulating pump, reaches predetermined value when the pressure detecting instrument detects the first cooling pipe pressure
When, the circulating pump adjusts pressure.
9. the reduction furnace according to any one of claim 7 or 8, it is characterised in that the reduction furnace include temperature measurer and
Buzzer, the temperature measurer are connected to the buzzer, when the reduction furnace temperature reaches the temperature measurer predetermined value, described
Buzzer sounds.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621059337.0U CN206051571U (en) | 2016-09-18 | 2016-09-18 | Reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621059337.0U CN206051571U (en) | 2016-09-18 | 2016-09-18 | Reduction furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206051571U true CN206051571U (en) | 2017-03-29 |
Family
ID=58371283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621059337.0U Active CN206051571U (en) | 2016-09-18 | 2016-09-18 | Reduction furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206051571U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110282627A (en) * | 2019-07-24 | 2019-09-27 | 中国恩菲工程技术有限公司 | The cooling system and method for polycrystalline silicon reducing furnace |
-
2016
- 2016-09-18 CN CN201621059337.0U patent/CN206051571U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110282627A (en) * | 2019-07-24 | 2019-09-27 | 中国恩菲工程技术有限公司 | The cooling system and method for polycrystalline silicon reducing furnace |
| CN110282627B (en) * | 2019-07-24 | 2023-09-19 | 中国恩菲工程技术有限公司 | Cooling system and method for polycrystalline silicon reduction furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206184428U (en) | Reaction material's cooling control system | |
| CN106735279A (en) | The device of the continuous volume production high-purity Nano-class metallic of circulating cooling | |
| CN206816470U (en) | A kind of afterheat recovery unit of air compressor | |
| CN106880291A (en) | A kind of back-heating type temperature controllable boiler and its control method | |
| CN207350419U (en) | A kind of stable single tank fused salt tank that heats | |
| CN206051571U (en) | Reduction furnace | |
| CN209540854U (en) | A kind of power generation station-service boiler overheating cooling device | |
| CN201036621Y (en) | Sterilizing baking oven | |
| CN104792197A (en) | High-efficiency cooling system | |
| CN204779925U (en) | Be applied to cooling device of single crystal growing furnace and contain its single crystal growing furnace | |
| CN107621334B (en) | For hot helium leak test gas heating circulation system and quickly heat cooling means | |
| CN204026622U (en) | Steam boiler | |
| CN106475027A (en) | A kind of reactor adjusts cooling box | |
| CN107576061A (en) | A kind of Teat pump boiler | |
| CN206428286U (en) | A kind of rapid cooling thermal processing unit and heat treatment system | |
| CN110106547A (en) | Improve the device of pulling of crystals pulling rate | |
| CN206167160U (en) | Avoid cold equipment of treating of automation of water tank normal water scale deposit | |
| CN205597763U (en) | Healthy energy -conserving water dispenser heat exchange assemblies | |
| CN205517846U (en) | Rapid cooling oil bath pot | |
| CN210464127U (en) | Cooling water circulation equipment for electrode foil production | |
| CN207778031U (en) | It is a kind of to heat cooling pipe-line system simultaneously | |
| CN112304117A (en) | Intelligent cooling device for rapid sampling of heat-conducting fluid boiler | |
| CN206369331U (en) | A kind of superconduction constant-pressure and high-temperature water stove | |
| CN207370572U (en) | A kind of back-heating type temperature controllable boiler | |
| CN206167170U (en) | Automatic cold equipment of treating of temperature steady type |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |