CN104777601A - Objective driving platform - Google Patents
Objective driving platform Download PDFInfo
- Publication number
- CN104777601A CN104777601A CN201510141735.0A CN201510141735A CN104777601A CN 104777601 A CN104777601 A CN 104777601A CN 201510141735 A CN201510141735 A CN 201510141735A CN 104777601 A CN104777601 A CN 104777601A
- Authority
- CN
- China
- Prior art keywords
- base
- object lens
- actuation part
- lens drive
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lens Barrels (AREA)
Abstract
The invention belongs to the field of micro-driving application and relates to an objective driving platform. The objective driving platform comprises a base, a mounting ring fixed on the base, a hinge mechanism arranged on the base, an objective ring fixed on the hinge mechanism and an actuating piece propped against the hinge mechanism, wherein the objective ring is arranged on one side of the mounting ring and parallel to the mounting ring; the hinge mechanism comprises a follower rod and an actuating part which are arranged oppositely, a movable platform hinged with the follower rod and the actuating part as well as a propping part formed by bending from the actuating part, one end of the follower rod and one end of the actuating part are hinged with two ends of the movable platform respectively, the other end of the follower rod and the other end of the actuating part are hinged with the base respectively, the objective ring is fixed on the movable platform, the propping part is close to one end, hinged with the base, of the actuating part, and the actuating piece is propped against the propping part.
Description
Technical field
The invention belongs to micro-move device application, relate to a kind of object lens drive table, be particularly related to and utilize linkage output displacement to be carried out the object lens drive table of amplifying.
Background technology
At present, in biology, optical microscope always is that people explore the powerful of microworld, and people utilize it constantly to deepen cognition to microworld.The development of optical microscope plays key effect to human knowledge's biological phenomena.Along with the continuous progress of scientific and technological level, the application of optical microscope extends in expansion, is also constantly improving its image quality simultaneously.Along with the needs of social development, the demand that people observe micro-sample interior three-dimensional structure is increasing, and this just proposes high requirement to microscopical resolution.But, conventional optical microscope present the enlargement factor that sharpness depends on Liar completely, and the maximum amplification of current optical object lens can only reach 1600 times (sharpness of human eye resolution is about 1mm, is enlarged into example, minimum observation precision 0.625 micron with 1600 times).Obviously traditional optical microscope can not satisfy the demands at this.
But current existing objective lens device generally adopts motor to drive or hand adjustment, such device has that precision does not reach requirement, the response time is slow, volume is excessive and the shortcoming such as noise is large.
Summary of the invention
The object of this invention is to provide and a kind ofly improve motion amplification multiple and the object lens drive table of the compactedness of volume can be ensured.
To achieve these goals, the technical solution adopted in the present invention is as follows: a kind of object lens drive table, comprise base, be fixed on the installing ring on described base, be arranged on the linkage on described base, the actuated piece being fixed on the object glass collar on described linkage and being pressed on described linkage, described object glass collar is arranged on the side of described installing ring and be arranged in parallel with described installing ring, described linkage comprises the tappet and actuation part that are oppositely arranged, the mobile platform of hinged tappet and actuation part and the support division from described actuation part bending formation respectively, one end of described tappet and one end of actuation part are hinged with the two ends of mobile platform respectively, the other end of described tappet and the other end of actuation part are articulated with base respectively, described object glass collar is fixed on described mobile platform, described support division is articulated with one end of base near actuation part, described actuated piece is held in described support division.
Further, described actuation part is side link, and described side link comprises the actuation ends hinged with base, and described support division extends to form from described actuation ends bending.
Further, described support division extends to form towards the bending of the direction of tappet from described actuation part.
Further, described actuation part, mobile platform, tappet and base enclose formation parallelogram.
Further, connected by flexible hinge between described actuation part, mobile platform, tappet and base.
Further, described base is provided with and described tappet and the hinged fixed bar of actuation part.
Further, described object lens drive table also comprises the set collar be fixed on described fixed bar and the sports ring be fixed on described mobile platform, and described installing ring is fixed in described set collar, and described object glass collar is fixed in described sports ring.
Further, described actuated piece is piezoelectric ceramics.
Further, described piezoelectric ceramics has to support support end on support division, described in support and end is provided with pretightning force regulates pad.
Further, described piezoelectric ceramics also has the link be connected on described mobile platform, and described link is connected by flexible hinge with between mobile platform.
By such scheme, the present invention at least has the following advantages: object lens drive table of the present invention is by arranging the linkage be fixed on base, and object glass collar is arranged on the mobile platform of linkage, installing ring is fixed on base, the piezoelectric ceramics supported on the support division formed from actuation part bending is set, thus utilize linkage to carry out gapless, without being coupled the motion amplification of piezoelectric ceramics micrometric displacement transmission, effectively to improve the compactedness of motion amplification multiple and guarantee volume.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to better understand technological means of the present invention, and can be implemented according to the content of instructions, coordinates accompanying drawing to be described in detail as follows below with preferred embodiment of the present invention.
Accompanying drawing explanation
Fig. 1 is the front view of object lens drive table of the present invention;
Fig. 2 is the side view of Fig. 1;
Fig. 3 is the exploded view of Fig. 1;
Fig. 4 is the part-structure figure of Fig. 2;
Fig. 5 is the vertical view of Fig. 4;
Fig. 6 A is schematic diagram when linkage remains static in Fig. 4;
Fig. 6 B is change schematic diagram when linkage is kept in motion in Fig. 4.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
See Fig. 1 to Fig. 5, a kind of object lens drive table described in a preferred embodiment of the present invention comprises base 1, the set collar 5 be fixed on described base 1, the installing ring 6 be fixed in set collar 5, the linkage 4 be arranged on described base 1, the sports ring 2 be fixed on described linkage 4, the piezoelectric ceramics 7 that is fixed on the object glass collar 3 in described sports ring 2 and is pressed on described linkage 4.Described base 1 is provided with the fixed bar 11 be connected with linkage 4, on described fixed bar 11, depression is formed with second step groove 12, described second step groove 12 offers two the second trapezoidal holes 13, described set collar 5 is fixed by pretension jackscrew and the second trapezoidal hole 13.Described object glass collar 3 is arranged on the side of described installing ring 6 and be arranged in parallel with described installing ring 6, and described installing ring 6 object glass collar 3 is connected with the object lens threaded hole of microscope (not shown), and object glass collar 3 is connected with the object lens of microscope 10.The mounting blocks 82 that described sports ring 2 and set collar 5 have ring portion 81 respectively and extend to form downwards from the side of described ring portion 81, described sports ring 2 and set collar 5 are fixed on the fixed bar 11 of linkage 4 and base 1 respectively by respective mounting blocks 82, described object glass collar 3 and installing ring 6 are screwed in the ring portion 81 of sports ring 2 and the ring portion upper screwed hole of set collar 5, to fix object glass collar 3 and installing ring 6 respectively respectively by pretension screw.
The mobile platform 43 that described linkage 4 comprises the tappet 41 and actuation part 42, respectively hinged tappet 41 and actuation part 42 be oppositely arranged and the support division 44 formed from described actuation part 42 bending.One end of described tappet 41 and one end of actuation part 42 hinged with the two ends of mobile platform 43 respectively, the other end of described tappet 41 and the other end of actuation part 42 are articulated with the fixed bar 11 of base 1 respectively, described sports ring 2 is fixed on described mobile platform 43 by its mounting blocks 82, described support division 44 is articulated with one end of the fixed bar 11 of base 1 near actuation part 42, described piezoelectric ceramics 7 is held in described support division 44.In the present embodiment, described actuation part 42 is side link, and described side link 42 comprises the actuation ends (non-label) hinged with base 1, and described support division 44 extends to form from described actuation ends bending.Described support division 44 extends to form towards the bending of the direction of tappet 41 from described actuation part 42.The fixed bar 11 of described actuation part 42, mobile platform 43, tappet 41 and base 1 encloses formation parallelogram, is connected between the fixed bar 11 of described actuation part 42, mobile platform 43, tappet 41 and base 1 by flexible hinge 9.On described mobile platform 43, depression is formed with first step groove 45, described first step groove 45 offers the first trapezoidal hole 46, and described sports ring 2 is fixed by pretension jackscrew (not shown) and the first trapezoidal hole 46.
The fixed bar 11 of described actuation part 42, mobile platform 43, tappet 41 and base 1 forms a parallelogram enlarger, and it is integral structure, and described piezoelectric ceramics 7 is arranged in this parallelogram enlarger.Except the present embodiment, other actuated pieces can also be adopted to replace piezoelectric ceramics 7, as push rod.But the present embodiment adopts the object of piezoelectric ceramics 7 to be: described piezoelectric ceramics 7 utilizes the inverse piezoelectric effect of piezoelectric ceramics 7 to carry out work, only rely on the size of extra electric field just can realize driving, piezoelectric ceramics 7 overcomes mechanical type in the past, fluid pressure type, pneumatic type, the actuator inertia such as electromagnetic type are large, low-response, complex structure, the deficiencies such as poor reliability, there is volume little, compact conformation, mechanical rubs, gapless, resolution is high, response is fast, without heating, not by magnetic interference, can at low temperature, the advantage such as to use under vacuum environment, can be widely used in microposition technology, such as object lens precision positioning, large-stroke nanometer alignment system, the micro-nano impression of high precision, the field such as linear motor and microwave acoustics.
