CN204631349U - Piezoelectric type object lens drive table - Google Patents
Piezoelectric type object lens drive table Download PDFInfo
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- CN204631349U CN204631349U CN201520184893.XU CN201520184893U CN204631349U CN 204631349 U CN204631349 U CN 204631349U CN 201520184893 U CN201520184893 U CN 201520184893U CN 204631349 U CN204631349 U CN 204631349U
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- motion platform
- object lens
- lens drive
- drive table
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Abstract
The utility model belongs to micro-move device application, relate to a kind of piezoelectric type object lens drive table, comprise base, the installing ring be fixed on described base, be arranged on described base and can respect thereto movement motion platform, be fixed on object glass collar on described motion platform and promote the piezoelectric ceramics on described motion platform, described object glass collar is arranged on the side of described installing ring and be arranged in parallel with described installing ring, and motion platform described in described Piezoelectric Ceramic is mounted opposite ring and moves.Object glass collar by arranging motion platform, and arranges on the moving platform by this piezoelectric type object lens drive table, is then mounted opposite ring by Piezoelectric Ceramic motion platform, thus relies on the voltage drive of drive power supply for piezoelectric ceramics, realizes the miniature displacement of motion platform.
Description
Technical field
The utility model belongs to micro-move device application, relates to a kind of piezoelectric type object lens drive table.
Background technology
At present, in biology, optical microscope always is that people explore the powerful of microworld, and people utilize it constantly to deepen cognition to microworld.The development of optical microscope plays key effect to human knowledge's biological phenomena.Along with the continuous progress of scientific and technological level, the application of optical microscope extends in expansion, is also constantly improving its image quality simultaneously.Along with the needs of social development, the demand that people observe micro-sample interior three-dimensional structure is increasing, and this just proposes high requirement to microscopical resolution.But, conventional optical microscope present the enlargement factor that sharpness depends on Liar completely, and the maximum amplification of current optical object lens can only reach 1600 times (sharpness of human eye resolution is about 1mm, is enlarged into example, minimum observation precision 0.625 micron with 1600 times).Obviously traditional optical microscope can not satisfy the demands at this.
But current existing objective lens device generally adopts motor to drive or hand adjustment, such device has that precision does not reach requirement, the response time is slow, volume is excessive and the shortcoming such as noise is large.
Utility model content
The purpose of this utility model is to provide a kind of piezoelectric type object lens drive table realizing nanoscale location.
To achieve these goals, the technical scheme that the utility model adopts is as follows: a kind of piezoelectric type object lens drive table, comprise base, the installing ring be fixed on described base, be arranged on described base and can respect thereto movement motion platform, be fixed on object glass collar on described motion platform and promote the piezoelectric ceramics on described motion platform, described object glass collar is arranged on the side of described installing ring and be arranged in parallel with described installing ring, and motion platform described in described Piezoelectric Ceramic is mounted opposite ring and moves.
Further, described piezoelectric type object lens drive table also comprises moving part, one end and the motion platform of described moving part are hinged, the other end is hinged on described base, described piezoelectric ceramics is pressed on described moving part, described moving part is provided with groove, is provided with ball in described groove, described piezoelectric ceramics is pressed on described ball.
Further, described moving part is also provided with the pretension jackscrew that can stretch in groove, described pretension jackscrew and piezoelectric ceramics are oppositely arranged on the both sides of described ball.
Further, described piezoelectric ceramics is provided with the wolfram steel sheet compressing described ball.
Further, described piezoelectric type object lens drive table also comprises servo-actuated portion, described servo-actuated portion and described moving part be arranged in parallel, one end and the motion platform in described servo-actuated portion are hinged, the other end is hinged on base, between described servo-actuated portion, moving part, motion platform and base, flexible hinge connects, and described object glass collar is fixed on described motion platform.
Further, described servo-actuated portion, moving part, motion platform and base enclose formation parallelogram.
Further, described base is provided with end cap, and described piezoelectric ceramics fixes on described end cap.
Further, described end cap offers the T-shaped draw-in groove fixing described piezoelectric ceramics.
Further, described piezoelectric ceramics is connected with shielding line, described base offers the through hole passed for described shielding line.
Further, described base comprise horizontal positioned base plate, be vertically arranged on fixed station on described base plate, described installing ring is fixed on described fixed station, described motion platform is positioned at the rear side of described fixed station, it is domatic that described fixed station orientation movements platform side is provided with guiding, and described motion platform is provided with the mating surface that coordinate domatic with described guiding towards fixed station side.
