CN204803438U - Single crystal growing furnace system - Google Patents
Single crystal growing furnace system Download PDFInfo
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- CN204803438U CN204803438U CN201520270350.XU CN201520270350U CN204803438U CN 204803438 U CN204803438 U CN 204803438U CN 201520270350 U CN201520270350 U CN 201520270350U CN 204803438 U CN204803438 U CN 204803438U
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- Prior art keywords
- flange
- cylindrical shell
- single crystal
- crystal growing
- bell
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Abstract
The utility model discloses a single crystal growing furnace system, it includes deputy furnace room, bell and main oven chamber, this single crystal growing furnace system still includes cooling device, cooling device includes flange and hollow barrel, inside the bell was located to the barrel, the crystal bar passed in can following the barrel, the position that main oven chamber and bell combine is located to the flange, after flange and barrel intercommunication, the height that highly is higher than the flange on the top of barrel, cooling water get into the flange, flow the barrel again in, then flow back to to the flange in from the barrel, flow from the flange at last. Cooling device's among this single crystal growing furnace system mounting means does not receive the restriction of single crystal growing furnace neck mouth, just cooling device's cooling effect is good, can accelerate scattering and disappearing of thermal field upper portion and crystal bar surface heat.
Description
Technical field
The utility model belongs to crystal-pulling technical field, is specifically related to a kind of single crystal growing furnace system.
Background technology
At present, most monocrystalline silicon production producer is all provided with refrigerating unit in single crystal growing furnace, then the object of installing refrigerating unit in single crystal growing furnace is mainly used for increasing the longitudinal temperature gradient in stove, is beneficial to enhance productivity.At present, the installation of existing refrigerating unit is normally by after taking apart between single crystal growing furnace valve chamber and bell, and from top to down is installed.But for the less single crystal growing furnace system of portion size, due to the restriction by monocrystalline furnace neck mouth size, make cannot install refrigerating unit additional in small-sized single crystal growing furnace system.
Utility model content
Technical problem to be solved in the utility model is according to prior art above shortcomings, a kind of single crystal growing furnace system is provided, the mounting means of the refrigerating unit in this single crystal growing furnace system is not by the restriction of monocrystalline furnace neck mouth, and the good cooling results of described refrigerating unit, can accelerate thermal field top and crystal bar surface heat scatter and disappear.
The technical scheme that solution the utility model technical problem adopts is that this single crystal growing furnace system comprises secondary furnace chamber, bell and main furnace chamber, this single crystal growing furnace system also comprises refrigerating unit, described refrigerating unit comprises the cylindrical shell of flange and hollow, described cylindrical shell is located at bell inside, crystal bar can pass from cylindrical shell, described flange is located at the position that main furnace chamber is combined with bell, flange is communicated with cylindrical shell, the height on the top of cylindrical shell is higher than the height of flange, after water coolant enters flange, flow to again in cylindrical shell, then flow back into flange from cylindrical shell, finally flow out from flange.
Preferably, described cylindrical shell is located at immediately below monocrystalline furnace neck mouth, and the top of cylindrical shell and monocrystalline furnace neck mouth close to and do not contact.
Distance between the top of preferred described cylindrical shell and monocrystalline furnace neck mouth is 1 ~ 10mm.
Preferably, the length of described cylindrical shell is set to make cylindrical shell together rotate with bell, and ensures the upper surface of the height of the bottom of cylindrical shell higher than main furnace chamber.
Preferably, the bottom of described cylindrical shell, lower than the height of flange, is passed from flange to make cylindrical shell.
Preferably, described bell comprises the bell flange be in bottom bell, described flange and bell Flange joint.
Further preferably, described flange is provided with contiguous block, flange and bell flange is installed together by described contiguous block.
It is further preferred that flange has water-in and water outlet, in flange, be provided with water stream channel, cooling channel is provided with in cylindrical shell, be communicated with outlet conduit by inlet channel between flange and cylindrical shell, one end of described inlet channel is communicated with the water-in on flange, and the other end is communicated with cylindrical shell; One end of described outlet conduit is communicated with the water outlet on flange, the other end is communicated with cylindrical shell, and water coolant enters the water stream channel of flange from the water-in flange, then enters the cooling channel of cylindrical shell through inlet channel, then flow through outlet conduit, finally flow out from the water outlet flange.
Preferably, flange and cylindrical shell adopt stainless steel to make.
The beneficial effect of the utility model single crystal growing furnace system is as follows:
Improved by the structure of the refrigerating unit arranged this single crystal growing furnace internal system, refrigerating unit is enable to adopt loading pattern from bottom to top to install, thus solve the bottleneck problem installing refrigerating unit in small-sized single crystal growing furnace additional, this single crystal growing furnace system is specially adapted to small-sized single crystal growing furnace and uses, and also makes the installation of refrigerating unit become simple and convenient simultaneously.Further, by installing described refrigerating unit additional, can easily water coolant be introduced in single crystal growing furnace, thus accelerate thermal field top and crystal bar surface heat scatter and disappear, good cooling results.