Described piezoelectric ceramics 7 have support on support division 44 support end (non-label) and relative support end arrange link (non-label), the described end that supports is fixed on support division 44 by pretension jackscrew (not shown), described supporting on end is provided with pretightning force adjustment pad 47, this pretightning force regulates pad 47 to select wolfram steel sheet, this pretightning force regulates pad 47 to stick on piezoelectric ceramics 7 by epoxide-resin glue, for piezoelectric ceramics 7 provides a revolute pair when mass motion, described link is connected on described mobile platform 43, be connected by flexible hinge 9 between this link with mobile platform 43.
Incorporated by reference to Fig. 6 A, 6B, the principle of work of above-mentioned object lens drive table is as follows: in Fig. 6 A, 6B, C, D point is respectively the pin joint of mobile platform 43 and actuation part 42 and tappet 41, is on-fixed rolling point, constitutes tache motorice; A, B are actuation part 42, tappet 41 and the pin joint of the fixed bar 11 of base 1, are pure rolling point, form stiff end; The power F that E point produces for piezoelectric ceramics 75 is to the thrust point (namely pretightning force regulates pad 47 position) of support division 44.When sports ring 2 and set collar 5 are installed, dock respectively by the threaded hole on it with the second trapezoidal hole 13 and the first trapezoidal hole 46 and fixed by pretension jackscrew.In actual motion, as shown in Fig. 6 A, 6B, piezoelectric ceramics 7 couples of E point out generation thrust, and E point can rotate around A point, and because piezoelectric ceramics 7 is by pretension jackscrew and pure rolling point E rigid contact, namely piezoelectric ceramics 7 can rotate around A point.Meanwhile A point moves along displacement outbound course as shown in Figure 6B with whole parallelogram enlarger.When piezoelectric ceramics 7 is at vertical input one thin tail sheep Sx, namely obtain a larger displacement output Sy at motion parts (transverse direction) CD place, its ratio is C1=Sy/Sx (displacement exports ratio).By finding out in Fig. 1 that this parallelogram enlarger exists the coupling displacement of a Z-direction when exporting transversal displacement, known when displacement exports in hundreds of micron level by theory calculate, the coupling displacement of Z-direction is horizontal per mille, can disregard by crocodile.From lever principle, the theoretical times magnification numerical value of this type of mechanism is C2=AC/AE, namely make enlargement factor under the compactest condition of structure reach an optimal value by the length of the position and AC that regulate piezoelectric ceramics 7 mounting points E, the optimum value of C is 7 to 14.But C value can be less than optimal value in actual use, be produce because compliant mechanism has certain elastic reaction on the one hand, the output displacement of parallelogram enlarger is reduced accordingly; On the other hand flexible hinge 9 is the displacements because the elastic deformation of material produces, so some energy is by material absorption itself in deformation process, piezoelectric ceramics 7 can be made to be subject to larger load, and the drive displacement making it provide also has reduction simultaneously.In addition, because piezoelectric ceramics 7 is arranged in this parallelogram enlarger, except four perisporium shells, do not have unnecessary structural elements, its structure is closely as seen, and when physical dimension is limited, when piezoelectric ceramics 7 is determined, this structure can obtain larger displacement and export ratio.Due to above-mentioned principle of work, when using object lens drive table, drive piezoelectric ceramics 7 to activate by the mode applying voltage drive and realize microscope 10 object lens Precision Linear Moving, realize the motion of microscope 10 object lens micron order.
When driving power applies voltage drive to piezoelectric ceramics 7, piezoelectric ceramics 7 drives E point that the top CD in parallelogram enlarger is moved along displacement outbound course, piezoelectric ceramics 7 range of movement can be amplified more than 5 times by this mechanism, wherein due to flexible hinge 9 guiding, auxiliary reply, the effect of displacement equations etc., and under the protection of flexible hinge 9, mobile platform keeps the consistance of direction of motion, any motion perpendicular to direction of motion is remained on negligible degree, and this parallelogram enlarger can effectively protect piezoelectric ceramics 7 from the vibrations in the external world, impact and inertial force etc., the reliability and stability of piezoelectric ceramics 7 are improved with this.