By such scheme, the utility model at least has the following advantages: piezoelectric type object lens drive table of the present utility model is by arranging motion platform, and object glass collar is arranged on the moving platform, then ring is mounted opposite by Piezoelectric Ceramic motion platform, thus rely on the voltage drive of drive power supply for piezoelectric ceramics, realize the miniature displacement of motion platform, and realize nanoscale location.
Above-mentioned explanation is only the general introduction of technical solutions of the utility model, in order to better understand technological means of the present utility model, and can be implemented according to the content of instructions, coordinates accompanying drawing to be described in detail as follows below with preferred embodiment of the present utility model.
Accompanying drawing explanation
Fig. 1 is the front view of the utility model piezoelectric type object lens drive table;
Fig. 2 is the side view of Fig. 1;
Fig. 3 is the cut-open view of Fig. 2;
Fig. 4 is the structural drawing of back shroud in Fig. 3;
Fig. 5 is the schematic diagram of hinge arrangement in Fig. 3.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples for illustration of the utility model, but are not used for limiting scope of the present utility model.
See Fig. 1 to Fig. 4, a kind of piezoelectric type object lens drive table described in the utility model one preferred embodiment comprises base 1, the installing ring 2 be fixed on described base 1, the linkage 3 be arranged on described base 1, the piezoelectric ceramics 5 that is fixed on the object glass collar 4 on described linkage 3 and is pressed on described linkage 3.Described base 1 comprise horizontal positioned base plate 11, be vertically arranged on fixed station 12 on described base plate 11, described installing ring 2 is fixed on described fixed station 12, described installing ring 2 is fixed on fixed station 12 by pretension jackscrew (not shown), described object glass collar 4 is arranged on the side of described installing ring 2 and be arranged in parallel with described installing ring 2, described installing ring 2 is connected with object lens (not shown) threaded hole in microscope, and object glass collar 4 is connected with microscopical object lens (not shown).Described linkage 3 is fixed on described base plate 11.
Described linkage 3 comprises moving part 31 on the base plate 11 being movably arranged on described base 1 and servo-actuated portion 32 and the motion platform 33 being connected described moving part 31 and servo-actuated portion 32, chain connection between described servo-actuated portion 32, moving part 31, motion platform 33 and base 1, the chain connection mode that it adopts is that flexible hinge 38 connects, to make that this linkage 3 is compact, drive connection is clear and definite, without transmission idle running, and without friction.The relatively servo-actuated portion 32 of described moving part 31 is arranged, and in the present embodiment, described moving part 31 be arranged in parallel with servo-actuated portion 32, and this servo-actuated portion 32, moving part 31, motion platform 33 and base 1 enclose formation parallelogram (as Fig. 5).Really, in other embodiments, this linkage 3 can also be other four-bar linkages or other linkages 3 (as slide block mechanism etc.) after being out of shape by four-bar linkage, certainly, also only can arrange motion platform 33 on described base 1, this motion platform 33 can move by respect thereto 1, and described motion platform 33 drives to be mounted opposite ring 2 by described piezoelectric ceramics 5 and moves, but the linkage that the present embodiment adopts is optimum embodiment.Described object glass collar 4 is fixed on described motion platform 33, on described motion platform 33 and object glass collar 4, correspondence is provided with threaded hole (not shown) respectively, during installation, by pretension jackscrew (not shown), object glass collar 4 is fixed on motion platform 33, described motion platform 33 is positioned at the rear side of described fixed station 12, in the present embodiment, closely cooperate to reach, described fixed station 12 orientation movements platform 33 side is provided with and guides domatic 13, and described motion platform 33 is provided with the mating surface 34 coordinated with described guiding domatic 13 towards fixed station 12 side.Described moving part 31 is provided with groove 35, is provided with ball 36 in described groove 35, this ball 36 can adopt steel ball.