Accompanying drawing explanation
Fig. 1 is the structural representation of refrigerating unit in the single crystal growing furnace system of the utility model embodiment 1.
In figure: 1-flange; 2-water-in; 3-water outlet; 4-dowel hole; 5-outlet conduit; 6-inlet channel; 7-supporting tube; 8-cylindrical shell; 9-contiguous block.
Embodiment
Below in conjunction with the accompanying drawing in the utility model, carry out clear, complete description to the technical solution of the utility model, obviously, the embodiments described below are a part of embodiments of the present utility model, instead of whole embodiments.Based on the embodiment in the utility model, the every other embodiment that those of ordinary skill in the art obtain under the prerequisite not making creative work, all belongs to the scope of the utility model protection.
The utility model provides a kind of single crystal growing furnace system, comprise secondary furnace chamber, bell and main furnace chamber, this single crystal growing furnace system also comprises refrigerating unit, described refrigerating unit comprises the cylindrical shell of flange and hollow, described cylindrical shell is located at bell inside, crystal bar can pass from cylindrical shell, described flange is located at the position that main furnace chamber is combined with bell, flange is communicated with cylindrical shell, the height on the top of cylindrical shell, higher than the height of flange, after water coolant enters flange, then flows in cylindrical shell, then flow back into flange from cylindrical shell, finally flow out from flange.
Embodiment 1:
The single crystal growing furnace system provided in the present embodiment, it comprises the main furnace chamber, bell, valve chamber and the secondary furnace chamber that are connected successively from top to bottom, and wherein bell comprises the bell flange be in bottom bell, and this single crystal growing furnace system also comprises refrigerating unit.Wherein refrigerating unit mainly comprises flange and cylindrical shell, and cylindrical shell is located at the inside of bell, and flange is located at the position that main furnace chamber is combined with bell, and flange is communicated with cylindrical shell, and the height on the top of cylindrical shell is higher than the height of flange.
Particularly, in the present embodiment, as shown in Figure 1, described refrigerating unit comprise flange 1, cylindrical shell 8, for the supporting tube 7 of joint flange 1 and cylindrical shell 8 and inlet channel 6 and outlet conduit 5.The external diameter of cylindrical shell 8 is less than the internal diameter of flange 1.
Wherein, the position that bell is combined with valve chamber forms monocrystalline furnace neck mouth.Preferably, cylindrical shell is located at immediately below monocrystalline furnace neck mouth, and the top of cylindrical shell and monocrystalline furnace neck mouth can infinite approach but both do not contact.
In the present embodiment, the distance between cylinder top and monocrystalline furnace neck mouth is 1 ~ 10mm, is preferably 5mm.
The setting principle of the length of cylindrical shell 8 it is possible to cylindrical shell is together rotated with bell, and ensures that the height of the bottom of cylindrical shell is higher than the upper surface of main furnace chamber.Wherein, the bottom of cylindrical shell also can, slightly lower than the position of flange, from the appearance, can make cylindrical shell 8 pass from the inside of flange 1.
In the present embodiment, flange 1 is arranged in main furnace chamber flange, and with bell Flange joint.Flange 1 is provided with contiguous block 9, and flange 1 matches with bell flange, flange 1 and bell flange can be installed together by contiguous block 9.In above-mentioned installation process, position by dowel hole 4 pairs of flanges 1.In the present embodiment, the quantity of contiguous block 9 is 4, and 4 contiguous blocks are distributed on flange 1.By contiguous block by flange together with bell Flange joint, make this refrigerating unit in later stage use procedure together can promote with bell, decline and rotate.
Wherein, cylindrical shell 8 inside is hollow, can pass to make crystal bar from the inside of cylindrical shell 8 hollow.Flange has water-in 2 and water outlet 3.Be provided with water stream channel in flange 1, circulate wherein with Cooling Water.Be communicated with outlet conduit 5 especially by inlet channel 6 between flange 1 and cylindrical shell 8.Be provided with cooling channel (being between the outer wall of cylindrical shell and inwall) in cylindrical shell 8, one end of inlet channel is communicated with the water-in 2 on flange, and the other end is communicated with the entrance of the cooling channel of cylindrical shell; One end of outlet conduit is communicated with the water outlet 3 on flange, the outlet of the cooling duct of the other end and cylindrical shell.Water coolant flows into from the water-in 2 flange, the cooling channel of cylindrical shell is entered again through inlet channel 6, then outlet conduit 5 is flowed through, last outflow from the water outlet 3 flange, the heat produced during to take away crystal bar crystallization, in each pipeline above-mentioned and ensure in cylindrical shell that water coolant is evenly circulation.
Preferably, in the present embodiment, water-in 2 and water outlet 3 are symmetricly set on flange 1, and correspondingly, the position of inlet channel 6 and outlet conduit 5 is also symmetrical arranged, and inlet channel 6 is arranged near water outlet 3, and outlet conduit 5 is arranged near water-in 2.Like this, after water coolant enters flange from water-in 2, the semicircular water stream channel first flowing through flange side enters in inlet channel 6 again, and water coolant flows out from outlet conduit 5 again afterwards, then flow through the semicircular water stream channel of flange opposite side, finally flow out from water outlet 3.