In the present embodiment, because linkage 4 adopts flexible hinge 9, small displacement is produced by the elastic deformation of material.Under normal circumstances, elastic modulus E and its yieldlimitσs of the elastic deformation of material and power output and material are directly proportional, in order to increase the range of movement of flexible hinge 9, to a certain extent, the elastic modulus E of selected flexible hinge 9 material and yieldlimitσs are larger better, must meet following requirement simultaneously: 1. the restoring force during maximum distortion of flexible hinge 9 is less than the maximum driving force of piezoelectric ceramics 7; 2. maximum stress during flexible hinge 9 maximum distortion is less than the permissible stress of material.Comprehensive above factor, beryllium-bronze, titanium alloy, spring steel and ultralumin are relatively good in distortion, but titanium alloy is general all costly, little employing, beryllium-bronze is toxic material, can bring a lot of inconvenience to use, the density of spring steel is too large, therefore in the present embodiment, material therefor is ultralumin.Other part material therefor is: piezoelectric ceramics 7 uses lead zirconate titanate (PZT), pretension jackscrew and ornamental shutoff all use common iron Q235 and carry out blackening process.Wolfram steel sheet adopts wolfram steel (wimet), has that hardness is high, wear-resisting, intensity and an a series of premium properties such as toughness is better, heat-resisting, corrosion-resistant.
In sum, above-mentioned object lens drive table is by arranging the linkage 4 be fixed on base 1, and object glass collar 3 is arranged on the mobile platform 43 of linkage 4, installing ring 6 is fixed on base 1, the piezoelectric ceramics 7 supported on the support division 44 formed from actuation part 42 bending is set, thus utilize linkage 4 to carry out gapless, without coupling by the motion amplification of piezoelectric ceramics 7 micrometric displacement transmission, effectively to improve the compactedness of motion amplification multiple and guarantee volume, hinge structure, it can solve current objective lens device and generally adopt motor to drive or hand adjustment, positioning precision does not reach requirement, response time is slow, excessive and the problem that noise is large of volume.On the basis realizing the range of movement amplification of microscope 10 object lens direction, under the prerequisite of more compact structure, export more Large travel range by adopting parallelogram enlarger to achieve.The present invention gathers around because of its compact conformation and easy location with a wide range of precise in fields such as MEMS (micro electro mechanical system), pH effect, Ultra-precision Turning, STM and AFM microscope 10 scanning platform, micro-nano operation, micro robot and biological microoperations and has wide practical use.
In addition, combine again and adopt piezoelectric ceramics 7, thus rely on the voltage drive of piezoelectric ceramics 7 driving power, realize the miniature displacement of mobile platform 43, to realize the nanoscale location of micro objective.Parallelogram enlarger in the present invention of above-mentioned object lens drive table is integral structure, namely form through processes such as numerical control mill, brill and Linear cut the entirety self be connected by block of metal, to make compact conformation, and when physical dimension is limited and piezoelectric ceramics 7 is determined, this structure can obtain larger displacement and export ratio, and the impact of the constraint such as the idle running avoided in transmission and friction on its precision.
The above is only the preferred embodiment of the present invention; be not limited to the present invention; should be understood that; for those skilled in the art; under the prerequisite not departing from the technology of the present invention principle; can also make some improvement and modification, these improve and modification also should be considered as protection scope of the present invention.
Claims (10)
1. an object lens drive table, it is characterized in that: comprise base, be fixed on the installing ring on described base, be arranged on the linkage on described base, the actuated piece being fixed on the object glass collar on described linkage and being pressed on described linkage, described object glass collar is arranged on the side of described installing ring and be arranged in parallel with described installing ring, described linkage comprises the tappet and actuation part that are oppositely arranged, the mobile platform of hinged tappet and actuation part and the support division from described actuation part bending formation respectively, one end of described tappet and one end of actuation part are hinged with the two ends of mobile platform respectively, the other end of described tappet and the other end of actuation part are articulated with base respectively, described object glass collar is fixed on described mobile platform, described support division is articulated with one end of base near actuation part, described actuated piece is held in described support division.
2. object lens drive table according to claim 1, is characterized in that: described actuation part is side link, and described side link comprises the actuation ends hinged with base, and described support division extends to form from described actuation ends bending.
3. object lens drive table according to claim 3, is characterized in that: described support division extends to form towards the bending of the direction of tappet from described actuation part.
4. object lens drive table according to claim 3, is characterized in that: described actuation part, mobile platform, tappet and base enclose formation parallelogram.
5. object lens drive table according to claim 4, be is characterized in that: connected by flexible hinge between described actuation part, mobile platform, tappet and base.
6. object lens drive table according to claim 5, is characterized in that: described base is provided with and described tappet and the hinged fixed bar of actuation part.
7. object lens drive table according to claim 6, it is characterized in that: described object lens drive table also comprises the set collar be fixed on described fixed bar and the sports ring be fixed on described mobile platform, described installing ring is fixed in described set collar, and described object glass collar is fixed in described sports ring.