Described linkage 3 and base 1 are all in integral structure, both enclose formation basic machine, described piezoelectric ceramics 5 is arranged in described basic machine, described piezoelectric ceramics 5 is pressed on described moving part 31, the driving force that described piezoelectric ceramics 5 promotes moving part 31 is crossing with the extension line of object glass collar 4, can realize object lens nanoscale location by linkage 3 by driving object glass collar 4 to move after piezoelectric ceramics 5 displacement equations.Described piezoelectric ceramics 5 is pressed on described ball 36, described moving part 31 is also provided with the pretension jackscrew 37 that can stretch in groove 35, and described pretension jackscrew 37 and piezoelectric ceramics 5 are oppositely arranged on the both sides of described ball 36.The two ends of described piezoelectric ceramics 5 are respectively arranged with wolfram steel sheet 6, this wolfram steel sheet 6 adopts Wear Characteristics of Epoxy Adhesive to be connected on piezoelectric ceramics 5, wherein the wolfram steel sheet 6 of one end is fixed on base 1 by clearance fit, thus piezoelectric ceramics 5 is accurately located in basic machine, in the present embodiment, described base 1 arranges end cap 14, and described piezoelectric ceramics 5 fixes on described end cap 14, end cap 14 offers the T-shaped draw-in groove 141 fixing described piezoelectric ceramics 5.On described piezoelectric ceramics 5, the wolfram steel sheet 6 of the other end compresses described ball 36; by wolfram steel sheet 6 being pressed on described ball 36; thus when making the end face out of plumb of moving part 31 and piezoelectric ceramics 5; also can ensure that piezoelectric ceramics 5 can not be subject to the power except vertical direction; protect piezoelectric ceramics 5 to a certain extent, decrease the loss of piezoelectric ceramics 5.Described piezoelectric ceramics 5 is connected with shielding line (not shown), described base 1 offers the through hole 15 passed for described shielding line.Described piezoelectric ceramics 5 utilizes the inverse piezoelectric effect of piezoelectric ceramics 5 to carry out work, only rely on the size of extra electric field just can realize driving, piezoelectric ceramics 5 overcomes mechanical type in the past, fluid pressure type, pneumatic type, the actuator inertia such as electromagnetic type are large, low-response, complex structure, the deficiencies such as poor reliability, there is volume little, compact conformation, mechanical rubs, gapless, resolution is high, response is fast, without heating, not by magnetic interference, can at low temperature, the advantage such as to use under vacuum environment, can be widely used in microposition technology, such as object lens precision positioning, large-stroke nanometer alignment system, the micro-nano impression of high precision, the field such as linear motor and microwave acoustics.
The mounting means of above-mentioned piezoelectric ceramics 5 is as follows: ball 36 embeds pretension jackscrew 37 by interference fit; the piezoelectric ceramics 5 being stained with wolfram steel sheet 6 contacts by some face be connected (i.e. motion higher pair) with the pretension jackscrew 37 being embedded with ball 36; even if when its benefit is the end face out of plumb of moving part 31 and piezoelectric ceramics 5; also can ensure that piezoelectric ceramics 5 can not be subject to the power except vertical direction; the piezoelectric ceramics 5 protected to a certain extent, decreases the loss of piezoelectric ceramics 5.It should be noted that at this, after screw-in threaded hole, inherently there is certain thread pitch due to pretension jackscrew 37 and loosening causes piezoelectric ceramics 5 cannot pretension, in the present embodiment, the fine thread that have employed on the one hand M4*0.35 is to eliminate gap and to be reached the object of fine setting by pretension jackscrew 37; On the other hand use two pretension jackscrews 37, make the object that the Impact direction of two pretension jackscrews 37 reaches locking on the contrary, concrete when implementing by regulating the degree of tightness of pretension jackscrew 37 to provide enough pretightning forces for described piezoelectric ceramics 5.After installing piezoelectric ceramics 5 and regulating pretightning force, end cap 14 is sticked on basic machine 4, reach the object of protection piezoelectric ceramics 5 and linkage 3.
Incorporated by reference to Fig. 5, the principle of work of above-mentioned piezoelectric type object lens drive table is as follows: in Fig. 5, C, D point is respectively the pin joint in motion platform 33 and moving part 31 and servo-actuated portion 32, A, E are the pin joint of moving part 31, servo-actuated portion 32 and base 1, the power F that B point produces for piezoelectric ceramics 5 is to the thrust point (i.e. ball 36 position) of moving part 31, when piezoelectric ceramics 5 inputs a thin tail sheep Sx at X to (transverse direction), namely obtain a larger displacement output X at motion platform 33, its ratio is C=X/Sx (displacement exports ratio).By finding out this linkage 3 in Fig. 5 at output X to the coupling displacement that there is a Z-direction during displacement, known when displacement output is in hundreds of micron level by theory calculate, the coupling displacement of Z-direction be X to per mille, can disregard by crocodile.From lever principle, the theoretical times magnification numerical value of this type of linkage 3 is C=AC/AB, and namely by regulating the position of B point to make enlargement factor under most compact structure condition reach an optimal value, the optimum value of C is 7 to 14.But C value can be less than optimal value in actual use, be produce because flexible hinge 38 has certain elastic reaction on the one hand, the output displacement of this linkage 3 is reduced accordingly; On the other hand flexible hinge 38 is the displacements because the elastic deformation of material produces, so some energy is by material absorption itself in deformation process, piezoelectric ceramics 5 can be made to be subject to larger load, and the drive displacement making it provide also has reduction simultaneously.The utility model is owing to being set directly in basic machine by piezoelectric ceramics 5, piezoelectric ceramics 5 is except basic machine four perisporium shell, there is no unnecessary structural elements, its structure visible is closely, and when physical dimension is limited, when piezoelectric ceramics 5 is determined, this structure can obtain larger displacement and export ratio.Due to above-mentioned principle of work, when using piezoelectric type object lens drive table, drive piezoelectric ceramics 5 actuating to realize the micro objective Precision Linear Moving be arranged on object glass collar 4 by the mode applying voltage drive, realize the motion of micro objective micron order.
In the present embodiment, because linkage 3 adopts flexible hinge 38, small displacement is produced by the elastic deformation of material.Under normal circumstances, elastic modulus E and its yieldlimitσs of the elastic deformation of material and power output and material are directly proportional, in order to increase the range of movement of flexible hinge 38, to a certain extent, the elastic modulus E of selected flexible hinge 38 material and yieldlimitσs are larger better, must meet following requirement simultaneously: 1. the restoring force during maximum distortion of flexible hinge 38 is less than the maximum driving force of piezoelectric ceramics 5; 2. maximum stress during flexible hinge 38 maximum distortion is less than the permissible stress of material.Comprehensive above factor, beryllium-bronze, titanium alloy, spring steel and ultralumin are relatively good in distortion, but titanium alloy is general all costly, little employing beryllium-bronze is toxic material, can bring a lot of inconvenience to use, the density of spring steel is too large, therefore in the present embodiment, material therefor is ultralumin.Other part material therefor is: piezoelectric ceramics 5 uses lead zirconate titanate (PZT), pretension jackscrew 37 and ornamental shutoff all use common iron Q235 and carry out blackening process.Wolfram steel sheet 6 adopts wolfram steel (wimet), has that hardness is high, wear-resisting, intensity and an a series of premium properties such as toughness is better, heat-resisting, corrosion-resistant.
In sum, above-mentioned piezoelectric type object lens drive table is by arranging motion platform 33, and object glass collar 4 is arranged on motion platform 33, then ring 3 is mounted opposite by piezoelectric ceramics 5 actuation movement platform, thus rely on the voltage drive of piezoelectric ceramics 5 driving power, realize the miniature displacement of motion platform 33, and realize nanoscale location.
In addition, linkage 3 is utilized to carry out gapless, without being coupled the motion amplification of piezoelectric ceramics 5 micrometric displacement transmission, effectively to improve the compactedness of motion amplification multiple and guarantee volume, hinge structure, it can solve current objective lens device and generally adopt motor to drive or hand adjustment, and positioning precision does not reach requirement, the response time is slow, volume is excessive and the problem that noise is large.
The base 1 of above-mentioned piezoelectric type object lens drive table and linkage 3 are all in integral structure, namely form through processes such as numerical control mill, brill and Linear cut the entirety self be connected by block of metal, to make compact conformation, and when physical dimension is limited and piezoelectric ceramics 5 is determined, this structure can obtain larger displacement and export ratio, and the impact of the constraint such as the idle running avoided in transmission and friction on its precision.
The above is only preferred implementation of the present utility model; be not limited to the utility model; should be understood that; for those skilled in the art; under the prerequisite not departing from the utility model know-why; can also make some improvement and modification, these improve and modification also should be considered as protection domain of the present utility model.
Claims (10)
1. a piezoelectric type object lens drive table, it is characterized in that: comprise base, the installing ring be fixed on described base, be arranged on described base and can respect thereto movement motion platform, be fixed on object glass collar on described motion platform and promote the piezoelectric ceramics on described motion platform, described object glass collar is arranged on the side of described installing ring and be arranged in parallel with described installing ring, and motion platform described in described Piezoelectric Ceramic is mounted opposite ring and moves.
2. piezoelectric type object lens drive table according to claim 1, it is characterized in that: described piezoelectric type object lens drive table also comprises moving part, one end and the motion platform of described moving part are hinged, the other end is hinged on described base, described piezoelectric ceramics is pressed on described moving part, described moving part is provided with groove, is provided with ball in described groove, described piezoelectric ceramics is pressed on described ball.
3. piezoelectric type object lens drive table according to claim 2, it is characterized in that: described moving part is also provided with the pretension jackscrew that can stretch in groove, described pretension jackscrew and piezoelectric ceramics are oppositely arranged on the both sides of described ball.
4. piezoelectric type object lens drive table according to claim 2, is characterized in that: described piezoelectric ceramics is provided with the wolfram steel sheet compressing described ball.
5. the piezoelectric type object lens drive table according to any one in claim 2 to 4, it is characterized in that: described piezoelectric type object lens drive table also comprises servo-actuated portion, described servo-actuated portion and described moving part be arranged in parallel, one end and the motion platform in described servo-actuated portion are hinged, the other end is hinged on base, between described servo-actuated portion, moving part, motion platform and base, flexible hinge connects, and described object glass collar is fixed on described motion platform.
6. piezoelectric type object lens drive table according to claim 5, is characterized in that: described servo-actuated portion, moving part, motion platform and base enclose formation parallelogram.
7. piezoelectric type object lens drive table according to claim 6, is characterized in that: described base is provided with end cap, and described piezoelectric ceramics fixes on described end cap.
8. piezoelectric type object lens drive table according to claim 7, is characterized in that: described end cap offers the T-shaped draw-in groove fixing described piezoelectric ceramics.
9. piezoelectric type object lens drive table according to claim 6, is characterized in that: described piezoelectric ceramics is connected with shielding line, described base offers the through hole passed for described shielding line.
10. piezoelectric type object lens drive table according to claim 6, it is characterized in that: described base comprise horizontal positioned base plate, be vertically arranged on fixed station on described base plate, described installing ring is fixed on described fixed station, described motion platform is positioned at the rear side of described fixed station, it is domatic that described fixed station orientation movements platform side is provided with guiding, and described motion platform is provided with the mating surface that coordinate domatic with described guiding towards fixed station side.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520184893.XU CN204631349U (en) | 2015-03-30 | 2015-03-30 | Piezoelectric type object lens drive table |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520184893.XU CN204631349U (en) | 2015-03-30 | 2015-03-30 | Piezoelectric type object lens drive table |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105537980A (en) * | 2015-12-16 | 2016-05-04 | 哈尔滨工业大学 | High-precision flexible redundant platform |
| CN108444915A (en) * | 2018-03-20 | 2018-08-24 | 山东大学苏州研究院 | A kind of the single-degree-of-freedom optical detecting platform and application method of Piezoelectric Driving |
| CN111474734A (en) * | 2020-04-13 | 2020-07-31 | 宁波大学 | Wide-range high-frequency-response optical confocal measuring head |
| CN111474733A (en) * | 2020-04-13 | 2020-07-31 | 宁波大学 | Wide-range high-frequency-response double-objective-lens optical independent confocal measuring head |
-
2015
- 2015-03-30 CN CN201520184893.XU patent/CN204631349U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105537980A (en) * | 2015-12-16 | 2016-05-04 | 哈尔滨工业大学 | High-precision flexible redundant platform |
| CN105537980B (en) * | 2015-12-16 | 2017-09-26 | 哈尔滨工业大学 | A kind of flexible redundancy platform of high accuracy |
| CN108444915A (en) * | 2018-03-20 | 2018-08-24 | 山东大学苏州研究院 | A kind of the single-degree-of-freedom optical detecting platform and application method of Piezoelectric Driving |
| CN111474734A (en) * | 2020-04-13 | 2020-07-31 | 宁波大学 | Wide-range high-frequency-response optical confocal measuring head |
| CN111474733A (en) * | 2020-04-13 | 2020-07-31 | 宁波大学 | Wide-range high-frequency-response double-objective-lens optical independent confocal measuring head |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150909 Termination date: 20190330 |