Preferably, in the present embodiment, flange 1, supporting tube 7 and cylindrical shell 8 all adopt stainless steel to make.The two ends of supporting tube 7 are connected with flange 1 and cylindrical shell 8 respectively by welding.Inlet channel 6 and outlet conduit 5 adopt metallic substance to make.
Existing refrigerating unit is all be arranged in single crystal growing furnace according to top-down mode, and the present embodiment is by improving the structure of refrigerating unit, and this refrigerating unit can be arranged in single crystal growing furnace according to mode from bottom to top.After passing into recirculated cooling water in the flange at this refrigerating unit, recirculated cooling water enters in the cooling channel of cylindrical shell, just can lower the temperature to high temperature crystal after crystal enters the enclosing region of cylindrical shell like this, crystalline growth velocity after cooling significantly improves, namely, the amount of heat in single crystal growing furnace can be taken away by recirculated cooling water, to reduce the temperature of the crystal of growth, reach the cooling effect to crystal, accelerate the effect of crystal heat radiation, improve isometrical pulling rate, namely form the huge temperature difference and crystal heat radiation is accelerated, to improve the speed of growth of crystal.Further, solid-liquid interface can be kept more smooth, reduce the microdefect of crystals, improve the crystal bar utilization ratio of single crystal rod, also contribute to increasing the longitudinal temperature gradient in stove.
The above is only preferred implementation of the present utility model; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the utility model principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (9)
1. a single crystal growing furnace system, comprise secondary furnace chamber, bell and main furnace chamber, it is characterized in that, this single crystal growing furnace system also comprises refrigerating unit, described refrigerating unit comprises the cylindrical shell of flange and hollow, described cylindrical shell is located at bell inside, crystal bar can pass from cylindrical shell, described flange is located at the position that main furnace chamber is combined with bell, and flange is communicated with cylindrical shell, and the height on the top of cylindrical shell is higher than the height of flange, after water coolant enters flange, flow to again in cylindrical shell, then flow back into flange from cylindrical shell, finally flow out from flange.
2. single crystal growing furnace system according to claim 1, is characterized in that, described cylindrical shell is located at immediately below monocrystalline furnace neck mouth, and the top of cylindrical shell and monocrystalline furnace neck mouth close to and do not contact.
3. single crystal growing furnace system according to claim 2, is characterized in that, the distance between the top of described cylindrical shell and monocrystalline furnace neck mouth is 1 ~ 10mm.
4. single crystal growing furnace system according to claim 2, is characterized in that, the length of described cylindrical shell is set to make cylindrical shell together rotate with bell, and ensures the upper surface of the height of the bottom of cylindrical shell higher than main furnace chamber.
5. single crystal growing furnace system according to claim 4, is characterized in that, the bottom of described cylindrical shell, lower than the height of flange, is passed from flange to make cylindrical shell.
6. single crystal growing furnace system according to claim 1, is characterized in that, described bell comprises the bell flange be in bottom bell, described flange and bell Flange joint.
7. single crystal growing furnace system according to claim 6, is characterized in that, described flange is provided with contiguous block, flange and bell flange is installed together by described contiguous block.
8. the single crystal growing furnace system according to any one of claim 1-7, it is characterized in that, flange has water-in and water outlet, water stream channel is provided with in flange, cooling channel is provided with in cylindrical shell, be communicated with outlet conduit by inlet channel between flange and cylindrical shell, one end of described inlet channel is communicated with the water-in on flange, and the other end is communicated with cylindrical shell; One end of described outlet conduit is communicated with the water outlet on flange, the other end is communicated with cylindrical shell, and water coolant enters the water stream channel of flange from the water-in flange, then enters the cooling channel of cylindrical shell through inlet channel, then flow through outlet conduit, finally flow out from the water outlet flange.
9. the single crystal growing furnace system according to any one of claim 1-7, is characterized in that, flange and cylindrical shell adopt stainless steel to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520270350.XU CN204803438U (en) | 2015-04-29 | 2015-04-29 | Single crystal growing furnace system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520270350.XU CN204803438U (en) | 2015-04-29 | 2015-04-29 | Single crystal growing furnace system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204803438U true CN204803438U (en) | 2015-11-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520270350.XU Expired - Fee Related CN204803438U (en) | 2015-04-29 | 2015-04-29 | Single crystal growing furnace system |
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| CN (1) | CN204803438U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108456918A (en) * | 2018-06-20 | 2018-08-28 | 南京晶能半导体科技有限公司 | A kind of flap valve and single crystal growing furnace for semiconductor silicon single crystal stove |
-
2015
- 2015-04-29 CN CN201520270350.XU patent/CN204803438U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108456918A (en) * | 2018-06-20 | 2018-08-28 | 南京晶能半导体科技有限公司 | A kind of flap valve and single crystal growing furnace for semiconductor silicon single crystal stove |
| CN108456918B (en) * | 2018-06-20 | 2024-04-05 | 南京晶能半导体科技有限公司 | Flap valve for semiconductor silicon single crystal furnace and single crystal furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151125 Termination date: 20170429 |