8. the object lens drive table according to any one in claim 1 to 7, is characterized in that: described actuated piece is piezoelectric ceramics.
9. object lens drive table according to claim 8, is characterized in that: described piezoelectric ceramics has to support support end on support division, described in support and end is provided with pretightning force regulates pad.
10. object lens drive table according to claim 9, it is characterized in that: described piezoelectric ceramics also has the link be connected on described mobile platform, described link is connected by flexible hinge with between mobile platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510141735.0A CN104777601B (en) | 2015-03-30 | 2015-03-30 | Object lens drive platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510141735.0A CN104777601B (en) | 2015-03-30 | 2015-03-30 | Object lens drive platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104777601A true CN104777601A (en) | 2015-07-15 |
| CN104777601B CN104777601B (en) | 2017-12-15 |
Family
ID=53619166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510141735.0A Active CN104777601B (en) | 2015-03-30 | 2015-03-30 | Object lens drive platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104777601B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110018549A (en) * | 2019-04-30 | 2019-07-16 | 苏州中时医疗科技有限公司 | A kind of modularization objective lens device that maximum displacement is variable |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3543935B2 (en) * | 1999-04-15 | 2004-07-21 | 株式会社日立国際電気 | Z-axis fine movement mechanism for microscope |
| CN202512289U (en) * | 2012-04-26 | 2012-10-31 | 哈尔滨芯明天科技有限公司 | Piezoelectric type objective lens driving feeder |
| CN103226287B (en) * | 2013-04-25 | 2014-11-26 | 河北工业大学 | Two-in-parallel parallel decoupling flexible microposition mechanism |
| CN203799672U (en) * | 2014-03-28 | 2014-08-27 | 苏州大学 | Precision positioning platform |
| CN104007545B (en) * | 2014-04-28 | 2016-08-17 | 南京航空航天大学 | A kind of microscope objective precise focusing device |
-
2015
- 2015-03-30 CN CN201510141735.0A patent/CN104777601B/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110018549A (en) * | 2019-04-30 | 2019-07-16 | 苏州中时医疗科技有限公司 | A kind of modularization objective lens device that maximum displacement is variable |
| CN110018549B (en) * | 2019-04-30 | 2023-12-29 | 苏州中时医疗科技有限公司 | Modularized objective lens driving device with variable minimum displacement |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104777601B (en) | 2017-12-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104467525B (en) | Preload adjustable formula inertia stick-slip drives across yardstick precisely locating platform | |
| CN203799672U (en) | Precision positioning platform | |
| US11342864B2 (en) | Three-degrees-of-freedom angle adjustment device driven by piezoelectric ceramics and adjusting method thereof | |
| CN106737646B (en) | The Three Degree Of Freedom Piezoelectric Driving regulating device and method of translation and rotation can be achieved | |
| CN110138266A (en) | A kind of Inchworm type piezoelectric actuator | |
| WO2022028260A1 (en) | Air-floating guide rail type switchable rigid-flexible coupling motion platform | |
| CN104467526B (en) | Inertia stick-slip cross-scale motion platform capable of achieving unidirectional movement | |
| CN205211424U (en) | Two -dimentional nanometer displacement table of flexible hinge direction | |
| JPH1014262A (en) | Highly dynamic piezoelectric drive | |
| CN104900573B (en) | A kind of differential lever micro-displacement amplifying device of symmetrical expression | |
| CN107378527A (en) | A kind of micro- oscillating platform of driving type piezoelectric actuator two freedom decoupling | |
| JPH1190867A (en) | Micromanipulator | |
| CN102380788A (en) | Double-parallel-flexible-hinge-based tool rest driving platform of super-precision machining lathe | |
| CN104793328A (en) | Objective lens drive table | |
| CN102069201B (en) | Two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning | |
| CN107906315B (en) | Micro-displacement motion platform with real-time adjustable dynamic frequency | |
| CN204964864U (en) | Piezoelectric type objective drive platform | |
| CN104777601A (en) | Objective driving platform | |
| CN103883849A (en) | Large-stoke nanometer positioning platform | |
| CN204631348U (en) | Piezoelectric type object lens drive table | |
| CN102608359B (en) | Nanomanipulator | |
| CN104362890A (en) | Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement | |
| CN104880814A (en) | Object lens driving table | |
| CN202317816U (en) | Tool-rest driving platform of ultra-precision processing lathe based on bi-parallel flexible hinge | |
| CN204403695U (en) | A kind of Z axis negative sense amplifies micro-move device platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |